CA2354604A1 - Rotary electrostatic microactuator - Google Patents
Rotary electrostatic microactuator Download PDFInfo
- Publication number
- CA2354604A1 CA2354604A1 CA002354604A CA2354604A CA2354604A1 CA 2354604 A1 CA2354604 A1 CA 2354604A1 CA 002354604 A CA002354604 A CA 002354604A CA 2354604 A CA2354604 A CA 2354604A CA 2354604 A1 CA2354604 A1 CA 2354604A1
- Authority
- CA
- Canada
- Prior art keywords
- comb drive
- comb
- microactuator
- rotation
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
- G02B6/357—Electrostatic force
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/1055—Disposition or mounting of transducers relative to record carriers
- G11B11/10556—Disposition or mounting of transducers relative to record carriers with provision for moving or switching or masking the transducers in or out of their operative position
- G11B11/10563—Access of indexed parts
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
- G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
- G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
- G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors
Landscapes
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11226598P | 1998-12-15 | 1998-12-15 | |
US11226398P | 1998-12-15 | 1998-12-15 | |
US60/112,263 | 1998-12-15 | ||
US60/112,265 | 1998-12-15 | ||
US12351299P | 1999-03-08 | 1999-03-08 | |
US60/123,512 | 1999-03-08 | ||
PCT/US1999/029964 WO2000036740A1 (en) | 1998-12-15 | 1999-12-15 | Rotary electrostatic microactuator |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2354604A1 true CA2354604A1 (en) | 2000-06-22 |
Family
ID=27381131
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002354604A Abandoned CA2354604A1 (en) | 1998-12-15 | 1999-12-15 | Rotary electrostatic microactuator |
CA002356905A Abandoned CA2356905A1 (en) | 1998-12-15 | 1999-12-15 | Optical microswitch with rotary electrostatic microactuator |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002356905A Abandoned CA2356905A1 (en) | 1998-12-15 | 1999-12-15 | Optical microswitch with rotary electrostatic microactuator |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1181765A1 (ja) |
JP (1) | JP2002542747A (ja) |
CN (1) | CN1333943A (ja) |
AU (1) | AU2365500A (ja) |
CA (2) | CA2354604A1 (ja) |
WO (1) | WO2000036740A1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6856632B1 (en) * | 1999-09-20 | 2005-02-15 | Iolon, Inc. | Widely tunable laser |
AU4513601A (en) * | 1999-11-29 | 2001-06-18 | Iolon, Inc. | Tunable laser with microactuator |
US6903486B2 (en) | 1999-11-29 | 2005-06-07 | Iolon, Inc. | Balanced microdevice |
US6469415B2 (en) | 1999-11-29 | 2002-10-22 | Iolon, Inc. | Balanced microdevice and rotary electrostatic microactuator use therewith |
US6333584B1 (en) | 2000-01-05 | 2001-12-25 | Iolon, Inc. | Tiltable electrostatic microactuator and method for using same |
FR2841995A1 (fr) * | 2002-07-04 | 2004-01-09 | Memscap | Attenuateur optique variable |
JP4492252B2 (ja) * | 2003-09-05 | 2010-06-30 | セイコーエプソン株式会社 | アクチュエータ |
JP2011180534A (ja) * | 2010-03-03 | 2011-09-15 | Furukawa Electric Co Ltd:The | Mems素子、可動式ミラー、および光スイッチ装置 |
JP5920706B2 (ja) * | 2012-02-29 | 2016-05-18 | 国立大学法人 香川大学 | Mems光学部品 |
EP2713196A1 (en) * | 2012-09-27 | 2014-04-02 | poLight AS | Deformable lens having piezoelectric actuators arranged with an interdigitated electrode configuration |
JP2016059191A (ja) * | 2014-09-11 | 2016-04-21 | ソニー株式会社 | 静電型デバイス |
US10516348B2 (en) * | 2015-11-05 | 2019-12-24 | Mems Drive Inc. | MEMS actuator package architecture |
US11274033B2 (en) * | 2016-09-12 | 2022-03-15 | MEMS Drive (Nanjing) Co., Ltd. | MEMS actuation systems and methods |
CN110165927B (zh) * | 2018-05-24 | 2020-04-14 | 北京纳米能源与系统研究所 | 一种摩擦电致发动机及图像扫描系统 |
CN109734044B (zh) * | 2019-01-09 | 2021-08-24 | 杭州电子科技大学 | 自驱动的微型冲击锤 |
CN109761185B (zh) * | 2019-01-25 | 2020-09-29 | 山东大学 | 一种基于拉链梳齿的mems驱动器及其工作方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5998906A (en) * | 1998-01-13 | 1999-12-07 | Seagate Technology, Inc. | Electrostatic microactuator and method for use thereof |
-
1999
- 1999-12-15 EP EP99967365A patent/EP1181765A1/en not_active Withdrawn
- 1999-12-15 CA CA002354604A patent/CA2354604A1/en not_active Abandoned
- 1999-12-15 AU AU23655/00A patent/AU2365500A/en not_active Abandoned
- 1999-12-15 JP JP2000588889A patent/JP2002542747A/ja active Pending
- 1999-12-15 CA CA002356905A patent/CA2356905A1/en not_active Abandoned
- 1999-12-15 CN CN 99815672 patent/CN1333943A/zh active Pending
- 1999-12-15 WO PCT/US1999/029964 patent/WO2000036740A1/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CA2356905A1 (en) | 2000-06-22 |
JP2002542747A (ja) | 2002-12-10 |
EP1181765A1 (en) | 2002-02-27 |
CN1333943A (zh) | 2002-01-30 |
WO2000036740A1 (en) | 2000-06-22 |
AU2365500A (en) | 2000-07-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6329737B1 (en) | Rotary electrostatic microactuator | |
CA2354604A1 (en) | Rotary electrostatic microactuator | |
US6469415B2 (en) | Balanced microdevice and rotary electrostatic microactuator use therewith | |
US6301403B1 (en) | Optical microswitch with rotary electrostatic microactuator | |
US7161275B2 (en) | Actuator | |
US6333584B1 (en) | Tiltable electrostatic microactuator and method for using same | |
US20020130561A1 (en) | Moving coil motor and implementations in MEMS based optical switches | |
JP2000314842A (ja) | 光超小型機械及び光ビームの制御方法 | |
US6384510B1 (en) | Electrostatic microactuator with offset and/or inclined comb drive fingers | |
US20050264131A1 (en) | Rotary-type comb-drive actuator and variable optical attenuator using the same | |
JP2006171349A (ja) | アクチュエータ | |
US7187483B1 (en) | Magnet on frame oscillating device | |
EP0991175B1 (en) | High-performance integrated microactuator, particularly for a hard disc read/write transducer | |
US7034415B2 (en) | Pivoting mirror with improved magnetic drive | |
US20030080648A1 (en) | Microdevice with lever assembly | |
JP2020504028A (ja) | 振動子を有する微小機械部品、微小機械部品の製造方法、および回転軸線を中心とした変位可能な部品の運動を誘起する方法 | |
WO2000062410A1 (en) | Electrostatic microactuator with offset and/or inclined comb drive fingers | |
RU2166832C1 (ru) | Многокоординатный пьезодвигатель | |
RU1799634C (ru) | Волновой вибрационный двигатель | |
JPH0541548A (ja) | 圧電アクチユエータ | |
JPS62126878A (ja) | 振動波モ−タ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FZDE | Discontinued |