CN1313801C - 光位移传感器 - Google Patents

光位移传感器 Download PDF

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Publication number
CN1313801C
CN1313801C CNB038060914A CN03806091A CN1313801C CN 1313801 C CN1313801 C CN 1313801C CN B038060914 A CNB038060914 A CN B038060914A CN 03806091 A CN03806091 A CN 03806091A CN 1313801 C CN1313801 C CN 1313801C
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CN
China
Prior art keywords
light
optics
optical element
signal
lens
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB038060914A
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English (en)
Chinese (zh)
Other versions
CN1643338A (zh
Inventor
斯蒂恩·汉森
比加克·罗斯
迈克尔·林德·佳克伯森
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TECHNICAL UNIVERSITY OF DENMAR
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TECHNICAL UNIVERSITY OF DENMAR
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Publication of CN1643338A publication Critical patent/CN1643338A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Glass Compositions (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Gyroscopes (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
CNB038060914A 2002-02-14 2003-02-13 光位移传感器 Expired - Fee Related CN1313801C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35613402P 2002-02-14 2002-02-14
US60/356,134 2002-02-14

Publications (2)

Publication Number Publication Date
CN1643338A CN1643338A (zh) 2005-07-20
CN1313801C true CN1313801C (zh) 2007-05-02

Family

ID=27734610

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB038060914A Expired - Fee Related CN1313801C (zh) 2002-02-14 2003-02-13 光位移传感器

Country Status (11)

Country Link
US (1) US7209291B2 (de)
EP (2) EP1476717B1 (de)
JP (2) JP4339693B2 (de)
CN (1) CN1313801C (de)
AT (1) ATE505706T1 (de)
AU (1) AU2003208299A1 (de)
CA (1) CA2513203A1 (de)
DE (1) DE60336708D1 (de)
HK (1) HK1073500A1 (de)
RU (1) RU2319158C2 (de)
WO (1) WO2003069278A1 (de)

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JP4339693B2 (ja) 2002-02-14 2009-10-07 ダンマークス テクニスク ユニバーシテット 光学変位センサ
GB0314422D0 (en) * 2003-06-20 2003-07-23 Qinetiq Ltd Image processing system
JP5124864B2 (ja) * 2006-06-07 2013-01-23 本田技研工業株式会社 光学装置および移動装置
US20080116239A1 (en) * 2006-11-17 2008-05-22 Lu Shin-Chiang Multifunctional Yoga Stretch Strap
DE102007007923A1 (de) * 2007-02-14 2008-08-21 Carl Zeiss Nts Gmbh Phasenschiebendes Element und Teilchenstrahlgerät mit phasenschiebenden Element
US8681321B2 (en) * 2009-01-04 2014-03-25 Microsoft International Holdings B.V. Gated 3D camera
EP2213988B1 (de) 2009-01-30 2012-06-20 Delphi Technologies, Inc. System zum Messen eines Körpers in Bewegung mit Hilfe eines optischen Positionssensors
WO2012019871A1 (en) 2010-08-09 2012-02-16 Technical University Of Denmark A/S Vector velocimeter
US8692880B2 (en) * 2010-10-05 2014-04-08 Mitutoyo Corporation Image correlation displacement sensor
CN102135413B (zh) * 2010-12-14 2012-08-22 河南科技大学 一种基于相位涡旋的数字散斑相关测量方法
CN102607428B (zh) * 2012-03-30 2014-05-28 中国科学院长春光学精密机械与物理研究所 基于微光学阵列元件的二维位移测量装置
US9500690B2 (en) * 2013-11-07 2016-11-22 Lenovo Enterprise Solutions (Singapore) Pte. Ltd. Radio frequency and microwave imaging with a two-dimensional sensor array
CN111089612B (zh) * 2014-09-24 2022-06-21 原相科技股份有限公司 光学传感器及光学感测系统
CN104880155B (zh) * 2015-06-05 2017-08-22 苏州市建设工程质量检测中心有限公司 远距离基准激光位移传感器测距方法
JP6749633B2 (ja) * 2016-07-11 2020-09-02 国立大学法人大阪大学 分光器、波長測定装置及びスペクトル測定方法
CN106996745B (zh) * 2017-04-28 2023-05-09 国网河南省电力公司电力科学研究院 一种断路器本体故障性位移的激光监测系统
CN110307807B (zh) * 2019-06-10 2021-03-02 中国科学院上海光学精密机械研究所 基于doe的入射光束角度标定装置及方法
CN110933279A (zh) * 2019-12-16 2020-03-27 中国辐射防护研究院 确定微透镜阵列、中继镜和图像传感器相对位置的方法
CN111912606B (zh) * 2020-07-09 2022-05-20 河海大学 一种基于光学折射的相机物距标定方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5004345A (en) * 1988-12-05 1991-04-02 Hung Yau Y Dual-lens shearing interferometer
DE4414287A1 (de) * 1993-04-24 1994-10-27 Wolfgang Prof Dr Ing Steinchen Verfahren, Vorrichtung und Shearing-Element für die Shearing-Speckle-Interferometrie
CN1282416A (zh) * 1997-10-20 2001-01-31 帕特辛·豪 具有至少一张透镜片的光编码器
DE10010791A1 (de) * 2000-03-04 2001-09-06 Fachhochschule Ulm Verfahren zur elektronischen Speckle-Shearing-Interferometrie basierend auf der Verwendung feinstrukturierter brechender optischer Elemente

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3229846C2 (de) * 1982-08-11 1984-05-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längen- oder Winkelmeßeinrichtung
DE3416864C2 (de) * 1984-05-08 1986-04-10 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Photoelektrische Meßeinrichtung
JPS61189402A (ja) * 1985-02-18 1986-08-23 Yokogawa Electric Corp スペツクル変位計
US4806016A (en) * 1987-05-15 1989-02-21 Rosemount Inc. Optical displacement sensor
US5012090A (en) * 1989-02-09 1991-04-30 Simmonds Precision Products, Inc. Optical grating sensor and method of monitoring having a multi-period grating
JPH087044B2 (ja) * 1990-03-26 1996-01-29 理化学研究所 空間フィルタ検出器と受光素子を横断するパターンの変位量計測装置
JPH085961A (ja) * 1994-06-17 1996-01-12 Mitsubishi Heavy Ind Ltd 空間フィルタ及び空間フィルタ式測長計
DE69806952T2 (de) 1997-05-16 2002-11-21 Forskningsct Riso Roskilde Speckle verfahren und apparatur zur bestimmung von winkelverschiebung, oberflächenverschiebung und torsion
EP1062519A2 (de) * 1998-03-09 2000-12-27 OTM Technologies, Ltd. Optische translationsmessung
JP4339693B2 (ja) 2002-02-14 2009-10-07 ダンマークス テクニスク ユニバーシテット 光学変位センサ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5004345A (en) * 1988-12-05 1991-04-02 Hung Yau Y Dual-lens shearing interferometer
DE4414287A1 (de) * 1993-04-24 1994-10-27 Wolfgang Prof Dr Ing Steinchen Verfahren, Vorrichtung und Shearing-Element für die Shearing-Speckle-Interferometrie
CN1282416A (zh) * 1997-10-20 2001-01-31 帕特辛·豪 具有至少一张透镜片的光编码器
DE10010791A1 (de) * 2000-03-04 2001-09-06 Fachhochschule Ulm Verfahren zur elektronischen Speckle-Shearing-Interferometrie basierend auf der Verwendung feinstrukturierter brechender optischer Elemente

Also Published As

Publication number Publication date
EP1476717A1 (de) 2004-11-17
RU2319158C2 (ru) 2008-03-10
CN1643338A (zh) 2005-07-20
HK1073500A1 (en) 2005-10-07
JP2009109513A (ja) 2009-05-21
ATE505706T1 (de) 2011-04-15
RU2004127590A (ru) 2005-04-20
JP2005517915A (ja) 2005-06-16
DE60336708D1 (de) 2011-05-26
WO2003069278A1 (en) 2003-08-21
AU2003208299A1 (en) 2003-09-04
US7209291B2 (en) 2007-04-24
JP4339693B2 (ja) 2009-10-07
EP2400260A1 (de) 2011-12-28
CA2513203A1 (en) 2003-08-21
EP1476717B1 (de) 2011-04-13
US20050128594A1 (en) 2005-06-16

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