CN2482054Y - Parallel rule device for compensation of error caused by violating Abbe's principle in measuring length - Google Patents

Abstract

The utility model discloses a compensation device using two parallel rulers to compensate the error occurred from inconformity with the Abbe length measurement principle, the compensation device is composed of a bottom seat with a guide rail, a movable work table, a standard ruler, a vernier or reading number aligner matched with the standard ruler, a compensation ruler, and a vernier or reading number aligner matched with the compensation ruler. The standard ruler and the compensation ruler are arranged in parallel. When the single parallel compensation ruler is used, the error occurred from inconformity with Abbe length measurement principle under the one-dimensional condition can be compensated, when the double parallel compensation ruler is used, the error occurred from inconformity with the Abbe length measurement principle under the two-dimensional condition can be compensated, and the measurement accuracy can be improved or the guide rail accuracy can be reduced.

Description

Run counter to the parallel rule compensation system that abbe ' s principle produces error in the linear measure longimetry

The utility model relates to a kind of length-measuring instrument, runs counter to the parallel rule compensation system that abbe ' s principle produces error in specifically a kind of linear measure longimetry.

The principle that should as far as possible observe when abbe ' s principle is the length-measuring instrument design and use.The main points of abbe ' s principle are: " will provide measurement result accurately by the amount of making instrument, measured piece must be arranged on the extended line of standard direction of motion." at this moment, can avoid first-order error.

When running counter to abbe ' s principle, referring to Fig. 7, the gauge line is NN, and the measured piece line is OO, and they are arranged parallel between the two.When the support that the reading alignment clamp is housed from M ₁Move to M along guide rail ₂The time, because the straight line error of MM guide rail, support will have the rotation at angle, measured piece length O around the z axle on the xy plane ₁O ₂With gauge reading N ₁N ₂Between error delta is just arranged _A

O among Fig. 7 ₂N ₀∥ O ₁N ₁

δ _A≈h×

In the formula, h is the distance between NN and the OO

H=0 when observing abbe ' s principle has δ _A=0.Can avoid first-order error this moment.

If h=100mm, guide rail linearity error =60 "

δ _A≈100×3×10 ^-4＝0.03mm

As seen, when guide precision is not high,, very big for the Instrument measuring precision influence if run counter to abbe ' s principle.

The universal tool-measuring microscope that uses does not meet abbe ' s principle at present.For guaranteeing to reach higher precision, very high requirement will be proposed to instrument guide rail rectilinearity.In the time can't satisfying abbe ' s principle, can compensate with the error compensation principle for the error that some surveying instrument produced, Ai Pengsitan (Epstein) principle is exactly the famous example that error that abbe ' s principle causes is run counter in the compensation of utilization optical system.Referring to Fig. 8.

In Fig. 8, slotted line with carve the chi dividing plane not on same straight line, run counter to abbe ' s principle.Owing to reasons such as gap cause tailstock inclination angle, make the gauge head summit move to A by A ₁, cause error delta l ₁Produce Δ l by optical system ₂Compensate,, make Δ l if will eliminate first-order error ₁=Δ l ₂F=f ' then.

For universal tool-measuring microscope, meet abbe ' s principle, the length of the working table movement guide rail that must extend, consequent distortion also will be lost precision.

Therefore universal tool-measuring microscope requires very highly to the rectilinearity of motion guide rail, makes the processing cost height.After the wearing and tearing of use middle guide the guide rail linearity error is increased, measuring accuracy will descend.The similar this situation that does not meet abbe ' s principle is a lot, also has plenty of structural design and does not allow gauge to cause on the extended line of workpiece calibration line.

The purpose of this utility model is exactly the problem that exists at present prior art, provides and runs counter to the parallel rule compensation system that abbe ' s principle produces error in a kind of linear measure longimetry.

To achieve these goals, technical solution adopted in the utility model is: this device comprises the base 6 of a band guide rail, be mounted with movable worktable 2 on the guide rail of base 6, one side of worktable 2 is equipped with gauge 1, and it is parallel with the working table movement direction, one side of base 6 is equipped with vernier or the reading aligner 4 that cooperates with gauge 1, be characterized in: the opposite side of worktable 2 also is equipped with compensation chi 3, the vernier or the reading aligner 5 that match with compensation chi 3 are installed on the opposite side of base 6, compensation chi 3 and gauge 1 arranged parallel, the slotted line of measured workpiece 7 and compensation chi 3, gauge 1 is parallel to each other and settles and be in same plane.

Its other characteristics are: gauge 1 is carved chi or grating chi or laser length measurement system with compensation chi 3 for optical glass.

The another kind of technical scheme that the utility model is taked is: this device comprises the base 6 of a band guide rail, be mounted with movable worktable 2 on the guide rail of base 6, one side of worktable 2 is equipped with gauge 1, and it is parallel with the working table movement direction, one side of base 6 is equipped with vernier or the reading aligner 4 that cooperates with gauge 1, be characterized in: the opposite side of worktable 2 also is equipped with compensation chi 3, the vernier or the reading aligner 5 that match with compensation chi 3 are installed on the opposite side of base 6, compensation chi 3 and gauge 1 arranged parallel, the slotted line of measured workpiece 7 and compensation chi 3, gauge 1 is parallel to each other the plane of settling and forming with gauge 1 and compensation chi 3 at a distance of Z, also be provided with a compensation parallel rule 9 below the worktable 2 in addition, compensation parallel rule 9 and gauge 1 and compensation chi 3 arranged parallel, and with gauge 1 and compensation chi 3 planes at a distance of H _Z, the vernier or the reading aligner 10 that match with compensation parallel rule 9 are fixed on the base 6.

Its other characteristics are: gauge 1, compensation chi 3, compensation parallel rule 9 are carved chi or grating chi or laser length measurement system for optical glass.

The utility model can compensate the caused error of linear measure longimetry of running counter to abbe ' s principle under one dimension or the two-dimensional case respectively owing to adopted single parallel compensation chi or two parallel compensation chi.

Fig. 1 is the utility model one dimension compensation system structural representation front view;

Fig. 2 is the utility model one dimension compensation system structural representation vertical view;

Fig. 3 is the utility model one dimension compensation system structural representation left view;

Fig. 4 is the utility model two dimension compensation system structural representation front view;

Fig. 5 is the utility model two dimension compensation system structural representation vertical view;

Fig. 6 is the utility model two dimension compensation system structural representation left view;

Fig. 7 is the Abbe error schematic diagram;

Fig. 8 is a Ai Pengsitan compensation application drawing;

Fig. 9 is single parallel rule compensation principle figure;

Figure 10 is two parallel rule compensation principle figure.

Below by drawings and Examples the utility model is described in detail.

Embodiment 1: present embodiment is a kind of single parallel rule compensation system, for the compensation of abbe ' s principle under the one-dimensional case.

Referring to Fig. 1～3, Fig. 9, gauge 1 are placed on the motion workbench 2 and are parallel with the working table movement direction.Compensation chi 3 and gauge 1 arranged parallel are on worktable 2.The vernier or the reading aligner 5 of the vernier of gauge 1 or reading aligner 4 and compensation chi 3 are positioned on the base 6.

Adjust workpiece 7 during measurement, the slotted line OO that makes it and gauge 1 are parallel and be in the same plane with gauge 1 and compensation chi 3, and gauge 1 and the distance H that compensates between the chi 3 are given value, can measure apart from x between gauge 1 and the slotted line OO.Measure end face by two of 2 pairs of workpiece 7 of travelling table during measurement and carry out aligning twice.Gauge 1 and compensation chi 3 can be that optical glass is carved chi, also can be grating chi or laser length measurement system.

Single parallel rule compensation principle as shown in Figure 9.

Gauge line NN is parallel with measured line OO, and both form a plane.Coordinate system xyz is set, xy plane and NN line and OO line are in the same plane.Place a parallel compensation chi on N ' N ' line parallel with gauge line NN on the xy plane, form two parallel rules, and establish parallel compensation chi line N ' N ' and be H with gauge line NN distance, gauge line NN and slotted line OO are apart from being x.Guide rail MM also is on the xy plane, and parallel with NN.When support from M ₁MM moves to M along guide rail ₂The time, because support has the rotation at angle around the z axle on the xy plane, if when not having the parallel compensation chi, the gauge reading is N ₁N ₂, O ₁O ₂During measurement error delta=N will be arranged ₂A.As when settling parallel compensation chi N ' N ', when support from M ₁Move to M along guide rail ₂The time, parallel compensation chi reading is N ₁' N ₂', this moment also will have error delta '=N ₂' B.Among Fig. 9, cross O ₂The straight line AB of point is parallel to N ₁N ₁'.

Order: measured piece length O ₁O ₂=L,

Measuring part is O ₁O ₂The time, the gauge reading is N ₁N ₂=l

Parallel compensation chi reading is N ₁' N ₂'=l '

From Fig. 9, have:

$L=\frac{(l+\mathrm{\δ})+(l^{\′}+{\mathrm{\δ}}^{\′})}{2}------\left(1\right)$

δ＝x (2)

δ′＝x′ (3)

$\mathrm{\φ}=\frac{l^{\′}-l}{H}-----\left(4\right)$

X+x '=H (5) utilizes (1)-(5) formula to have through simple the derivation

$L=\frac{x}{H}{l}^{\′}+\frac{x^{\′}}{H}-l------\left(6\right)$

$L=\frac{x}{H}{l}^{\′}+\left(\frac{H-x}{H}\right)l----\left(6^{\′}\right)$

(6) in the formula, x, x ', H is a given value, reads l, l ' value and just can get Workpiece length value L.When the workpiece calibration line is put when middle, x=x ', δ=δ ' full remuneration, at this moment

$L=\frac{1}{2}(l^{\′}+l)------\left(7\right)$

(6) formula is to release during for l '＞l, but the situation when l '＜l and l '=l is suitable for too.

Error analysis

To (6) formula total differential, and bidding object staff and parallel compensation chi manufacturing accuracy and aiming reading accuracy etc. all equate, then Δ l '=Δ l.

$\mathrm{\ΔL}=\frac{\∂L}{\∂x}\mathrm{\Δx}+\frac{\∂L}{\∂H}\mathrm{\ΔH}+(\frac{\∂L}{\∂l^{\′}}+\frac{\∂L}{\∂l})\mathrm{\Δl}---------\left(8\right)$

Wherein: $\frac{\&PartialD;L}{\&PartialD;x}=\frac{1}{H}(l^{\&prime;}-l)=\frac{1}{H}\&CenterDot;H\&CenterDot;\mathrm{\&phi;}=\mathrm{\&phi;}$ $\frac{\&PartialD;L}{\&PartialD;H}=-\frac{x}{H^2}(l^{\&prime;}-l)=-\frac{x}{{\mathrm{<figure-callout\; id="2"\; label="H"\; filenames="Y0124046700122.png,Y0124046700141.png"\; state="\{\{state\}\}">H</figure-callout>}}^2}\&CenterDot;H\&CenterDot;\mathrm{\&phi;}=-\frac{x}{H}\&CenterDot;\mathrm{\&phi;}$ $\frac{\&PartialD;L}{\&PartialD;l^{\&prime;}}+\frac{\&PartialD;L}{\&PartialD;l}=\frac{x}{H}+\frac{H-x}{H}=1$

Above substitution (8) formula has: $\mathrm{\&Delta;L}=\mathrm{\&phi;}\&CenterDot;\mathrm{\&Delta;x}-\frac{x}{H}\&CenterDot;\mathrm{\&phi;}\&CenterDot;\mathrm{\&Delta;H}+\mathrm{\&Delta;l}-------\left(9\right)$

If the guide rail linearity error is:

=1 '=3 * 10 ^-4Arc, Δ H=0.2mm, Δ x=0.2mm,

Then preceding two in (9) formula are $\mathrm{\&phi;}\&CenterDot;\mathrm{\&Delta;x}-\frac{x}{H}\&CenterDot;\mathrm{\&phi;}\&CenterDot;\mathrm{\&Delta;}H=3\&times;{10}^{-4}\&times;0.2-0.5\&times;3\&times;10^{-4}\&times;0.2$

＝3×10 ^-5mm＝0.03μm

ΔL＝Δl＋0.03μm

ΔL≈Δl (10)

This shows that the linear motion guide rail that has only 1 fen for guide precision produces owing to run counter to the caused error of abbe ' s principle hardly with the method for two parallel compensation chis.

Embodiment 2: present embodiment is an a kind of pair of parallel rule compensation system, and for the compensation of running counter to abbe ' s principle under the two-dimensional case, different is also to be provided with a compensation parallel rule 9 in the device in addition with embodiment 1, has constituted two parallel rule compensation systems.Compensation parallel rule 9 and gauge 1 and compensation chi 3 arranged parallel, and with gauge 1 and compensation chi 3 planes at a distance of H ₂, the vernier or the reading aligner 10 that match with compensation parallel rule 9 are fixed on the base 6.Gauge 1, compensation chi 3, compensation parallel rule 9 can be that optical glass is carved chi, also can be grating chi or laser length measurement system.

Referring to Fig. 4～6, Figure 10, two parallel rule compensation systems are slotted line OO and gauges 1 of workpiece 7 when measuring and compensate chi 3 not at grade the time, run counter to a kind of compensation system of abbe ' s principle under the two-dimensional case.

Regulation XYZ coordinate in Fig. 4～6, Building Y mark arrow is vertically in paper.

Slotted line as workpiece 7 is O ' O ', and O ' O ' is parallel with OO, and O ' O ' is x apart from the YZ plane, and O ' O ' is z apart from the XY plane.At this moment, be under two-dimensional case, not meet abbe ' s principle.

(a) is the right view of (b) among Figure 10, this moment measuring piece slotted line O ' O ' not on the XY plane, but be z on distance XY plane, distance Y Z plane is on the position of x.This is the measurement of running counter to abbe ' s principle under a kind of two-dimensional case.With two parallel rule NN, N ' N ' is parallel and apart from XY plane H _ZThe position on place two dimension compensation chi N _ZN _Z, measured piece length is O ₁' O ₂', when support along guide rail MM from M ₁Move to M ₂The time, measuring point is aimed at O respectively ₁' and O ₂', because the linearity error of guide rail, support has ' corner around X-axis on the YZ plane, two dimension compensation this moment chi N _ZN _ZReading is N _Z1N _Z2, error delta is arranged _ZCross O among Figure 10 (a) ₂' straight line CD be parallel to O ₁' N _Z1

Order: N _Z1N _Z2=L _zN _X2C=Δ N _Z2The D=Δ _z

N _x1N _x2＝L O ₁′O ₂′＝L′

Have by Figure 10

Δ＝L′-L (11) ${\mathrm{\&Delta;}}_z=\mathrm{\&Delta;}\&CenterDot;\frac{z+H_z}{z}=(1+\frac{H_z}{z})(L^{\&prime;}-L)------\left(12\right)$ $L^{\&prime;}=\frac{(L+\mathrm{\&Delta;})+(L_z+{\mathrm{\&Delta;}}_z)}{2}-----------\left(13\right)$

By (12)-(14) Shi Kede $L^{\&prime;}=L+(L-L_z)\frac{z}{H_z}-------\left(14\right)$

In the following formula L value by (6) formula according to l, l ' with record x and can get, when recording z value and known constant H _Z, and by two dimension compensation chi N _ZN _ZRead L _ZGet final product to such an extent that survey the measured value L ' of part.To (14) formula total differential, establish two dimension compensation chi N _ZN _ZWith NN and two parallel rules of N ' N ' under the one-dimensional case same precision is arranged, (10) formula of utilization has

ΔL＝ΔL _z ${\mathrm{\&Delta;L}}^{\&prime;}=(\frac{\&PartialD;L^{\&prime;}}{\&PartialD;L}+\frac{\&PartialD;L^{\&prime;}}{\&PartialD;L_z})\mathrm{\&Delta;L}+\frac{\&PartialD;L^{\&prime;}}{\&PartialD;z}\mathrm{\&Delta;z}+\frac{\&PartialD;L^{\&prime;}}{\&PartialD;H_z}\mathrm{\&Delta;}{H}_z------\left(15\right)$ ${\mathrm{\&Delta;L}}^{\&prime;}=\mathrm{\&Delta;L}+{\mathrm{\&phi;}}^{\&prime;}\&CenterDot;\mathrm{\&Delta;z}-\frac{z}{H_z}\&CenterDot;{\mathrm{\&phi;}}^{\&prime;}\&CenterDot;{\mathrm{\&Delta;H}}_z-------\left(16\right)$

If Δ z=Δ H _z=0.2mm

Have again $\frac{z}{H_z}<1$

In '=1 ' time, two can be omitted after (16) formula, and by (10) Shi Kede

ΔL′≈ΔL

ΔL′≈Δl

Can compensate the caused error of the linear measure longimetry of running counter to abbe ' s principle under the one-dimensional case with single parallel rule compensation.

When compensating, can compensate the caused error of the linear measure longimetry of running counter to abbe ' s principle under the two-dimensional case with two parallel rules.

Calculating shows, for low precision line slideway, can make and run counter to the caused error of abbe ' s principle and obtain full remuneration.

Make to measure to meet abbe ' s principle, gauge NN is positioned on the extended line of measured line O ' O ', perhaps make both as far as possible near reducing Abbe error.But under a lot of situations, owing to survey the concrete shape of part, consider that perhaps deformation reason makes the longitudinal size of instrument can not be too big the time, often should not measured line is positioned on the extended line of gauge line, have to take to make the method for gauge line NN and the parallel placement of measured line OO.When both distances are big, because the linearity error of guide rail will make measurement result produce than mistake.

Compensation chi principle of the present utility model can be to any x among Figure 10, and the measurement of the slotted line O ' O ' of z position compensates, thereby can improve measuring accuracy, perhaps can reduce the precision of guide rail.This can regard the popularization to abbe ' s principle as, and the design of length measuring instrument has been proposed a new mentality of designing.

Claims (8)

1, run counter to the parallel rule compensation system that abbe ' s principle produces error in a kind of linear measure longimetry, the base [6] that comprises a band guide rail, be mounted with movable worktable [2] on the guide rail of base [6], one side of worktable [2] is equipped with gauge [1], and it is parallel with the working table movement direction, one side of base [6] is equipped with vernier or the reading aligner [4] that cooperates with gauge [1], it is characterized in that: the opposite side of worktable [2] also is equipped with compensation chi [3], the vernier or the reading aligner [5] that match with compensation chi [3] are installed on the opposite side of base [6], compensation chi [3] and gauge [1] arranged parallel, the slotted line of measured workpiece [7] and compensation chi [3], gauge [1] is parallel to each other and settles and be in same plane.

2, run counter to the parallel rule compensation system that abbe ' s principle produces error in the linear measure longimetry according to claim 1, it is characterized in that: described gauge [1] is carved chi with compensation chi [3] for optical glass.

3, run counter to the parallel rule compensation system that abbe ' s principle produces error in the linear measure longimetry according to claim 1, it is characterized in that: described gauge [1] is the grating chi with compensation chi [3].

4, run counter to the parallel rule compensation system that abbe ' s principle produces error in the linear measure longimetry according to claim 1, it is characterized in that: described parallel rule [1] is the laser length measurement system with compensation chi [3].

5, run counter to the parallel rule compensation system that abbe ' s principle produces error in a kind of linear measure longimetry, the base [6] that comprises a band guide rail, be mounted with movable worktable [2] on the guide rail of base [6], one side of worktable [2] is equipped with gauge [1], and it is parallel with the working table movement direction, one side of base [6] is equipped with vernier or the reading aligner [4] that cooperates with gauge [1], it is characterized in that: the opposite side of worktable [2] also is equipped with compensation chi [3], the vernier or the reading aligner [5] that match with compensation chi [3] are installed on the opposite side of base [6], compensation chi [3] and gauge [1] arranged parallel, the slotted line of measured workpiece [7] and compensation chi [3], gauge [1] plane of settling and forming with gauge [1] and compensation chi [3] Z apart that is parallel to each other, also be provided with a compensation parallel rule [9] below the worktable [2] in addition, compensation parallel rule [9] and gauge [1] and compensation chi [3] arranged parallel, and with gauge [1] and compensation chi [3] plane at a distance of HZ, the vernier or the reading aligner [10] that match with compensation parallel rule [9] are fixed on the base [6].

6, run counter to the parallel rule compensation system that abbe ' s principle produces error in the linear measure longimetry according to claim 5, it is characterized in that: described gauge [1], compensation chi [3], compensation parallel rule [9] are carved chi for optical glass.

7, run counter to the parallel rule compensation system that abbe ' s principle produces error in the linear measure longimetry according to claim 5, it is characterized in that: described gauge [1], compensation chi [3], compensation parallel rule [9] are the grating chi.

8, run counter to the parallel rule compensation system that abbe ' s principle produces error in the linear measure longimetry according to claim 5, it is characterized in that: described gauge [1], compensation chi [3], compensation parallel rule [9] are the laser length measurement system.

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