CA2354604A1 - Rotary electrostatic microactuator - Google Patents

Rotary electrostatic microactuator Download PDF

Info

Publication number
CA2354604A1
CA2354604A1 CA002354604A CA2354604A CA2354604A1 CA 2354604 A1 CA2354604 A1 CA 2354604A1 CA 002354604 A CA002354604 A CA 002354604A CA 2354604 A CA2354604 A CA 2354604A CA 2354604 A1 CA2354604 A1 CA 2354604A1
Authority
CA
Canada
Prior art keywords
comb drive
comb
microactuator
rotation
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002354604A
Other languages
English (en)
French (fr)
Inventor
John D. Grade
John H. Jerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iolon Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2354604A1 publication Critical patent/CA2354604A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002Electrostatic motors
    • H02N1/006Electrostatic motors of the gap-closing type
    • H02N1/008Laterally driven motors, e.g. of the comb-drive type
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/351Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/35Optical coupling means having switching means
    • G02B6/3564Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357Electrostatic force
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/1055Disposition or mounting of transducers relative to record carriers
    • G11B11/10556Disposition or mounting of transducers relative to record carriers with provision for moving or switching or masking the transducers in or out of their operative position
    • G11B11/10563Access of indexed parts
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors

Landscapes

  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CA002354604A 1998-12-15 1999-12-15 Rotary electrostatic microactuator Abandoned CA2354604A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US11226598P 1998-12-15 1998-12-15
US11226398P 1998-12-15 1998-12-15
US60/112,263 1998-12-15
US60/112,265 1998-12-15
US12351299P 1999-03-08 1999-03-08
US60/123,512 1999-03-08
PCT/US1999/029964 WO2000036740A1 (en) 1998-12-15 1999-12-15 Rotary electrostatic microactuator

Publications (1)

Publication Number Publication Date
CA2354604A1 true CA2354604A1 (en) 2000-06-22

Family

ID=27381131

Family Applications (2)

Application Number Title Priority Date Filing Date
CA002354604A Abandoned CA2354604A1 (en) 1998-12-15 1999-12-15 Rotary electrostatic microactuator
CA002356905A Abandoned CA2356905A1 (en) 1998-12-15 1999-12-15 Optical microswitch with rotary electrostatic microactuator

Family Applications After (1)

Application Number Title Priority Date Filing Date
CA002356905A Abandoned CA2356905A1 (en) 1998-12-15 1999-12-15 Optical microswitch with rotary electrostatic microactuator

Country Status (6)

Country Link
EP (1) EP1181765A1 (ja)
JP (1) JP2002542747A (ja)
CN (1) CN1333943A (ja)
AU (1) AU2365500A (ja)
CA (2) CA2354604A1 (ja)
WO (1) WO2000036740A1 (ja)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856632B1 (en) * 1999-09-20 2005-02-15 Iolon, Inc. Widely tunable laser
AU4513601A (en) * 1999-11-29 2001-06-18 Iolon, Inc. Tunable laser with microactuator
US6903486B2 (en) 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
US6469415B2 (en) 1999-11-29 2002-10-22 Iolon, Inc. Balanced microdevice and rotary electrostatic microactuator use therewith
US6333584B1 (en) 2000-01-05 2001-12-25 Iolon, Inc. Tiltable electrostatic microactuator and method for using same
FR2841995A1 (fr) * 2002-07-04 2004-01-09 Memscap Attenuateur optique variable
JP4492252B2 (ja) * 2003-09-05 2010-06-30 セイコーエプソン株式会社 アクチュエータ
JP2011180534A (ja) * 2010-03-03 2011-09-15 Furukawa Electric Co Ltd:The Mems素子、可動式ミラー、および光スイッチ装置
JP5920706B2 (ja) * 2012-02-29 2016-05-18 国立大学法人 香川大学 Mems光学部品
EP2713196A1 (en) * 2012-09-27 2014-04-02 poLight AS Deformable lens having piezoelectric actuators arranged with an interdigitated electrode configuration
JP2016059191A (ja) * 2014-09-11 2016-04-21 ソニー株式会社 静電型デバイス
US10516348B2 (en) * 2015-11-05 2019-12-24 Mems Drive Inc. MEMS actuator package architecture
US11274033B2 (en) * 2016-09-12 2022-03-15 MEMS Drive (Nanjing) Co., Ltd. MEMS actuation systems and methods
CN110165927B (zh) * 2018-05-24 2020-04-14 北京纳米能源与系统研究所 一种摩擦电致发动机及图像扫描系统
CN109734044B (zh) * 2019-01-09 2021-08-24 杭州电子科技大学 自驱动的微型冲击锤
CN109761185B (zh) * 2019-01-25 2020-09-29 山东大学 一种基于拉链梳齿的mems驱动器及其工作方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Also Published As

Publication number Publication date
CA2356905A1 (en) 2000-06-22
JP2002542747A (ja) 2002-12-10
EP1181765A1 (en) 2002-02-27
CN1333943A (zh) 2002-01-30
WO2000036740A1 (en) 2000-06-22
AU2365500A (en) 2000-07-03

Similar Documents

Publication Publication Date Title
US6329737B1 (en) Rotary electrostatic microactuator
CA2354604A1 (en) Rotary electrostatic microactuator
US6469415B2 (en) Balanced microdevice and rotary electrostatic microactuator use therewith
US6301403B1 (en) Optical microswitch with rotary electrostatic microactuator
US7161275B2 (en) Actuator
US6333584B1 (en) Tiltable electrostatic microactuator and method for using same
US20020130561A1 (en) Moving coil motor and implementations in MEMS based optical switches
JP2000314842A (ja) 光超小型機械及び光ビームの制御方法
US6384510B1 (en) Electrostatic microactuator with offset and/or inclined comb drive fingers
US20050264131A1 (en) Rotary-type comb-drive actuator and variable optical attenuator using the same
JP2006171349A (ja) アクチュエータ
US7187483B1 (en) Magnet on frame oscillating device
EP0991175B1 (en) High-performance integrated microactuator, particularly for a hard disc read/write transducer
US7034415B2 (en) Pivoting mirror with improved magnetic drive
US20030080648A1 (en) Microdevice with lever assembly
JP2020504028A (ja) 振動子を有する微小機械部品、微小機械部品の製造方法、および回転軸線を中心とした変位可能な部品の運動を誘起する方法
WO2000062410A1 (en) Electrostatic microactuator with offset and/or inclined comb drive fingers
RU2166832C1 (ru) Многокоординатный пьезодвигатель
RU1799634C (ru) Волновой вибрационный двигатель
JPH0541548A (ja) 圧電アクチユエータ
JPS62126878A (ja) 振動波モ−タ

Legal Events

Date Code Title Description
FZDE Discontinued