CN109445025A - A kind of modification method and structure of optical mixer unit phase error - Google Patents
A kind of modification method and structure of optical mixer unit phase error Download PDFInfo
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- CN109445025A CN109445025A CN201811558866.9A CN201811558866A CN109445025A CN 109445025 A CN109445025 A CN 109445025A CN 201811558866 A CN201811558866 A CN 201811558866A CN 109445025 A CN109445025 A CN 109445025A
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- phase
- mixer unit
- optical mixer
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
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Abstract
The invention discloses the modification methods and structure of a kind of optical mixer unit phase error, are related to photonic integrated device field, the modification method of optical mixer unit phase error is comprising steps of be arranged phase compensation area at least one connection waveguide of optical mixer unit；The refractive index for changing part original area in phase compensation area, as variation zone, the phase change value φ of variation zone meetsWherein, λ is optical wavelength, and L is the length of variation zone, n2For the refractive index of variation zone, n1For the refractive index of original area.Convenient, production that the present invention designs simply, by refraction index changing technique, changes the phase in phase compensation area, the disposable phase error for correcting optical mixer unit reduces power consumption when device works compared to the method for the thermal tuning structure additional with traditional introducing.
Description
Technical field
The present invention relates to photonic integrated device fields, and in particular to a kind of modification method and knot of optical mixer unit phase error
Structure.
Background technique
Coherent light communication is the primary solutions of current long haul communication, and integrated coherent receiver is coherent light communication system
The device of receiving end in system.Optical mixer unit is the important component in integrated coherent optical heterodyne communicatio, is responsible for 4 in output
Realize that the relative phase-angle error of signal light and intrinsic light is respectively 0 °, 80 °, 170 °, 270 ° in port.
Silicon substrate, which integrates coherent receiver, has the advantages that at low cost, integrated level is high, increasingly obtains market attention.Silicon substrate collection
At the silicon substrate optical mixer unit in coherent receiver by the realization of the structures such as beam splitter and waveguide to the phase of signal light and intrinsic light
Regulation.But due to fabrication error, there are phase errors for silicon substrate optical mixer unit, and it is even whole to influence the integrated coherent receiver of silicon substrate
The yield rate of the relevant integrated chip of a silicon substrate.Existing technology is to lead in the waveguide in silicon substrate optical mixer unit plus thermode
The mode adjusted is overheated, known phase error is compensated, but this mode needs additionally to power for thermode, not only increases
Add number of pin, also adds the power consumption of device.
Summary of the invention
In view of the deficiencies in the prior art, repairing the purpose of the present invention is to provide a kind of optical mixer unit phase error
Correction method and structure, can disposable orrection phase place error, power consumption during reduction.
First aspect present invention provides a kind of modification method of optical mixer unit phase error, for carrying out to optical mixer unit
Phase error corrections comprising step:
Phase compensation area is set at least one connection waveguide of optical mixer unit；
The refractive index for changing part original area in phase compensation area, as variation zone, the phase change value φ of variation zone is full
Foot
Wherein, λ is optical wavelength, and L is the length of variation zone, n2For the refractive index of variation zone, n1For the refractive index of original area.
Based in a first aspect, in a possible embodiment, variation zone include the second under-clad layer stacked gradually from the bottom to top,
Second phase waveguide and the second top covering.
Based in a first aspect, in a possible embodiment, variation zone changes second by laser technology by part original area
Phased waveguides obtain.
Based in a first aspect, in a possible embodiment, variation zone is converted by part original area by proton exchange process
Change the second top covering to obtain.
Second aspect of the present invention provides a kind of correcting principle of optical mixer unit phase error comprising:
Optical mixer unit comprising the connection waveguide of at least two beam splitters and connection beam splitter；
Phase compensation area is set at least one connection waveguide, and phase compensation area includes original area and variation zone, variation
Area changes refractive index by part original area and obtains, and the phase change value of variation zoneWherein, λ is light wave
Long, L is the length of variation zone, n2For the refractive index of variation zone, n1For the refractive index of original area.
Based on second aspect, in a possible embodiment, original area include the first under-clad layer stacked gradually from the bottom to top,
First phase waveguide and the first top covering, the first top covering coat first phase waveguide.
Based on second aspect, in a possible embodiment, the refractive index of first phase waveguide is greater than the first under-clad layer and the
The refractive index of one top covering.
Based on second aspect, in a possible embodiment, variation zone include the second under-clad layer stacked gradually from the bottom to top,
Second phase waveguide and the second top covering.
Based on second aspect, in a possible embodiment, second phase waveguide is variations in refractive index waveguide.
Based on second aspect, in a possible embodiment, the second top covering is variations in refractive index top covering.
Compared with the prior art, the advantages of the present invention are as follows:
Convenient, production that the present invention designs simply, by refraction index changing technique, changes the phase in phase compensation area, once
Property amendment optical mixer unit phase error reduce device work compared to the method for the thermal tuning structure additional with traditional introducing
Power consumption when making.
Detailed description of the invention
Fig. 1 is one of the conversion schematic diagram in phase compensation area in the embodiment of the present invention；
Fig. 2 is the two of the conversion schematic diagram in phase compensation area in the embodiment of the present invention；
Fig. 3 is the structural schematic diagram of correcting principle in the embodiment of the present invention；
Fig. 4 is the structural schematic diagram in phase compensation area in the embodiment of the present invention.
In figure: 1- optical mixer unit；2- beam splitter；3- connection waveguide；4- phase compensation area；The original area 5-；The variation zone 6-；7-
First under-clad layer；8- first phase waveguide；The first top covering of 9-；The second under-clad layer of 10-；11- second phase waveguide；12- second
Top covering；13- exposure mask.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and embodiments.
Referring to figure 1 and figure 2, the embodiment of the present invention provides a kind of modification method of optical mixer unit phase error, is used for
Phase error corrections are carried out to optical mixer unit 1, comprising steps of
Phase compensation area 4 is set at least one connection waveguide 3 of optical mixer unit 1；
The refractive index for changing part original area 5 in phase compensation area 4, as variation zone 6, the phase change value of variation zone 6
φ meetsWherein, λ is optical wavelength, and L is the length of variation zone 6, n2For the refractive index of variation zone 6, n1For
The refractive index of original area 5.
In the present embodiment, it is necessary first to which the phase error to optical mixer unit in af at wavelength lambda is measured, which is
Phase compensation area 4 needs the phase change value introduced, sets the length of refraction index changing technique and variation zone 6.
In the present embodiment, variation zone 6 includes the second under-clad layer 10,11 and of second phase waveguide stacked gradually from the bottom to top
Second top covering 12, the second top covering 12 coat second phase waveguide 11.
Preferably, when refraction index changing technique uses laser technology, variation zone 6 passes through laser technology by part original area 5
Changing second phase waveguide 11 to obtain, the refractive index of variation zone 6 is determined by the design parameter of laser technology, finally, phase compensation
The phase change value that area 4 introduces is determined by the length that laser fire is crossed.
Preferably, when refraction index changing technique uses proton exchange process, variation zone 6 passes through proton by part original area 5
Exchange process conversion changes the second top covering 12 and obtains, and the refractive index of variation zone 6 is determined by the design parameter of proton exchange process,
Finally, the phase change value that phase compensation area 4 introduces is determined by the length of proton exchange.
The method of the embodiment of the present invention, design is simple, easy to make, can correct the arbitrary phase error of optical mixer unit, with
Increase the yield rate that silicon substrate integrates the relevant integrated chip of coherent receiver even silicon substrate.
As shown in figure 3 and figure 4, the embodiment of the present invention also provides a kind of correcting principle of optical mixer unit phase error to ginseng, with
Correct the phase error of optical mixer unit 1 comprising optical mixer unit 1 and phase compensation area 4.Optical mixer unit 1 includes at least two points
The connection waveguide 3 of beam device 2 and connection beam splitter 2.Phase compensation area 4 is set at least one connection waveguide 3, phase compensation area
4 include original area 5 and variation zone 6, and variation zone 6 changes refractive index by part original area 5 and obtains, and the phase change of variation zone 6
ValueWherein, λ is optical wavelength, and L is the length of variation zone 6, n2For the refractive index of variation zone 6, n1It is initial
The refractive index in area 5.The phase change value of variation zone 6 is because the phase of optical mixer unit caused by fabrication error or other reasons is missed
Difference.
Preferably, beam splitter 2 can effectively ensure that using multimode interference structure, Y-branch structure or directional coupling structure
Wide range and low-loss separation.In the present embodiment, beam splitter 2 uses multimode interference structure.
Above-mentioned original area 5 includes the first under-clad layer 7 stacked gradually from the bottom to top, wraps in first phase waveguide 8 and first
Layer 9, the first top covering 9 coat first phase waveguide 8.Wherein, the refractive index of first phase waveguide 8 is greater than 7 He of the first under-clad layer
The refractive index of first top covering 9.Due to the buffer action of the first under-clad layer 7 and the first top covering 9, light is in first phase waveguide 8
Middle transmission No leakage.
Above-mentioned variation zone 6 includes the second under-clad layer 10 stacked gradually from the bottom to top, in second phase waveguide 11 and second
Covering 12.
Shown in Figure 1, in the present embodiment, variation zone 6 changes second phase by laser technology by part original area 5
Waveguide 11 obtains.Laser technology includes laser thermal oxide, laser annealing etc..The part being irradiated with a laser in phase compensation area 4 turns
Variation zone 6 is turned to, the part not being irradiated with a laser in phase compensation area 4 is original area 5.Wherein, second phase waveguide 11
It is converted into variations in refractive index waveguide, and the second top covering 12 and the second under-clad layer 10 do not convert, i.e. the second under-clad layer 10 and first
Under-clad layer 7 is identical refractive index, and the second top covering 12 is also identical refractive index with the first top covering 9.The length L of the variation zone 6
It is determined by the length of laser scanning, with this final phase change value for determining phase compensation area 4, and then corrects the phase of optical mixer unit
Position error.
Shown in Figure 2, in other embodiments, variation zone 6 can also pass through proton exchange process by part original area 5
Conversion changes the second top covering 12 and obtains.When carrying out proton exchange process, do not covered by exposure mask 13 in phase compensation area 4
Regioinvertions are variation zone 6, and the part that phase compensation area 4 is covered by exposure mask 13 is original area 5.Wherein, the second top covering 12 is
Variations in refractive index top covering, and second phase waveguide 11 and the second under-clad layer 10 do not convert, the second under-clad layer 10 and the first lower packet
Layer 7 is identical refractive index, and second phase waveguide 11 is also identical refractive index with first phase waveguide 8.The length L of the variation zone 6
It is determined by the length that exposure mask 13 does not cover, with this final phase change value for determining phase compensation area 4, and then corrects photomixing
The phase error of device.
In above-described embodiment, laser technology and proton exchange process belong to refraction index changing technique, are changed using refractive index
Part original area 5 is converted variation zone 6 by skill of exchanging work, and changes the phase in phase compensation area 4, disposably and permanently corrects photomixing
The phase error of device, waste caused by reducing because of fabrication error, compared to the side of the thermal tuning structure additional with traditional introducing
Method reduces power consumption when device work.
The present invention is not limited to the above-described embodiments, for those skilled in the art, is not departing from
Under the premise of the principle of the invention, several improvements and modifications can also be made, these improvements and modifications are also considered as protection of the invention
Within the scope of.The content being not described in detail in this specification belongs to the prior art well known to professional and technical personnel in the field.
Claims (10)
1. a kind of modification method of optical mixer unit phase error, for carrying out phase error corrections, feature to optical mixer unit (1)
It is, comprising steps of
Phase compensation area (4) are set at least one connection waveguide (3) of optical mixer unit (1)；
The refractive index for changing part original area (5) in the phase compensation area (4), as variation zone (6), the variation zone (6)
Phase change value φ meet
Wherein, λ is optical wavelength, and L is the length of variation zone (6), n2For the refractive index of variation zone (6), n1For the folding of original area (5)
Penetrate rate.
2. the correcting principle of optical mixer unit phase error as described in claim 1, it is characterised in that: variation zone (6) packet
Include the second under-clad layer (10) stacked gradually from the bottom to top, second phase waveguide (11) and the second top covering (12).
3. the modification method of optical mixer unit phase error as claimed in claim 2, it is characterised in that: the variation zone (6) by
Part original area (5) changes second phase waveguide (11) by laser technology and obtains.
4. the modification method of optical mixer unit phase error as claimed in claim 2, it is characterised in that: the variation zone (6) by
Part original area (5) converts change the second top covering (12) by proton exchange process and obtains.
5. a kind of correcting principle of optical mixer unit phase error, characterized in that it comprises:
Optical mixer unit (1) comprising the connection waveguide (3) of at least two beam splitters (2) and the connection beam splitter (2)；
Phase compensation area (4) is set on at least one connection waveguide (3), and the phase compensation area (4) includes original area
(5) and variation zone (6), the variation zone (6) changes refractive index by part original area (5) and obtains, and the phase of the variation zone (6)
Position changing valueWherein, λ is optical wavelength, and L is the length of variation zone (6), n2For the refraction of variation zone (6)
Rate, n1For the refractive index of original area (5).
6. the correcting principle of optical mixer unit phase error as claimed in claim 5, it is characterised in that: original area (5) packet
The first under-clad layer (7) stacked gradually from the bottom to top, first phase waveguide (8) and the first top covering (9) are included, is wrapped on described first
Layer (9) coats the first phase waveguide (8).
7. the correcting principle of optical mixer unit phase error as claimed in claim 6, it is characterised in that: the first phase waveguide
(8) refractive index is greater than the refractive index of first under-clad layer (7) and the first top covering (9).
8. the correcting principle of optical mixer unit phase error as claimed in claim 5, it is characterised in that: variation zone (6) packet
Include the second under-clad layer (10) stacked gradually from the bottom to top, second phase waveguide (11) and the second top covering (12).
9. the correcting principle of optical mixer unit phase error as claimed in claim 8, it is characterised in that: the second phase waveguide
It (11) is variations in refractive index waveguide.
10. the correcting principle of optical mixer unit phase error as claimed in claim 8, it is characterised in that: second top covering
It (12) is variations in refractive index top covering.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111131122A (en) * | 2019-12-31 | 2020-05-08 | 武汉邮电科学研究院有限公司 | Optical transmission system equalization method and device based on DMT modulation and beat frequency detection |
| CN116974010A (en) * | 2023-08-15 | 2023-10-31 | Nano科技(北京)有限公司 | On-chip optical waveguide phase deviation correction structure, MZI and preparation method |
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Application publication date: 20190308 |