CN1366296A - Equipment and method of polishing magnetic head - Google Patents
Equipment and method of polishing magnetic head Download PDFInfo
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- CN1366296A CN1366296A CN 01101512 CN01101512A CN1366296A CN 1366296 A CN1366296 A CN 1366296A CN 01101512 CN01101512 CN 01101512 CN 01101512 A CN01101512 A CN 01101512A CN 1366296 A CN1366296 A CN 1366296A
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Abstract
The invention relates to the luster-finish of a coronal ceramic stick that contains several magnetic head converters. The ceramic stick is pressed to polishing plane being concave mainly by elastic element composed of rubber mainly. There are multiple grooves perpendicular to the longitudinal direction on the surface of opposite polishing planes. Based on result of measuring magnetic resistance of component setup on the magnetic head converter, closed loop control is executed. With operational pressure of coronal polishing molding being adjusted, the satisfactory shape controlled accurately can be obtained.
Description
The present invention relates to the Apparatus for () and method therefor of magnetic head polishing, can be used to the polishing object that a plurality of magnetic heads of a row constitute is polished.Especially relate to the equipment and the method that make polished surface form the smooth surface (below will be called crown) that protrudes.
Be used for the production run of the thin-film head of computer disc driver in production in enormous quantities, the processing step to bar-shaped pottery (ceramic rod) polishing will be arranged traditionally.A plurality of converters that comprise magnetic thin film are lined up a neat row on the surface of ceramic rod, so one of these converter have realized that each converter space entrance height (height of gap) reaches a suitable numerical value.Be cut into converter one by one at the next procedure ceramic rod, the part of each cutting-out becomes the part of magnetic head of disc drive.Use this magnetic head in disc driver, ceramic segment is formed in and is rotated the air pressure that produces by disk on the disk and support the sliding shoe that floats, and the converter that comprises magnetic thin film constitutes that head core is used to write down and/or the magnetic signal of copy diskette.
At above-mentioned converter, formed the magnetoresistive element (MR) that magnetic induction conversion element that signal writes and signal are read.Entrance height above-mentioned in addition refers to, and two confessions in this magnetic core write or read the length (highly) that faces one another part in space very little between the pole end piece of magnetic signal.In order to carry out suitable record and read output signal, this entrance height must keep the numerical value be scheduled to, therefore for polishing very high accuracy requirement is arranged.
Proposed the magnetic head with ceramic rod form of introducing is above carried out the device (for example, U.S. Patent No. 5,620,356 etc.) of high precision polishing.Be exactly some apparatus and method of proposing of the inventor (for example, Japanese patent application No.11-162799 etc.) in addition.
As the simple introduction that the front is done, be in the disc driver of user mode, be positioned at chip component (comprising sliding shoe and head core) that the magnetic head end is subjected to suspension support keep keeping apart disk hundreds of/one micron suspended state.Suspension is that the stream pressure that the disk of high speed rotating produces causes.For obtaining can magnetic disc storage and the accurate information of duplicating, the chip component that is in suspended state must constantly remain on settling position.
For this purpose, on some magnetic head, the chip component that is positioned at the magnetic head end has shape round or curved surface on the surface of relative disk, thereby has suppressed because the influence to the chip component quick condition of air flow variation generation between the about part of disk.
To produce technology in enormous quantities and make this curve form (below be called crown processing or process crown) in order to adopt, a plurality of ceramic rods that contain the magnetic thin film converter are housed at first polish, carry out crown processing so that obtain desirable curve form on same surface then to obtain the entrance height that desired explained earlier is crossed.
Carry out the device that crown processing above-mentioned can use the inventor to propose at aforementioned Japanese patent application No.11-162799.This device is provided with can horizontal location and the polishing block of rotation and be used for supporting the rubbing head of polished workpiece (ceramic rod of a plurality of converters promptly is housed), and polish so that carry out workpiece the appropriate location that keeps these workpiece to be in contact with polishing block.Rubbing head be fixed on can along continuous straight runs and the fixed frame that moves of vertical direction on.Rubbing head is subjected to the support of the annular bearing on the fixed frame and can rotates at surface level.
The device that proposes among the Japanese patent application No.11-162799, its bottom surface is provided with the rubbing head that has regulating ring.In the process of polishing operation, regulating ring contacts with the upper surface of polishing block as polished surface, therefore defines the reference planes of rubbing head location.Rubbing head also is provided with inclinator can be with the frame of reference (i.e. the frame of reference of being made up of the element that is fixed on regulating ring) that is fixed on regulating ring around the predeterminated level axle desired angle that tilts.Therefore inclinator can be with desired angle of the relative vertical direction inclination of the frame of reference that comprises regulating ring.The tilting action of inclinator can be realized by motor.
Said apparatus also is provided with regulates the mechanism that workpiece is crooked or twist in the polishing process of the ceramic rod polished surface that constitutes workpiece, thereby regulates the horizontal equilibrium of polished amount.More particularly, can carry out the adjusting of workpiece along the vertically any multiple spot of workpiece to polishing block pressure, thus calibration of workpieces distortion and adjusting polished amount.
Make entrance height reach the common polishing operation of required value, the inclination angle of the device medium dip device of introducing is above fixed at the whole polishing process of workpiece.In this polishing process, the surface polishing of device polishing block keeps and the workpiece quadrature in addition, and polished surface is polished the plane thus.
Also have, use this device that has inclinator, might form crown polished surface in theory.More particularly, can carry out polishing operation by the mode that changes the inclinator inclination angle gradually and continuously and obtain circular polished surface.But, using this device to carry out crown difficult processing obtaining having the smooth curved surface of desired curvature, and cause resulting curved surface that very big fluctuating is arranged, going back claimed apparatus in this polishing operation has complicated operations control.
For this reason, the crown processing of ceramic rod workpiece polished surface is also carried out at the device that is provided with spherical surface polishing polishing block, in a this polishing block example, the ceramic rod workpiece is connected to the rubber slab that is bonded at the rod clamps end face and is pressed to polishing block by this clamp mechanism, carries out polishing operation then under controlling all exerting pressure.In another example, the ceramic rod workpiece is connected to square rod clamps by rubber parts, and carrying out polishing operation is the rubbing head that comprises anchor clamps and workpiece by depressing, and its weight is pressed to surface polishing.
Generally speaking, the device of above-mentioned routine can not carry out the crown processing of magnetic head with high precision.The device that proposes among the Japanese patent application No.11-162799 can not be used for this crown processing in addition, because when changing gradually under the inclination angle of inclinator must the control in complexity, smooth surface almost is difficult to obtain.
In addition at the device that is provided with spherical surface polishing polishing block, obtain machining shape normally by controlling the workpiece weight and the process time of pressing to polishing block by polishing, polished amount can not be controlled exactly, for example, because the tired polishing speed that causes of polishing fluid changes.
Consider above-mentioned situation, the purpose of this invention is to provide a kind of burnishing device and finishing method, it can carry out the crown processing of high precision of magnetic head.
According to the present invention,, realized above-mentioned purpose by the burnishing device that the polishing workpiece that a plurality of magnetic heads are housed is polished.This device comprises the polishing block of a rotation, polishing block is by the polished surface of forming the predetermined bend radius piece, be used for fixing the frame that can move relative to surface polishing of rubbing head, with the fixing rubbing head of polished fixed frame, wherein rubbing head comprises the anchor clamps that support polishing workpiece by flexible member, the rear panel that anchor clamps can be fixed, the elevating mechanism that can rise overally and descend with the relative surface polishing of rear panel, elevating mechanism can also be with the mode of rotating around the strong point and the fixing rear panel on the plane of parallel rising and descent direction, rear panel can be pushed to a plurality of correction transfer bar mechanisms of surface polishing, to the measuring mechanism that the characteristic of magnetic head that is positioned at polishing workpiece is measured, control the control gear of a plurality of correction transfer bar mechanism pressure according to measured value.
Be the purpose that realizes talking about above, optimize a kind of structure, wherein elevating mechanism is supported in inclinator, and the direction of lifting can drive inclinator by the inclinator driving mechanism and make it, and rubbing head preferably is fixed to the rubbing head fixed mechanism in rotating mode in addition.Also optimize the device that includes the rubbing head wabbler mechanism, the rubbing head wabbler mechanism can make rubbing head be rotated to-and-fro movement at predetermined angular range.
A plurality of in addition correction transfer bar mechanisms preferably include three low friction cylinders, and low friction cylinder preferably is positioned at the strong point of rear panel to the promotion part of rear panel, and are positioned at rear panel and mention the both sides of the strong point in the front longitudinally.
In addition, the predetermined bend radius of above-mentioned surface polishing is preferably in 4 to 6 meters the scope, and flexible member preferably mainly is made up of rubber.The surface of the relative surface polishing of this external polishing workpiece preferably is provided with vertically a plurality of longitudinally grooves, and the measurement characteristics of magnetic head is magnetic resistance preferably.
According to the present invention, above-mentioned purpose can also realize by the finishing method that can polish the polishing workpiece that a plurality of magnetic heads are housed.This method comprises the step that makes anchor clamps pass through flexible member clamping polishing workpiece, mobile anchor clamps are to relatively rotating polishing block, polishing block is provided with the polished surface of forming the piece that predetermined bend radius is arranged, the step in precalculated position, anchor clamps are rotatably mounted to plane that is orthogonal to surface polishing substantially and the step that anchor clamps is dropped to surface polishing, thereby polishing workpiece is pressed to the step that surface polishing polishes polishing workpiece by anchor clamps, wherein, anchor clamps can be pressed to surface polishing at a plurality of points except rotational support point, measure polished amount and will repeat repeatedly in polishing process according to the pressure that measurement result is adjusted the strong point and a plurality of points based on measuring characteristic of magnetic head.
In order to realize above-mentioned purpose, in the step of anchor clamps fixing polishing workpiece, preferably anchor clamps are regulated towards the direction that surface polishing descends.In the step of polishing, anchor clamps also preferably are rotated reciprocal rotation around the strong point of the substantially parallel surface polishing that anchor clamps are fixed rotationally in predetermined angular range.Pressurization at the strong point and a plurality of points is preferably undertaken by the cylinder of low friction, and a plurality of pressure point preferably are positioned at the both sides of anchor clamps longitudinal bracing point.
In addition, the predetermined bend radius that surface polishing is mentioned in the front is preferably in 4 to 6 meters the scope, and flexible member preferably mainly is made up of rubber.Be preferably in surface with respect to surface polishing by the polished part of anchor clamps by the rubber clamping in addition a plurality of vertically grooves longitudinally are set, and the measurement characteristics of magnetic head magnetic resistance preferably.
Fig. 1 is the whole front elevation of magnetic head burnishing device according to an embodiment of the invention;
Fig. 2 is the overall plan view of magnetic head burnishing device according to an embodiment of the invention;
Fig. 3 is the front elevation that show to constitute magnetic head in the magnetic head burnishing device of one embodiment of the invention etc.;
Fig. 4 is the planimetric map of rubbing head shown in Figure 3;
Fig. 5 is the side view of rubbing head shown in Figure 3;
Fig. 6 is the side cutaway view of rubbing head shown in Figure 3;
Fig. 7 is the perspective diagram that shows the polishing workpiece shape;
Fig. 8 is the sectional view along the polishing block diameter;
Fig. 9 is the block scheme of the relevant polished amount control of the embodiment of the invention;
Figure 10 is the measurement of displayed map 9 and the view of multipath conversion plate details; With
Figure 11 is the view of the push rod drive plate details of displayed map 9.
Below with reference to Fig. 1 to 11, magnetic head burnishing device of the present invention and method are explained by the mode of embodiment.Fig. 1 is the whole front elevation of magnetic head burnishing device that the present invention is specialized, and Fig. 2 is its planimetric map.Fig. 3 is respectively the front elevation of the polishing magnetic-head of the embodiment of the invention to Fig. 6, planimetric map, side view, and side cutaway view.
At first, with reference to Fig. 1 and 2, the one-piece construction of magnetic head burnishing device that the present invention is specialized is introduced.The magnetic head burnishing device is provided with for the mode fixing matrix 1 of polishing block 2 to rotate at surface level.Polishing block 2 polished CD-ROM drive motor 4 drive by driving-belt 6 and rotate, and CD-ROM drive motor is arranged on matrix 1 and constitutes the rotational power source.
The a pair of guide rail 8 that separates along vertical plane is horizontally fixed on the matrix 1.Slide unit 10 moves horizontally as side direction under the guiding of paired guide rail 8.Rubbing head fixed frame 12 is fixed in mode (regulated at will is vertical drive to heavens) that can be for vertical movement and is displaced sideways slide unit 10.Be displaced sideways slide unit 10, for example, the ball-screw nut that can be by being installed in slide unit 10 and the ball-screw engagement of closed slide 8 also drive by the revolution ball-screw, and slide unit 10 and rubbing head fixed frame 12 can carry out linear reciprocating motion thus.
As shown in Figure 3, in rubbing head fixed frame 12 inside, annular bearings 14 is fixed in rotationally in rotational support portion 16, and rubbing head 20 is fixed to rotational support portion 16 by leaf spring or the such flexible member 18 of rubber.The vertical support plate 24 that rubbing head 20 is provided with base plate 22 and erects with parallel mode.
Shown in Fig. 2 and 3, pulley 28 is fixed on rotational support portion 16, and the rubbing head rotation motor 32 of drive pulley 30 is fixed on the outside of rubbing head fixed frame 12.Driving-belt 34 connects pulley 28,30.Motor 32, pulley 28 and 30, driving-belt 34 constitute wabbler mechanism makes rubbing head 20 make crankmotion (oscillating motion) in predetermined angular range.
Shown in Fig. 3 to 6, between the vertical support plate of rubbing head 20, be provided with the sloping shaft 44 that is parallel to vertical support plate 24, inclinator 46 is linked to sloping shaft 44 in the mode that tilts with respect to rubbing head 20.
As illustrated in Figures 5 and 6, in the vertical support plate 24 of rubbing head 20, the bottom of motor fixing base 48 is fixing relative to axle 50 modes of rotating.Incline motor 52 is fixed on the top of motor fixing base 48.The driving shaft of motor 52 is connected to the ball-screw of mediating with ball-screw nut 56 54.Ball-screw nut is connected to an end of arm 68 by axle 60, and the other end of arm is fixed to inclinator 46.60 mechanism has constituted tilt drive mechanism from axle 50 to axle, and it can make inclinator 46 from being parallel to predetermined angle of state inclination of vertical support plate 24.
Elevating mechanism 64 by sliding bearing (laterally roller guide) but 62 vertical moving be connected to inclinator 46.When elevating mechanism 64 carried out banking motion with inclinator 64, elevating mechanism 64 and inclinator 46 always kept parallel to each other.Lower end at elevating mechanism 64 has linked rear panel 68 by axle 66.Axle 66 is parallel to vertical support plate 24 and sloping shaft 44 quadratures.
Shown in Fig. 3 and 5, be fixed with correction transfer bar mechanism 70A, 70B, 70C by support 70 on the top of inclinator 46.Proofread and correct transfer bar mechanism 70A, 70B, 70C and be used for respectively the axle 66 of rear panel 68, its left side and the right are to pressing down and the load that acts on rear panel being controlled.At present embodiment, proofread and correct transfer bar mechanism and form by low friction air cylinder.But also can use the low friction cylinder of other type, as the Electromagnetic Drive cylinder.
Correction transfer bar mechanism 70A, bar 80A, the 80B of 70B, 70C, the lower end of 80C are connected to cylinder jointing 82A, 82B, 82C, each cylinder jointing is by bolt, composition such as nut and spherical parts so that can rise and descend along the sliding bearing 84A, the 84B that are fixed on elevating mechanism 64,84C.Each cylinder jointing can the relative correction transfer bar mechanism rising and descent direction rotate 5 ° of degree, compensate the axle of cylinder jointing and proofread and correct deviation between the transfer bar mechanism with this.The lower end of cylinder jointing 82A, 82B, 82C is connected respectively to the left side, centre, the right of rear panel 68 by connecting link.Therefore, as shown in these figures, act on the correction transfer bar mechanism 70A of rear panel 68, the pressure of 70B, 70C becomes parallel to each other.
As shown in Figure 6, rear panel 68 is connected with the anchor clamps 94 that side direction prolongs by rectangular slab 90, fixed pin 96 and web member 122.Be provided with on the surface (lower surface among the figure) that side direction prolongs the relative polishing block 2 of anchor clamps 94 and mainly constitute and with the resilient rubbber cushion of fixing as the binding material of epoxy type 97 by rubber.The surface of the rubber blanket 97 of relative polishing block 2 fixed and is supported in by polishing workpiece (ceramic rod workpiece) 92 by the self-adhesive effect of rubber surface or analog.Polishing workpiece 92 is corrected the surface polishing 2a that transfer bar mechanism is pressed to polishing block 2 by the effect of the element introduced above, and at this pressured state, continues to be subjected to the support of rubber blanket 97 by the self-adhesive effect.
In the polishing operation of reality, the polishing workpiece compressive load that acts on surface polishing 2a is mainly regulated by proofreading and correct transfer bar mechanism 70B, and the balance of polishing workpiece 92 vertical compressive load is regulated by other correction transfer bar mechanism 70A, 70C.Therefore, depend on polishing workpiece 92 fluctuation of polished amount longitudinally, the partial pressure of proofreading and correct transfer bar mechanism 70A, 70B, 70C can be (that is, being the power of ascent direction) born.
The surface polishing 2a that is used for polishing workpiece 92 is polished by the tin manufacturing of polishing block 2 is preferably formed as the concave shape that constitutes the piece that pre-determines radius, so that make the polished surface 92a of polishing workpiece 92 obtain predetermined circular (dome) by glossing.Fig. 8 is the sectional view of polishing block 2 along its diameter.At present embodiment, polishing block 2 has formed the substantially annular shape of big thickness, and wherein aforementioned recessed surface polishing 2a constitutes a spherical part, and spherical radius can be selected in 4 to 6 meters scope.
Also have, polishing workpiece 92 is being pressed under the situation of surface polishing 2a, in order to make whole polished surface 92a contact surface polishing 2a easily, be provided with a plurality of polishing workpiece 92 groove 92b longitudinally that are orthogonal on the surface with rubber blanket 97 bondings of polishing workpiece 92 by crooked polishing workpiece 92.Because said structure, it is recessed surface polishing 2a substantially that surface polishing 92a can easily contact, and therefore, can obtain level and smooth circle along the vertical whole surface of polishing workpiece.
As shown in Figure 7, polishing workpiece 92 constitutes (will be cut off each slide block that becomes thin-film head) by the ceramic rod 104 of rectangular rod elongation, and a plurality of magnetic head converters of being made up of magnetic thin film on it are arranged in the mode of line spread.The magnetic thin film of converter is arranged in vertical side surface 104a of ceramic rod 104.At present embodiment, suppose that the basal surface (polished surface) of ceramic rod 104 polishes in preceding operation, thus, each converter that is positioned at vertical side surface 104a has had predetermined entrance height.
Next, to want the circular entrance height that must assurance can not cause the front operation to obtain that remarkable change is arranged in order obtaining and to prevent the fluctuation of the vertical polished amount of polishing workpiece the selection that allows polished amount.The polishing process that obtains suitable entrance height generally carries out at different burnishing devices with the polishing process that obtains circle, because polished amount in these operations and the desired precision of this polished amount are diverse.
According to the present invention, the polished amount of polishing workpiece 92 is controlled the polishing of measuring in the polishing process under the so-called closed-loop control that magnetic resistance value (MR value) that the magnetoresistive element be positioned at a plurality of converters draws carries out.Determine desired polished amount according to measured value, then according to pressure and balance thereof on the polished amount adjusting polishing workpiece 92 of decision.At present embodiment, carry out polishing operation and be being positioned at the converter at ceramic rod 104 centers and being positioned at the magnetic resistance value of the magnetoresistive element in ceramic rod 104 left sides and precalculated position, right side by interval measurement at the fixed time.The magnetic resistance value is only three position measurements in the present embodiment, but when requiring that polished amount had more accurate control, preferably increases the number of measurement point and the number of the spot pressure on the polishing workpiece.
In order to measure the magnetoresistive element magnetic resistance value that is positioned at converter, set in advance the electrode that is connected by electrical wiring to above-mentioned magnetoresistive element to be measured at the side direction prolongation anchor clamps 94 surperficial 94a of relative rear panel.Be provided with the measurement pin 128 (with reference to figure 3) that can be moved by spring at rectangular slab 90, so when the anchor clamps 94 that extend laterally are fixed to rectangular slab 90, above-mentioned electrode and measurement pin 128 are connected to each other, measure pin 128 and be connected to not shown magnetic resistance value measurement mechanism, so predetermined magnetoresistive element magnetic resistance value can be fixed to rectangular slab 90 and measures by side direction being prolonged anchor clamps 94.
The control gear of the practical structures of magnetic resistance value measurement mechanism and push rod pressure will be introduced below.Fig. 9 is the control system block scheme that comprises above-mentioned measuring mechanism and control gear, and control system can drive according to the magnetic resistance value that records and proofread and correct transfer bar mechanism.And Figure 10 is the more detailed block diagram of measurement and multipath conversion plate 220, and Figure 11 is the more detailed block diagram of push rod drive plate.At present embodiment, measure the magnetic resistance value by 4 terminal resistance, a plurality of measurement pins 128 (POGO pin) contact with magnetoresistive element 201.Measurement and multipath conversion plate 220 utilize the known calculating that 4 terminal resistance measurements are carried out to be resistance value from magnetoresistive element 201 and measurement pin 128 voltage transitions that obtain.Therefore the resistance value that obtains is converted and is the input/output terminal 211 that numerical data enters microcomputer 210 by multipath conversion.Computing machine 210 shows polished amount according to the polished amount of input data computation polishing workpiece 92 and to the operator.
With reference to Figure 10, be described in detail from the operation that the magnetic resistance value measures numerical data output for the front.Measure and multipath conversion plate 220 is carried out and provided from the electric current of constant current source 221 and carry out the voltage measurement of measuring between the pin, and according to the measured value that carries out at counter 223 and reference resistance 222 relatively combine digital calculate, thereby obtain the impedance of magnetoresistive element.Income value further is converted to numerical data by AC/DC changeover switch 224.
According to the numerical data after the conversion, determine polished amount at the surface polishing 92a of magnetoresistive element and adjacent domain thereof.Then, for the polished amount that needing to obtain, computing machine 210 calculates each transfer bar mechanism 70A, 70B, drive amount that 70C requires.Offer push rod drive plate 230 these drive amount data by input/output end port 211 computing machines 210, these data convert control signal to by the AC/DC changeover switch 231 of push rod drive plate, drive current output unit 232 receives these signals then, and output drives the required current value of transfer bar mechanism respectively.Respond these output, transfer bar mechanism is finely tuned rear panel 68 upward pressures, and the longitudinal pressure balance of the last polishing workpiece 92 of surface polishing 2a obtains trickle adjusting by the anchor clamps 94 that side direction prolongs thus.
At present embodiment, the polished amount of crown processing is to control by the closed-loop control system that explained earlier is crossed.Therefore can realize that the meticulous control of polished amount reduces the fluctuation of polishing workpiece polished amount, this is difficult to realize on common device.In single polishing workpiece, can also control the polished amount that vertically goes up diverse location, therefore reduced the polished amount fluctuation in the polishing workpiece, this also is that common device is difficult to accomplish.
To introduce the finishing method and the function of the embodiment of the invention below.
In this state, measure pin and contact the distribution that detects polished amount or draw from converter with the converter of the predetermined magnetic head that is used for carrying out the magnetic resistance measurement.Measuring the spring compacting that pin is subjected to not illustrating, is in order constantly to keep suitable electric contact, even also can keep in the polishing operation process.
Set the pitch angle of rear panel 68 and fixedly extend laterally after the anchor clamps 94 by tilt drive mechanism, the rubbing head fixed frame 12 that rubbing head 20 has been installed moves and stops at the predetermined position on rotation polishing block 2 along guide rail 8 as straight line.Rubbing head 20 drops to the surface polishing 2a that constitutes polishing block 2 upper surfaces.In operation, proofread and correct transfer bar mechanism 70A, 70B, 70C in the back the pressure that produces of the both sides (left side among Fig. 3 and right side) of 68 66 of plates be set to zero, therefore make rear panel 68 and the anchor clamps 94 that extend laterally can rotate around axle 66.
When polishing workpiece 92 contacted surface polishing 2a with its whole surface, the decline of rubbing head 20 stopped.When the sloping portion of surface polishing 2a concave surface contacts polishing workpiece 92, need relative descent direction inclination polishing workpiece 92, so that whole surface is contacted with surface polishing 2a.At present embodiment, as previously described, rear panel 68, the anchor clamps 94 and the polishing workpiece that extend laterally are to be in the state that freely rotates to contact with surface polishing 2a down, so whole polished surface 92a and surface polishing 2a can keep in touch, needn't use the control gear polishing workpiece 92 that tilts in rotation.After step-down operation was finished, in order to obtain contact reliably between whole polished surface 92a and the surface polishing 2a, the anchor clamps 94 that extend laterally also will stand little repeatedly up-down vibration.
When the surface polishing 2a of present embodiment is a concave surface, the different piece that the rotation of polishing workpiece can cause polished surface 92a in the polishing operation process changes for the pressure of surface polishing 2a, this in addition having only 66 pairs of polishing workpieces of axle Shi Douhui that exerts pressure to take place.For this reason, adopted the center of rotation of its rubbing head 20 of a kind of structure consistent, and this center of rotation to remain in the diameter of polishing block 2 or is positioned on the center of rotation extended line when rubbing head 20 is done straight reciprocating motion with the center of rotation of polishing workpiece.
The end that rubbing head 20 descends will come whether the distance between the precalculated position reaches predetermined numerical value on detecting sensor and the surface polishing by unshowned capacitance type proximity transducer, also can use the range sensing type proximity transducer of magnetic detection type proximity transducer or use high frequency waves.
The polishing that polished surface 92a carries out is to realize with contacting of surface polishing 2a by whole polished surface 92a.In the polishing operation process, polishing workpiece 92 is pressed onto surface polishing 2a by resilient rubbber cushion 97, with surface polishing 2a better the contact is arranged in order to make workpiece, and polishing workpiece 92 is provided with a plurality of perpendicular to its groove longitudinally.For this reason, even when axle 66 was corrected transfer bar mechanism 80B and promotes separately, polishing workpiece all was easy to bending.To this, as long as at surface polishing flexible member is set simply, pressure just can be distributed on the whole polished surface 92a effectively, and can reduce the polished amount fluctuation of polishing workpiece.
But, depending on that surface polishing 2a goes up the state when the beginning polishing operation between the consumption of polishing emery liquid and polished surface 92a and the surface polishing 2a, each polishing workpiece has the fluctuation of polishing speed and polished amount.At present embodiment, adopted the mensuration polished amount and according to these measured values to proofreading and correct transfer bar mechanism 70B closed-loop control for pressure regulation, thereby realized balance to polished amount between the meticulous control of polished amount and the different polishing workpiece.In polishing process, near the pressure the two ends of polishing workpiece 92 has reduced the polishing workpiece fluctuation of polished amount in the vertical by proofreading and correct when being adjusted in of transfer bar mechanism 70A, 70C controlled polished amount in addition.
The polishing process of Jie Shaoing may produce unbalanced friction if the maintenance of the same position of polishing workpiece 92 just contacts with polished surface 2a in the above.For this reason, the rotation eyelid retractor 16 polished head tremor pendulum motors 32 that rubbing head 20 is installed drive, and do alternating movement at predetermined angular range.And rubbing head fixed frame 12 is done straight reciprocating motion in predetermined scope.Therefore in the polishing operation process, rubbing head has carried out by rotating the aggregate motion that to-and-fro movement and straight reciprocating motion are formed.Therefore the unbalanced wearing and tearing of polished surface have been prevented.
Embodiment in front, the magnetic resistance value is measured at three points of polishing workpiece, proofreaies and correct transfer bar mechanism in the load of these three points by three and regulates.But the number of the number of measurement point and the point of load is not only limited to top explanation.The target of Ce Lianging also is not limited to the magnetic resistance value in addition, for example, the change that can also come measuring resistance by the electrode that other measurement polished amount is set at polishing workpiece, or directly measure the shape of polished surface and obtain polished amount by polishing shape application image is handled by the optical devices as optical microscope.Proofreading and correct the low friction cylinder that transfer bar mechanism also is not limited among the embodiment of front in addition can also be made up of different drive units, as the drive unit of electromagnetic type.
Being fixed on the rubber blanket that extends laterally anchor clamps and be used for the clamping polishing workpiece can be made up of any material, as long as it has elastic performance, can by autoadhesion performance and vacuum engagement performance support polishing workpiece and by elastic deformation along the surface polishing distortion that mainly is curved surface.Embodiment in front is arranged on a plurality of of polishing workpiece and carries out easily along the distortion of surface polishing perpendicular to groove is feasible longitudinally, but this effect also can adopt more resilient material realize by thickness or the polishing workpiece that reduces polishing workpiece.In addition, measure and control gear also is not limited to the structure that discloses among the embodiment in front, and can comprise any mechanism that can measure the polishing workpiece polished amount and can regulate polishing workpiece pressure according to measured value.
The present invention mainly is the surface polishing of concave surface and is provided with a plurality of perpendicular to groove longitudinally in the rear surface of polishing workpiece by polishing workpiece is pressed to through the flexible member of mainly being made up of rubber, whole polished surface is contacted with surface polishing easily, therefore can obtain satisfied crown polished surface.
The polished amount that the present invention can also control crown workpiece by the closed-loop control that the front is said is to reduce the polished amount fluctuation between the different polishing workpieces, and this is the problem that common unit often runs into.Within single polishing workpiece, also can to along polishing workpiece longitudinally the polished amount of various piece control, therefore, reduced the polished amount fluctuation in each polishing workpiece, this also is the problem that common unit often runs into.
Claims (19)
1. magnetic head burnishing device, it can be used to the polishing workpiece that a plurality of magnetic heads are housed is polished, and it comprises:
Rotate polishing block, it has the surface polishing that constitutes a part of predetermined bend radius sphere;
The rubbing head fixed frame can move relative to described surface polishing; With
The rubbing head that described rubbing head fixed frame supports;
Wherein, described rubbing head comprises the anchor clamps by the described polishing workpiece of flexible member clamping; The rear panel that described anchor clamps can be fixed; It can be relative together with described rear panel described surface polishing of elevating mechanism rises and descends, and can support described rear panel around the mode that the strong point rotates and at the described rear panel of the planar support that is parallel to described rising and descent direction with described rear panel; Described rear panel is pressed to a plurality of correction transfer bar mechanisms of described surface polishing; Measurement is positioned at the measuring mechanism of the magnetic head performance of described polishing workpiece; With the control gear of controlling described a plurality of correction transfer bar mechanism pressure according to measured value.
2. described device as claimed in claim 1 is characterized in that, described elevating mechanism is tilted device and supports, and described updip and the direction that has a down dip make inclinator tilt to obtain by the inclinator drive unit.
As in claim 1 or 2 each as described in device, it is characterized in that described rubbing head is rotatably mounted to described rubbing head fixed frame.
4. described device as claimed in claim 3, it also comprises the rubbing head wabbler mechanism, it can make described rubbing head carry out at predetermined angular range and rotate to-and-fro movement.
5. described device as claimed in claim 4 is characterized in that, described a plurality of correction transfer bar mechanisms are three low friction cylinders.
6. described device as claimed in claim 5 is characterized in that, described low friction cylinder pushes described rear panel in the both sides of the described longitudinally rear panel strong point of described rear panel and the described strong point.
As in claim 1 or 2 each as described in device, it is characterized in that the described predetermined bend radius of described surface polishing is within 4 to 6 meters scope.
As in claim 1 or 2 each as described in device, it is characterized in that described flexible member mainly is made up of rubber.
As in claim 1 or 2 each as described in device, it is characterized in that described polishing workpiece is provided with a plurality of perpendicular to described polishing workpiece groove longitudinally on the surface of described relatively surface polishing.
As in claim 1 or 2 each as described in device, it is characterized in that the measurement performance of described magnetic head is a magnetic resistance.
11. the magnetic head finishing method, it can be used to the polishing workpiece that a plurality of magnetic heads are housed is polished, and it comprises:
Make anchor clamps pass through the step of flexible member clamping polishing workpiece;
Move the step of described anchor clamps to the precalculated position that relatively rotates polishing block, described polishing block being provided with constitutes the surface polishing of the piece of predetermined bend radius;
Described anchor clamps are rotatably mounted to plane that is basically perpendicular to described surface polishing and the step that described anchor clamps is dropped to described surface polishing; With
Thereby described polishing workpiece is pressed to the step that described surface polishing polishes described polishing workpiece by described anchor clamps;
Wherein, described anchor clamps can be pressed to described surface polishing at a plurality of points except described rotational support point; With at described polishing step, carry out polished amount by the characteristic of measuring described magnetic head and measure, and control the pressure of the described strong point and described a plurality of points according to described measurement result.
12., it is characterized in that the vergence direction of adjusting described anchor clamps and described surface polishing carries out in the described step of the described polishing workpiece of described anchor clamps clamping as method as described in the claim 11.
13. as in claim 11 or 12 each as described in method, it is characterized in that, at described polishing step, described anchor clamps are done the rotation repeating motion in predetermined angular range, and described anchor clamps are being fixed to the plane that is basically parallel to described surface polishing around the mode that the described strong point rotates.
14., it is characterized in that, be to carry out by low friction cylinder to the described pushing of the described strong point and described a plurality of points as method as described in the claim 13.
15., it is characterized in that described a plurality of pushing points are positioned at the described anchor clamps both sides of the described strong point longitudinally as method as described in the claim 14.
16. as in claim 11 or 12 each as described in method, it is characterized in that the predetermined bend radius of described surface polishing is in 4 to 6 meters scope.
17. as in claim 11 or 12 each as described in method, it is characterized in that described flexible member mainly is made up of rubber.
18. as in claim 11 or 12 each as described in method, it is characterized in that, described polishing workpiece by described flexible member clamping, has been set in advance a plurality of perpendicular to groove longitudinally by described anchor clamps on the surface of the described relatively surface polishing of described polishing workpiece.
19. as in claim 11 or 12 each as described in method, it is characterized in that the measurement characteristics of described magnetic head is a magnetic resistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01101512 CN1366296A (en) | 2001-01-15 | 2001-01-15 | Equipment and method of polishing magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01101512 CN1366296A (en) | 2001-01-15 | 2001-01-15 | Equipment and method of polishing magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1366296A true CN1366296A (en) | 2002-08-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01101512 Pending CN1366296A (en) | 2001-01-15 | 2001-01-15 | Equipment and method of polishing magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1366296A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107604365A (en) * | 2017-10-25 | 2018-01-19 | 佛山杰致信息科技有限公司 | A kind of chemical polishing device |
| CN109968128A (en) * | 2018-12-07 | 2019-07-05 | 贵州雅光电子科技股份有限公司 | A kind of bottom plate grinding device of the AMR sensor convenient for pick-and-place |
-
2001
- 2001-01-15 CN CN 01101512 patent/CN1366296A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107604365A (en) * | 2017-10-25 | 2018-01-19 | 佛山杰致信息科技有限公司 | A kind of chemical polishing device |
| CN109968128A (en) * | 2018-12-07 | 2019-07-05 | 贵州雅光电子科技股份有限公司 | A kind of bottom plate grinding device of the AMR sensor convenient for pick-and-place |
| CN109968128B (en) * | 2018-12-07 | 2024-03-26 | 贵州雅光电子科技股份有限公司 | Bottom plate grinding device for AMR sensor convenient to get and put |
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