CN1293367C - 参考点泰伯编码器 - Google Patents

参考点泰伯编码器 Download PDF

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Publication number
CN1293367C
CN1293367C CNB028219309A CN02821930A CN1293367C CN 1293367 C CN1293367 C CN 1293367C CN B028219309 A CNB028219309 A CN B028219309A CN 02821930 A CN02821930 A CN 02821930A CN 1293367 C CN1293367 C CN 1293367C
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CN
China
Prior art keywords
scale
encoder
detector
detector array
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB028219309A
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English (en)
Chinese (zh)
Other versions
CN1582387A (zh
Inventor
威廉·G·索伯恩
诺曼·J·托比
梅尔文·J·J·特尔
道格拉斯·A·克林拜尔
拉尔夫·A·凯利埃尔
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GSI Group Corp
MicroE Systems Inc
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Publication date
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Publication of CN1582387A publication Critical patent/CN1582387A/zh
Application granted granted Critical
Publication of CN1293367C publication Critical patent/CN1293367C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
CNB028219309A 2001-08-30 2002-08-12 参考点泰伯编码器 Expired - Fee Related CN1293367C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31616001P 2001-08-30 2001-08-30
US60/316,160 2001-08-30

Publications (2)

Publication Number Publication Date
CN1582387A CN1582387A (zh) 2005-02-16
CN1293367C true CN1293367C (zh) 2007-01-03

Family

ID=23227766

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028219309A Expired - Fee Related CN1293367C (zh) 2001-08-30 2002-08-12 参考点泰伯编码器

Country Status (6)

Country Link
EP (1) EP1421343A2 (enExample)
JP (1) JP2005526951A (enExample)
CN (1) CN1293367C (enExample)
AU (1) AU2002329728A1 (enExample)
CA (1) CA2458954A1 (enExample)
WO (1) WO2003021194A2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10353808B4 (de) * 2003-11-14 2015-09-03 Dr. Johannes Heidenhain Gmbh Messteilung für eine Positionsmesseinrichtung und Positionsmesseinrichtung
CN1989571A (zh) * 2004-07-21 2007-06-27 皇家飞利浦电子股份有限公司 信息载体、用于读取这种信息载体的系统和装置
DE102005006247A1 (de) * 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7385178B2 (en) 2005-10-26 2008-06-10 Avago Technologies Ecbu Ip Pte Ltd Reflective encoders with various emitter-detector configurations
US20090219547A1 (en) * 2006-02-06 2009-09-03 Petteri Kauhanen Method and Device for Position Sensing in an Imaging System
DE102007035345A1 (de) * 2006-11-20 2008-05-21 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP5489068B2 (ja) * 2007-07-24 2014-05-14 株式会社ニコン 位置計測システム、露光装置、位置計測方法、露光方法及びデバイス製造方法、並びに工具及び計測方法
JP5391115B2 (ja) * 2010-03-18 2014-01-15 株式会社ミツトヨ 光電式エンコーダ
WO2015049173A1 (en) * 2013-10-01 2015-04-09 Renishaw Plc Reference mark detector arrangement
JP6272129B2 (ja) * 2014-05-02 2018-01-31 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
JP6987045B2 (ja) * 2015-09-09 2021-12-22 レニショウ パブリック リミテッド カンパニーRenishaw Public Limited Company エンコーダ装置
EP3623769A1 (en) * 2018-09-12 2020-03-18 Renishaw PLC Measurement device
EP3825659B1 (en) 2019-11-19 2023-11-08 CSEM Centre Suisse D'electronique Et De Microtechnique SA Position encoder
CN114440945B (zh) * 2022-02-28 2023-06-16 中北大学 一种基于双层圆孔点阵二维光栅的可调谐光学角度编码器

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2246430A (en) * 1988-01-22 1992-01-29 Mitutoyo Corp Optical encoder
US5260568A (en) * 1990-07-18 1993-11-09 Okuma Corporation Absolute position detector with diffraction grating windows and spot position detection
US5534693A (en) * 1993-07-12 1996-07-09 Canon Kabushiki Kaisha Optical displacement detection apparatus employing diffraction gratings and a reference position sensor located on the scale
US5559600A (en) * 1992-05-05 1996-09-24 Microe, Inc. Apparatus for detecting relative movement
US5646730A (en) * 1992-05-05 1997-07-08 Microe, Inc. Relative movement detecting apparatus using a detector positioned in a region of natural interference
CN1170139A (zh) * 1995-06-08 1998-01-14 松下电器产业株式会社 相位光栅及其制造方法、光学编码器、使用光学编码器的电动机及使用该电动机的机械手
CN1171560A (zh) * 1996-05-20 1998-01-28 松下电器产业株式会社 光学编码器及位置检测方法
EP0895239A2 (en) * 1997-07-29 1999-02-03 Hoetron, Inc. Optical track sensing device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2246430A (en) * 1988-01-22 1992-01-29 Mitutoyo Corp Optical encoder
US5260568A (en) * 1990-07-18 1993-11-09 Okuma Corporation Absolute position detector with diffraction grating windows and spot position detection
US5559600A (en) * 1992-05-05 1996-09-24 Microe, Inc. Apparatus for detecting relative movement
US5646730A (en) * 1992-05-05 1997-07-08 Microe, Inc. Relative movement detecting apparatus using a detector positioned in a region of natural interference
US5534693A (en) * 1993-07-12 1996-07-09 Canon Kabushiki Kaisha Optical displacement detection apparatus employing diffraction gratings and a reference position sensor located on the scale
CN1170139A (zh) * 1995-06-08 1998-01-14 松下电器产业株式会社 相位光栅及其制造方法、光学编码器、使用光学编码器的电动机及使用该电动机的机械手
CN1171560A (zh) * 1996-05-20 1998-01-28 松下电器产业株式会社 光学编码器及位置检测方法
EP0895239A2 (en) * 1997-07-29 1999-02-03 Hoetron, Inc. Optical track sensing device
US5991249A (en) * 1997-07-29 1999-11-23 Hoetron, Inc. Optical track sensing device

Also Published As

Publication number Publication date
CN1582387A (zh) 2005-02-16
EP1421343A2 (en) 2004-05-26
CA2458954A1 (en) 2003-03-13
WO2003021194A2 (en) 2003-03-13
WO2003021194A3 (en) 2003-08-14
AU2002329728A1 (en) 2003-03-18
JP2005526951A (ja) 2005-09-08

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Owner name: GSI BLOOM MAUNICK CO., LTD.

Free format text: FORMER OWNER: MICROE SYSTEMS INC.

Effective date: 20050923

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Address after: Michigan

Applicant after: GSI lum Monique company

Address before: Massachusetts USA

Applicant before: Microe Systems Inc.

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20070103

Termination date: 20150812

EXPY Termination of patent right or utility model