CN1307603A - 多环共聚物组合物 - Google Patents
多环共聚物组合物 Download PDFInfo
- Publication number
- CN1307603A CN1307603A CN99807961A CN99807961A CN1307603A CN 1307603 A CN1307603 A CN 1307603A CN 99807961 A CN99807961 A CN 99807961A CN 99807961 A CN99807961 A CN 99807961A CN 1307603 A CN1307603 A CN 1307603A
- Authority
- CN
- China
- Prior art keywords
- group
- acid
- methyl
- alkyl
- branching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F232/00—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
- C08F232/08—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system having condensed rings
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F232/00—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
Abstract
Description
Claims (1)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9136198P | 1998-07-01 | 1998-07-01 | |
US60/091,361 | 1998-07-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1307603A true CN1307603A (zh) | 2001-08-08 |
Family
ID=22227385
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN99807961A Pending CN1307603A (zh) | 1998-07-01 | 1999-06-18 | 多环共聚物组合物 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6303724B1 (zh) |
EP (1) | EP1093480A1 (zh) |
JP (1) | JP2002519487A (zh) |
KR (1) | KR100546472B1 (zh) |
CN (1) | CN1307603A (zh) |
AU (1) | AU4826399A (zh) |
ID (1) | ID27889A (zh) |
WO (1) | WO2000001747A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102298265A (zh) * | 2002-07-03 | 2011-12-28 | 住友电木株式会社 | 共聚物组合物、光刻介电组合物及电气或电子器件 |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6232417B1 (en) * | 1996-03-07 | 2001-05-15 | The B. F. Goodrich Company | Photoresist compositions comprising polycyclic polymers with acid labile pendant groups |
US6406828B1 (en) * | 2000-02-24 | 2002-06-18 | Shipley Company, L.L.C. | Polymer and photoresist compositions |
TW594410B (en) * | 2000-09-07 | 2004-06-21 | Shinetsu Chemical Co | Resist compositions and patterning process |
KR100604751B1 (ko) * | 2001-08-24 | 2006-07-26 | 주식회사 하이닉스반도체 | 산 확산 방지용 포토레지스트 공중합체 및 이를 함유하는포토레지스트 조성물 |
WO2003102005A1 (en) * | 2002-05-30 | 2003-12-11 | Exxonmobil Chemical Patents Inc. | Soluble late transition metal catalysts for olefin oligomerizations |
US6677419B1 (en) | 2002-11-13 | 2004-01-13 | International Business Machines Corporation | Preparation of copolymers |
US7160834B2 (en) * | 2003-03-18 | 2007-01-09 | Exxonmobil Chemical Patents Inc. | Soluble group-10 α-diimine catalyst precursors, catalysts and methods for dimerizing and oligomerizing olefins |
US7087687B2 (en) * | 2003-08-21 | 2006-08-08 | Rohm And Haas Company | Catalytic composition and its preparation and use for preparing polymers from ethylenically unsaturated monomers |
US7408013B2 (en) * | 2003-09-23 | 2008-08-05 | Commonwealth Scientific And Industrial Research Organization | Low-polydispersity photoimageable polymers and photoresists and processes for microlithography |
US6956003B2 (en) * | 2003-12-03 | 2005-10-18 | Formosa Plastics Corporation, U.S.A. | Catalyst system for ethylene (co)-polymerization |
US7172986B2 (en) * | 2004-06-14 | 2007-02-06 | Rohm And Haas Company | Catalytic composition and its preparation and use for preparing polymers from ethylenically unsaturated monomers |
US7199074B2 (en) * | 2004-06-14 | 2007-04-03 | Rohm And Haas Company | Catalytic composition and its preparation and use for preparing polymers from ethylenically unsaturated monomers |
JP4752211B2 (ja) * | 2004-08-13 | 2011-08-17 | Jsr株式会社 | 環状オレフィン系付加共重合体の製造方法、環状オレフィン系付加共重合体およびその用途 |
WO2006031067A1 (en) * | 2004-09-16 | 2006-03-23 | Lg Chem, Ltd. | Catalyst system for polymerizing cyclic olefin having polar functional group, polymerizing method using the catalyst system, olefin polymer produced by the method and optical anisotropic film comprising the olefin polymer |
US7595369B2 (en) * | 2004-11-10 | 2009-09-29 | Lg Chem, Ltd. | Method of polymerizing cyclic olefins and vinyl olefins, copolymer produced by the method and optical anisotropic film comprising the same |
US7749934B2 (en) * | 2005-02-22 | 2010-07-06 | Rohm And Haas Company | Protected catalytic composition and its preparation and use for preparing polymers from ethylenically unsaturated monomers |
US7799883B2 (en) | 2005-02-22 | 2010-09-21 | Promerus Llc | Norbornene-type polymers, compositions thereof and lithographic process using such compositions |
JP4794293B2 (ja) * | 2005-07-14 | 2011-10-19 | 株式会社クラレ | 金属化合物、それを用いたビニル系モノマー重合用触媒組成物および該組成物を用いたビニル系モノマーの重合への使用 |
KR102486898B1 (ko) * | 2021-02-09 | 2023-01-10 | 경북대학교 산학협력단 | 환형올레핀계 단량체 중합용 이민계 리간드 함유 코발트 착체 촉매 및 이를 이용한 환형올레핀계 중합체의 제조방법 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3313785A (en) * | 1963-06-11 | 1967-04-11 | Union Carbide Corp | Polysulfones and method for their production |
US3536681A (en) | 1967-12-13 | 1970-10-27 | Goodrich Co B F | Substituted norbornene compounds |
US3697490A (en) | 1971-06-21 | 1972-10-10 | Goodrich Co B F | Polymers of alkoxy alkyl acrylates, alkyl acrylates and substituted norbornene |
AU6145373A (en) | 1972-11-29 | 1975-04-17 | American Cyanamid Co | Vulcanizable polyacrylate elastomer |
DE3854958T2 (de) * | 1987-11-17 | 1996-11-14 | Japan Synthetic Rubber Co Ltd | Transparentes Harzmaterial |
JPH0463810A (ja) | 1990-07-03 | 1992-02-28 | Kuraray Co Ltd | アクリル―ノルボルネン系共重合体およびその製造法 |
JP3000745B2 (ja) | 1991-09-19 | 2000-01-17 | 富士通株式会社 | レジスト組成物とレジストパターンの形成方法 |
DE4319178C2 (de) | 1992-06-10 | 1997-07-17 | Fujitsu Ltd | Resist-Zusammensetzung enthaltend ein Polymermaterial und einen Säuregenerator |
US5468819A (en) | 1993-11-16 | 1995-11-21 | The B.F. Goodrich Company | Process for making polymers containing a norbornene repeating unit by addition polymerization using an organo (nickel or palladium) complex |
WO1996023010A2 (en) | 1995-01-24 | 1996-08-01 | E.I. Du Pont De Nemours And Company | α-OLEFINS AND OLEFIN POLYMERS AND PROCESSES THEREFOR |
US5677405A (en) * | 1995-05-24 | 1997-10-14 | The B.F. Goodrich Company | Homopolymers and copolymers of cationically polymerizable monomers and method of their preparation |
US5705503A (en) | 1995-05-25 | 1998-01-06 | Goodall; Brian Leslie | Addition polymers of polycycloolefins containing functional substituents |
US5843624A (en) | 1996-03-08 | 1998-12-01 | Lucent Technologies Inc. | Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material |
KR100261022B1 (ko) * | 1996-10-11 | 2000-09-01 | 윤종용 | 화학증폭형 레지스트 조성물 |
KR100265597B1 (ko) | 1996-12-30 | 2000-09-15 | 김영환 | Arf 감광막 수지 및 그 제조방법 |
EP0878738B1 (en) * | 1997-05-12 | 2002-01-09 | Fuji Photo Film Co., Ltd. | Positive resist composition |
-
1999
- 1999-06-18 JP JP2000558145A patent/JP2002519487A/ja active Pending
- 1999-06-18 CN CN99807961A patent/CN1307603A/zh active Pending
- 1999-06-18 KR KR1020007015041A patent/KR100546472B1/ko not_active IP Right Cessation
- 1999-06-18 AU AU48263/99A patent/AU4826399A/en not_active Abandoned
- 1999-06-18 WO PCT/US1999/013903 patent/WO2000001747A1/en active IP Right Grant
- 1999-06-18 EP EP99931841A patent/EP1093480A1/en not_active Withdrawn
- 1999-06-18 ID IDW20002703A patent/ID27889A/id unknown
- 1999-06-30 US US09/345,286 patent/US6303724B1/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102298265A (zh) * | 2002-07-03 | 2011-12-28 | 住友电木株式会社 | 共聚物组合物、光刻介电组合物及电气或电子器件 |
CN102298265B (zh) * | 2002-07-03 | 2014-04-16 | 住友电木株式会社 | 光刻介电组合物及电气或电子器件 |
Also Published As
Publication number | Publication date |
---|---|
EP1093480A1 (en) | 2001-04-25 |
ID27889A (id) | 2001-05-03 |
JP2002519487A (ja) | 2002-07-02 |
WO2000001747A1 (en) | 2000-01-13 |
KR20010053311A (ko) | 2001-06-25 |
KR100546472B1 (ko) | 2006-01-26 |
US6303724B1 (en) | 2001-10-16 |
AU4826399A (en) | 2000-01-24 |
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C06 | Publication | ||
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C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: PROMERUS LLC Free format text: FORMER OWNER: B.F.GOODRICH CO. (US) 500 SOUTH MAIN STREET AKRON, OHIO 44318, USA Effective date: 20030418 |
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C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20030418 Address after: American Ohio Applicant after: Promerus LLC Address before: North Carolina Applicant before: B. F. Goodrich Company |
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