CN1333943A

CN1333943A - Rotary electrostatic microactuator

Info

Publication number: CN1333943A
Application number: CN 99815672
Authority: CN
Inventors: 约汉·H·杰尔曼; 约汉·D·格拉德
Original assignee: Seagate Technology LLC
Current assignee: Seagate Technology LLC
Priority date: 1998-12-15
Filing date: 1999-12-15
Publication date: 2002-01-30
Also published as: CA2356905A1; CA2354604A1; JP2002542747A; EP1181765A1; WO2000036740A1; AU2365500A

Abstract

A rotary electrostatic microactuator (101) that includes a substantially planar substrate and a rotatable member (103) overlying the substrate for rotation about an axis of rotation (108) extending perpendicular to the planar substrate. First and second spaced-apart springs (113, 114) and a plurality of comb drive assemblies (106, 107) are included. Each of the comb drive assemblies has a first comb drive member (111) mounted on the substrate and a second comb drive member. Each of the first and second comb drive members are provided with arcuate comb drive fingers (137, 127). Each of the first and second springs has a first end portion (131a) secured to the substrate and a second end portion (131b) secured to at least one of the second comb drive members for suspending the second comb drive members and the rotatable member over the substrate. The second comb drive members are movable in a direction of travel about the axis of rotation between a first position in which the comb drive fingers of the first and second comb drive members are not substantially fully interdigitated and a second position in which the comb drive fingers of the first and second comb drive members are substantially fully interdigitated.

Description

The electrostatic microactuator of rotation

Relate generally to electrostatic actuator of the present invention, and relate more specifically to have the rotation electrostatic microactuator of pectination driven unit.

Many rotation electrostatic motors formerly use centre bearings, have various static stator arrangements around motor to cause rotation.Unfortunately, these motors tend to have the friction problem at centre bearing place and the life problems relevant with the wearing and tearing of bearing are arranged.These motors usually play the stepping motor, and rotor is with the motion of increment when stator component is subjected to attracting.Thereby, be difficult to a plate accurately is adjusted to a specific angle with this motor.

Illustrated with a rotating element of flexible element supporting other angle motor.In the arc of a flexible pivot in center, arrange the driving of comb shape interdigital with one heart at one, thereby provide little angular movement around this pivot.For example, referring to, D.A.Hoorsley, et al., " AngularMicropositioner for Disc Drives, Proceedings Of the TenthInternational Workshop on Micro Electro MechanicalSystems; 1997, pp 454-458; L.-S ", Fan, et al., " Batch-Fabricated Area-Efficient Milli-Actuators ", Proceedings 1994 Solid State and ActuatorWorkshop, Hilto Head, pp 38-42; T.Juneau, et al., " Dual AxisOperation of a Micromachined Rate Gyroscope ", Proceedings 1997International Conference on Solid State Sensors and Actuators, V.2, pp883-890; E.H.Klassen, et al., " Silicon Fusion Boding and DeepReactive Ion Etching; A New Technology for Microstuctures, ", The 8thInternational Conference on Solid State Sensors and Actuators; andEurosensos IX, Stockholm, Sweden; June 25-19,1995, pp 556-559; W.C.Tang, et al., " Latrally Driving Polysilicon ResonantMicrostuctures ", Sensors Actuatos 20,1989, pp25-31 (IEEE reprintPP.53-59), and grant Tang, Deng United States Patent (USP) 5,025,346.Unfortunately, described these devices all provide limited angular movement scope.

In general, the purpose of this invention is to provide a kind of rotation electrostatic microactuator that above-mentioned characteristic is arranged, described micro-actuator has the angular movement scope of raising.

Another object of the present invention provides a kind of rotation electrostatic microactuator that above-mentioned characteristic is arranged, and wherein, the medio-lateral instability power in one or more pectination driven unit in this micro-actuator is lowered to minimum.

Another object of the present invention provides a kind of rotation electrostatic microactuator that above-mentioned characteristic is arranged, the plane that this micro-actuator allows the rotation of member to stretch out micro-actuator.

Another object of the present invention provides a kind of rotation electrostatic microactuator that above-mentioned characteristic is arranged, and this micro-actuator can not be circular in shape.

Another object of the present invention provides a kind of rotation electrostatic microactuator that above-mentioned characteristic is arranged, and wherein the rotating shaft of micro-actuator can adjoin one of this micro-actuator and is sidelong and puts.

Be schematically in many examples in the accompanying drawing, income the present invention also constitutes the part of this specification, and accompanying drawing illustrates several enforcement of the present invention, and plays explanation principle of the present invention with this explanation.

Fig. 1 is the plane graph of rotation electrostatic microactuator of the present invention.

Fig. 2 is a rotation electrostatic microactuator shown in Figure 1 cutaway view along the 2-2 line of Fig. 1.

Fig. 3 is the plane graph of another enforcement of rotation electrostatic microactuator of the present invention.

Fig. 4 is the plane graph of another enforcement of rotation electrostatic microactuator of the present invention.

Fig. 5 is the plane graph of another enforcement of rotation electrostatic microactuator of the present invention.

Rotation electrostatic microactuator 101 of the present invention is formed on the substrate 102 on a plane (seeing Fig. 1 and Fig. 2).The circular in other words mirror support 103 of rotating member is overlapping with substrate 102.A plurality of first and second pectination assemblies 106 and 107 are used for mirror support 103 along the first and second opposite angle directions around rotating shaft 108 rotations by substrate 102 carrying, thereby rotating shaft 108 extends through perpendicular to the substrate 102 on the plane center perpendicular to the circular mirror support 103 of Fig. 1.Each first and second pectination driven unit 106 and 107 comprises the first pectination drive member overlapping second pectination drive member of comb actuator 111 and and substrate 102 comb actuator 112 in other words in other words that is installed on the substrate 102.Comprise that in micro-actuator 101 first and second separator springs 113 and 114 are used for supporting or hang second comb actuator 112 and mirror support 103 on substrate 102, and be used for providing radially rigidity, thereby and provide radial rigidity to mirror support 103 to the second movable comb actuator 112.

Substrate 102, such as silicon and is preferably formed with silicon wafer by any suitable made.This substrate has from 200 to 600 microns scope and preferably about 400 microns.Mirror support 103, the first and second pectination driven units 106 and 107 and first and second spring 113 and 114 by one by the second layer of the wafer manufacturing of any suitable material such as silicon in other words top layer 116 be formed on the top of substrate 102.Top wafer 116 has from 10 to 200 microns thickness range and preferably about 85 microns and be fixed on the substrate 102 by any suitable means.Sheet 116 preferably is attached on the substrate 102 by means of the scope of from 0.1 to two micron of thickness and preferably about one micron silicon dioxide layer 117 fusions.Can locate 116 to the top and grind or be polished to desirable thickness.Mirror support 103, the first and second pectination driven units 106 and 107 and first and second spring 113 and 114 form from top wafer 116 by any suitable means.Preferably these structure function deep reactive ion etch (DRIE) technology etch from sheet 116.Mirror support 103 is placed on air gap 118 on the substrate 102, from three to 30 microns of scopes in this gap and preferably be about 15 microns, thereby with the substrate electric insulation.

At least one and preferably a plurality of first pectination driven unit 106 be included in the rotation electrostatic microactuator 101 and be placed on as Fig. 1 a bit shown in rotating shaft 108 on.At least one and preferably a plurality of second pectination driven unit 107 can be included in the rotation electrostatic microactuator 101, are used for driving mirror support in the counterclockwise direction around rotating shaft 108.Each first and second pectination driven unit 106 and 107 all radially stretches out from rotating shaft 108 basically, and, on the whole, thus facing to one about 180 the degree the angle provide one to see that in the plane (referring to Fig. 1) has the micro-actuator 101 of semicircle or fan shape.More specifically, micro-actuator 101 has three first driven unit 106a, 106b and 106c and three second driven unit 107a, 107b and 107c.Rotation micro-actuator 101 has the substrate 119 that the diameter of a semicircle that forms along micro-actuator 101 extends and an outer radius end 121 that is similar to a semi arch is arranged.First end and second end that the radius end has the end opposite with first and second of substrate 119 to adjoin.The first and second pectination driven units 106 and 107 outer radius end define in the radius terminal 121.Mirror support 103 and rotating shaft 108 adjoin substrate 119 and are placed on the semicircle center.

Crossover each other between the first and second pectination driven units 106 and 107, in other words, the second pectination driven unit 107 is placed between every pair of first adjacent pectination driven unit 106.The first pectination driven unit 106 is placed the second pectination driven unit 107 symmetrically about the radius center line of rotation electrostatic microactuator 101, and described radius center line is to pass through rotating shaft 108 and perpendicular to the imaginary line of substrate 219 in the plane of substrate 102.From 200 to 2000 microns approximately of each first and second pectination driven unit 106 and 107 length ranges, and preferably about 580 microns.Rotation micro-actuator 101 is measured from 500 to 5000 microns and more preferably about 1,800 micron of length ranges along substrate 219.

Each the first and second pectination driven unit 106 and 107 first comb actuator 111 are installed on the substrate 102 by silicon dioxide layer 117.So, first comb actuator 111 is immovably fixed on substrate 102.Each first comb actuator 111 has one to be provided with first or say the 122a of inside radius portion and second or the bar 122 that radially extends of the 122b of outer radius portion.Outside 122b reaches the outer radius end 121 of micro-actuator 101.It is interdigital 123 longitudinally spaced apart along the length of bar 122 by eight to 50 microns and preferably about 24 microns distance of separation that a plurality of pectinations drive.Pectination drives interdigital 123 and substantially perpendicularly stretches out and in that each all is an arc in shape from bar 122.More specifically, each pectination interdigital 123 is at the radial dimension that has when protruding from bar 122 with respect to rotating shaft 108 substantial constant.Interdigital 123 length ranges increase on length linearly from about 22 to 102 microns and outside 122b from the inside 122a of bar to bar.Although interdigital 123 can change its width along its length, the interdigital constant width that from two to 12 micrometer ranges is arranged and be preferably six microns of illustrated pectination.The inner 122a of the bar of the first driven unit 106a and 106b and the second driven unit 107a and 107c is connected on the basal component 124, basal component plays to anchor on the substrate 102 to this bar 122 and allows the inner 122a of this bar that width smaller is arranged, and associated comb actuator 123 has corresponding long length.

Second comb actuator 112 separates with air gap 118 and is placed on the substrate 102, thereby can be with respect to substrate 102 and with respect to 111 motions of first comb actuator.Second comb actuator 112 has the similar structure of discussing to top collected works of first comb actuator, and more specifically is formed with from rotating shaft 108 bar 126 that goes out of side radially.Bar 126 has first 126a of inside radius portion and stretch to second 126b of outer radius portion in other words of radius end 121 in other words near paraxial 108.It is interdigital 127 longitudinally spaced apart along the length of bar 12600 that a plurality of pectinations drive, basic similar to pectination interdigital 123.The pectination of arc fork 127 staggers with respect to pectination interdigital 123, thereby around axle 108 during, make pectination interdigital 127 on the second comb dress driver 112 drive interdigital 123 with the pectination of first comb actuator 111 and intersect to static first comb actuator, 111 rotations in second pectination interdigital 112.Each first and second pectination driven unit 106 and 107 is similar to a covering of the fan of a semicircle micro-actuator 101.

Rotation electrostatic microactuator 101 inside include 114 the device that comprises first and second separator spring 113 and are used for movingly second comb actuator being bearing on the substrate 102.First and second hanging elements are preferably approximate first and second pectination driven units 106 of spring 113 and 114 length and 107 length in other words, yet the length of spring is not more than the length that the pectination driven unit can provide.Although each first and second spring 113 and 114 can be formed by a single spring member, first and second springs 113 and 114 each preferably be U font or V font on configuration, from but folding spring.Spring 113 and 114 is the U font basically as shown in the figure.Each spring 113 and 114 is made of the first and second long spring members 131 and 132.First in other words linear springs member 131 the first and second end 131a and 131b are arranged and second in other words linear springs member 132 first and second end 132a and the 132b are arranged.

Each folded spring 113 and 114 first end 131a are fixed to (see figure 2) on the substrate 102 that adjoins rotating shaft 108 at its end by means of silicon dioxide layer 117.The counterweight of spring is placed on the substrate top with 118 compartment of terrains, air gap.Each spring 113 and 114 the second end 131b are fixed on the first end 132a of second spring member 132.The spring member 131 of first and second pencils and 132 each is all radially protruding from rotating shaft 108, and preferably length approximates the length of the first and second pectination driven units 106 and 107.Spring member 131 and 132 500 microns the length that preferably is equal to each other on length and respectively has an appointment, like this, the first end 131a of spring is fixed on the substrate 102 that adjoins the second end 132b.Although the second end 131b of each spring 113 and 114 is fixed on the substrate 102 that adjoins mirror support 103 or adjoin external diameter end 121, first end 131a preferably is fixed on the substrate 102 that adjoins external diameter end 121.First and second spring members 131 and 132 each from one to 10 micron width and preferably about four microns are arranged.Its each full content United States Patent (USP) 5 incorporated by reference in this article, 998, the U.S. Patent Application Serial 09/135 same period of on August 17th, 906 and 1998 filing, first and second thin, the long corrosion protection bars 133,134 of 236 described types extend along every side of each spring member 131 and 132, thus the described rectangular cross section that is used to guarantee uniform etching and guarantees spring member.Corrosion protection bar 133,134 is settled and is parallel to corresponding spring member along the opposition side of spring member and extends.

Each spring 113 and 114 the second end 132b are fixed at least one second comb actuator 112.In this respect, provide first and second movable frameworks framework 141 and 142 in other words in the electrostatic microactuator 101, separate with air gap 118 and be placed on the substrate 102 in rotation.Each framework 141 and 142 be the U font basically on configuration and bar 126 that comprise second comb actuator 112 that adjoins as lateral members.More specifically, the first movable framework 141 comprise the second pectination driven unit 107a bar 126, the first pectination driven unit 106a bar 126 and interconnect the arc component 143 of the outside 126b of such bar.The structurally similar and bar 126 that comprises the second pectination driven unit 107c of the second movable framework 142 is as the bar 126 of lateral members, the first pectination driven unit 106c and connect the arc component 144 of the outside 126b of such bar.The second end 132b of first spring 113 is fixed on the arc component 143, be adjacent to the outside 126b of bar of the second pectination driven unit 107a, and the second end 132b of second spring 114 is fixed on the arc component 144, is adjacent to the outside 126b of bar of the second pectination driven unit 106c.First folded spring 113 places in the first movable framework 142 and second folded spring 114 places in the second movable framework 142 in this way.The inner 126a of the bar of the second pectination driven unit 107a is connected to and plays a part on the mirror support 103 first spring 113 is fixed on the mirror support.Similarly, the inner 126a of the bar of the first pectination driven unit 106c is connected to be used on the mirror support 103 second spring 114 linked mutually and connects mirror support.

The first movable framework 141 and the second movable framework 142 are placed to the midline symmetrically about the footpath of rotation electrostatic microactuator 101.At least one pectination driven unit and preferably thereby at least one first pectination driven unit 106 and at least one second pectination driven unit 107 are placed between the first movable framework 141 and the second movable framework 142 and are placed between first and second springs 113 and 114.More specifically, the first pectination driven unit 106a and 106b and the second pectination driven unit 107a and 107b are placed between framework 141 and 142.The bar 126 of the bar 126 of the second pectination driven unit 107b and the first pectination driven unit 106b back-to-back connects the 3rd movable framework 147 that extends along the center line of the micro-actuator 101 between movable framework 141 and 142 to form preferably.Arc member shuttle 148 in other words is connected opposite end and is connected with the first and second movable frameworks 141 and 142.148 1 ends of the shuttle of rigidity are fixed to the inner 126a of bar of the first pectination driven unit 106a and shuttle 148 another ends are fixed to the inner 126a of the bar of the second pectination driven unit 107a.Thereby the 3rd movable framework 147 is connected to the middle part of rib 148 as one man to be rotated around axle 108 with the first and second movable frameworks 141 and 142.Establishing another arc component 151 in micro-actuator 101 is used for rigidly the second end of first and second springs 113 and 114 being fixed together.Arc component 151 and substrate 102 are overlapping and extend around rotating shaft 108 at least partly.Member 151 is rotated between shuttle 148 and the mirror support 103 and breaks away from mirror support 103 around axle 108 rotations.The suspended structure of micro-actuator 101, just respectively there is the thickness of from 10 to 200 micrometer ranges mirror support 103, second comb actuator 112, first and second springs 131 and the 132 and first and second movable frameworks 141 and 142 and 85 microns thickness are preferably arranged approximately.

As shown in Figure 1, the first and second pectination driven units 106 and 107 second comb actuator 112 can be along directions around rotating shaft 108 walkings, move between the corresponding primary importance and the corresponding second place by means of movable framework 141,142, in described primary importance, the pectination of first and second comb actuators interdigital 123 and 127 does not have complete intersection basically, and the corresponding second place of not showing in the drawings, the pectination of comb actuator interdigital 123 and 127 is complete intersection basically.Although second comb actuator 112 is when its primary importance, the pectination of comb actuator interdigital 123 and 127 can partly be intersected, but in the drawings, pectination interdigital 123 and 127 fully disconnects, described at second comb actuator 112 during in its primary importance, the pectination of comb actuator interdigital 123 and 127 is not intersected.When in its second place, the pectination of second comb actuator 112 interdigital 127 is extended between the corresponding pectination interdigital 123 of first comb actuator 111.Pectination interdigital 127 near but does not preferably engage with the bar 122 of corresponding second comb actuator 11, and pectination interdigital 123 is near still preferably not engaging with the bar 126 of corresponding second comb actuator 112 similarly.The movable framework 141,142 and 147 of rigidity is configured to light weight, with the quality and the inertia of the moveable element that reduces micro-actuator 101, thereby and convenient second comb actuator 112 and mirror support 103 around the rotation of rotating shaft 108.Each movable framework 141,142 and 147 is hollow and the bundle that is formed with a plurality of inside beam 152 in other words basically, is used for providing rigidity to movable framework.

Comprise that in micro-actuator 101 electric installation is used for driving second comb actuator 112 between its first and second position.Such electric installation comprises a controller and voltage generator 161, and described voltage generator electrically is connected to a plurality of electrodes that are located on the substrate 102 by a plurality of electric leads 162.Controller is schematically shown in Figure 1.First grounding electrode 116 and second grounding electrode 167 are formed on the substrate 102 and are connected to respectively on the first end 131a of first and second springs 113 and 114, with second comb actuator 112 and mirror support 103 electrical ground.Electrode 166 and 167 plays the fixation point of spring first end 131a to substrate 102.Can slave controller 161 on first comb actuator 111 of the first pectination driven unit 106 electrode 171 by an outside 122b of bar that is electrically connected to the first pectination driven unit 106a and comb actuator 111 that is electrically connected to the first pectination driven unit 106b and provide a voltage potential by the comb actuator 11 other electrodes 172 that lead 173 is connected to the first pectination driven unit 106c.Electrode 176 is fixed to first comb actuator 111 of the second pectination driven unit 107a by lead 177, and be fixed to the second pectination driven unit 107b, and the outside 122b of bar that electrode 179 is connected to the second pectination driven unit 107c is used for providing a voltage potential to first comb actuator of the second pectination driven unit 107.Metal level 181 with any suitable made of aluminium or other is created on the top surface of top flat 116, is used to produce electrode 166,167,171,172,176 and 179 and produce lead 173,174,177 and 178 (see figure 2)s.First and second pointers 186 stretch out radially outwardly from the outer end of the 3rd movable framework 147 and are used on the scale 187 that is located on the substrate 102 rotating mirror support 103 around the position, angle of axle 108.

The device of closed loop servo control forms be can comprise in the micro-actuator 101, thereby the position of second comb actuator 112 and the position of monitoring oscilloscop support 103 are used to monitor.For example controller 161 can be determined the position of movable comb actuator 112 by the algorithm that is included in the routine in the described controller, the pectination that is used to measure movable comb actuator 112 drive interdigital 127 and the pectination of static comb actuator 111 drive electric capacity between interdigital.Can be sent to micro-actuator by controller 161 from the signal that the drive signal of pectination drive member is separated, be used to measure this capacitance.Such method need not drive entity contact between interdigital in pectination.Flexible ground, be used for the optical system place at micro-actuator 101, can send and measure the luminous energy that is coupled to the part output of output in the fiber, and regulate slave controller 161 and reach maximization to the light energy that the drive signal of micro-actuator 101 can be adjusted to measurement.

In an example job of rotation electrostatic microactuator 101, can for example install in that a micro mirror (not shown) is installed on mirror support 103 outside the plane of micro-actuator by being inserted in the groove 188 that is located in the mirror support 103, be used for 108 rotations of line rotating shaft.Described mirror has a reflecting surface (not shown), and described reflecting surface vertically stretches out from the plane of substrate 102 and the effect of the part of optical switch that can a laser beam of deflection.Optical switch that utilizes micro-actuator 101 with such mirror is particularly suitable for being used in the fibre light guide network of circular order system.

Mirror support 103 can rotate around the first and second opposite directions of rotation 108 walkings by controller 161.When hope during along clockwise direction around the described mirror support of axle 108 rotation, provide a voltage potential by controller to first comb actuator 111 of the first pectination driven unit 106, thereby second comb actuator 112 that causes the first pectination driven unit 106 is inhaled the pectination interdigital 123 to the first such comb actuator 111 statically.This attraction makes pectination drive interdigital 127 and drives interdigital 123 motions and drive interdigital 123 with pectination and intersect to pectination.The amount of this intersection, thereby and mirror support 103 around the amount of axle 108 rotation, the voltage that can provide control by first comb actuator 111 to the first pectination driven unit 106.When hope during in the counterclockwise direction around the described mirror support of axle 108 rotation, can provide a suitable voltage potential to first comb actuator 111 of the second pectination driven unit 107, intersect to cause that corresponding second comb actuator 112 drives interdigital 123 motions and drives interdigital 123 with pectination to pectination.As can be seen, during in its primary importance, second comb actuator 112 of one of the first pectination driven unit 106 or second pectination driven unit 107 is in its second place at another second comb actuator 112 of the second pectination driven unit 107 or the first pectination driven unit 106.

The suitable voltage potential that drives pectination driven unit 106 and 107 can be between 20 to 200 volt range, and preferably between from 60 to 150 volts the scope.When using 120 volts of driving voltages, micro-actuator 101 can have+/-six angles rotations of spending, and in other words, can rotate six degree on clockwise and counterclockwise both direction, rotates 12 degree angles on the whole.The amount of angular deflection depend on amount, the pectination of pectination interdigital 123 and 127 between interdigital the gap and the length and the width of first and second folded spring 113 and 114.

In electrostatic microactuator 101, use the spring 113 and 114 that radially extends to strengthen the stability of micro-actuator and help mirror support 103 bigger angles and rotate.Spring 113 and 114 provides radial rigidity to micro-actuator 101, when pectination interdigital 127 is intersected with pectination interdigital 123, and the lateral movement that this stiffness limits pectination is interdigital.Any side direction mounting board that can between pectination interdigital 123 and 127, take place thereby such radial rigidity prevents.

Spring 113 and 114 folding material are further strengthened the radial rigidity of micro-actuator 101.In this regard, each folding spring 113 and 114 rotation that can both respond second comb actuator 112 is radially shunk, thereby and is suppressed at the axial tension force of formation in the spring.More specifically, in rotary course since the bending of spring member 131 or 132 cause, can cause pectination interdigital 123 and the bad radial contraction of 127 alignment of intersection individually, be compensated by other the radial contraction of spring member.Such compensation is that the symmetrical structure by each spring 113 and 114 reaches; Spring member 131 and 132 roughly equate on the length and spring member 131 to adhere on the substrate 102 be to adhere on attached to corresponding movable framework 141 or 142 roughly the same radial distances with spring member 132.

Spring the second end 131b by when axle 108 rotates by angle symmetrically the combination of the arc component 151 at half place of mirror support 103 further by comb actuator 112 during around rotating shaft 108 rotations the rotation of restraining spring 113 and 114 folding inside radius portion strengthen the radial rigidity of micro-actuator 101.As mentioned above, the first pectination driven unit 106a and 106b and the second pectination driven unit 107b and 107c are placed between the first and second movable frameworks 141 and 142.Arc 151 especially works to the radial rigidity of second comb actuator 112 of these pectination driven units.

Thereby first and second springs are fixed on the substrate 102 at terminal 121 places of outer radius primely and leave rotating shaft 108.Hold easily and additionally play the big relatively electrode 166 and 167 that spring is connected to on-chip effect than approaching axle 108 on 121 endways.In addition, pectination drive rod 126 can further play being connected on the mirror support 103 spring 113 and 114.

With respect to the center line of micro-actuator 101 arrange symmetrically spring 113 and 114 and the angle cut spring from 30 spend to 150 the degree scopes distances and about as shown in the figure 90 the degree, play restriction micro-actuator 101, thereby the outside linear acceleration that applies does not influence the angular deflection of optics basically.More specifically, each spring 113 and 114 antagonism are along the linear acceleration of its corresponding axis and provide the radial rigidity that needs with opposing pectination assembly 106 and 107 tendencies along any radially mounting board.

The thickness effect of the movable structure of micro-actuator 101 is to the rigidity of off-axis mode.Thereby the preferred high device of asperratio, and the thickness of movable structure is basically greater than the width of the minimum part of micro-actuator 101.In this way, rigidity is relatively big outside the plane of described structure, limits moving the structure in the plane of micro-actuator 101 basically.

First and second springs folding 113 and 114 allow mirror support 103 around rotating shaft 108 relative big rotating distances.When mirror support 103 turns clockwise around axle 108, spring member 131 and 132 bending toward each other, and mirror support 103 is when axle 108 is rotated counterclockwise, the opposing each other liftoff bending of spring member 131 and 132.The first and second movable frameworks 141 and 142 sizes are sufficiently large and be provided with enough inner spaces to hold first and second springs 113 and 114 deflections therein therein.Contrast have one or a plurality of length be about folded spring 113 and 114 length but only with the plan actuator of the spring of single such spring member formation, just have one or the micro-actuator of a plurality of folded springs, producing folded springs with two bendable springs members 131 and 132 that are connected has always increased the rotating distance amount that allows.

The semicircle of rotation electrostatic microactuator 101 fan shape in other words allows rotating shaft 108, and for example by the mirror of carrying other parts that can be right after grin lens or fibre light guide system place.

Although disclose the micro-actuator 101 of the fibre light guide network that is used for communication system, be to be understood that micro-actuator 101 has other application, no matter have or do not have mirror.For example, micro-actuator 101 can be used for other parts of optical switch or optical data storage system, the U.S. Patent Application Serial 09/135 same period of on August 17th, 1998 filing for example, parts in the sort of optical data storage system of 236 explanations, and be used for other structure that photoscanner, spectrometer, light phase compensator or the rotating parts such as light wave plate, mirror or diffraction grating are used.

Can provide the pectination that has along intersecting to drive other interdigital fan-shaped electrostatic microactuator around the angular direction that rotating shaft moves.Rotation electrostatic microactuator 201 shown in Fig. 3 has similitude with micro-actuator 101, and with same label declaration micro-actuator 101 and 201 similar parts.Mirror support 202 is overlapping with substrate 102 in other words for a rotating member.A plurality of first and second pectination assemblies 203 and 417 are used for mirror support 202 is rotated around rotating shaft 206 along the first and second opposite angle directions by substrate 102 carryings, and rotating shaft 206 extends through perpendicular to the substrate 102 on plane.Described axle is shown a point in Fig. 3, and marks with reference line 206.The first and second pectination driven units 203 and 204 each comprise the first pectination drive member overlapping second pectination drive member of comb actuator 211 and and substrate 102 comb actuator 212 in other words in other words that is installed on the substrate 102.Comprise that in micro-actuator 201 first and second separator springs 213 and 214 are used for supporting or hang second comb actuator 212 and mirror support 202 on substrate 102, and be used for providing radial rigidity to the second movable comb actuator 212 with to mirror support 202.Mirror support 202, the first and second pectination driven units 203 and 204 and first and second springs 213 and 214 by such as above any suitable means micro-actuator 101 is discussed from top layer 116 formation.Mirror support 202, second comb actuator 212 and first and second separator springs 213 and 214 at interval an air gap 188 are placed on the substrate 102, and to the same parts of micro-actuator 101 is discussed similar.

At least one and preferably a plurality of first pectination driven unit 203 are included in the rotation electrostatic microactuator 201 and are placed on the rotating shaft 206, are used for driving mirror support along clockwise direction around rotating shaft 206.At least one and preferably a plurality of second pectination driven unit 204 can be included in the rotation electrostatic microactuator 201, are used for driving mirror support in the counterclockwise direction around rotating shaft 206.The first and second pectination driven units 203 and 204 each all radially stretch out basically from rotating shaft 108, and, thereby assembly 203 and 204 on the whole facing to one about 180 the degree the angle provide a semicircle or fan-shaped shape to micro-actuator 201.More specifically, micro-actuator 201 has four first driven unit 203a, 203b, 203c and 203d and four second driven unit 204a, 204b, 204c and 204d.The first pectination driven unit 203 is inserted between the second pectination driven unit 204.Rotation micro-actuator 201 identical with substrate 119 a basically substrate 219 is arranged and have one basically with outer terminal 121 identical outer radius ends 221.203 pairs second pectination driven units 204 of the first pectination driven unit are about the center line symmetry of rotation electrostatic microactuator 201, and described center line is promptly at the imaginary line of substrate 102 center line rotating shafts 206 perpendicular to substrate 219.Mirror support 202 and rotating shaft 206 are placed on the adjacent substrate 219 in the center of adjoining micro-actuator 201.The scope that rotation micro-actuator length is measured at 500 to 5000 microns along substrate 219, and preferably about 2000 microns.

Each the first and second pectination driven unit 203 and 204 first comb actuator 211 are by being installed on the substrate 101 with above the same manner that first comb actuator 111 is discussed.Each first comb actuator 211 have one be provided with first or the 226a of inside radius portion and one be provided with second or the bar 226 that radially extends of the 226b of outer radius portion.The outside 226b of each first comb actuator 211 reaches outer radius end 221.A plurality of pectinations drive interdigital longitudinally spaced apart along the length of bar 226 with eight to 50 microns and preferably about 35 microns distance of separation.Pectination drive interdigital 227 substantially perpendicularly from bar 226 stretch out and, identical with pectination interdigital 123, in that each all is an arc in shape.Interdigital 227 length ranges increase on length linearly from about 25 to 1902 microns and outside 226b from the inside 226a of bar to bar.Each pectination drives interdigital 227a a close end 227a and a distal portion 227b.The width range that close end 227 is from four to 20 microns and be preferably 10 microns.Distal portion 227b has the width that is not more than close end 227a width.And, from two to 12 microns scope and be preferably about six microns more specifically.

Second comb actuator 212 and mirror support 202 are movable or say the part of rotatable framework 231, framework 231 separates with air gap 118 and is placed on the substrate 102, thereby opens with the substrate electric insulation and can be with respect to substrate 102 and 211 motions of first comb actuator.Framework 231 comprises the first arm 232, second arm 233, the 3rd arm 236 and the 4th arm 237, they each all stretch out from rotating shaft 206 along radially direction basically.First settles with the center line of 237 also relative micro-actuators 101 symmetrically with the 4th arm 232, and second goes out mutually with the 3rd arm 233 and 236 this center line is settled symmetrically.The first and the 4th arm 232 and 237 each all be the U font on configuration and form from first and second bars 241 and 242.First bar 241 has first 241a of inside radius portion and stretch to second 241b of outer radius portion in other words of radius end 221 in other words near axle 206.Similarly, second bar 242 has first 242a of inside radius portion and second 242b of outer radius portion in other words in other words.241b of outer radius portion and 242b radial extremity 221 places outside link together by a basal component 243.The 241a of inside radius portion of first bar 241 is connected to mirror support 202, and the 242a of inside radius portion of second bar 242 extends near mirror support 202 places freely.The second and the 3rd arm 233 and 236 portion within it is connected to mirror support 202.

First bar 241 of the first arm 232 forms the part of second comb actuator 212 of the first pectination driven unit 203a, and second bar, 242 shapes of the first arm 232 are played the part of second comb actuator 212 of the second pectination driven unit 204a.It is interdigital 251 longitudinally spaced apart along the length of first bar 241 that a plurality of pectinations drive, interdigital with the pectination that forms the first pectination driven unit 203a, and that a plurality of pectinations drive is interdigital 251 longitudinally spaced apart along the length of second bar 242 of this first arm 232, interdigital with the pectination that forms the first pectination driven unit 204a.Pectination drive interdigital 251 basically to pectination drive interdigital 227 similar, and have be connected to corresponding bar 241 or 242 first or say close end 251a and from this close end 251a stretch out second or say distal portion 251b.The pectination of arc interdigital 251 staggers with respect to pectination interdigital 227, can drive interdigital 227 with pectination and intersects thereby make pectination drive interdigital 251.First bar 241 of the 4th arm 237 plays the part of second comb actuator 212 of pectination driven unit 204d similarly, and second bar 242 of the 4th arm 237 plays the part of second comb actuator 212 of the first pectination driven unit 203d.Pectination drives interdigital 251 first and second bars 241 and 242 from the 4th arm and stretches out.

The second and the 3rd arm 233 and 236 is included in second comb actuator 212 of the first pectination driven unit 203b and 203c and the second pectination driven unit 204b and 204c.Second arm 233 has one first or say the 236a of inside radius portion and the 236b of outer radius portion, the 3rd arm 2336 is structurally similar to second arm 233, have one be connected to mirror support 202 first or say the 233a of inside radius portion and one adjoin outer radius end 211 second or say the 233b of outer radius portion.It is interdigital 251 longitudinally spaced apart along the length of second arm, 233 1 sides that more than first pectination drives, forming second comb actuator of the second pectination driven unit 204b, and that more than second pectination drives is interdigital 251 longitudinally spaced apart along the length of second arm, 233 opposite sides; To form second comb actuator of the first pectination driven unit 203b.Similarly, it is interdigital 251 longitudinally spaced apart along the length of the 3rd arm 236 1 sides that more than first pectination drives, to form second comb actuator of the second pectination driven unit 203c, and that more than second pectination drives is interdigital 251 longitudinally spaced apart along the length of the 3rd arm 236 opposite sides, to form second comb actuator 212 of the first pectination driven unit 204c.Second can be alternatively be connected with 236a place in corresponding inside radius portion 233 by connecting rod 252 with the 3rd arm 233 and 236, with the rigidity of reinforcement arm 233 and 236.

Rotation electrostatic microactuator 201 inside include 214 the device that comprises first and second separator spring 213 and are used for movingly second comb actuator being bearing on the substrate 102.Spring 213 and 214 is placed and the length of preferably approximate at least some the first and second pectination driven units 203 of length and 204 symmetrically for the center line of micro-actuator 201.The substrate of micro-actuator 201 comprises set support element 253 in other words, and it has a part to intersect rotating shaft 206 and play a part first and second springs 213 and 214 are fixed on the substrate 102.First and second springs 213 and 214 each all form by a single pencil spring member 256, pencil spring member 256 has one to be connected to first on the support element 253 or to say that inside radius end 256a and is connected on the basal component 243 of corresponding the first arm 232 or the 4th arm 237 second or say outer radius end 256b at its end.More specifically, first spring 213 upwards reaches the center of the first arm 232 from support element 253, to be attached to the center of basal component 243.The inner end 256a of spring member 256 is connected to support element 253 at rotating shaft 206 places.The width of spring member 256 is one to 10 micron scope and preferably about four microns.Each the first and the 4th arm 232 and 237 plays a part the outer end 256b of first and second spring members 213 and 214 is fixed on the mirror support 202.

At least one pectination driven unit and preferably at least one first pectination driven unit 203 and at least one second pectination driven unit 204 are placed between spring 213 and 214.More specifically, the first pectination driven unit 203b and the 203c second pectination driven unit 204b and wherein each of 204c are all partly formed by the second and the 3rd arm 233 and 236, are being placed on the angle between first and second spring members 213 and 214.Other first pectination assembly 203a and the 4th pectination assembly 204d arrange symmetrically about the center line of micro-actuator 210 each other, are being placed on the angle between first and second spring members 213 and 214.

At shown in Figure 3 its first or when saying resting position first and second comb actuators 211 and 212 pectination interdigital do not have basically complete intersection.Although the pectination that broad sense that term " does not have complete intersection " does not basically have in the time of must being enough to cover its resting position to intersect drives interdigital, it is interdigital 123,127 that the pectination of micro-actuator 101 as shown in figs. 1 and 2 drives, and this term comprises that also the pectination of partly intersecting during in its resting position when them drives interdigital.In micro-actuator 201, comb actuator 211 and 212 pectination when its resting position drives interdigital distal portion 227b and 251b and intersects basically.

At least one, and all first and second pectination driven units 203 and 204 are not the center with the edge from rotating shaft 206 outwardly directed radiuses in diagram.In this regard, the first and second pectination driven units 203 and 204 each the far-ends 261 of pectination interdigital 227 all do not align with the imaginary line that rotating shaft 206 intersects along one, and spaced apart with axle 206 in this wise.Similarly, the far-end 262 of pectination interdigital 251 does not all align with the imaginary line that rotating shaft 206 intersects along one, and spaced apart with axle 206 in this wise.Thereby each first and second pectination driven unit 203 and 204 are formed a semicircular sector of opening partially for the radius of such semicircle.

As shown in Figure 3, the first and second pectination driven units 203 and 204 second comb actuator 212 each can be along a direction around rotating shaft 206 walkings, between the corresponding primary importance and the corresponding second place, move, in described primary importance, the pectination of first and second comb actuators interdigital 227 and 251 does not have complete intersection basically, and the corresponding second place of not showing in the drawings, the pectination of comb actuator interdigital 227 and 251 is complete intersection basically, as the front pectination of micro-actuator 101 interdigital 123 and 127 is discussed.Second comb actuator 212 of second comb actuator 212 of the second pectination driven unit 204, first pectination driven unit 203 when its primary importance its primary importance and, second comb actuator 212 of second comb actuator 212 of assembly 203 assembly 204 when its primary importance is in its second place similarly.

In micro-actuator 201, comprise electric installation, be used between its first and second position, driving second comb actuator 212.Such electric installation can comprise a controller and voltage generator 161, and described voltage generator electrically is connected to a plurality of electrodes that are located on the substrate 102 by a plurality of electric leads 162.In order to simplify, controller 161 and lead 162 are not shown among Fig. 3.Such electrode, wherein each is similar to top electrode to 101 discussion of note of the ancient Chinese actuator basically, comprise: one is connected electrically to support element 253, ground connection or public electrode 266 and at least one by lead 267 and directly or by lead 272 is connected to the drive electrode 271 of first comb actuator 211 of the first pectination driven unit 203, and one or more directly or be connected to the drive electrode 273 of first comb actuator 211 of the second pectination driven unit 204 by lead 274.Several leads 274 that stretch out from micro-actuator 201 are shown in broken lines among Fig. 3.The position of mirror support 202 can the alternatively above mode of discussing in the face of micro-actuator 101 monitor.

At work, rotation electrostatic microactuator 201 regards to the identical mode that rotation electrostatic actuator 101 discussed more than basically and uses.When as part of the fibre light guide network of communication system, a micro mirror (not shown) can be installed on mirror support 202, for example install by being inserted in the groove 276 that is located in the mirror support 202, be used for rotating around rotating shaft 206.Described mirror stretches out from the plane of micro-actuator 201 and a reflecting surface (not shown) is arranged, and described reflecting surface preferably intersects with rotating shaft 206.The groove 276 that is used to hold mirror needn't be placed on rotating shaft 206 to the center.

As discussed above, controller 161 to one of the first and second pectination driven units 203 or 204 comb actuator 211 voltage potential is provided.Drive electrode 271 and 273 can be between 20 to 250 volt range in order to the suitable voltage potential of revolving mirror support 202, and preferably between from 60 to 180 volts the scope.Micro-actuator 201 can rotate with the angles of+/-six degree, just when using such voltage, can rotate six degree on clockwise and counterclockwise both direction, rotates 12 on the whole and spends angles.

Another electricity at electrostatic microactuator 201 drives in the configuration, controller 161 applies earth potential to the electrode 271 of first comb actuator 211 that is connected to the first pectination driven unit 203, and applies a fixing maximum potential to the electrode 273 of first comb actuator 211 that is connected to the second pectination driven unit 204.Variable current potential between earth potential and fixing maximum potential is applied to by controller and is connected to support, thereby also is connected to the public electrode 266 of second comb actuator 212.To equal maximum potential be to exist equal potential difference to produce the power that equates between the electrode 273 and 266 and between the electrode 271 and 266 when being applied to current potential on the public electrode 266, tend in the counterclockwise direction to rotate mirror support 202, thereby and can not get the clean rotation of mirror support 202 with clockwise direction.Along with being applied to driving voltage on the public electrode 266 when this half value changes, the clean power of an increase is provided, it causes the clean rotation of mirror support 202 from its resting position.Current potential on being applied to public electrode 266 be ground or fixing peak both one of the time one be substantially equal to accordingly high driving voltage be applied to electrode 273 or 271 both one of, and the maximum, force of the actuating force that takes place during public electrode 266 ground connection just has been applied in, thereby causes mirror support 202 rotations.The similar voltage of discussing the front can be applied and similar rotation can be reached.The driving configuration of this accommodation is only required single variable potential source and is changed the position of mirror support 202 around its resting position reposefully by only changing a single source.Thereby drive the cost that configuration can reduce the quantity of the electric parts in the controller 161 and reduce actuator system with this.

Radially thereby the spring 213 of Yan Shening and 214 also provides radial rigidity to second comb actuator 212 to rotatable framework 231.The inner end 256a of spring member 256 preferably rotating shaft 206 and the substrate intersection point be connected on the substrate 102.The outer end 256b of spring member 2213 or directly, or be connected to second comb actuator 212 by the rotatable framework 231 that adjoins outer radius end 221.Spring 213 and 214 is spent to the angular region of 90 degree spaced apart with restriction micro-actuator 201 with about 30, resisted linear acceleration in the face of the mode that micro-actuator 101 is discussed in the past.Thereby Zhe Die spring 213 and 214 need not be used for deflection and distribute more area to pectination driven unit 203 and 204 by less surface area than folded spring previously discussed

The first and second pectination driven units 203 are relative with 204 to be encapsulated in the rotation electrostatic microactuator 201 densely.Such packed part ground is because the character that staggers of pectination driven unit 203 and 204 just can be accomplished.As previously discussed pectination drive interdigital 227 and 251 far-end 261 and 262 and the footpath of each first and second pectination driven unit 203 and 204 do not intersect to the midline with rotating shaft 206.This pectination driven unit 203 and 204 skew also allow the 226a of inside radius portion of bar 226 that bigger width is arranged, and thereby the stability of raising is arranged, and allow pectination at the interior near-end of each first and second pectination driven unit 203 and 204 drive interdigital 227 and 251 can be on the length than on comb actuator density but have the pectination driven unit 203 that radially aligns with rotating shaft 206 and 204 micro-actuator greatly.Thereby on electrostatic microactuator 201, may obtain relatively bigger revolving force and moment.

Pectination drives interdigital 227 and 251 configuration and also allows revolving force relatively bigger in the micro-actuator 201.In this regard, pectination drives interdigital 227 and 251 and partly intersects when they are in resting position shown in Figure 3.Because can be by the restriction of existing etching technique at the interval that adjacent pectination drives between interdigital 227 and 251, it is little that pectination drives the width of interdigital 227 and 251 far-end 227b and 251b.The interdigital near-end 227a of pectination of far-end 251b first comb actuator 211 when move in its 3rd position intersects at second comb actuator 211, and reduce in the gap in other words at the interval that adjacent pectination drives between interdigital 227 and 251, thereby strengthened the electrostatic attraction between first and second comb actuators 211 and 212.

The invention broad sense that is to be understood that this paper must be enough to cover and is similar to fan-shaped on the Any shape or is similar to semicircular rotation electrostatic actuator, perhaps have facing to spending angle or following, for example the rotation electrostatic actuators of the pectination driven unit of an angle of 90 degrees about rotating shaft 180.Such configuration allow rotating shaft place the substrate or the end of contiguous micro-actuator.Such rotation electrostatic microactuator preferably includes along the arc pectination of extending about an angular direction of rotating shaft interdigital.The present invention also broad sense must be enough to cover the electrostatic microactuator of the pencil spring on any intersection point with the rotating shaft that is fixed to substrate and substrate.Each such spring can be made of single pencil member, and also can be folded on configuration is U-shaped or V-arrangement.

But can be provided on the figure is not fan-shaped or semicircle rotation electrostatic microactuator within the scope of the invention.For example, on figure shown in Fig. 4 be circular rotation electrostatic microactuator 301.Micro-actuator 301 has similitude with micro-actuator 201 and micro-actuator 201, and with same label declaration micro-actuator 101,201 and 301 similar parts.It is 302 overlapping with substrate 102 that rotating member encircles in other words.A plurality of first and second pectination assemblies 303 and 304 are used for ring 302 is rotated around rotating shaft 306 along the first and second opposite angle directions by substrate 102 carryings, and rotating shaft 306 extends through the center of ring 302 perpendicular to the substrate 102 on plane.Each first and second pectination driven unit 303 and 304 comprises that one is installed in the first pectination drive member on the substrate 102 comb actuator 311 and one overlap second pectination drive member comb actuator 312 in other words on the substrate 102 in other words.Around rotating shaft 306 arrange circumferentially a plurality of spring assemblies 312 be used for supporting or hang second comb actuator 312 and ring 302 on substrate 102, and be used for to second comb actuator 312 and ring 302 rigidity that provide radially.Spring assembly 313, pectination driven unit 303 and 304 and encircle 302 and formed by top layer 116 preferably use the DRIE technology to form.Spring assembly 313, second comb actuator 312 and encircle 302 and separate air gap 118 and be placed on substrate 102 tops.Such structural thickness and front are similar for the thickness of the similar structures that micro-actuator 101 was discussed.

At least one and preferably a plurality of first pectination driven unit 303 are included in the rotation electrostatic microactuator 301 and around rotating shaft 306 and place, and are used for along clockwise direction around rotating shaft 306 driving rings 302.At least one and preferably a plurality of second pectination driven unit 304 can be included in the rotation electrostatic microactuator 301, are used for around rotating shaft 306 driving ring 302 in the counterclockwise direction.The first and second pectination driven units 303 and 304 each all radially stretch out basically from rotating shaft 306, and, on the whole,, thereby provide one its round-shaped rotation micro-actuator 303 is arranged facing to one about 360 angle.More specifically, micro-actuator 301 has plural three first pectination driven unit 303a and six first plural pectination driven unit 303b, and three the second pectination driven unit 304a and six the second plural pectination driven unit 304b of plural number are arranged.The first and second pectination driven units 303 and 304 intersect toward each other and arrange around rotating shaft 306 symmetrically.Each first and second pectination driven unit 303 and 304 length are from 200 to 2000 microns scope and preferably about 580 microns.The rotation electrostatic microactuator can be any suitable size and from 500 to 5000 microns and more preferably about 2800 microns of diameter ranges preferably.Terminal or the circle of periphery 314 compositions of outer radius around the circumferential extension of electrostatic microactuator 301.

Each the first and second pectination driven unit 303 and 304 each first comb actuator 311 are installed on the substrate 102 rigidly by silicon dioxide layer 117.Each first comb actuator 311 of the first driven unit 303a and the second pectination assembly 304a has a bar 316 that radially extends, and bar 316 is provided with first or the 316a of inside radius portion and second or the 316b of outer radius portion.The shared bars 317 that radially extend of first comb actuator 311 of the first adjacent driven unit 303b and the second pectination assembly 304b, bar 317 are provided with first or the 317a of inside radius portion and second or the 317b of outer radius portion.Outside 316b and 317b reach the outer radius end 314 of micro-actuator 301.Bar 316 and 317 is along with they are radially outward stretched and increase width, thereby thereby increases the rigidity that described bar is fixed to the area on the substrate 102 and increases these bars.It is interdigital 321 longitudinally spaced apart along bar 316 length with any distance of separation of discussing about pectination interdigital 123 such as the front that a plurality of pectination of discussing about micro-actuator 101 to the front basically interdigital 123 similar pectinations drive.It is interdigital 321 longitudinally spaced apart along the length of every side of bar 317 with similar distance of separation that a plurality of pectinations drive.It is interdigital 321 similar on size and dimension to pectination interdigital 123 that pectination drives, and the outside from the inside of bar to bar increases on length linearly.Adjacent comb actuator 311 joint use poles 317 have been cancelled otherwise will be located at space between the bar that separates of these adjacent comb drivers 311.Space under saving can be incorporated into pectination and drives in interdigital 321 the length and go.

Second comb actuator 312 and separate with air gap 118 is placed on the substrate 102, thereby can be with respect to substrate 102 and 311 motions of first comb actuator.The structural similarity of the structure of second comb actuator 312 and first comb actuator 311.More specifically, second comb actuator 312 of the first driven unit 303a and the second pectination assembly 304a each all be formed with the bar 326 that radially stretches out from rotating shaft 306.Bar 326 has first 326a of inside radius portion and stretch to second 326b of outer radius portion in other words of radius end 314 in other words near axle 306.It is interdigital 327 that a plurality of pectinations drive, similar to pectination interdigital 321 basically, and the length that drives interdigital bar 326 along each second such pectination is longitudinally spaced apart.Each all has the bar 328 that radially stretches out from rotating shaft 306 second comb actuator 312 of the first driven unit 303b and the second pectination assembly 304b, and first 328a of inside radius portion and stretch to second 328b of outer radius portion in other words of radius end 314 in other words that is connected to ring 302 is arranged.Back-to-back second comb actuator, the 312 shared single bars 328 of the first driven unit 303b and the second pectination assembly 304b.A plurality of pectinations drive interdigital 327, and to drive the length of interdigital bar 328 along each second such pectination longitudinally spaced apart.Pectination drive interdigital 327 near the outer radius portion of bar 326 and 328 in contraction in length 326b, with the thickness at the outer radius place of the increase that adapts to bar 316 and 317.The arc pectination interdigital 321 of arc pectination interdigital 327 relative first comb actuators 311 of second comb actuator 312 staggers, thereby can intersect with pectination interdigital 321 around axle 306 pectination interdigital 327 when the first static comb actuator 311 rotates at second comb actuator 312.

Rotation electrostatic microactuator 301 inside include comprise spring assembly 313 device be used for ring 302 and second comb actuator 312 is bearing on the substrate 101.Thereby spring assembly 313 with about 120 the degree angular spacings around the spaced apart circumferentially spring configuration that a symmetry is provided of axle 306.Each assembly 313 is provided with the first and second isolated folded springs 336 and 337, and folded spring 336 and 337 length preferably are similar to the length of the first and second pectination driven units 303 and 304.Folded spring 336 is similar with 314 to first and second springs 313 of micro-actuator 101 basically with 337.Although spring 336 and 337 can be formed by single spring member, folded spring 336 and 337 preferably is U font or V font on configuration, and what illustrate in the drawings is U font basically.Each folded spring 336 and 337 shapes are made of the first and second microscler spring members 338 and 339 that are the pencil shape basically.First in other words the linear springs member first and second end 338a and the 338b are arranged, and second in other words linear springs member 339 first and second end 339a and the 339b are arranged.

Each spring 336 and 337 first end 338 its end be fixed on form by layer 116 and be connected to by means of silicon dioxide layer 117 on the substrate 102 solid attached member 340 on.The second end 338b of each spring member 338 is fixed to the first end 339a of each spring member 339.Spring member 338 and 339 each all from rotating shaft 306 radially outward stretch and preferably length near the length of the first and second pectination driven units 303 and 304.Though first end 338a can be fixed on the substrate 102 near ring 302, first end 338a preferably is fixed on the substrate 102 near outer radius end 314.Spring member 338 preferably equates on length with 339 and each all has and the first and second spring members 131 previously discussed width similar with 132.The first and second

corrosion protection bars

133 and 134 extend along every side of each spring member 338 and 339.

Each spring 336 and 337 the second end 339b are fixed at least one second comb actuator 312.Micro-actuator 301 is provided with the first and second movable frameworks 341 and 342 for each spring assembly 313 in this regard.Thereby at least one pectination driven unit and at least one first pectination driven unit 303 and one second pectination driven unit 304 are placed between the first and second movable frameworks 341 and 342 and are placed between first and second springs 336 and 337.More specifically, one first pectination driven unit 303a and one second pectination driven unit 303b are placed between the first and second movable frameworks 341 and 342, and the first and second movable frameworks 341 and 342 are placed symmetrically about the radius of micro-actuator 301 simultaneously.

The first and second movable frameworks 341 are similar with 142 to the first and second movable frameworks 141 of micro-actuator 101 basically with 342, are the U font basically on configuration.The first movable framework 341 comprises the bar 328 of the second pectination driven unit 304b that adjoins and the bar 326 of the first pectination driven unit 303a that adjoins, as lateral members.Basically similar to arc component 143 arc component 343 interconnects outside 328b of such bar and 326b.The second movable framework 342 is structurally similar basically, and comprises the bar 326 of the second pectination driven unit 304a that adjoins and the bar 328 of the first pectination driven unit 303b that adjoins, as lateral members.Basically similar to arc component 144 arc component 344 interconnects outside 326b of such bar and 328b.The second end 339b of first spring 336 is fixed on the arc component 343, be adjacent to the outside 326b of bar of the second pectination driven unit 303a, and the second end 339b of second spring 337 is fixed on the arc component 344, is adjacent to the outside 326b of bar of the second pectination driven unit 304a.First folded spring 336 places in the first movable framework 341 and second folded spring 337 places in the second movable framework 342 in this way.The inner 328a of the bar of the first movable framework 341 is connected to ring 302 to be play a part first spring 336 is fixed on the ring 302.Similarly, the inner 328b of the bar of the second movable framework 342 be connected to ring 302 be used for spring 337 with encircle 302 and be connected to each other.

Arc member shuttle 346 in other words is connected opposite end and is connected with the first and second movable frameworks 341 and 342.346 1 ends of shuttle are fixed to the inner 326a of bar of the first movable framework 341 and another end of shuttle 346 is fixed to second movable 342 the inner 326b of bar.Establishing another arc component 347 in micro-actuator 301 is used for rigidly the second end 338b of first and second springs 336 and 337 being fixed together.Arc component 347 and substrate 102 are overlapping and extend in shuttle 346 and encircle between 302 around rotating shaft 108 at least partly.

As shown in Figure 4, the first and second pectination driven units 303 and 304 second comb actuator 312 can be along directions around rotating shaft 306 walkings, between the primary importance and the second place, move, in described primary importance, the pectination of first and second comb actuators interdigital 321 and 327 does not have complete intersection basically, and the second place of not showing in the drawings, the pectination of comb actuator interdigital 321 and 327 is complete intersection basically.Although second comb actuator 312 is when its primary importance, the pectination of comb actuator interdigital 321 and 327 can partly be intersected, but in the drawings, pectination interdigital 321 and 327 fully disconnects, thereby, described at second comb actuator 312 during in its primary importance, the pectination of comb actuator interdigital 321 and 327 is not intersected.When in its second place, the pectination of second comb actuator 312 interdigital 327 is extended between the corresponding pectination interdigital 321 of first comb actuator 311, and the mode of micro-actuator 101 being discussed with the front is identical.

In micro-actuator 301, comprise electric installation, be used between its first and second position, driving second comb actuator 112.Such electric installation can comprise a controller and voltage generator 161, and described voltage generator electrically is connected to a plurality of electrodes that are located on the substrate 102 by a plurality of electric leads 162.In order to simplify, controller 161 and lead 162 are not shown among Fig. 4.Each such electrode is similar to top electrode to 101 discussion of note of the ancient Chinese actuator basically.Be provided with a ground wire on the first end 338a that is connected electrically to one of second folded spring 337, be used for the second pectination drive unit, 312 ground connection.First drive electrode 357 is connected on the outer radius end of first comb actuator 311 of the first pectination driven unit 303a, and second drive electrode 358 is connected on the outer radius end of each first comb actuator 311 of the first pectination driven unit 304a.Common driver electrode 359 is connected on the outer radius end of each first comb actuator 311 of the second pectination driven unit 303b and 304b.The position of ring 302 can the alternatively above mode of discussing in the face of micro-actuator 101 monitor.

In a kind of actual application of pursuing, rotation electrostatic actuator 301 can be used in the data-storage system, such as in the optical module of a magnetic-optical data storage system.Electrostatic microactuator 301 can be used for the optic angle that polarised light starts is turned to an optical fiber.In this regard, in ring 302, be provided with a hole 361 and be fixed to the circular half-wave plate that encircles on 302 to hold a splicing.

The work of electrostatic microactuator 301 is similar basically with use with 102 work of being discussed to micro-actuator 101 to the front with use.Ring 302 can be by controller 161 along rotating around the first and second opposite directions of rotating shaft 306 walkings.When hope during, provide a voltage potential to first comb actuator 311 of the first pectination driven unit 303 by controller along clockwise direction around the described ring 302 of axle 306 rotation.Pectination that obtains interdigital 321 and 327 amounts of intersecting, thereby and encircle 302 amounts around axle 306 rotations, can be by the voltage control that provides to first comb actuator 311.When hope during, can provide a suitable voltage potential to first comb actuator 311 of the second pectination driven unit 304, to cause that pectination drives interdigital 321 and 327 and intersects in the counterclockwise direction around the described ring 302 of axle 306 rotation.During in its primary importance, second comb actuator 312 of one of the first pectination driven unit 303 or second pectination driven unit 304 is in its second place at another comb actuator 312 of the second pectination driven unit 304 or the first pectination driven unit 301.The suitable voltage potential that drives pectination driven unit 303 and 304 can be between 20 to 250 volt range, and preferably between from 60 to 150 volts the scope.When using 130 volts of driving voltages, micro-actuator 301 can rotate at the angles of+/-six degree.

Ring 302 clockwise or be rotated counterclockwise and apply voltage by the starting point to second drive electrode 358 of first drive electrode, the 357 still relevant second pectination driven unit 303a of the relevant first pectination driven unit 303a and initiate.As discussed above, electrode 357 and 358 acts on the first specific comb actuator 311 rather than is shared by back-to-back comb actuator 311.When pectination interdigital 321 and 327 begins to engage with the first and second pectination driven unit 303b and 304b, just can apply driving voltage to public 359.Pectination interdigital 321 and 327 the second correct comb actuator 312 of this initial joint are attached on the pectination interdigital 321 of shared pectination drive rod 317.

Electrostatic microactuator 301 adopts the structure of six springs, and three spring assemblies 313 of first and second folded springs 336 and 337 are promptly respectively arranged.This spring structure allows spring 336 and 337 to arrange circumferentially with the interval of about 60 degree around rotating shaft 306.As the front lecture, spring 336 and 337 pairs second comb actuators 312 provide radial rigidity to sting to prevent the card between pectination interdigital 321 and 327.The micro-actuator that is similar to micro-actuator 301 can be provided with no more than or more than six springs 336 and 337, and within the scope of the invention.Providing radial rigidity to have compromise between the revolving force to the spring allocation space with to the pectination driven unit to provide.We find that three to six springs 336 and 337 are preferred on the total number.

Micro-actuator 301 circular and from but the configuration of symmetry is convenient to provide the barycenter of micro-actuator along rotating shaft 306.Such balance prevents that external shock, vibration or acceleration are to encircling 302 bad interference.

Rotation electrostatic microactuator of the present invention can use and not be the pectination driven unit that radially extends.Use the illustrative push-and-pull micro-actuator of the straight line electrostatic microactuator that is coupled shown in Figure 5.Rotation micro-actuator 401 wherein is similar with micro-actuator 301 to micro-actuator 101, micro-actuator 201 in some aspects, and with same label declaration micro-actuator 101,201,301 and 401 similar parts.Micro-actuator 401 comprises a rotating member 402, and rotating member 402 contains: a mirror support is used for installing a micro mirror 403 that stretches out micro-actuator 401 planes on micro-actuator 401; And half-set 404 that is fixed on the micro mirror 403.The profile of micro mirror is shown in Fig. 5.Rotatable members 402 rotates around rotating shaft 406, and rotating shaft 406 extends perpendicular to the substrate 102 on plane.Rotating shaft 406 intersects micro mirror 403 marks into a point in its reflecting surface 403a and in Fig. 5 by label 406.Micro-actuator 401 is provided with at least one side 407 and rotatable members 402 is placed adjacent to side 407.Micro-actuator 401 has first and second

micro motors

408 and 409 and first and

second connectors

411 and 412, the first and

second connectors

411 and 412 to be used for respectively first and second

micro motors

408 and 409 being fixed to support 404.

First and second micro motors 408 are identical and be formed on by upper strata 116 on the top of substrate 102 on the structure basically with 409.Each comprises micro motor at least one pectination driven unit and preferably includes at least one first pectination driven unit 416 and few one second pectination driven unit 417.As shown in the figure,

micro motor

408 and 409 each comprise four second pectination driven units 471 of the plural number of four first pectination driven units 416 of plural number and parallel alignment.The first pectination driven unit 416 settles abreast in groups and the second pectination driven unit 417 is settled similarly in groups abreast.The group of assembly 416 is arranged side by side with the group of assembly 417.

Pectination driven unit 416 and 417 can be any suitable type.In preferred an enforcement, the pectination driven unit that illustrate in the U.S. Patent Application Serial 09/135,236 same period of the United States Patent (USP) filing of delivering in pectination driven unit and on December 7th, 1999 on August 17th, 5,998,906 and 1998 is similar.Each pectination driven unit 416 and 417 is provided with the first pectination driving group member, first comb actuator 421 in other words that is installed on the substrate 102, and second comb actuator 422 overlaps on the substrate.Each first comb actuator 421 has the stock 426 of the first and second end 426a and 426b to form by one.The pectination that shown in the figure is a plurality of straight lines of straight line drives an interdigital side that is fixed on bar along the spaced positions on the pole length.Pectination drives that interdigital pectination in other words is interdigital vertically stretches out from bar 426, and can be as shown in the figure equal length and along its length constant width is arranged.Second comb actuator 422 is structurally similar to first comb actuator 421, and each has the bar 431 of the first and second end 431a and 431b to form by one.The pectination that shown in the figure is a plurality of straight lines of straight line drives an interdigital side that is fixed on bar 431 along the spaced positions on the pole length.Pectination drives that interdigital pectination in other words is interdigital vertically stretches out from bar 427, and can be as shown in the figure equal length and along its length constant width is arranged.Pectination interdigital 432 is interdigital identical with pectination basically, but staggers with respect to pectination interdigital 427.When pectination driven unit 416 and 417 in its storehouse during in other words in resting position, pectination interdigital 427 and 432 is intersected basically fully, preferably partly intersects as shown in Figure 5.

Slender member shuttle 436 in other words is included in each first and second micro motor 408 and 409.Shuttle 346 has first and second end 436a and the 436b.Bar 431 stretches out between

shuttle end

436a and 436b from a side of shuttle 436 on the shuttle 436 thereby the end 431a of each bar 431 is fixed to.

The first and second separator spring members 437 and 438 are included in each micro motor 408 and 409.Spring member 437 and 438 can be that any suitable type preferably forms from least one long pencil member.In preferred an enforcement, spring 437 and 438 respectively is made of a single this pencil member, similar in appearance to the spring member 131 and second spring member 132 of front lecture.Basic identical and comprise that respectively first and second corrosion protection of arranging along the opposition side of spring are used for the purpose of front lecture on spring 437 and 438 structures.The first and second end 437a and 437b are arranged first spring 437 and second spring 438 has first and second end 438a and the 438b.Spring the second end 437b is fixed to shuttle first end 436a and spring the second end 438b is fixed to shuttle first end 436b.As a result, at least one and as shown in the figure all first and second pectination driven units 416 and 417 be placed between first and second springs 437 and 438.When pectination driven unit 416 and 417 in its storehouse during in other words in resting position, first and second springs 437 and 438 are preferably perpendicular to shuttle 436 and extend.Each first and second spring 437 and 438 is approximate pectination driven unit 416 of length and 417 length preferably, places thereby first end 437a and 438a adjoin the second end 426b and the 431b of pectination drive rod 426 and 431.An attachment piece 439 is fixed on the substrate 102 of each spring 437 and 438, and plays a part the first end 437a of first and second springs and 438a are fixed on the substrate 102.

Second comb actuator 422, shuttle 436 and first and

second springs

437 and 438 at interval air gap 118 are placed on the substrate 102, thereby electrically with the substrate insulation and can move by relative substrate.These structures can have any suitable thickness and from 10 to 200 microns thickness preferably respectively be arranged and more preferably be about 85 microns.First and

second springs

437 and 438 are included in and are used in the device of micro-actuator 401 hanging and movingly at substrate 102 upper supports second comb actuator 422.

As shown in Figure 5, second comb actuator 422 can move between the primary importance and the second place by relative first comb actuator 421 along the direction of travel of straight line, in described primary importance, the pectination of first and second comb actuators interdigital 427 and 432 does not have complete intersection basically, and in the second place, the pectination of comb actuator interdigital 427 and 432 is complete intersection basically.When its second place, pectination interdigital 432 and between corresponding pectination interdigital 427, extend and near but preferably do not engage the first pectination drive rod 426.When second comb actuator 422 of the second pectination driven unit 417 during in its primary importance, second comb actuator of the first pectination driven unit 416 is in 422 its second places.On the contrary, when second comb actuator of the second pectination driven unit 417 during in its second place, second comb actuator of the first pectination driven unit 416 is in its primary importance.

Second comb actuator causes that in 422 motions to its first and second position shuttle 436 moves with respect to substrate 102 along the first and second opposite rectilinear directions.Such direction of travel is substantially perpendicular to first and second long comb dress driven

units

416 and 417 layout.A plurality of first retainers 441 are fixed on the substrate 102 to limit the stroke of the first pectination driven unit 416 to its corresponding first comb actuator 421.A plurality of similar second retainers 442 are fixed on the substrate to limit the stroke of the second pectination driven unit 417 to its corresponding first comb actuator 421.In preferred an enforcement, first and second

micro motors

408 and 409 are arranged side by side, thereby corresponding shuttle 436 is placed side by side in parallel with each other.Each usually points to micro mirror 403 and with respect to rotating shaft 406 centres the second end 436b of shuttle 436.

First and

second connectors

411 and 412 separate with air gap 118 and are placed on the substrate 102, and a first end and the second end that is fixed on the support 404 on the second end 436b that is fixed to shuttle is

arranged.Connector

411 and 412 is preferably arranged each other symmetrically about rotating shaft 406.First connector 411 is fixed to a side of support 404 to the shuttle 436 of first micro motor 408, and second connector 412 is the opposite side that is fixed to support 404 of second micro motor 409.In preferred an enforcement, each first and second connector has at least one spring member to connect spring in other words, is used for shuttle 436 Hes; Nonrigid connection is provided between 404.Each first and

second connector

411 and 412 comprises the bar 466 of a rigidity in special preferred an enforcement, rigidity bar 466 connects spring 437 by one first and at one end is fixed on the shuttle 436, and, connect spring 448 by one second and be fixed on the support 404 at the other end.

In micro-actuator 401, comprise electric installation, be used between its first and second position, driving second comb actuator 422 of first and second micro motors 408 and 409.Such electric installation comprises a suitable controller and voltage generator 161, such as the controller and the voltage generator 161 that electrically are connected to by a plurality of electric leads 162 on a plurality of electrodes.In order to simplify, controller 161 and lead 162 are not shown among Fig. 5.Each such electrode is similar to top electrode to 101 discussion of note of the ancient Chinese actuator basically, comprise by corresponding lead 454 being connected electrically to first and second ground wires on the attachment piece 439 of first spring 437, be used for second comb actuator, 422 electrical groundings first and second springs 437 and 438, shuttle 436 and each micro motor 408 and 409.First drive electrode 457 or directly, or be connected electrically to by lead 458 on first comb actuator 421 of the first pectination driven unit 416 of each micro motor 408 and 409.And second drive electrode 461 or directly, or be connected electrically to by lead 462 on first comb actuator 421 of the second pectination driven unit 417 of each micro motor 408 and 409.Each micro motor 408 and 409 can additionally be established an additional retainer 463 with the forward direction stroke of restriction shuttle 436 to rotating parts 402.The position of rotating parts 402 can the alternatively above mode of discussing in the face of micro-actuator 101 monitor.

In work and using, controller 161 can be with being used to drive second comb actuator 422 of each first and second micro motor 408 and 409 with the front to micro-actuator 101,201 and 301 modes of being discussed, thereby the shuttle 436 that makes micro motor 408 and 409 is along the direction walking opposite with substrate 102 and rotating shaft 406.For example when the voltage that equates put on first micro motor, 408 drive electrodes 457 and and the drive electrode 461 of second micro motor 409 on the time, the shuttle 436 that causes first micro motor 408 is to axle 406 motions, and the shuttle 436 that causes second micro motor 409 leaves axle 406 motions, thereby causes that first and second connectors 411 and 412 are in the counterclockwise direction around axle 406 rotations.In a similar manner, can utilize first and second micro motors 408 and 409 that rotatable members 402 is pivoted around axle 406 along clockwise direction.Being applied to the suitable voltage potential that electrode 457 and 461 is used to rotate micro mirror 403 can be between 20 to 200 volt range, and preferably between from 60 to 150 volts the scope.Micro-actuator 401 can rotate at the angles of+/-10 degree when the such driving voltage of effect, promptly all rotates 10 degree at clockwise and counterclockwise both direction, and rotation 20 is spent on the summation.

The circular motion of rotating parts is closely mated in

micro motor

408 and 409 deflection.If like this straight line

micro motor

408 and 409 each can carry out+/-30 microns motion, rotating parts 402 is slightly smaller than arctan (30/R) with rotation, P is the effective radius of rotating parts here.As seen, angular region depends on effective girth of rotating parts 402, and effectively the less rotating parts of girth can obtain bigger angle; And effectively the bigger rotating parts of girth can obtain less angle.Flexibly connect

spring

447 and 448 and strengthened the conversion that rotatablely move of the lengthwise movement of shuttle 436 to micro mirror 403 and support 404.

The symmetrical structure of first and second

micro motors

408 and 409 and first and

second connectors

411 and 412, and first micro motor 408 and second connector 411 with respect to the symmetric arrangement of second micro motor 409 and second connector 412, guarantee correct pushing away-La, thereby micro mirror and support 404 pivot around rotating shaft 406.In this respect, first micro motor 408 and second connector 411 and second micro motor 409 and second connector 412 are with respect to the imaginary line symmetry that extends between shuttle 436 and the rotating shaft 406.First and

second connectors

411 and 412 are connected on the support 404, and the size and dimension of plan mirror 403 and support 404 is done so that the reflecting surface 403a of micro mirror 403 pivots at rotating shaft 406 places.

Because the strokes that pectination driven

unit

416 and 417 requires, thereby and pectination interdigital 427 relative with 432 length less, in

micro motor

408 and 409, can use non-folding spring 437 and 438.As a result, pectination interdigital 427 that is produced by the bending of

spring

437 and 438 in the interdigital intersection mileage of pectination and 432 lateral movement are not obvious.

Micro motor

408 and 409 symmetric arrangement have compensated any such lateral movement of the shuttle 436 of first micro motor 408 with respect to the lateral movement of the shuttle 436 of second micro motor 409.Plug-type micro-actuator with folded spring can be provided.

Rotation static note of the ancient Chinese actuator of other realization straight line static micro motor can be provided, and within the scope of the invention.For example, can provide pushing away-the La micro-actuator of two above micro motors 408 of use and 409.Preferably, any such rotation micro-actuator is arranged around the rotating shaft of micro-actuator symmetrically.Can conceive, such micro-actuator has the rotating shaft at the center of micro-actuator, with opposite in a side in the micro-actuator 401.

Be to be understood that, Shuo Ming rotation electrostatic microactuator can be provided with the spring of pre-bending or the United States Patent (USP) of delivering on December 7th, 1,999 5 herein, 998, the U.S. Patent Application Serial 09/135 same period of on August 17th, 906 and 1998 filing, the hanger of the sort of type of explanation in 236, and within the scope of the invention.The spring of this pre-bending is a non-rectilinear, and is in the state of " bending " under the situation that is still in static not deflection.Thereby the spring member of this spring stretches to linear state when pectination drives interdigital intersection and increase its axial rigidity in the process of intersection.Such rotation electrostatic microactuator can be established two or more pre-bending springs, one or more stretches when the pectination that drives micro-actuator along first direction drives interdigital intersections, and one or more stretches when driving the interdigital intersection of the pectination driving of micro-actuator in opposite direction.The result who uses the spring of such pre-bending be improved or follow the rigidity of structure near the spring at the range place of comb actuator, this is especially important in the micro-actuator that bigger deflection is arranged.

The rotation electrostatic microactuator of the various herein micro-actuator features of embodiment can be provided.Use arc drive interdigital rotation electrostatic microactuator can be in shape circular also can be other non-circular shape, such as fan-shaped, the perhaps shape of the covering of the fan of similar circle or section.Can establish the folding or non-folded spring that radially extends.This spring when it is static be pre-bending also can be straight line.The pectination assembly of micro-actuator can be the center radius that also can stagger with a radius.Its rest position pectination drive interdigital can be isolated also can be that part is intersected, and different shape can be arranged.

In sum, provide a kind of rotation electrostatic microactuator that has improved range of angular motion.Medio-lateral instability power in one or more pectination driven unit of micro-actuator is lowered to minimum, and the plane that allows the rotation of member to stretch out micro-actuator.The rotating shaft of micro-actuator can adjoin a side of micro-actuator and place.

Claims

1. a rotation electrostatic microactuator contains: the substrate of a substantitally planar; A rotating member overlaps and is used on the substrate rotating around rotating shaft, and rotating shaft extends perpendicular to the substrate on plane; At least one pectination driven unit radially stretches out and has first and second pectination drive member from rotating shaft basically, the first pectination drive member is installed on the substrate, each first and second pectination drive member all is provided with the arc pectination and drives interdigital, the first and second interval folded springs, and at least one is placed on the pectination driven unit between first and second folded springs, each first and second folded spring all is the U font basically, and the spring member that first and second pencils of stretching out from rotating shaft are arranged basically radially, each first spring member has a first end to be fixed on the substrate, and each second spring member has a second end to be fixed on the second pectination driven unit, be used at substrate overhung second pectination driven unit and the rotating member, the second pectination driven unit can move between first and second positions along the direction of travel around rotating shaft, in described primary importance, the pectination of the first and second pectination drive member drive interdigital do not have basically complete intersection, and in the second place, the pectination of the first and second pectination drive member drives interdigital complete intersection basically, thereby first and second folded springs allow the second pectination drive member that bigger walking is arranged between first and second positions, and then allow rotating parts around the bigger rotation of rotating shaft.

2. the described micro-actuator of claim 1 is characterized in that, at least one pectination assembly has a length and each first and second spring that the length of the length of approaching described at least one pectination driven unit is arranged.

3. the described micro-actuator of claim 2 is characterized in that, each first and second spring member has the length near at least one pectination driven unit length.

4. the described micro-actuator of claim 1 is characterized in that, the substrate on plane has an outer radius end, and the first end of first spring assembly is fixed to the outer radius end of planar substrates, the second end of adjacency second spring member.

5. the described micro-actuator of claim 1, it is characterized in that, first spring member of each first and second spring has a second end, and second spring member of each first and second spring has a first end to be fixed on the described the second end of corresponding first spring member, an arc component and substrate is overlapping and extend the second end be used for the second end of first spring member of first spring is fixed on first spring member of second spring around rotating shaft to small part, be used to make the radial row walking of the second pectination drive member to minimize, arc component can break away from rotating member and rotate around rotating shaft.

6. the described micro-actuator of claim 1, it is characterized in that, further contain additional pectination driven unit and the first and second pectination drive member are arranged, described additional pectination driven unit radially stretches out and is placed between first and second springs from rotating shaft basically, the pectination that each first and second pectination drive member of additional pectination driven unit all are provided with arc drives interdigital, the first pectination drive member of additional pectination driven unit is installed on the substrate, the second pectination drive member and the substrate of additional pectination driven unit are overlapping, and the second end of second spring member by first and second springs is suspended on the substrate top, the second pectination drive member of additional pectination driven unit can be moved between the primary importance and the second place, drive in the pectination of the first and second pectination drive member of the additional pectination driven unit of described primary importance and interdigitally to intersect deficiently basically, interdigitally intersect fully basically and drive in the pectination of the first and second pectination drive member of the additional pectination driven unit of the described second place, during in described primary importance, the second pectination drive member of additional pectination driven unit is in the described second place in the second pectination drive member of the pectination driven unit of first appellation.

7. the described micro-actuator of claim 6, it is characterized in that, a plurality of described pectination driven units and described additional pectination driven unit with generally facing to about rotating shaft about 180 the degree the angle around the rotating shaft arrangement, have one basically along the end that the diameter of semicircle extends to form a semicircle, rotating shaft is placed on the center of semicircle in abutting connection with the described end.

8. the described micro-actuator of claim 1, it is characterized in that, a plurality of described pectination driven units are placed around rotating shaft circumferentially, and a plurality of first and second such folded springs of arranging are in groups placed around rotating shaft circumferentially, and each pectination driven unit all is placed between first and second folded springs of one of these groups.

9. the described micro-actuator of claim 8 is characterized in that, a plurality of described pectination driven units are placed symmetrically about rotation.

10. a rotation electrostatic microactuator contains: the substrate on a basic plane; A rotating member is overlapped in and is used on the substrate rotating around rotating shaft, and rotating shaft extends perpendicular to the substrate on plane; With a plurality of pectination driven units, each pectination driven unit has one first pectination drive member and is installed on the substrate and one second pectination drive member, each first and second pectination drive member all is provided with the arc pectination and drives interdigital, the first and second isolated springs, each first and second spring all has a first end to be fixed to substrate and a second end is fixed at least one second pectination driven unit, be used on substrate, hanging second pectination drive member and the rotating member, the second pectination driven unit can move between first and second positions along the direction of travel around rotating shaft, in described primary importance, the pectination of the first and second pectination drive member drives interdigital and does not have complete intersection basically, and in the second place, the pectination of the first and second pectination drive member drives interdigital complete intersection basically, a plurality of pectination driven units are facing to the angle about about 180 degree of rotating shaft, have one basically along the end that the diameter of semicircle extends to form a semicircle, rotating shaft is placed on the center of semicircle in abutting connection with the described end.

11. the described micro-actuator of claim 10 is characterized in that, each first and second spring radially stretches out from rotating shaft basically, and comprises that a plurality of pectination driven units of the first and second pectination driven units are placed between first and second springs.

12. the described micro-actuator of claim 11 is characterized in that, during in described primary importance, the second pectination drive member of the second pectination driven unit is in the described second place in the second pectination drive member of the first pectination driven unit.

13. the described micro-actuator of claim 10 is characterized in that the first end of first and second springs is fixed on the substrate, in abutting connection with rotating shaft.

14. the described micro-actuator of claim 10, it is characterized in that, the pectination of each first and second pectination drive member drives interdigital all have close end and distal portion, and each close end has a width and each distal portion that the width that is not more than corresponding close end width is all arranged.

15. the described micro-actuator of claim 10 is characterized in that, the pectination driving of the first pectination drive member is interdigital different length, and the pectination of the second pectination driving group member drives the interdigital different length that has.

16. the described micro-actuator of claim 10 is characterized in that, the pectination driving of at least one first and second pectination drive member is interdigital to be had separately, and an imaginary line is connected to each other the pectination that separates with rotating shaft and drives interdigital end.

17. a rotation electrostatic microactuator contains: the substrate on a basic plane; A rotating member overlaps on the substrate, is used for rotating around rotating shaft, and described rotating shaft extends perpendicular to the substrate on plane; The first and second straight line micro motors, each first and second line motor has the first and second isolated springs and at least one pectination driven unit, described at least one pectination assembly has the first and second pectination drive member, the first pectination drive member is installed on the substrate, each first and second spring all has a first end to be fixed on the substrate, be fixed on the second pectination drive member with a second end, be used in the substrate overhung second pectination drive member, each first and second pectination drive member all is provided with pectination and drives interdigital, the second pectination drive member can be moved between the primary importance and the second place with respect to the first pectination drive member along the direction of travel of a straight line, in described primary importance, the pectination of the first and second pectination drive member drive interdigital do not have basically complete intersection, and in the second place, the pectination of the first and second pectination drive member drives interdigital complete intersection basically; One first connector is used for the second pectination drive member of first micro motor is fixed to rotating member, be used for the second pectination drive member of second micro motor is fixed to rotating member with one second connector, thereby the second pectination drive member of first and second micro motors causes that to the motion of the second place rotating member rotates around rotating shaft.

18. the described micro-actuator of claim 17 is characterized in that, at least one pectination driven unit is placed between first and second springs.

19. the described micro-actuator of claim 18 is characterized in that, first and second springs of each first and second micro motor extend along the direction perpendicular to the corresponding first and second micro motor direction of travel.

20. the described micro-actuator of claim 17 is characterized in that, first and second connectors contain first and second and connect spring.

21. the described micro-actuator of claim 17 is characterized in that first and second micro motors are placed symmetrically about rotating parts.

22. the described micro-actuator of claim 17 is characterized in that, the straight line moving direction of first micro motor be parallel to second micro motor the straight line moving direction.

23. the described micro-actuator of claim 22 is characterized in that first and second micro motors are arranged side by side.

24. the described micro-actuator of claim 17, it is characterized in that, each first and second micro motor has the described first and second pectination driven units, during in described primary importance, the second pectination drive member of additional pectination driven unit is in the described second place in the second pectination drive member of the pectination driven unit of first appellation.