CN1333943A - 旋转的静电微致动器 - Google Patents

旋转的静电微致动器 Download PDF

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Publication number
CN1333943A
CN1333943A CN 99815672 CN99815672A CN1333943A CN 1333943 A CN1333943 A CN 1333943A CN 99815672 CN99815672 CN 99815672 CN 99815672 A CN99815672 A CN 99815672A CN 1333943 A CN1333943 A CN 1333943A
Authority
CN
China
Prior art keywords
pectination
actuator
driven unit
micro
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 99815672
Other languages
English (en)
Chinese (zh)
Inventor
约汉·H·杰尔曼
约汉·D·格拉德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of CN1333943A publication Critical patent/CN1333943A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/1055—Disposition or mounting of transducers relative to record carriers
    • G11B11/10556—Disposition or mounting of transducers relative to record carriers with provision for moving or switching or masking the transducers in or out of their operative position
    • G11B11/10563—Access of indexed parts
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors

Landscapes

  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN 99815672 1998-12-15 1999-12-15 旋转的静电微致动器 Pending CN1333943A (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US11226598P 1998-12-15 1998-12-15
US11226398P 1998-12-15 1998-12-15
US60/112,265 1998-12-15
US60/112,263 1998-12-15
US12351299P 1999-03-08 1999-03-08
US60/123,512 1999-03-08

Publications (1)

Publication Number Publication Date
CN1333943A true CN1333943A (zh) 2002-01-30

Family

ID=27381131

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 99815672 Pending CN1333943A (zh) 1998-12-15 1999-12-15 旋转的静电微致动器

Country Status (6)

Country Link
EP (1) EP1181765A1 (ja)
JP (1) JP2002542747A (ja)
CN (1) CN1333943A (ja)
AU (1) AU2365500A (ja)
CA (2) CA2354604A1 (ja)
WO (1) WO2000036740A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100411294C (zh) * 2003-09-05 2008-08-13 精工爱普生株式会社 致动器
CN104981725A (zh) * 2012-09-27 2015-10-14 珀莱特公司 用于优化可变形透镜的压电致动器结构的方法
CN106664039A (zh) * 2014-09-11 2017-05-10 索尼公司 静电型装置
CN108602663A (zh) * 2015-11-05 2018-09-28 麦穆斯驱动有限公司 Mems致动器组结构
CN109734044A (zh) * 2019-01-09 2019-05-10 杭州电子科技大学 自驱动的微型冲击锤
CN109761185A (zh) * 2019-01-25 2019-05-17 山东大学 一种基于拉链梳齿的mems驱动器及其工作方法
CN110165927A (zh) * 2018-05-24 2019-08-23 北京纳米能源与系统研究所 一种摩擦电致发动机及图像扫描系统
CN110267908A (zh) * 2016-09-12 2019-09-20 麦斯卓微有限公司 Mems致动系统和方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856632B1 (en) * 1999-09-20 2005-02-15 Iolon, Inc. Widely tunable laser
WO2001043241A2 (en) * 1999-11-29 2001-06-14 Iolon, Inc. Tunable laser with microactuator
US6903486B2 (en) 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
WO2001043268A2 (en) 1999-11-29 2001-06-14 Iolon, Inc. Balanced microdevice and rotary electrostatic microactuator for use therewith
AU2929601A (en) 2000-01-05 2001-07-16 Iolon, Inc. Tiltable electrostatic microactuator and method for using same
FR2841995A1 (fr) * 2002-07-04 2004-01-09 Memscap Attenuateur optique variable
JP2011180534A (ja) * 2010-03-03 2011-09-15 Furukawa Electric Co Ltd:The Ｍｅｍｓ素子、可動式ミラー、および光スイッチ装置
JP5920706B2 (ja) * 2012-02-29 2016-05-18 国立大学法人 香川大学 Ｍｅｍｓ光学部品

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100411294C (zh) * 2003-09-05 2008-08-13 精工爱普生株式会社 致动器
CN104981725A (zh) * 2012-09-27 2015-10-14 珀莱特公司 用于优化可变形透镜的压电致动器结构的方法
CN104981725B (zh) * 2012-09-27 2017-07-25 珀莱特公司 用于优化可变形透镜的压电致动器结构的方法
CN106664039B (zh) * 2014-09-11 2019-09-10 索尼公司 静电型装置
CN106664039A (zh) * 2014-09-11 2017-05-10 索尼公司 静电型装置
CN108602663A (zh) * 2015-11-05 2018-09-28 麦穆斯驱动有限公司 Mems致动器组结构
CN110267908A (zh) * 2016-09-12 2019-09-20 麦斯卓微有限公司 Mems致动系统和方法
CN110267908B (zh) * 2016-09-12 2023-08-22 麦斯卓微电子(南京)有限公司 Mems致动系统和方法
CN110165927A (zh) * 2018-05-24 2019-08-23 北京纳米能源与系统研究所 一种摩擦电致发动机及图像扫描系统
CN110165927B (zh) * 2018-05-24 2020-04-14 北京纳米能源与系统研究所 一种摩擦电致发动机及图像扫描系统
CN109734044A (zh) * 2019-01-09 2019-05-10 杭州电子科技大学 自驱动的微型冲击锤
CN109734044B (zh) * 2019-01-09 2021-08-24 杭州电子科技大学 自驱动的微型冲击锤
CN109761185A (zh) * 2019-01-25 2019-05-17 山东大学 一种基于拉链梳齿的mems驱动器及其工作方法
CN109761185B (zh) * 2019-01-25 2020-09-29 山东大学 一种基于拉链梳齿的mems驱动器及其工作方法

Also Published As

Publication number Publication date
JP2002542747A (ja) 2002-12-10
EP1181765A1 (en) 2002-02-27
WO2000036740A1 (en) 2000-06-22
AU2365500A (en) 2000-07-03
CA2356905A1 (en) 2000-06-22
CA2354604A1 (en) 2000-06-22

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