CN1357744A - Single-beam laser collimation/alignment measurement technology - Google Patents

Abstract

The present invention belongs to precise laser measurement technology. The present invention is one laser centering instrument utilizing single-beam laser and one position-sensitive detector, and it may be used as laser collimator. One mathematics mold for processing the computer collected data is also proposed.

Description

A kind of single beam laser that utilizes collimates/technology of alignment measurement

The invention belongs to and utilize laser to carry out the Technology of Precision Measurement field.

After laser occurred, people utilized performances such as its good high direction, high monochrome, high-energy that many traditional technology have been carried out revolutionary transformation.

Traditional mechanical axis centering (promptly transferring coaxial) is adopted clock gauge, necessary human eye reading, hand computation; Inconvenient and time-consuming.After laser alignment instrument replaced, available computers was carried out the collection and the processing of data, make measuring process become simply, rapid.

Existing laser alignment instrument mainly contains double beam type, and its basic structure has two kinds.A kind of be semiconductor laser (LD) with position sensitive detector (PSD) as a side (being contained in the box), right-angle prism places respectively on the diaxon for the treatment of centering as the opposing party (it is interior to be contained in another box), by prism laser beam is returned.Another kind of structure is that pair of L D and PSD are respectively arranged on diaxon.Indivedual employing single beam persons have then installed two position sensitive detectors, utilize half-reflecting half mirror that laser beam is divided into two.More than two kinds of not only used elements of structure many, and purposes is single.

The purpose of this invention is to provide a kind of above-mentioned laser alignment instrument that adopts single beam laser, a position sensitive detector PSD, make designs simplification, function enlarges, but and the double as laser collimator, and data model that the data that computing machine is gathered are handled has been proposed.

This instrument is formed (shown in figure l) by semiconductor laser LD, position sensitive detector PSD and be installed mechanism and computing machine C.

LD sends the laser beam K as linear datum, and shines on the PSD.PSD can output facula position signalling (representing) with two-dimensional coordinate; This signal is gathered and is handled by computing machine C.

This instrument is as collimator, and principle is fairly simple; Need only keep the direction of laser beam constant, the position that changes PSD along beam direction gets final product; Key is precision to adjust the position of PSD to collimation.

As centering instrument, need be described as follows in more detail: LD and PSD are respectively installed on the diaxon for the treatment of centering A of main drive shaft shown in Fig. 1 (1) and driven shaft B (2).Intersection point with the axis of the axis of LD pillar and driven shaft B is true origin O, makes rectangular coordinate system O-XYZ (Fig. 1).X-axis makes progress along pillar axes, the Z axle along the B axis to the right, Y-axis is then outside perpendicular to paper.If the intersection point of the axis of the axis of PSD pillar and main drive shaft A is x at the coordinate of this coordinate system ₀, y ₀, z ₀, the angle of diaxon is respectively φ and φ in the projection of vertical plane and surface level.When utilizing native system to measure, need to rotate diaxon (establishing corner is α) synchronously, in the same way, measure facula position (being the coordinate of luminous point on PSD), then can calculate the parameter x of above-mentioned sign diaxon relative position ₀, y ₀, θ and φ, thereby can try to achieve the adjustment amount of two machineries for the treatment of centering by following formula:

X ₁＝-L ₁sinθ-x ₀，

X ₂＝-L ₂sinθ-x ₀，

Y ₁＝-L ₁cosθsinφ-y ₀，

Y ₂=-L ₂Cos θ sin φ-y ₀, X in the formula ₁, X ₂And Y ₁, Y ₂Be respectively the adjustment amount of vertical direction and horizontal direction; L ₁And L ₂As shown in Figure 1.

Hot spot signal of position (being coordinate) on PSD is sent into amplifier and is amplified, and is gathered by the A/D plate, presses the mathematical model of being given by computing machine at last and handles.

Fig. 2 and Fig. 3 are seen in the installation of LD and PSD, adjustment signal.LD carries out pitch regulation and adjusting screw 5 around fulcrum 3 through adjusting screw 4 and carries out deflection and regulate; And PSD moves horizontally and uses screw 7 to carry out vertical moving with screw 6.

Particularly of the present invention: adopt single beam, a position sensitive detector, two combine into one for laser alignment and laser alignment.This is that analogous instrument is not available.

Because this instrument adopts single beam, and only uses a position sensitive detector, therefore must seek new data processing model.According to the characteristics of this apparatus measures, we carry out coordinate transform with matrix method, obtain the coordinate of hot spot on PSD and the relation of diaxon relative position: $X=\left(h\cos \mathrm{\α}{-x}_0\right)[\sin \mathrm{\α}\tan \mathrm{\θ}\tan \mathrm{\φ}+\frac{\cos \mathrm{\α}}{\cos \mathrm{\θ}}]+(h\sin \mathrm{\α}-y_0)\frac{\sin \mathrm{\α}}{\cos \mathrm{\φ}},$ $Y=(h\cos \mathrm{\α}-x_0)[\cos \mathrm{\α}\tan \mathrm{\θ}\tan \mathrm{\φ}+\frac{\sin \mathrm{\α}}{\cos \mathrm{\θ}}]+(h\sin \mathrm{\α}-y_0)\frac{\cos \mathrm{\α}}{\cos \mathrm{\φ}},$ H is that laser beam arrives the distance between the driven shaft axis in the formula, and other parameters as described above.

The present invention adopts single beam laser, a position sensitive detector PSD, makes designs simplification, and function enlarges, and the double as laser collimator has proposed the mathematical model that the data that computing machine is gathered are handled.

Claims (2)

1. one kind is utilized single beam laser to collimate/the centering measuring technique, it is characterized in that semiconductor laser LD and position sensitive detector PSD are respectively installed on the diaxon for the treatment of centering, A of main drive shaft shown in Fig. 1 (1) and driven shaft B (2), intersection point with the axis of the axis of LD pillar and driven shaft B is true origin O, make rectangular coordinate system O-XYZ (Fig. 1), X-axis makes progress along pillar axes, the Z axle along the B axis to the right, Y-axis is then outside perpendicular to paper.If the intersection point of the axis of the axis of PSD pillar and main drive shaft A is x at the coordinate of this coordinate system ₀, y ₀, z ₀The angle of diaxon is respectively θ and φ in the projection of vertical plane and surface level, when utilizing native system to measure, needs to rotate synchronously, in the same way diaxon (establishing corner is α), measure facula position (being the coordinate of luminous point on PSD), then can calculate the parameter x of above-mentioned sign diaxon relative position ₀, y ₀, θ and φ.

2. the single beam laser that utilizes according to claim 1 collimates/the centering measuring technique, it is characterized in that hot spot on PSD coordinate and the data processing model of diaxon relative position relation be: $X=(h\cos \mathrm{\α}-x_0)[\sin \mathrm{\α}tan\mathrm{\θ}\tan \mathrm{\φ}+\frac{\cos \mathrm{\α}}{\cos \mathrm{\θ}}]+(h\sin \mathrm{\α}-y_0)\frac{\sin \mathrm{\α}}{\cos \mathrm{\φ}},$ $Y=(h\cos \mathrm{\α}-x_0)[\cos \mathrm{\α}\tan \mathrm{\θ}\tan \mathrm{\φ}+\frac{\sin \mathrm{\α}}{\cos \mathrm{\θ}}]+(h\sin \mathrm{\α}-y_0)\frac{\cos \mathrm{\α}}{\cos \mathrm{\φ}}$

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