CN1318820C - Correcting method for electronic part mounting device and device for using said method - Google Patents

Correcting method for electronic part mounting device and device for using said method Download PDF

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CN1318820C
CN1318820C CNB2004100295201A CN200410029520A CN1318820C CN 1318820 C CN1318820 C CN 1318820C CN B2004100295201 A CNB2004100295201 A CN B2004100295201A CN 200410029520 A CN200410029520 A CN 200410029520A CN 1318820 C CN1318820 C CN 1318820C
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substrate
camera
clamp member
identification camera
mentioned
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CN1532520A (en
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师冈博明
石泽勇治
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Juki Corp
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Juki Corp
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Abstract

To provide a method for calibrating the position of a camera by which a deviation between the mutual coordinate system of the part recognition camera and coordinate system of the substrate recognition camera can be calibrated simply and rapidly.In the method for calibrating the deviation of the places of the cameras, a fixture part 30 enabled by both recognition methods is used. The method has an image pick-up process in which the part 30 is image-picked up by the part recognition camera first, the image pick-up process in which a fixture substrate is image-picked up by the substrate recognition camera 17, a mounting process in which the fixture part 30 is mounted, a computing process in which the center of the part is obtained by the substrate recognition camera 17 and the quantities of displacements obtained respectively with the place of the recognition center of the camera 17 are computed in the mark of the fixture part 30 after the mounting, and a calibrating process in which the coordinate systems of the camera 17 or the camera 16 are calibrated on the basis of the quantities of the displacements. (C)2005,JPO&NCIPI.

Description

Position of camera offset correction method, device and used clamp member
Technical field
The present invention relates to a kind of in electronic component mounting apparatus etc., position of camera offset correction method and device thereof that the mutual deviation of the coordinate system of the coordinate system of component identification camera and substrate identification camera is proofreaied and correct, and camera position correction fixture substrate and the clamp member used.
Background technology
In electronic component mounting apparatus, use substrate identification camera to make a video recording substrate is carried out location recognition to moving into base plate mark on the substrate in the auto levelizer main body or IC mark.And, use the component identification camera to make a video recording and carry out location recognition to being installed to electronic unit on the substrate, according to these recognition results, the position of electronic unit is proofreaied and correct, afterwards electronic unit is installed on the substrate.
In this case, if the coordinate system of the coordinate system of component identification camera and substrate identification camera is gone up not quite identical at X, Y direction and angle θ (following table is shown " θ "), even then proofread and correct, can not correctly be installed to electronic unit on the substrate.
For this reason, as paragraph " 0004 " record of opening flat 5-10746 the spy, in existing electronic component mounting apparatus, when being provided with device or consider temperature variation etc., regularly (during device work etc.) the mutual deviation of the coordinate system of the coordinate system of component identification camera and substrate identification camera is proofreaied and correct.
Specifically, according to above-mentioned steps sectional fixture parts, use ready separately measurement mechanism that the departure of installation site in the design on the fixture substrate and actual installation position is measured on the fixture substrate in moving into the auto levelizer main body.Then, this measurement result is input to electronic component mounting apparatus, the deviation that the coordinate system and the substrate of component identification camera are discerned the coordinate system of camera is proofreaied and correct (also the absolute reference coordinate system of apparatus main body being proofreaied and correct simultaneously).
[patent documentation 1]
Te Kaiping 5-10746
Like this, in existing electronic component mounting apparatus,, need measurement mechanism in order to proofread and correct the coordinate system of two identification cameras.And, the transmission of fixture substrate and measurement etc., its correction operation is numerous and diverse and take time.And, be necessary to use a plurality of clamp member repeatedly to carry out above-mentioned installation and measurement, obtain the mean value of departure.
Summary of the invention
The present invention can carry out simple and correction rapidly to the mutual deviation that the coordinate system and the substrate of component identification camera are discerned the coordinate system of camera.And, but the purpose of this invention is to provide identification position of camera offset correction method and the device thereof that a kind of high precision is proofreaied and correct, and the clamp member and the fixture substrate that are used for the position correction of camera.
Each position of camera offset correction method of the present invention is carried out location recognition to the mark on the fixture substrate 20 of the substrate fixed part of being moved into electronic component mounting apparatus shown in Figure 11.And, to the coordinate system of its substrate identification camera 17 be used for carrying out the position of camera offset correction method that the mutual deviation of coordinate system of the component identification camera 16 of location recognition is proofreaied and correct to being installed to clamp member 30 on the fixture substrate 20, for the departure on the coordinate system at the parts center of obtaining the identification center of relatively respectively discerning camera by shooting, use can be discerned the clamp member 30 of camera identification by each.And, this offset correction method has: the first shooting step, use is respectively discerned the clamp member that camera can be discerned the departure of center on coordinate system of clamp member by above-mentioned, uses above-mentioned component identification camera that this clamp member is made a video recording under the state of the posture that keeps above-mentioned clamp member; The second shooting step uses aforesaid substrate identification camera that the mark on the above-mentioned fixture substrate is made a video recording; Installation steps, the image pickup result according to by two identification camera shootings is installed to above-mentioned clamp member on the above-mentioned fixture substrate; Departure is calculated step, calculates and uses aforesaid substrate identification camera to the make a video recording departure of the identification center obtained and the parts mounting center position of being obtained by aforesaid substrate identification camera according to the mark of above-mentioned fixture substrate of the mark of the clamp member of being installed; And aligning step, according to calculating the departure that step is calculated, the coordinate system of aforesaid substrate identification camera or above-mentioned component identification camera is proofreaied and correct in above-mentioned departure.According to this formation, at first by on former coordinate system separately, the mark that uses 17 pairs of fixture substrates of substrate identification camera 20 to be moved on the fixture substrate 20 of substrate fixed position is made a video recording, and the departure of relative substrate being discerned on the coordinate system of each mark center at identification center of camera 17 is discerned.Obtain the total departure amount and the pitch angle of fixture substrate by this shooting.
Then, for clamp member 30 being installed to the assigned position of fixture substrate 20, suction jig parts 30, according to result by 16 shootings of component identification camera, obtain the parts center of clamp member 30, according to the total departure amount and the pitch angle of this result and fixture substrate 20, clamp member 30 is installed to the assigned position of fixture substrate.
Then, 17 pairs in use substrate identification camera adds to a plurality of marks of the clamp member 30 of this installation and makes a video recording, and according to this result, obtains the center of the clamp member 30 on the fixture substrate 20.The departure of the clamp member center on clamp member mounting center position of obtaining according to the mark of fixture substrate 20 and the fixture substrate 20 obtained according to the clamp member 30 of being installed is the mutual off normal of each identification camera.
Then, according to this off normal the coordinate system of substrate identification camera 17 or component identification camera 16 is proofreaied and correct, the coordinate system of substrate identification camera 17 is consistent with the coordinate system of component identification camera 16.Promptly, the deviation of the former coordinate system of recoverable (coordinate system in the design), use is respectively discerned camera fixture substrate 20 and clamp member 30 is discerned, clamp member 20 is installed on the fixture substrate 20, and, by using 17 pairs of clamp member of being installed 30 of substrate identification camera to discern, can proofread and correct each coordinate system.
Constitute according to this, the absolute reference coordinate system of apparatus main body relatively also can be proofreaied and correct the deviation based on the error of the setting angle of the setting angle of the identification of the substrate in surface level camera and component identification camera.
And,,, thereby can carry out installation on the substrate of electronic unit more accurately because installation head is fixed on the support component according to the absolute reference coordinate system according to this formation.
In the position of camera driven parallax correction setter of invention 2, to be used for to the mark on the fixture substrate carry out location recognition substrate identification camera coordinate system and be used for carrying out the mutual deviation of coordinate system of the component identification camera of location recognition and proofreading and correct to being installed to clamp member on the fixture substrate, it is characterized in that, have: first image unit, use is respectively discerned the clamp member that camera can be discerned the departure on the coordinate system of center of clamp member by above-mentioned, uses above-mentioned component identification camera that this clamp member is made a video recording under the state of the posture that keeps above-mentioned clamp member; Second image unit uses aforesaid substrate identification camera that the mark on the above-mentioned fixture substrate is made a video recording; Installation unit, the image pickup result according to by two identification camera shootings is installed to above-mentioned clamp member on the above-mentioned fixture substrate; Departure is calculated the unit, calculates and uses aforesaid substrate identification camera to the make a video recording departure of the identification center obtained and the parts mounting center position of being obtained by aforesaid substrate identification camera according to the mark of above-mentioned fixture substrate of the mark of the clamp member of being installed; And correcting unit, according to calculating the departure that calculate the unit, the coordinate system of aforesaid substrate identification camera or above-mentioned component identification camera is proofreaied and correct by above-mentioned departure.
In invention 3 clamp member, preferred image pattern being shot is by respectively can identified above-mentioned departure and constitute for concentric parts figure portion and parts mark group.
Description of drawings
Fig. 1 is the stereographic map of the electronic component mounting apparatus of an embodiment of the present invention.
Fig. 2 is the vertical view of the clamp member used in implementing the offset correction method of present embodiment.
Fig. 3 is the vertical view at the fixture substrate of the offset correction method use of implementing present embodiment.
Fig. 4 is the block scheme of the control system of expression electronic component mounting apparatus.
Fig. 5 is the synoptic diagram that is illustrated in the state of sectional fixture parts on the fixture substrate.
Fig. 6 is under the state of the move angle deviation of the XY transport unit of having considered the absolute reference coordinate system, obtains the action flow chart of off normal of the coordinate system of the coordinate system of substrate identification camera and component identification camera.
Among the figure: 1 ... electronic component mounting apparatus; 2 ... X-axis; 3 ... Y-axis; 11 ... spool; 11a ... pushing belt device; 12 ... the parts supply unit; 13 ... suction head; 13a ... adsorption mouth; 14 ... the XY transport unit; 15 ... the substrate transferring road; 16 ... the component identification camera; 17 ... substrate identification camera; 20 ... fixture substrate; 20a ... the substrate fiducials mark; 20b, c ... mark; 21a, b, c, d ... the reference for installation mark; 30 ... clamp member; 32 ... image pattern being shot; 33a, b, c, d ... parts mark group; 34 ... parts figure portion
Embodiment
Below, with reference to accompanying drawing,, and adopt the fixture substrate that the identification camera position correction uses and the electronic component mounting apparatus of clamp member to describe to the offset correction method and the device thereof of according to an embodiment of the present invention identification position of camera.
This electronic component mounting apparatus 1 is general alleged multipurpose multifunctional operating system fitting machine, constitutes the various electronic units of the multioutlet parts etc. of surface mounting assembly that chip capacitor and pellet resistance etc. can be installed and QFPIC etc.
Fig. 1 is the skeleton diagram of electronic component mounting apparatus, as shown in the drawing, electronic component mounting apparatus 1 has: parts supply unit 12, from the central portion left and right directions substrate transferring road 15 of extending a little in the wings, be provided in the parts supply unit 12 of the front portion (diagram downside) of electronic component mounting apparatus 1, and be provided in the anterior of electronic component mounting apparatus 1 and move freely XY transport unit 14.
In XY transport unit 14, be mounted with adsorption mouth 13a in the suction head 13 that is used to adsorb and electronic unit is installed.Adsorption mouth 13a has in vertical direction mechanism movably.And, on suction head 13, substrate is discerned camera 17 and is installed on the support component.On this device, be equipped with component identification camera 16 in the side locations of parts supply unit 12.
In this electronic component mounting apparatus 1, the little electronic unit of surface mounting assembly etc. is supplied with by parts supply unit 12, and the big electronic unit of multioutlet parts etc. is supplied with by the parts supply unit of not shown tray form.And substrate is supplied to the substrate fixed part of also being moved into the central authorities of electronic component mounting apparatus 1 by substrate transferring road 15 from left, is discharged from from right-hand.For example, in the installation of the electronic unit that uses XY transport unit 14,, make suction head 13, then this electronic unit is transplanted on the position of component identification camera 16, carry out location recognition from the required electronic unit of parts supply unit 12 absorption by XY transport unit 14.Then, further suction head 13a is sent to the assigned position of substrate, uses the additional mark to substrate of 17 pairs in substrate identification camera etc. to discern, obtain substrate position.Afterwards, electronic unit is installed on the substrate.
At this moment, recognition result according to component identification camera 16, carry out the position correction between design load A (the adsorption mouth position of suction head) and the adsorbed electronic unit, according to the recognition result of substrate identification camera 16, carry out the position correction between the installation site of design load B (apart from the position of substrate position) and substrate.
Substrate transferring road 15 has: the substrate fixed part of central authorities, the left side move into carrying channel, and the right side take out of carrying channel (diagram is omitted).Substrate is supplied to and is moved into the substrate fixed part of the central authorities of electronic component mounting apparatus 1 from left by substrate transferring road 15.Then, be discharged to right-hand from the substrate fixed part substrate of finishing the installation of electronic unit.In this case, the side of moving on substrate transferring road 15 has and is the substrate of waiting for supply condition, and the discharge side on substrate transferring road 15 has and be the substrate (diagram is omitted) of waiting for the discharge state, and these substrates are by transmitting by conveyance in turn.In addition, when on the substrate of substrate fixed part electronic unit being installed, the initial point of the absolute reference coordinate system that device is whole is near the jut (diagram is omitted) the substrate front end.
Parts supply unit 12 horizontally-arrangeds set a plurality of pushing belt device 11a.On each pushing belt device 11a, contain and be the electronic unit that is loaded in the state on the travelling belt (diagram omit), electronic unit is supplied with seriatim from the front end of pushing belt device 11a.
XY transport unit 14 has a pair of axle guiding by the both ends, the left and right sides that are provided in device 1, and in the mobile Y-axis 3 of fore-and-aft direction (Y direction).Use the round head screw and the Y-axis motor that makes its rotation (all diagram is omitted) of the axle right part of XY transport unit 14, advance and retreat in Y direction (fore-and-aft direction).
On the other hand, have X-axis 2, identical with above-mentioned drive system, adopt the formation of round head screw and X-axis motor (all diagram is omitted), above-mentioned suction head 13 is advanced and retreat in X-direction (left and right directions).Like this, suction head 13 promptly moves freely in surface level in X-direction and Y direction.
Have adsorption mouth 13a and substrate identification camera 17 in suction head 13.And adsorption mouth 13a has in vertical direction mechanism movably.The mark of 17 pairs of each substrates of substrate identification camera etc. is discerned, and the specific part of mark etc. is the reference mark of the installation site of electronic unit.And the adsorption mouth 13a that installs in the bottom of suction head 13 is connected with not shown vacuum suction device.
In addition, in suction head 13 motor (diagram is omitted) that electronic unit is rotated by adsorption mouth 13a is installed in surface level.
Fig. 2 and clamp member 30 shown in Figure 3 and fixture substrate 20 are used for the mutual deviation of the coordinate system of the coordinate system of the substrate identification camera 17 of substrate position identification usefulness and the component identification camera 16 that the electronic unit location recognition is used is proofreaied and correct.This correction uses 16 pairs of clamp member 30 that transmitted by suction head 13 of component identification camera to make a video recording, and it is discerned.
Then, the regulation position of using 17 pairs in camera of substrate identification to move into the fixture substrate 20 of substrate fixed part is discerned, and the deviation of the coordinate system of the substrate identification camera 17 of the absolute reference coordinate system of relative electronic component mounting apparatus 1 is proofreaied and correct.Then, the assigned position use component identification camera 16 of fixture substrate 20 is made a video recording, the clamp member of being discerned 30 is installed.
Then, use the clamp member 30 of installing on 17 pairs of fixture substrates 20 of substrate identification camera to make a video recording, the center of the clamp member on the fixture substrate is discerned.Then, obtain the above-mentioned position of obtaining and the mutual deviation of the position obtained according to the reference mark on the fixture substrate.
Clamp member 30 as shown in Figure 2, is made of the parts figure portion of describing on the square substrate face 34 and parts mark group 33a, 33b, 33c, 33d.For substrate, consider to make it have certain rigid, adopting thickness is the glass formation of 1~2mm, parts figure portion 34 constitutes by evaporation chromium oxide on this substrate.Parts figure portion 34 is by parts mark group 33a, 33b, 33c, 33d and the hollow space of same position 35 as the center constituted.
Parts mark group 33a, 33b, 33c, 33d form the pattern of 4 circles being discerned easily by substrate identification camera 17.And, parts figure portion 34 form with by the component identification camera 16 approximate pattern of lead member of identification easily, at the peripheral part suitable square a plurality of graphical elements of uniformly-spaced arranging and go between, have square contour as a whole.
Fixture substrate 20 forms square as shown in Figure 3.
Surface on fixture substrate 20, for obtain fixture substrate fixedly the time the pitch angle and with the correcting value of the initial point of absolute reference coordinate system, as shown in Figure 3, describe mark 20a, 20b, 20c, wherein 1 substrate fiducials mark 20a that is depicted as fixture substrate at 3 jiaos.And, describe to be useful on reference for installation mark 21a, 21b, 21c, the 21d that fixture substrate 30 in early stage is installed near the central authorities of fixture substrate 20.Reference for installation mark 21a, 21b, 21c, 21d are that initial point has been set each position relation with substrate fiducials mark 20a.
Then, before describing,, the control device 100 of this electronic component mounting apparatus 1 is carried out simple declaration with reference to Fig. 4 in the above-mentioned bearing calibration of using clamp member 30 and fixture substrate 20.
As shown in the drawing, control device 100 be connected with the lower part: the X motor 101 and the Y motor 102 that suction head 13 are moved by XY transport unit 14 in the XY direction, and be loaded into θ motor (rotation) 103 on the suction head 13.X motor 101, Y motor 102 and θ motor 103 be separately by X motor driver 104, Y motor driver 105 and θ motor driver 106, and is used for that each motor etc. is carried out central controlled CPU107 and is connected.Equally, substrate identification camera 16 and component identification camera 17 are connected with CPU107 separately by substrate image handling part 108 and image of component handling part 109.
And CPU107 is connected with storer 110, is useful on motor 104,105,106 and identification camera 16,17 design load data and other the various data controlled in storer 110 stored, stores following correction data simultaneously.
Correction data is calculated by following position deviation and is updated, and CPU107 uses correction data to proofread and correct the design load data, and these motor 104,105,106 and identification camera 16,17 are controlled.In addition, using the identification respectively discern 16,17 pairs of shootings of camera (CCD camera) object is after 108,109 pairs of image pickup results of each image processing part have been carried out various processing etc., carries out by carrying out calculation process at CPU107.
Below, the offset correction method of substrate being discerned camera 16 and component identification camera 17 describes.
In this offset correction method, by clamp member shown in Figure 2 30 is installed on the fixture substrate shown in Figure 3 20, obtain the departure of the regulation installation site of the mounting center position of clamp member and fixture substrate, the off normal of the coordinate system of the substrate identification camera 17 of relative absolute reference coordinate system is proofreaied and correct.
Then, also comprise the angular deviation of the coordinate system when the moving of the XY of absolute reference coordinate system transport unit 14 is proofreaied and correct, also the off normal of the coordinate system of the component identification camera 16 of the coordinate system of relative substrate identification camera 17 is proofreaied and correct.Therefore, simultaneously,, also the center of adsorption mouth 13a is proofreaied and correct at the timing of actual coordinates.
Fig. 5 is the image graph that clamp member 30 has been installed on the fixture substrate 20 of moving into the substrate fixed part, and fixture substrate 20 is gone up the location at absolute reference coordinate system (substrate orientation coordinate system).
In this case, obtain and be used for the position deviation of the clamp member 30 of the design size of the driving XY coordinate of the relative XY transport unit 14 seen from substrate orientation XY coordinate and the correction data that angular deviation is adjusted.Then, according to this correction data, be that benchmark is proofreaied and correct with the XY coordinate.In addition, it is consistent with the position coordinates of the driving XY coordinate of XY transport unit 14 (being suction head 13) to be loaded into the scanning coordinate center of the substrate identification camera 17 on the XY transport unit 14.
Specifically, fixture substrate 20 is moved into the substrate fixed part, in the motion flow of Fig. 6, obtain correction data.At the step S1 of Fig. 6 (identification of fixture substrate mark), the substrate identification camera 17 that is loaded on the XY transport unit 14 is moved in turn according to design load, make a video recording, it is discerned, so that the position consistency of its center and substrate fiducials mark 20a, mark 20b, 20c.Then, at the step S2 of Fig. 6 (the substrate margin of error " Δ x1; Δ y1; θ 1 " calculates), the pitch angle of the departure of substrate fiducials mark 20a in this recognition result that will temporarily preserve and fixture substrate 20 (the mark center position coordinates of seeing from the camera center of the scanning coordinate of substrate identification camera 17 poor) is kept in the storer 110 as " Δ x1; Δ y1, θ 1 " temporarily.
" θ 1 for Δ x1, Δ y1 " is obtained by following calculating.
The logical coordinates of mark 20a, 20b, 20c be made as separately A (Xa, Ya), B (Xb, Yb), C (Xc, Yc), the mark recognition result of coordinate (mark departure) separately be made as A1 (Xa1, Ya1), B1 (Xb1, Yb1), C1 (Xc1, Yc1).
The XY axle of absolute coordinates is a quadrature, and the XY axle of substrate identification camera 17 also is a quadrature.Suppose XY axle cant angle theta (C0) installation of substrate identification camera 17 with respect to absolute coordinates, then A1, B1, C1 are that transformation of criterion is as follows with the XY axle of absolute coordinates.
A2[Xa1*cos(C0)-Ya1*sin(C0),Xa1*sin(C0)+Ya1*cos(C0)]
B2[Xb1*cos(C0)-Yb1*sin(C0),Xb1*sin(C0)+Yb1*cos(C0)]
C2[Xc1*cos(C0)-Yc1*sin(C0),Xc1*sin(C0)+Yc1*cos(C0)]
Because calculating formula is numerous and diverse, thus separately transformation results be made as A2 (Xa2, Ya2), B2 (Xb2, Yb2), C2 (Xc2, Yc2).
Absolute coordinates A0, B0, the C0 of substrate fiducials mark 20a, mark 20b, 20c are as follows separately.
A0(Xa+Xa2,Ya+Ya2)
B0(Xb+Xb2,Yb+Yb2)
C0(Xc+Xc2,Yc+Yc2)
Then, the differential seat angle of logical coordinates and absolute coordinates, that is, substrate is moved into angle θ 1, can obtain by following.
The vector of the logical coordinates of the mark 20c that sees from substrate fiducials mark 20a be VL (Xc-Xa, Yc-Ya), the vector of the absolute coordinates of the mark 20c that sees from substrate fiducials mark 20a be VR (Xc+Xc2-Xa-Xa2, Yc+Yc2-Ya-Ya2).
Separately vector angle θ L, θ R can calculate by following formula.
θL=tan -1[(Yc-Ya)/(Xc-Xa)]
θR=tan -1[(Yc+Yc2-Ya-Ya2)/(Xc+Xc2-Xa-Xa2)]
Because the differential seat angle θ 1 of logical coordinates and absolute coordinates is more than the θ 1=θ R-θ L, thereby can calculate " θ 1 for Δ x1, Δ y1 ".
Δx1=Xa1*cos(C0)-Ya1*sin(C0)
Δy1=Xa1*sin(C0)+Ya1*cos(C0)
θ1=θR-θL
Then, at the step S3 of Fig. 6 (clamp member identification is prepared),, make suction head 13 move to parts supply unit 12 for clamp member 30 is installed on the fixture substrate 20.Then, consistent with the center (center, the visual field) of component identification camera 16 with the adsorption mouth 13a suction jig parts 30 on the suction head 13 for the position that makes adsorption mouth 13a, move according to design load.
Herein, at the step S4 of Fig. 6 (clamp member identification), use 16 pairs of clamp member 30 of component identification camera to discern, at the step S5 of Fig. 6 (the parts margin of error " Δ x2; Δ y2, θ 2 " calculates), this recognition result (difference and the pitch angle of the clamp member center position coordinates of seeing from the camera center of the scanning coordinate of component identification camera 16) is kept in the storer 110 as " Δ x2; Δ y2, θ 2 " temporarily.
The margin of error " θ 2 for Δ x2, Δ y2 " is obtained by following calculating.The XY axle of absolute coordinates is a quadrature, and the XY axle of component identification camera 16 also is a quadrature.Suppose XY axle cant angle theta (C1) installation of component identification camera 16 with respect to absolute coordinates, component identification result (side-play amount of camera center relatively) is made as R1 (Xr, Yr, θ r), then R1 is that transformation of criterion is as follows with the XY axle of absolute coordinates.
R2[Xr*cos(C1)-Yr*sin(C1),Xr*sin(C1)+Yr*cos(C1),θr+C1]
Therefore,
Δx2=Xr*cos(C1)-Yr*sin(C1)
Δy2=Xr*sin(C1)+Yr*cos(C1)
θ2=θr+C1
Then, consistent at the step S6 of Fig. 6 (installation of the clamp member on the fixture substrate) for the center (center, the visual field) of the identification of the substrate on making parts adjustment notch position and being installed in head 13 camera 17, move according to design load.Then, discern, (21a~21d) carries out computing, uses at vertical direction adsorption mouth 13a sectional fixture parts 30 (drive division illustrates) movably according to the result who obtains at step S5.
Obtain computing method one for example down described of installation site.
For the moving target coordinate of the base plate mark that is used to discern 21b, the logical coordinates of 21b be made as D (Xd, Yd), the vector V L1 of the logical coordinates of the 21b that sees from 20a be VL1 (Xd-Xa, Yd-Ya).
Owing to be verified as at step S2, substrate is with respect to the XY axle cant angle theta 1 of absolute coordinates, thereby the vector V R1 of the absolute coordinates of the 21b that sees from 20a is with respect to VL1 rotation θ 1.
VR1[(Xd-Xa)*cos(θ1)-(Yd-Ya)*sin(θ1),(Xd-Xa)*sin(θ1)+(Yd-Ya)*cos(θ1)]
On the other hand because the mark of 20a forms skew (Δ x1, Δ y1) with respect to absolute coordinates, thereby become the 21b of mark moving target absolute coordinates D0 (Xd0, Yd0) as follows.
Xd0=(Xd-Xa)*cos(θ1)-(Yd-Ya)*sin(θ1)+Δx1
Yd0=(Xd-Xa)*sin(θ1)+(Yd-Ya)*cos(θ1)+Δy1
Absolute coordinates D0 (Xd0, mark recognition result Yd0) be made as D01 (Xd01, Yd01).Because substrate identification camera 17 is installed with respect to the XY axle cant angle theta (C0) of absolute coordinates, thereby D01 is that transformation of criterion is as follows with the XY axle of absolute coordinates.
D02[Xd01*cos(C0)-Yd01*sin(C0),Xd01*sin(C0)+Yd01*cos(C0)]
The absolute coordinates D00 of final mark (Xd00, Yd00) as follows.
Xd00=Xd0+Xd01*cos(C0)-Yd01*sin(C0)
Yd00=Yd0+Xd01*sin(C0)+Yd01*cos(C0)
Because it is identical that the mark coordinate of coordinate and 21b is installed, thereby (Xp Yp) can be by following calculating to be positioned at the final loading absolute coordinates P that the rotating shaft center of the adsorption mouth 13a of suction head 13 will move.
The absolute coordinates at the parts center of seeing from the rotating shaft center of adsorption mouth 13a and pitch angle thereof are obtained with step S6 and are Δ x2, Δ y2, θ 2.Because parts are with respect to absolute coordinates cant angle theta 2, substrate is with respect to absolute coordinates cant angle theta 1, thereby mounting position is made as θ P, the identification posture is made as θ R, final to want the angle θ P0 of rotation correction be θ P0=θ P+ θ 1-θ R-θ 2, and the absolute coordinates at the parts center that the rotating shaft center of the adsorption mouth 13a behind the rotation correction is seen is as follows.
Δx2z=Δx2*cos(θP0)-Δy2*sin(θP0)
Δy2z=Δx2*sin(θP0)+Δy2*cos(θP0)
The installation targets absolute coordinates of the rotation center of final adsorption mouth 13a is as follows.
Xp=Xd00-Δx2z
Yp=Yd00-Δy2z
As other method, mark that also can the nonrecognition installation site, but carry out computing according to the result of result who obtains at step S2 and step S5 uses at vertical direction adsorption mouth 13a sectional fixture parts 30 movably.
Then, at the step S7 of Fig. 6 (using the IC location recognition of substrate identification camera), for the center (center, the visual field) that position that makes the IC mark 33a, the 33c that describe on the clamp member 30 of installing on the fixture substrate 20 and the substrate of installing on suction head 13 are discerned camera 17 consistent, move in turn according to design load, make a video recording, it is discerned.
Shown in one of computing method are for example descended.
Suppose the relative parts of mark 33a, 33c center on the parts be in separately AA (Xaa, Yaa), CC (Xcc, relative position Ycc), when substrate and parts do not have deviation, obtain the target absolute coordinates AAC that substrate identification camera 17 will move (Xaac, Yaac), CCC (Xccc, Yccc).
At first, because substrate is with respect to absolute coordinates cant angle theta 1, thereby AA (Xaa, Yaa), (Xcc Ycc) also rotates θ 1 to CC, and the AAz as a result, the CCz that carry out conversion are as follows.
AAz[Xaa*cos(θ1)-Yaa*sin(θ1),Xaa*sin(θ1)+Yaa*cos(θ1)]
CCz[Xcc*cos(θ1)-Ycc*sin(θ1),Xcc*sin(θ1)+Ycc*cos(θ1)]
Then, the parts center on the substrate is that (Xd00 Yd00), obtains by following formula the D00 that obtains at step S6.
Xaac=Xd00+Xaa*cos(θ1)-Yaa*sin(θ1)
Yaac=Yd00+Xaa*sin(θ1)+Yaa*cos(θ1)
Xccc=Xd00+Xcc*cos(θ1)-Ycc*sin(θ1)
Yccc=Yd00+Xcc*sin(θ1)+Ycc*cos(θ1)
AAC (Xaac, Yaac), (Xccc Yccc) is made as logical coordinates to CCC, carries out and the same computation process of step S2, obtains the mark 33a on the parts, the absolute coordinates of 33c.
That is to say, at the step S8 of Fig. 6 (calculating of various installation correction datas), the centre of location position on the absolute coordinate system (substrate orientation coordinate system) that step S7 obtains and the difference of the parts mounting center position of obtaining at step S6 are the installation correction data of XY coordinate system of component identification camera 16 of the coordinate system of relative substrate identification camera 17.Then, differential seat angle is for tilting to install correction data.
As previously discussed,, use clamp member 30 and fixture substrate 20, the off normal of the coordinate system of the coordinate system of the substrate identification camera 17 of relative absolute reference coordinate system and component identification camera 16 is proofreaied and correct according to present embodiment.Therefore, can discern off normal between the coordinate system of the coordinate system of camera 17 and component identification camera 16 to substrate, promptly the coordinate system of these identification cameras 16,17 and the off normal between the absolute reference coordinate system are carried out the utmost point and are correctly proofreaied and correct.
Particularly, the coordinate system of substrate identification camera 17 and the off normal between the component identification camera 16 can detect by using identification camera 16,17 identification clamp member 30 separately.Therefore, can carry out simple and correction rapidly.In addition, owing to use special-purpose clamp member 30 and fixture substrate 20, and be made into easily its identification, but thereby correct execution.
And, can proofread and correct accurately as a whole.Therefore, but high precision and stably electronic unit being installed on the substrate.
As mentioned above,, use clamp member and fixture substrate, can proofread and correct the former coordinate system separately (coordinate system in the design) of two identification cameras according to the offset correction method and the device thereof of position of camera of the present invention.This bearing calibration is to use respectively to be discerned camera clamp member and fixture substrate is discerned and installed, and reuse the method that substrate identification camera is discerned, even not to the additional additional mechanism of device, also can obtain the coordinate system of component identification camera and the mutual deviation that substrate is discerned the coordinate system of camera.
Therefore, even in the device that has dispatched from the factory, can simply and rake in correction data.Like this, but high precision is carried out position correction.Therefore, but high precision and stably electronic unit being installed on the substrate can improve the reliability of device.
And the influence that the thickness of the clamp member of being used by camera position correction among the present invention causes can fully compensate in the prior art.That is to say, in the present invention, can correctly carry out Figure recognition, can improve the reliability of the position correction etc. of electronic unit etc.

Claims (3)

1. position of camera offset correction method, be a kind of to be used for to the mark on the fixture substrate carry out location recognition substrate identification camera coordinate system be used for carrying out the position deviation bearing calibration that the mutual deviation of coordinate system of the component identification camera of location recognition is proofreaied and correct to being installed to clamp member on the fixture substrate, it is characterized in that, comprising:
The first shooting step, use is respectively discerned the clamp member that camera can be discerned the departure of center on coordinate system of clamp member by above-mentioned, uses above-mentioned component identification camera that this clamp member is made a video recording under the state of the posture that keeps above-mentioned clamp member;
The second shooting step uses aforesaid substrate identification camera that the mark on the above-mentioned fixture substrate is made a video recording;
Installation steps, the image pickup result according to by two identification camera shootings is installed to above-mentioned clamp member on the above-mentioned fixture substrate;
Departure is calculated step, calculates and uses aforesaid substrate identification camera to the make a video recording departure of the identification center obtained and the parts mounting center position of being obtained by aforesaid substrate identification camera according to the mark of above-mentioned fixture substrate of the mark of the clamp member of being installed; And
Aligning step according to calculating the departure that step is calculated in above-mentioned departure, is proofreaied and correct the coordinate system of aforesaid substrate identification camera or above-mentioned component identification camera.
2. position of camera driven parallax correction setter, to be used for to the mark on the fixture substrate carry out location recognition substrate identification camera coordinate system and be used for carrying out the mutual deviation of coordinate system of the component identification camera of location recognition and proofreading and correct to being installed to clamp member on the fixture substrate, it is characterized in that having:
First image unit, use is respectively discerned the clamp member that camera can be discerned the departure on the coordinate system of center of clamp member by above-mentioned, uses above-mentioned component identification camera that this clamp member is made a video recording under the state of the posture that keeps above-mentioned clamp member;
Second image unit uses aforesaid substrate identification camera that the mark on the above-mentioned fixture substrate is made a video recording;
Installation unit, the image pickup result according to by two identification camera shootings is installed to above-mentioned clamp member on the above-mentioned fixture substrate;
Departure is calculated the unit, calculates and uses aforesaid substrate identification camera to the make a video recording departure of the identification center obtained and the parts mounting center position of being obtained by aforesaid substrate identification camera according to the mark of above-mentioned fixture substrate of the mark of the clamp member of being installed; And
Correcting unit according to calculating the departure that calculate the unit by above-mentioned departure, is proofreaied and correct the coordinate system of aforesaid substrate identification camera or above-mentioned component identification camera.
3. camera position correction clamp member, it is characterized in that, using the described position deviation bearing calibration of claim 1 to carry out position deviation proofreaies and correct, and having a described position deviation means for correcting of claim 2, the image pattern being shot on the above-mentioned clamp member is by respectively can identified above-mentioned departure and constitute for concentric parts figure portion and parts mark group.
CNB2004100295201A 2003-03-20 2004-03-18 Correcting method for electronic part mounting device and device for using said method Expired - Fee Related CN1318820C (en)

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JP4616694B2 (en) * 2005-05-09 2011-01-19 Juki株式会社 Component mounting equipment
CN100358820C (en) * 2005-12-02 2008-01-02 友达光电股份有限公司 Substrate-correcting means
KR101113679B1 (en) * 2010-05-24 2012-02-14 기아자동차주식회사 Image correction method for a camera system
JP6131045B2 (en) * 2012-12-28 2017-05-17 Juki株式会社 Electronic component mounting apparatus and electronic component mounting method
JP6594545B2 (en) * 2016-07-14 2019-10-23 三菱電機株式会社 Substrate measuring device and laser processing system
CN108541141B (en) * 2018-04-12 2020-02-18 江苏博敏电子有限公司 Partition alignment method for conducting hole layer and circuit graphic layer
CN110091591B (en) * 2018-04-18 2020-07-10 广东聚华印刷显示技术有限公司 Offset correction method, device and system for glass clamp
CN112597832B (en) * 2020-12-10 2022-08-16 上海闻泰信息技术有限公司 Rectangular piece installation deviation judgment method and device
CN115097664A (en) * 2022-07-11 2022-09-23 河南省华锐光电产业有限公司 Method and device for bonding substrates

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