CN1334748A - 电子束多级加速器驱动的探针装置 - Google Patents

电子束多级加速器驱动的探针装置 Download PDF

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Publication number
CN1334748A
CN1334748A CN99816178A CN99816178A CN1334748A CN 1334748 A CN1334748 A CN 1334748A CN 99816178 A CN99816178 A CN 99816178A CN 99816178 A CN99816178 A CN 99816178A CN 1334748 A CN1334748 A CN 1334748A
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central axis
electron
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CN99816178A
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Chinese (zh)
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M·丁斯默雷
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Photoelectron Corp
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Photoelectron Corp
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
    • A61N5/00—Radiation therapy
    • A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
    • A61N5/1001—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy using radiation sources introduced into or applied onto the body; brachytherapy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H15/00—Methods or devices for acceleration of charged particles not otherwise provided for, e.g. wakefield accelerators

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Optics & Photonics (AREA)
  • Animal Behavior & Ethology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Pathology (AREA)
  • Medical Informatics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biophysics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • X-Ray Techniques (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Radiation-Therapy Devices (AREA)
CN99816178A 1998-12-14 1999-11-30 电子束多级加速器驱动的探针装置 Pending CN1334748A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/211,144 US6111932A (en) 1998-12-14 1998-12-14 Electron beam multistage accelerator
US09/211,144 1998-12-14

Publications (1)

Publication Number Publication Date
CN1334748A true CN1334748A (zh) 2002-02-06

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN99816178A Pending CN1334748A (zh) 1998-12-14 1999-11-30 电子束多级加速器驱动的探针装置

Country Status (8)

Country Link
US (2) US6111932A (https=)
EP (1) EP1146931A4 (https=)
JP (1) JP2002532167A (https=)
KR (1) KR20010101202A (https=)
CN (1) CN1334748A (https=)
AU (1) AU1927400A (https=)
CA (1) CA2356619A1 (https=)
WO (1) WO2000035535A1 (https=)

Cited By (4)

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CN1879187B (zh) * 2003-12-02 2010-04-28 康姆艾德控股公司 模块化的x射线管以及制造这种模块化的x射线管的方法
CN104284507A (zh) * 2013-07-10 2015-01-14 阿戴姆股份公司 线性质子加速器
CN107293342A (zh) * 2016-04-12 2017-10-24 瓦里安医疗系统公司 线性加速器的屏蔽结构
WO2020252750A1 (en) * 2019-06-20 2020-12-24 Shanghai United Imaging Healthcare Co., Ltd. System and method for radiation therapy

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* Cited by examiner, † Cited by third party
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US6195411B1 (en) * 1999-05-13 2001-02-27 Photoelectron Corporation Miniature x-ray source with flexible probe
US6875165B2 (en) 2001-02-22 2005-04-05 Retinalabs, Inc. Method of radiation delivery to the eye
RU2344513C2 (ru) * 2003-12-02 2009-01-20 Комет Холдинг АГ Модульная рентгеновская трубка, а также способ изготовления такой модульной рентгеновской трубки
AU2005214040B2 (en) 2004-02-12 2011-03-31 Neo Vista, Inc. Methods and apparatus for intraocular brachytherapy
US7563222B2 (en) 2004-02-12 2009-07-21 Neovista, Inc. Methods and apparatus for intraocular brachytherapy
US7336764B2 (en) * 2005-10-20 2008-02-26 Agilent Technologies, Inc. Electron beam accelerator and ceramic stage with electrically-conductive layer or coating therefor
BRPI0618677A2 (pt) 2005-11-15 2011-09-06 Neovista Inc métodos e aparelho para braquiterapia intra-ocular
BRPI0913380A2 (pt) 2008-06-04 2015-11-24 Neovista Inc sistema portátil de liberação de radiação para o avanço de um fio de fonte de radiação
BR112014006056A8 (pt) * 2011-09-14 2023-10-03 Prad Res & Development Ltd Gerador de radiação, e ferramenta de perfilagem de poço
CN103140014B (zh) * 2011-11-25 2015-12-09 中国原子能科学研究院 电子加速器的电子枪在线拆装设备
US8953747B2 (en) * 2012-03-28 2015-02-10 Schlumberger Technology Corporation Shielding electrode for an X-ray generator
EP2757571B1 (en) * 2013-01-17 2017-09-20 IMS Nanofabrication AG High-voltage insulation device for charged-particle optical apparatus
JP2015023286A (ja) 2013-07-17 2015-02-02 アイエムエス ナノファブリケーション アーゲー 複数のブランキングアレイを有するパターン画定装置
US9091777B2 (en) 2013-12-18 2015-07-28 Schlumberger Technology Corporation Input voltage modulator for radiation generator
EP2913838B1 (en) 2014-02-28 2018-09-19 IMS Nanofabrication GmbH Compensation of defective beamlets in a charged-particle multi-beam exposure tool
CN106134293B (zh) * 2014-03-27 2019-06-25 株式会社尼康 X射线产生装置、x射线装置以及结构物的制造方法
US9443699B2 (en) 2014-04-25 2016-09-13 Ims Nanofabrication Ag Multi-beam tool for cutting patterns
EP2950325B1 (en) 2014-05-30 2018-11-28 IMS Nanofabrication GmbH Compensation of dose inhomogeneity using overlapping exposure spots
JP6892214B2 (ja) 2014-07-10 2021-06-23 アイエムエス ナノファブリケーション ゲーエムベーハー 畳み込みカーネルを使用する粒子ビーム描画機のカスタマイズ化
US9568907B2 (en) 2014-09-05 2017-02-14 Ims Nanofabrication Ag Correction of short-range dislocations in a multi-beam writer
US9653263B2 (en) 2015-03-17 2017-05-16 Ims Nanofabrication Ag Multi-beam writing of pattern areas of relaxed critical dimension
EP3096342B1 (en) 2015-03-18 2017-09-20 IMS Nanofabrication AG Bi-directional double-pass multi-beam writing
US10410831B2 (en) 2015-05-12 2019-09-10 Ims Nanofabrication Gmbh Multi-beam writing using inclined exposure stripes
US10325756B2 (en) 2016-06-13 2019-06-18 Ims Nanofabrication Gmbh Method for compensating pattern placement errors caused by variation of pattern exposure density in a multi-beam writer
CN106531592B (zh) * 2016-12-29 2018-12-28 清华大学 电子枪以及具有该电子枪的x射线光源与ct设备
US10325757B2 (en) 2017-01-27 2019-06-18 Ims Nanofabrication Gmbh Advanced dose-level quantization of multibeam-writers
US10522329B2 (en) 2017-08-25 2019-12-31 Ims Nanofabrication Gmbh Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus
US11569064B2 (en) 2017-09-18 2023-01-31 Ims Nanofabrication Gmbh Method for irradiating a target using restricted placement grids
US10651010B2 (en) 2018-01-09 2020-05-12 Ims Nanofabrication Gmbh Non-linear dose- and blur-dependent edge placement correction
US10840054B2 (en) 2018-01-30 2020-11-17 Ims Nanofabrication Gmbh Charged-particle source and method for cleaning a charged-particle source using back-sputtering
US11099482B2 (en) 2019-05-03 2021-08-24 Ims Nanofabrication Gmbh Adapting the duration of exposure slots in multi-beam writers
KR102919104B1 (ko) 2020-02-03 2026-01-29 아이엠에스 나노패브릭케이션 게엠베하 멀티―빔 라이터의 블러 변화 보정
KR102922552B1 (ko) 2020-04-24 2026-02-04 아이엠에스 나노패브릭케이션 게엠베하 대전 입자 소스
EP4095882A1 (en) 2021-05-25 2022-11-30 IMS Nanofabrication GmbH Pattern data processing for programmable direct-write apparatus
US12154756B2 (en) 2021-08-12 2024-11-26 Ims Nanofabrication Gmbh Beam pattern device having beam absorber structure
KR102819452B1 (ko) * 2022-12-29 2025-06-13 한국원자력의학원 붕소 중성자 포획치료용 다발식 정전형 가속기
CN115823745B (zh) * 2023-02-15 2023-04-11 中海(山东)净化工程有限公司 一种空气调节系统
EP4557344A1 (en) * 2023-11-15 2025-05-21 Comet AG Electron gun device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2030747C3 (de) * 1970-06-23 1975-01-09 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Beschleunigungsrohr für einen Ladungsträgerstrahl
DE2302938C3 (de) * 1973-01-22 1979-07-12 Polymer-Physik Gmbh & Co Kg, 2844 Lemfoerde Mehrstufiger Beschleuniger für geladene Teilchen mit Hochvakuumisolation
US5124658A (en) * 1988-06-13 1992-06-23 Adler Richard J Nested high voltage generator/particle accelerator
US5153900A (en) 1990-09-05 1992-10-06 Photoelectron Corporation Miniaturized low power x-ray source
US5428658A (en) * 1994-01-21 1995-06-27 Photoelectron Corporation X-ray source with flexible probe
US5077530A (en) * 1990-10-16 1991-12-31 Schlumberger Technology Corporation Low-voltage modulator for circular induction accelerator
US5680431A (en) * 1996-04-10 1997-10-21 Schlumberger Technology Corporation X-ray generator
US6009146A (en) * 1997-06-23 1999-12-28 Adler; Richard J. MeVScan transmission x-ray and x-ray system utilizing a stationary collimator method and apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1879187B (zh) * 2003-12-02 2010-04-28 康姆艾德控股公司 模块化的x射线管以及制造这种模块化的x射线管的方法
CN104284507A (zh) * 2013-07-10 2015-01-14 阿戴姆股份公司 线性质子加速器
CN104284507B (zh) * 2013-07-10 2018-02-13 阿戴姆股份公司 线性质子加速器
CN107293342A (zh) * 2016-04-12 2017-10-24 瓦里安医疗系统公司 线性加速器的屏蔽结构
CN107293342B (zh) * 2016-04-12 2023-01-13 瓦里安医疗系统公司 线性加速器的屏蔽结构
WO2020252750A1 (en) * 2019-06-20 2020-12-24 Shanghai United Imaging Healthcare Co., Ltd. System and method for radiation therapy

Also Published As

Publication number Publication date
WO2000035535A1 (en) 2000-06-22
EP1146931A1 (en) 2001-10-24
WO2000035535B1 (en) 2000-09-08
EP1146931A4 (en) 2009-05-20
KR20010101202A (ko) 2001-11-14
JP2002532167A (ja) 2002-10-02
CA2356619A1 (en) 2000-06-22
US6111932A (en) 2000-08-29
US6198804B1 (en) 2001-03-06
AU1927400A (en) 2000-07-03

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