Classifications

• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
  • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
  • H02N1/002—Electrostatic motors
  • H02N1/006—Electrostatic motors of the gap-closing type
  • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/24—Coupling light guides
  • G02B6/26—Optical coupling means
  • G02B6/35—Optical coupling means having switching means
  • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
  • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
  • G02B6/24—Coupling light guides
  • G02B6/26—Optical coupling means
  • G02B6/35—Optical coupling means having switching means
  • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
  • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
  • G02B6/357—Electrostatic force
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
  • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
  • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
  • G11B11/1055—Disposition or mounting of transducers relative to record carriers
  • G11B11/10556—Disposition or mounting of transducers relative to record carriers with provision for moving or switching or masking the transducers in or out of their operative position
  • G11B11/10563—Access of indexed parts
• • G—PHYSICS
  • G11—INFORMATION STORAGE
  • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
  • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
  • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
  • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
  • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
  • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors

Definitions

• FIG. 1 is a plan view of a rotary electrostatic microactuator of the present invention.
• FIG. 2 is a cross-sectional view of the rotary electrostatic microactuator of FIG. 1 taken along the line 2-2 of FIG. 1.
• each spring 113 and 114 opposes linear accelerations along its respective axis and provides the required radial stiffness to resist the tendency of comb drive assemblies 106 and 107 to snap over in any radial direction.
• microactuator 101 has been disclosed for use in a fiber-optic network of a telecommunications system, it should be appreciated that the microactuator 101 , for use with or without a mirror, has other applications.
• microactuator 101 can be used in an optical switch or other component of an optical data storage system of the type described in copending U.S. patent application Serial No.09/135,236 filed August 17, 1998, in optical scanners, optical spectrometers, optical phase compensators or in other structures for rotating components such as optical waveplates, mirrors or diffraction gratings.
• First bar 241 of first arm 232 forms part of second comb drive 212 of first comb drive assembly 203a, while second bar 242 of first arm 232 serves as part of the second comb drive 212 of second comb drive assembly 204a.
• a plurality of comb drive fingers 251 are longitudinally spaced apart along the length of such first bar 241 for forming the comb drive fingers of first comb drive assembly 203a, while a plurality of comb drive fingers 251 are longitudinally spaced apart along the length of second bar 242 of such first arm 232 for forming the comb drive fingers of first comb drive assembly 204a.
• Such electrodes each of which is substantially similar to the electrodes discussed above with respective to microactuator 101, include a ground or common electrode 266 electrically coupled by lead 267 to bracket member 253, at least one drive electrode 271 coupled directly or by means of lead 272 to first comb drive 211 of first comb drive assemblies 203 and one or more drive electrodes 273 coupled directly or by means of lead 274 to first comb drives 211 of second comb drive assemblies 204.
• Several leads 274 extending out ofthe plane of microactuator 201 are shown in phantom lines in FIG. 3. The position of mirror holder 202 can optionally be monitored in the manner discussed above with respect to microactuator 101.
• controller 161 applies a ground potential to electrode 271 coupled to first comb drives 211 of first comb drive assemblies 203 and a fixed maximum potential to electrode 273 coupled to first comb drives 211 of second comb drive assemblies 204.
• a variable potential between the ground potential and the fixed maximum potential is applied by the controller to common electrode 266 coupled to bracket member 253 and hence second comb drives 212.
• the potential applied to common electrode 266 is equal to half of the maximum potential, an equal potential differences exist between electrodes 273 and 266 and between electrodes 271 and 266 resulting in approximately equal forces tending to rotate mirror holder 202 in counterclockwise and clockwise directions and thus resulting in no net rotation ofthe mirror holder 202.
• microactuator 301 has a plurality of three first comb drive assemblies 303a and a plurality of six first comb drive assemblies 303b, and has a plurality of three second comb drive assemblies 304a and a plurality of six second comb drive assemblies 304b.
• First and second comb drive assemblies 303 and 304 are interspersed relative to each other and are symmetrically disposed about axis of rotation 306.
• Each of the first and second comb drive assemblies 303 and 304 has a length ranging from 200 to 2,000 microns and preferably approximately 580 microns.
• Rotary electrostatic microactuator can be of any suitable size and preferably has a diameter ranging from 500 to 5,000 microns and more preferably approximately 2,800 microns.
• An outer radial extremity or periphery 314 resembling a circle extends around the circumference of electrostatic microactuator 301.
• First end portion 338a of each spring 336 and 337 is secured at its end to an attachment member 340 formed from layer 116 and joined to substrate 102 by means of silicon dioxide layer 117.
• the second end portion 338b of each spring member 338 is secured to the first end portion 339a of each spring member 339.
• Spring members 338 and 339 each extend radially outwardly from axis of rotation 306 and preferably have a length approximating the length of first and second comb drive assemblies 303 and 304.
• first end portion 338a can be secured to substrate 102 adjacent ring 302, the first end portion 338a is preferably secured to substrate 102 adjacent outer radial extremity 314.
• microactuator 301 is provided with first and second movable frames 341 and 342 for each spring assembly 313.
• At least one comb drive assembly and preferably at least one first comb drive assembly 303 and at least one second comb drive assembly 304 is disposed between first and second movable frames 341 and 342 and thus between first and second springs 336 and 337.
• one first comb drive assembly 303a and one second comb drive assembly 303b are disposed between first and second movable frames 341 and 342 and, together with first and second frames 341 and 342, are symmetrically disposed about a radial of microactuator 301.
• a plurality of linear comb drive fingers 427 are secured to one side ofthe bar in longitudinally spaced-apart positions along the length ofthe bar.
• Comb drive fingers or comb fingers 427 extend perpendicularly from bar 426 and, as shown, can be of equal length and have a constant width along their length.
• Second comb drives 422 are similar in construction to first comb drives 421 and are each formed from a bar 431 having first and second end portions 431a and 431b.
• a plurality of linear comb fingers 432 shown as being linear, extend from one side ofthe bar 431 in longitudinally spaced-apart positions.
• Comb fingers 432 are substantially identical to comb fingers 427, but are offset relative to the comb fingers 427. When comb drive assemblies 416 and 417 are in their home or rest positions, comb fingers 427 and 432 are not substantially fully interdigitated and, preferably, are partially interdigitated as shown in FIG. 5.
• controller 161 can be utilized to drive the second comb drives 422 of each of first and second micromotors 408 and 409, in the manner described above with respect to micromotors 101, 201 and 301, so that shuttles 436 ofthe micromotors 408 and 409 travel in opposite directions relative to substrate 102 and the axis of rotation 406.
• shuttle 436 ofthe first micromotor 408 is caused to move towards axis 406 and shuttle 436 ofthe second micromotor 409 is caused to move away from axis 406 so as to cause first and second couplers 411 and 412 to pivot the rotatable member 402 in a counterclockwise direction about axis 406.
• first and second micromotors 408 and 409 can be utilized to pivot the rotatable member 402 in a clockwise direction about axis 406.
• the linear deflection ofthe micromotors 408 and 409 closely matches the circumferential motion ofthe rotatable member.
• the linear micromotors 408 and 409 are each capable of +/- 30 microns of linear motion, the rotatable member 402 will rotate slightly less than the arctan (30/R), where R is the effective radius of the rotatable member 402.
• the angular range depends on the effective circumference ofthe rotatable member 402 ; larger angles can be obtained for rotatable members with smaller effective circumferences and smaller angles can be obtained for rotatable members with larger effective circumferences.
• the flexible coupling springs 447 and 448 enhance the translation of the longitudinal movement of shuttles 436 to rotational movement of micromirror 403 and bracket 404.

Landscapes

• Micromachines (AREA)
• Mechanical Light Control Or Optical Switches (AREA)

Priority Applications (4)

Applications Claiming Priority (6)

Publications (1)

Family

ID=27381131

Family Applications (1)

Country Status (6)

Cited By (6)

Families Citing this family (10)

Citations (1)

• 1999
  • 1999-12-15 EP EP99967365A patent/EP1181765A1/en not_active Withdrawn
  • 1999-12-15 AU AU23655/00A patent/AU2365500A/en not_active Abandoned
  • 1999-12-15 CA CA002354604A patent/CA2354604A1/en not_active Abandoned
  • 1999-12-15 WO PCT/US1999/029964 patent/WO2000036740A1/en not_active Application Discontinuation
  • 1999-12-15 JP JP2000588889A patent/JP2002542747A/ja active Pending
  • 1999-12-15 CA CA002356905A patent/CA2356905A1/en not_active Abandoned
  • 1999-12-15 CN CN 99815672 patent/CN1333943A/zh active Pending

Patent Citations (1)

Also Published As

Similar Documents

Legal Events