CN1279424A - 半导体工厂自动化系统及用于控制测量设备的方法 - Google Patents

半导体工厂自动化系统及用于控制测量设备的方法 Download PDF

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Publication number
CN1279424A
CN1279424A CN 00122213 CN00122213A CN1279424A CN 1279424 A CN1279424 A CN 1279424A CN 00122213 CN00122213 CN 00122213 CN 00122213 A CN00122213 A CN 00122213A CN 1279424 A CN1279424 A CN 1279424A
Authority
CN
China
Prior art keywords
semiconductor wafer
measurement data
data
semiconductor
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 00122213
Other languages
English (en)
Chinese (zh)
Inventor
河圣海
曹荣洙
高明载
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SK Hynix Inc
Original Assignee
Hyundai Electronics Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR10-1999-0024934A external-priority patent/KR100498601B1/ko
Priority claimed from KR10-1999-0024870A external-priority patent/KR100498600B1/ko
Application filed by Hyundai Electronics Industries Co Ltd filed Critical Hyundai Electronics Industries Co Ltd
Publication of CN1279424A publication Critical patent/CN1279424A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Factory Administration (AREA)
CN 00122213 1999-06-28 2000-06-28 半导体工厂自动化系统及用于控制测量设备的方法 Pending CN1279424A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR24870/1999 1999-06-28
KR10-1999-0024934A KR100498601B1 (ko) 1999-06-28 1999-06-28 반도체 제조용 엘립소미터 장비의 데이터를 수집하기 위한 방법
KR24934/1999 1999-06-28
KR10-1999-0024870A KR100498600B1 (ko) 1999-06-28 1999-06-28 반도체 제조용 프로메트릭스 장비의 데이터를 수집하기 위한방법

Publications (1)

Publication Number Publication Date
CN1279424A true CN1279424A (zh) 2001-01-10

Family

ID=26635597

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 00122213 Pending CN1279424A (zh) 1999-06-28 2000-06-28 半导体工厂自动化系统及用于控制测量设备的方法

Country Status (5)

Country Link
JP (1) JP2001076982A (ja)
CN (1) CN1279424A (ja)
DE (1) DE10031478A1 (ja)
GB (1) GB2351804B (ja)
TW (1) TW466577B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100342485C (zh) * 2003-06-10 2007-10-10 旺宏电子股份有限公司 炉管产能监视系统及其运作方法
CN100399342C (zh) * 2002-03-29 2008-07-02 音质技术公司 使计量系统适于与不同计量器件适配而工作的方法和系统
CN105185731A (zh) * 2015-08-17 2015-12-23 北京七星华创电子股份有限公司 一种半导体热处理设备的晶片调度控制方法及系统

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7160739B2 (en) 2001-06-19 2007-01-09 Applied Materials, Inc. Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
CN1720490B (zh) 2002-11-15 2010-12-08 应用材料有限公司 用于控制具有多变量输入参数的制造工艺的方法和系统
EP2515976B1 (en) * 2009-12-22 2015-07-22 Unitract Syringe Pty Ltd Retractable syringe with improved delivery efficiency and locking system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5828674A (en) * 1997-09-16 1998-10-27 Teradyne, Inc. Production interface for integrated circuit test system
JP4240559B2 (ja) * 1997-12-12 2009-03-18 株式会社日立国際電気 基板処理管理装置
JPH11274076A (ja) * 1999-02-12 1999-10-08 Nikon Corp 露光装置、リソグラフィシステム及びこれを利用した半導体デバイス製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100399342C (zh) * 2002-03-29 2008-07-02 音质技术公司 使计量系统适于与不同计量器件适配而工作的方法和系统
CN100342485C (zh) * 2003-06-10 2007-10-10 旺宏电子股份有限公司 炉管产能监视系统及其运作方法
CN105185731A (zh) * 2015-08-17 2015-12-23 北京七星华创电子股份有限公司 一种半导体热处理设备的晶片调度控制方法及系统
CN105185731B (zh) * 2015-08-17 2018-10-16 北京北方华创微电子装备有限公司 一种半导体热处理设备的晶片调度控制方法及系统

Also Published As

Publication number Publication date
GB0015837D0 (en) 2000-08-23
GB2351804A (en) 2001-01-10
TW466577B (en) 2001-12-01
JP2001076982A (ja) 2001-03-23
GB2351804B (en) 2003-09-24
DE10031478A1 (de) 2001-07-12

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