CN1407608A - Compound semiconductor device manufacture - Google Patents

Compound semiconductor device manufacture Download PDF

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Publication number
CN1407608A
CN1407608A CN02123314A CN02123314A CN1407608A CN 1407608 A CN1407608 A CN 1407608A CN 02123314 A CN02123314 A CN 02123314A CN 02123314 A CN02123314 A CN 02123314A CN 1407608 A CN1407608 A CN 1407608A
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electrode
base
base electrode
area
grid
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CN1215539C (en
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浅野哲郎
榊原干人
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Sanyo Electric Co Ltd
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Sanyo Electric Co Ltd
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Abstract

A method for making a chemical semiconductor device is provided to eliminate such drawbacks in conventional chemical semiconductor device that a silicon nitride layer, which is left in the device for the safety purpose through the final process step, tends to crack easily at the bonding process because of the hard substrate and silicon nitride layer. A heavily doped region is formed underneath the pad electrode and wiring layer or underneath a peripheral portion, and the silicon nitride layer underneath the pad electrode is removed. Because of heavily doped region, a predetermined isolation is assured even after removing the silicon nitride layer, so that the gold plating process for prevention of cracking can be eliminated. As the space between each pad and the wiring layer can be reduced, a manufacturing method realizing the chip-shrink can be provided.

Description

The manufacture method of compound semi-conductor device
Technical field
The present invention relates to a kind of manufacture method of compound semi-conductor device, particularly a kind of manufacture method that adopts the compound semi-conductor device of GaAs substrate.
Background technology
The mobile communication instrument of mobile phone and so on uses the microwave of GHz frequency band mostly, in the antenna switching circuit and the circuit that connects, signals, often adopts the switch element (for example, the spy opens flat 9-181642 number) that switches these high-frequency signals.As these elements, owing to use high-frequency, often use and adopt gallium, the field-effect transistor of arsenic (GaAs) (below be called FET) has advanced the exploitation with the integrated monolithic integrated microwave circuit of described switching circuit self (MMIC) thereupon.
Figure 11 (A) is the sectional drawing of expression GaAs FET, surface portion at pure GaAs substrate 31, infiltration n type impurity, form n type channel region 32, on channel region 32 surfaces, dispose the grid 33 that Schottky connects,, dispose with the GaAs surface and carry out source electrode, the drain electrode 34,35 that resistance connects on the both sides of grid 33.This transistor utilizes the current potential of grid 33, under channel region 32 in form depletion layer, and then the channel current between 34 drain electrodes 35 of control source electrode.
Figure 11 (B) is expression, adopts the principle electrical circuit figure of the compound semiconductor switched circuit device that is called SPDT (one pole double-throw) of GaAs FET.
The source electrode of first and second FET1, FET2 (or drain electrode) is connected with common input terminal IN, the grid of each FET1, FET2 is connected with the first and second control terminal Ctl-1, Ctl-2 by resistance R 1, R2, and the drain electrode of each FET (or source electrode) is connected with the first and second lead-out terminal OUT1, OUT2.The signal that applies at the first and second control terminal Ctl-1, Ctl-2 is a complementary signal, the FET that applies the H electric potential signal connects, make the signal that puts on input terminal IN be communicated to a certain lead-out terminal, resistance R 1, R2 are provided with by the gate leakage high-frequency signal for the DC potential of the control terminal Ctl-1, the Ctl-2 that exchange ground connection for preventing.
Figure 12 to Figure 20 represents the manufacture method of FET, base and the distribution of above-claimed cpd semiconductor switched circuit device.
In Figure 12, form channel layer 2 on substrate 1 surface.
That is,, use silicon nitride film 3 to cover with the straight-through ion injection of about 100 thickness with 1 whole of substrate.Then, implement the lithographic procedures of optionally protective layer 4 on the predetermined channel layer 2 being windowed.Afterwards, with this protective layer 4 as mask, to predetermined channel layer 2 be embodied as the ion of selecting the action layer and authorizing p-type impurity inject and authorize n type impurity ion inject.Consequently, form p-type zone 5 and form n type channel layer 2 thereon at pure substrate 1.
Among Figure 13, on substrate 1 surface, the source region 6 and the drain region 7 of the two ends adjacency of formation and channel layer 2.
Remove the protective layer 4 that uses in preceding operation, implement lithographic procedures again, optionally windowed in predetermined source region 6 and the protective layer 8 on the drain region 7.Then with protective layer 8 as mask, in predetermined source region 6 and drain region 7, ion injects the impurity of authorizing the n type, forms n+ type source region 6 and drain region 7.
Among Figure 14, in the source region 6 and drain region 7 adhere to Resistiue metal layers 10 as the ground floor electrode, form first source electrode 11 and first drain electrode 12.
Implement lithographic procedures, the part of formation first source electrode 11 that optionally will be scheduled to and first drain electrode 12 is windowed.Utilize CF 4Plasma will be positioned at the first predetermined source electrode 11 and the silicon nitride film 3 of first drain electrode on 12 removed, and these three layers of the AnGe/Ni/Au that will form Resistiue metal layers 10 then are the vacuum evaporation lamination successively.Remove protective layer 13 afterwards, utilization is peeled off, and keeps first source electrode 11 and first drain electrode 12 on source region 6 and drain region 7.Utilize alloying heat treatment then, form the resistance junction of first source electrode 11 and source region 6 and first drain electrode 12 and drain region 7.
Among Figure 15, implement the lithographic procedures of optionally predetermined grid 16 parts being windowed.
Among Figure 16, after nitride film 3 dry ecthings that will expose, with these three layers of Ti/Pt/Au forming grid metal level 18 vacuum steaming degree lamination successively.Remove protective layer 14 afterwards, utilization is peeled off, and forms the grid 16 and first base electrode 17 of the long 0.5 μ m of grid that connects with channel layer 2.
Among Figure 17, form passivating film 19 after, form second source electrode and drain 23,24 and wiring layer 25.
Form after the grid 16, in order to protect the channel layer 2 of grid 16 peripheries, the passivating film 19 that substrate 1 surface is formed by silicon nitride film covers.On this passivating film 19, implement lithographic procedures, for first source electrode and drain this coupling part of 11,12 and with the coupling part of grid 16, optionally implement diaphragm and window, with passivating film 19 dry ecthings of this part.Remove protective layer afterwards.
Afterwards, form second source electrode and drain 23,24 and wiring layer 25.1 whole of substrate, implement lithographic procedures again, the passivating film 19 on first source electrode 11 and first drain electrode 12 parts and the predetermined wiring layer 25 is exposed other cover with protective layer 20.Then on whole, with the distribution metal level 21 of these three layers of formation of Ti/Pt/Au as triple electrode, vacuum steaming degree lamination successively.Protective layer 20 is directly as the mask utilization, so can form and first source electrode 11 and first drain electrode 12 second source electrodes 23 that connect and second drain electrode 24 and the wiring layer 25.The other parts of distribution metal level 21 are attached on the protective layer 20, so, remove protective layer 20, utilization is peeled off, and only keeps second source electrode 23 and second drain electrode 24 and the wiring layer 25, other remove.In addition, local distribution partly utilizes distribution metal level 21 to form, so the distribution metal level 21 of other distribution parts is retained certainly.
Among Figure 18, form the nitride film 26 that interlayer dielectric is used, form and electroplate with electrode 27.
Because multilayer wiredization, the interlayer dielectric 26 that substrate 1 surface is formed by silicon nitride film covers.On interlayer dielectric 26, implement lithographic procedures, to second source electrode and drain 23,24 the coupling part and the coupling part of distribution electrode 25, optionally implement diaphragm and window, the passivating film 19 of this part is carried out dry ecthing.Remove diaphragm afterwards.
Form afterwards and electroplate with electrode 27.To form at whole and to electroplate with 3 layers of Ti/Pt/Au of electrode 27 vacuum steaming degree lamination successively.At second source electrode and drain 23,24 and the established part of distribution electrode 25, be provided with connection holes, connect and electroplate with electrode 27.
Among Figure 19, carry out gold-platedly, form the 3rd source electrode and drain 28,29 and be used for fixing the base electrode 31 of closing line.
On substrate 1, implement lithographic procedures, the plating of the 3rd predetermined source electrode 28 and the 3rd drain electrode 29 and predetermined base electrode 31 parts exposed with electrode 27, other with after protective layer 30 coverings, carry out electrolytic gold plating.At this moment, protective layer 30 constitutes mask, just electroplates the part of exposing with electrode 27 and adheres to gold-plated.That is to say, form base electrode 31 with second source electrode 23 and second drain electrode 24 the 3rd source electrodes 28 that connect and the 3rd drain electrode 29 and fixed engagement line.
Among Figure 20, finally form base electrode 31, the press fit engagement line 40 thereon.
Remove after the protective layer 30, remove the unnecessary plating electrode 27 that exposes whole again.The plating electrode of having implemented beyond the 3rd gold-plated source electrode 28 and the 3rd drain electrode 29 and the base electrode 31 is unnecessary.If utilize argon plasma to carry out ion(ic) etching, do not carry out the plating of gold-plated part and cut by erosion with electrode, interlayer dielectric 26 exposes.Though gold-plated part is also cut what, the thickness of 2-3 μ m is arranged, so no problem.Local in addition distribution partly adopts this gold-plated formation, so the plating of this distribution part is with electrode 27 and gold-platedly be retained certainly.
After compound semiconductor switched circuit device is finished preceding working procedure, be moved to the later process of assembling.The flaky semiconductor chip is cut into slices, and individual other semiconductor chip is separated, and this semiconductor chip is fixed on framework (not diagram) afterwards, with closing line 40, the base electrode 31 of semiconductor chip and the lead-in wire of stipulating (not having diagram) is connected.Adopt thin gold thread as closing line 40, connect with known ball bond.Implement afterwards to transmit the mould dress, implement resin-encapsulated.
Summary of the invention
The GaAs substrate is the half insulation substrate, and still, if the base electrode layer that line is engaged usefulness is set directly on the substrate, the interaction of then adjacent interelectrode electricity still exists.For example because a little less than the dielectric strength, generation electrostatic breakdown, or high-frequency signal leakage make level of isolation (ア イ ソ レ-シ ヨ Application) deterioration etc., the quality characteristic problem increases.Therefore in present manufacture method, under wiring layer and base electrode layer, apply with nitride film.
But because nitride film is hard, the pressure during owing to joint can produce cracking in base portion.For suppressing these, on the bonding electrodes on the nitride film, carry out accordingly gold-plated, but gold-plated operation both increased the operation amount, increased cost again.
In addition, in present compound semi-conductor device, during with base and wiring layer and the formation of semiconductive GaAs substrate contacts, for guaranteeing level of isolation, in the distance that is provided with between the electrode of adjacency more than the 20 μ m.Though this lacks theoretic evidence, from before the semiconductive GaAs substrate just cry the insulating properties substrate this thinking methods, it is infinitely-great thinking withstand voltage.If but actual measurement just knows that withstand voltage is limited.Therefore, can think that in the semiconductive GaAs substrate, depletion layer extends, and utilizes the variation of the depletion layer distance of corresponding high-frequency signal, when depletion layer arrives the electrode of adjacency, produce the leakage of high-frequency signal at this.Therefore, electrodes such as base electrode layer and wiring layer are provided with the above distance configuration of 20 μ m.
But, in described compound semi-conductor device, 5 pedestals accounted for semiconductor chip near half, this becomes the major reason that is difficult to reduce chip size.
Now, it is very surprising that the performance of Si semiconductor improves, and improves constantly in the possibility of high frequency band utilization.Present silicon is in the utilization difficulty of high frequency band, and the expensive compound semiconductor chip of use, still, if the possibility that Si semiconductor utilizes improves, the compound semiconductor chip that chip price is high will be failed in price competition certainly.Therefore, must reduce the size of chip, suppress cost, it is inevitable that chip size reduces.
The present invention develops in view of above-mentioned all situations, its objective is the manufacture method that a kind of compound semi-conductor device is provided: remove the nitride film under the base electrode, the influence of pressure when suppressing wire-bonded, and area with high mercury is set under the base electrode, in addition, under the grid metal of using as distribution, area with high mercury is set, thereby can not increase the operation amount, realization can be dwindled the base electrode of adjacency, the spacing distance of distribution electrode, the understructure that chip size can dwindle, wired electric electrode structure.
That is: the present invention includes following operation:
Form channel layer at substrate surface; Be connected with described channel layer and form source electrode and drain region, forming area with high mercury under the predetermined base area and under the predetermined wiring layer simultaneously; To form first source electrode and first drain electrode as the Resistiue metal layers of ground floor electrode attached to described source electrode and drain region; To form grid and first base electrode and wiring layer as the grid metal level of second layer electrode attached on described channel layer and the described area with high mercury; To form second source electrode and second and drain and second base electrode as the base metal level of triple electrode attached on described first source electrode and first drain electrode and first base electrode; Closing line is fitted on described second base electrode.
Description of drawings
Fig. 1 is used to illustrate sectional drawing of the present invention;
Fig. 2 is used to illustrate sectional drawing of the present invention;
Fig. 3 is used to illustrate sectional drawing of the present invention;
Fig. 4 is used to illustrate sectional drawing of the present invention;
Fig. 5 is used to illustrate sectional drawing of the present invention;
Fig. 6 is used to illustrate sectional drawing of the present invention;
Fig. 7 is used to illustrate sectional drawing of the present invention;
Fig. 8 is used to illustrate sectional drawing of the present invention;
Fig. 9 is used to illustrate sectional drawing of the present invention;
Figure 10 is used to illustrate (a) of the present invention sectional drawing, (b) sectional drawing, (c) plane graph;
Figure 11 is (a) sectional drawing, (b) circuit diagram that is used to illustrate present example;
Figure 12 is the sectional drawing that is used to illustrate present example;
Figure 13 is the sectional drawing that is used to illustrate present example;
Figure 14 is the sectional drawing that is used to illustrate present example;
Figure 15 is the sectional drawing that is used to illustrate present example;
Figure 16 is the sectional drawing that is used to illustrate present example;
Figure 17 is the sectional drawing that is used to illustrate present example;
Figure 18 is the sectional drawing that is used to illustrate present example;
Figure 19 is the sectional drawing that is used to illustrate present example;
Figure 20 is the sectional drawing that is used to illustrate present example.
Embodiment
Below referring to figs. 1 through Figure 10, embodiments of the invention are described.
The present invention is made of following operation: the operation that forms channel layer 52 on substrate 51 surfaces; Be connected with described channel layer 52 and form source electrode and drain region 56,57, simultaneously under the predetermined base area and form the operation of area with high mercury 60,61 under the predetermined wiring layer; To form the operation of first source electrode and first drain electrode 65,66 as the Resistiue metal layers 64 of ground floor electrode attached to described source electrode and drain region 56,57; To form the operation of grid 69 and first base electrode 70 and wiring layer 62 as the grid metal level 68 of second layer electrode attached on described channel layer 52 and the described area with high mercury 60,61; To form the operation of second source electrode and second drain electrode, 75,76 and second base electrode 77 as the base metal level 74 of triple electrode attached on first source electrode and first drain electrode, 65,66 and first base electrode 70; Closing line 80 is fitted in operation on second base electrode 77.
First operation of the present invention as shown in Figure 1, forms channel layer 52 on substrate 51 surfaces.
That is: the compound semiconductor substrate that will form with GaAs etc. is 51 whole, injects with silicon nitride film 53 coverings to the straight-through ion of 200 thickness with about 100 .Then, implement the lithographic procedures of optionally protective layer 54 on the predetermined channel layer 52 being windowed.Afterwards, this protective layer 54 as mask, is embodied as the ion injection of selecting the action layer and authorizing the ion injection of p-type impurity (24Mg+) and authorize n type impurity (29Si) to the channel layer of being scheduled to 52.
Consequently, form p-type zone 55 and form n type channel layer 52 thereon at pure substrate 51.
In second operation of the present invention, as shown in Figure 2, be connected, form source region 56 and drain region 57, reach predetermined wiring layer 62 times 70 times at predetermined base area simultaneously, form area with high mercury 60,61 with described channel layer 52.
This operation is the operation as the present invention's first feature; remove the protective layer 54 that uses in preceding operation; again implement lithographic procedures, optionally with on predetermined source region 56, drain region 57, predetermined wiring layer 62 and the base area 70 protective layer 58 window.Then with protective layer 58 as mask; in predetermined source region 56 and drain region 57, predetermined wiring layer 62 and the substrate top layer under the base area 70; the ion of n type impurity (29Si+) is authorized in injection, therefore, forms n+ type source region 56 and drain region 57.At predetermined base area 70 and the substrate surface under the wiring layer 62, form area with high mercury 60,61 simultaneously.It is important in this that, expose from predetermined base electrode 70 and wiring layer 62, remove protective layer 58 for making area with high mercury 60,61.Thus, under the base electrode 70 and wiring layer 62 that operation forms, form the area with high mercury 60,61 bigger afterwards than those zones.
It is generally acknowledged, if base electrode or wiring layer directly are set on the GaAs substrate, then according to variation corresponding to the depletion layer of high-frequency signal, when depletion layer arrives the electrode of adjacency or wiring layer, the leakage that produces high-frequency signal herein.
But if substrate 51 surfaces under base electrode 70 and wiring layer 62 are provided with the area with high mercury 60,61 of n+ type, so, (for half insulation, the substrate resistance value is 1 * 10 with the substrate 51 that does not permeate impurity 7Ω .cm) surface is different, and impurity concentration increases that (ionic species is 29Si+, and concentration is 1～5 * 10 8Cm -3).Therefore, wiring layer 62 and base electrode 70 are separated with substrate 51, and depletion layer does not extend to base electrode 70, wiring layer 62, so can make the mutual distance of the base electrode 70, wiring layer 62 of adjacency approaching significantly in the design.
Concrete is exactly, can extrapolate, and be 4 μ m as long as make distance, just can fully guarantee the level of isolation more than the 20Db.In addition, if the spacing distance of 4 μ m also is set in analog electromagnetic field, then at 2.4GHz even can obtain the level of isolation of 40dB degree.
That is to say, under base electrode 70 and wiring layer 62, in the mode of exposing from these zones, area with high mercury 60,61 is set, in view of the above, even base electrode 70 and wiring layer 62 are directly arranged on the GaAs substrate, also can fully guarantee level of isolation, therefore, can remove the nitride film that is provided with for safety at present.
If do not need nitride film, nitride film cracking in the time of just can not considering the press fit engagement line, so, just can omit necessary gold-plated process at present.Gold-plated process is the high operations of the many costs of operation, if omit this operation, can significantly simplify manufacturing process and cut down manufacturing cost.
And, even make the base electrode 70 that adjoins each other or the spacing distance of wiring layer 62 be close to 4 μ m, also can fully guarantee the level of isolation of 20dB.For example, account in nearly half such compound semi-conductor device of semiconductor chip resembling 5 bases, chip size can reduce significantly, can realize the low price of compound semi-conductor device.
The 3rd operation of the present invention is, as shown in Figure 3, will form first source electrode 65 and first drain electrode 66 as the Resistiue metal layers 64 of ground floor electrode attached to described source region 56 and drain region 57.
At first, implement lithographic procedures, optionally will form the first predetermined source region 65 and the part of first drain region 66 and window.Utilize CF 4Plasma will be positioned at the first predetermined source region 65 and the silicon nitride film 53 on first drain region 66 is removed, and these three layers of the AnGe/Ni/Au that will form Resistiue metal layers 64 continuously are the vacuum evaporation lamination successively.Then, remove protective layer 63, utilization is peeled off, and keeps first source electrode 65 and first drain electrode 66 of contact on source region 56 and drain region 57.Then, form the resistance junction of first source electrode 65 and source region 56 and first drain electrode 66 and drain region 57 by alloying heat treatment.
The 4th operation of the present invention is, as Fig. 4 to shown in Figure 6, will be as the grid metal level 68 of second layer electrode attached on described channel layer 52 and the described area with high mercury 60,61, form grid 69, first base electrode 70, and wiring layer 62.
This operation is the operation as the present invention's second feature.As first embodiment, at first in Fig. 4, implement lithographic procedures, optionally with predetermined grid 69, base electrode 70, and wiring layer 62 parts window.To from predetermined grid 69, base electrode 70, and the silicon nitride film that exposes of wiring layer 62 parts carry out dry ecthing, expose the channel layer 52 of predetermined grid 69 parts, expose the substrate 51 of predetermined wiring layer 62 and predetermined base electrode 70 parts.
The peristome that makes predetermined grid 69 parts is 0.5 μ m, can form tiny grid 69.At this moment, as described in the explanation of second operation, utilize area with high mercury 60,61 is set, can remove present conduct and be used to guarantee the necessary nitride film of the level of being divided into, so the impact in the time of just can be owing to press fit engagement produces cracking at nitride film and substrate.
In Fig. 5, will form grid 69, wiring layer 62 and first base electrode 70 as the grid metal level 68 of second layer electrode attached to channel layer 52 and the substrate 51 that exposes.
That is: at substrate 51, will form as these three layers of the Ti/Pt/Au of the grid metal level 68 of second layer electrode, vacuum evaporation lamination successively.Remove protective layer 67 afterwards, utilization is peeled off, and forms grid 69 and first base electrode 70 and the wiring layer 62 of the long 0.5 μ m of grid that contacts with channel layer 52.
As second embodiment, as shown in Figure 6, it is also passable that the part of grid 69 is imbedded channel layer 52, at this moment, and as grid metal level 68, with these four layers of Pt/Ti/Pt/Au vacuum evaporation lamination successively.By peeling off, form grid 69, first base electrode 70 and wiring layer 62 afterwards, afterwards, implement the heat treatment that Pt is imbedded.Thus, as shown in Figure 6, grid 69 is under the state of the schottky junction of maintenance and substrate, and a part is imbedded channel layer 52.Therefore, the degree of depth of channel layer 52 at this moment when first operation forms channel layer 52, has been considered the amount of imbedding of this grid 69, and formation can access the degree of depth of required FET characteristic.
Channel layer 52 surfaces (for example distance surperficial 500 ～1000 ) produce the nature depletion layer, or the uneven zone of crystallization, so electric current does not flow, raceway groove is invalid.Utilization is imbedded channel region 52 with the part of grid 69, and the electric current under the grid 69 flows part from the decline downwards of channel region 52 surfaces.Channel region 52 is for to obtain required FET characteristic, gives the amount of burying underground that takes into full account grid 69 earlier and forms more deeply, therefore, as raceway groove, can effectively apply flexibly.Specifically, has the advantage of significantly improving current density, channel resistance and high frequency waves distortion performance.
No matter under which kind of situation, owing to can remove nitride film under base electrode 70 and the wiring layer 62, so do not produce the situation of cracking.In addition, at present, also must be used to prevent electrostatic damage and guarantee level of isolation, area with high mercury 60,61 is arranged on the substrate 51 that reaches under the base electrode 70 under the wiring layer 62, can suppress the expansion of depletion layer, guarantee the level of isolation of stipulating but utilize.
Like this, if do not need nitride film, just needn't be provided for suppressing the gold-plated process of its cracking, so can reduce cost significantly, manufacturing process also can simplify.
The 5th operation of the present invention is, as shown in Figures 7 and 8, on described first source region 65 and first drain region 66 and first base electrode 70, adhere to base metal level 74 as triple electrode, form second source electrode and second drain electrode, 75,76 and second base electrode 77.
Among Fig. 7, on the passivating film 72 on first source region 65 and first drain region 66 and first base electrode 70, form connection holes.
After grid 69, wiring layer 62 and first base electrode 70 formed, in order to protect the channel layer 52 of grid 69 peripheries, the passivating film 72 that substrate 51 surfaces are formed by silicon nitride film covered.On this passivating film 72, implement lithographic procedures, optionally to first source region 65 and first drain region 66 and with the connection part of first base electrode 70, carry out windowing of diaphragm, with passivating film 72 dry ecthings of this part.Remove protective layer 71 afterwards.
Among Fig. 8, on first source region 65 and first drain region 66 and first base electrode 70, adhere to base metal level 74, form second source electrode 75 and second drain electrode, 76 and second base electrode 77 as triple electrode.
51 whole of substrates, smear protective layer 73 again, implement lithographic procedures, implement optionally the lithographic procedures that the second predetermined source region 75 and the protective layer on second drain region 76 and second base electrode 77 are windowed.Then, the vacuum evaporation lamination forms as these three layers of the Ti/Pt/Au of the base metal level 74 of triple electrode successively, forms second source electrode 75 and second that connects with first source region 65, first drain region 66 and first base electrode 70,76 and second base electrode 77 that drains.Base metal level 74 other parts attached on the protective layer 73, so remove protective layer 73, utilization is peeled off, and only keeps second source electrode 75 and second drain electrode, 76 and second base electrode 77, other remove.In addition, local distribution partly adopts this base metal level 74 to form, so will keep the base metal level 74 of this distribution part certainly.
The 6th operation of the present invention is, as shown in Figure 9, and press fit engagement line 80 on second base electrode 77.Fig. 9 (a) is the situation of the first embodiment of the present invention, and Fig. 9 (b) is the situation of the second embodiment of the present invention.
This operation can utilize area with high mercury 60,61 to remove nitride film under first base electrode 70 and second base electrode 77 as previously mentioned, so crack can prevent the press fit engagement line time.
Before finishing, compound semiconductor switched circuit device after the operation, moves on to the back operation of assembling.The semiconductor chip of sheet is separated into other semiconductor chip by stripping and slicing, and this semiconductor chip is fixed on framework (not diagram) afterwards, connects the lead-in wire (not diagram) of second base electrode 77 and the regulation of semiconductor chip with closing line 80.Adopt thin gold thread as closing line 80, connect with known ball bond.With transmitting mould mould dress, implement resin-encapsulated afterwards.
Area with high mercury also can utilize lithographic procedures shown in Figure 10 (a) and (b), optionally diaphragm is windowed, and is arranged under predetermined wiring layer 62 all ends to reach under predetermined base electrode 70 all ends.At this moment, a part is exposed from wiring layer 62 and base electrode 70.
The configuration example of Figure 10 (c) expression area with high mercury 60,61.Area with high mercury 60,61 also can resemble with base electrode 70 and wiring layer 62 encirclements and be provided with, and also can be provided with as Figure 10 (c).Just, base electrode 70a removes the top, along 3 limits area with high mercury 60 is set, and base electrode 70b is the bight of removing the GaAs substrate, along irregular pentagonal 4 limits, area with high mercury 60 is set the C font.The part of area with high mercury 40 is not set, and all is the part towards the Zhou Duan of GaAs substrate, even depletion layer expansion also has sufficient spacing distance with the base and the distribution of adjacency, is that leak can debatable part.
In addition, area with high mercury 61 optionally is arranged near the wiring layer of base electrode 70a, 70b one side 62 times.
This is a routine distribution example, as long as the high-frequency signal that can prevent to put on base electrode 70 is communicated to wiring layer 62 and gets final product by substrate 51.In addition, in Figure 10, omitted, but as the second embodiment of the present invention, also grid 69 can have been imbedded channel layer 52 surfaces.
As described in detail above, can obtain following effect according to the present invention.
The first, utilize the area with high mercury that is arranged on substrate, base electrode and wiring layer can separate with substrate, so, can remove the nitride film for guaranteeing that fully level of isolation is provided with at present.If do not need nitride film, just can economize the cracking of nitride film when slightly preventing to engage and the gold-plated process that carries out.Gold-plated process quantity is many, cost is high, so if omit this operation, just can be with the manufacture method of the simple compound semi-conductor device of low-cost realization flow.
The second, utilize area with high mercury, base electrode and wiring layer can separate with substrate, prevent insulation breakdown and interference, can dwindle the spacing distance that adjoins each other significantly.When guaranteeing the level of isolation of 20dBm, can be close to 4 μ m configuration particularly, can realize significantly that chip size dwindles, in other words, can make high-quality compound semi-conductor device with low cost.
The 3rd, the grid metal level adopts Pt/Ti/Pt/Au, utilizes heat treatment, and the part of grid is imbedded channel region, and the electric current under the grid is flowed part from the decline of channel region surface.Channel surface is as the invalid zone of raceway groove, utilizes grid to imbed raceway groove is effectively applied flexibly, so, can improve current density, channel resistance and high frequency distortion characteristic significantly.

Claims (11)

1, a kind of manufacture method of compound semi-conductor device is characterized in that, comprises following operation,
Adhering to before the grid metal level that forms grid, the semiconductor substrate surface under predetermined base area forms the operation of area with high mercury;
On described area with high mercury, adhere to described grid metal level, form the operation of first base electrode;
On described first base electrode, the adhesion base metal level forms the operation of second base electrode;
The operation of press fit engagement line on described second base electrode.
2, a kind of manufacture method of compound semi-conductor device is characterized in that, comprises following operation,
Adhering to before the grid metal level that forms grid, under the predetermined base area and the semiconductor substrate surface under the predetermined wiring layer form the operation of area with high mercury;
On described area with high mercury, adhere to described grid metal level, form the operation of first base electrode and wiring layer;
Adhesion base metal level on described first base electrode forms the operation of second base electrode;
The operation of press fit engagement line on described second base electrode.
3, a kind of manufacture method of compound semi-conductor device is characterized in that, comprises following operation,
Form the operation of channel layer at substrate surface;
Joining with described channel layer forms source electrode and drain region, forms the operation of area with high mercury simultaneously under predetermined base area;
Adhere to Resistiue metal layers in described source electrode and drain region, form the operation of first source electrode and first drain electrode as the ground floor electrode;
On described channel layer and described area with high mercury, adhere to grid metal level as second layer electrode, form the operation of the grid and first base electrode;
On described first source electrode and first drain electrode and first base electrode, adhere to grid metal level as triple electrode, form the operation of second source electrode and second drain electrode and second base electrode;
The operation of press fit engagement line on described second base electrode.
4, a kind of manufacture method of compound semi-conductor device is characterized in that, comprises following operation,
Form the operation of channel layer at substrate surface;
Joining with described channel layer forms source electrode and drain region, under the predetermined base area and under the predetermined wiring layer, forms the operation of area with high mercury simultaneously;
In described source electrode and drain region, adhere to Resistiue metal layers as the ground floor electrode, form the operation of first source electrode and first drain electrode;
On described channel layer and described area with high mercury, adhere to grid metal level as second layer electrode, form the operation of grid and first base electrode and wiring layer;
On described first source electrode and first drain electrode and first base electrode, adhere to base metal level as triple electrode, form the operation of second source electrode and second drain electrode and second base electrode;
The operation of press fit engagement line on described second base electrode.
5, the manufacture method of claim 1 or 3 described compound semi-conductor devices is characterized in that, described area with high mercury exposes and is provided with from described base electrode.
6, the manufacture method of claim 2 or 4 described compound semi-conductor devices is characterized in that, described area with high mercury exposes and is provided with from described base electrode and described wiring layer.
7, the manufacture method of claim 1 or 3 described compound semi-conductor devices is characterized in that, described area with high mercury is under described base electrode, and a part is exposed and is provided with from described base electrode.
8, the manufacture method of claim 2 or 4 described compound semi-conductor devices, it is characterized in that, described area with high mercury described base electrode week the end and described wiring layer week end under, a part is exposed and is provided with from described base electrode and described wiring layer.
9, accessory rights requires the manufacture method of 1～4 each described compound semi-conductor device, it is characterized in that, also comprise following operation, described grid metal level is to heat-treat behind the metallized multilayer film of Pt at the evaporation orlop, and the part of described grid is imbedded described substrate surface.
10, accessory rights requires the manufacture method of 1～4 each described compound semi-conductor device, and its feature is that all described area with high mercury is injected by ion and is provided with.
11, the manufacture method of claim 3 or 4 described compound semi-conductor devices is characterized in that, described channel region is injected by ion and is provided with.
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CN102130157A (en) * 2009-12-17 2011-07-20 英飞凌科技奥地利有限公司 Semiconductor device with metal carrier and manufacturing method
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