CN1233473C - Method and device for cleaning LCD using plasma - Google Patents
Method and device for cleaning LCD using plasma Download PDFInfo
- Publication number
- CN1233473C CN1233473C CNB031222056A CN03122205A CN1233473C CN 1233473 C CN1233473 C CN 1233473C CN B031222056 A CNB031222056 A CN B031222056A CN 03122205 A CN03122205 A CN 03122205A CN 1233473 C CN1233473 C CN 1233473C
- Authority
- CN
- China
- Prior art keywords
- lcd
- film transistor
- thin film
- plasma treatment
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 26
- 238000005530 etching Methods 0.000 claims abstract description 5
- 238000005507 spraying Methods 0.000 claims abstract description 4
- 239000010409 thin film Substances 0.000 claims description 69
- 238000009832 plasma treatment Methods 0.000 claims description 46
- 238000001035 drying Methods 0.000 claims description 6
- 238000003491 array Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 239000005416 organic matter Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000000704 physical effect Effects 0.000 description 5
- 230000001680 brushing effect Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 230000002285 radioactive effect Effects 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical group O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 206010013786 Dry skin Diseases 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 208000002173 dizziness Diseases 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- NHDHVHZZCFYRSB-UHFFFAOYSA-N pyriproxyfen Chemical compound C=1C=CC=NC=1OC(C)COC(C=C1)=CC=C1OC1=CC=CC=C1 NHDHVHZZCFYRSB-UHFFFAOYSA-N 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Liquid Crystal (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR200221551 | 2002-04-19 | ||
KR1020020021551A KR100608452B1 (en) | 2002-04-19 | 2002-04-19 | Cleaning method using plasma for manufacturing TFT-LCD and apparatus thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1451491A CN1451491A (en) | 2003-10-29 |
CN1233473C true CN1233473C (en) | 2005-12-28 |
Family
ID=29244756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB031222056A Expired - Lifetime CN1233473C (en) | 2002-04-19 | 2003-04-16 | Method and device for cleaning LCD using plasma |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100608452B1 (en) |
CN (1) | CN1233473C (en) |
TW (1) | TW572798B (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100676601B1 (en) * | 2004-09-17 | 2007-01-30 | 주식회사 삼한텍 | The brush-roller for washing fpd |
CN104907288A (en) * | 2014-03-13 | 2015-09-16 | 东莞高伟光学电子有限公司 | Cleaning equipment and technique for cleaning electronic components |
CN105057317A (en) * | 2015-09-02 | 2015-11-18 | 扬州宁达贵金属有限公司 | Method for splitting waste liquid crystal display |
KR101635550B1 (en) * | 2016-01-20 | 2016-07-01 | 엠에스티코리아(주) | apparatus for treating substrate |
KR101634705B1 (en) * | 2016-01-20 | 2016-06-29 | 엠에스티코리아(주) | apparatus for treating substrate |
CN109719087B (en) * | 2019-01-04 | 2021-06-18 | Oppo(重庆)智能科技有限公司 | Screen activating device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05166789A (en) * | 1991-12-12 | 1993-07-02 | Shimada Phys & Chem Ind Co Ltd | Cleaner/drier for substrate |
JPH10209097A (en) * | 1997-01-21 | 1998-08-07 | Dainippon Screen Mfg Co Ltd | Substrate cleaning method and apparatus |
JPH11333394A (en) * | 1998-05-27 | 1999-12-07 | Toray Ind Inc | Method for washing substrate and washing apparatus |
JP2001314827A (en) * | 2000-05-10 | 2001-11-13 | Sharp Corp | Method and apparatus for cleaning substrate |
-
2002
- 2002-04-19 KR KR1020020021551A patent/KR100608452B1/en active IP Right Grant
-
2003
- 2003-04-07 TW TW92107853A patent/TW572798B/en not_active IP Right Cessation
- 2003-04-16 CN CNB031222056A patent/CN1233473C/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
TW572798B (en) | 2004-01-21 |
KR100608452B1 (en) | 2006-08-02 |
TW200305461A (en) | 2003-11-01 |
CN1451491A (en) | 2003-10-29 |
KR20030083129A (en) | 2003-10-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140227 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140227 Address after: Gyeonggi Do Lingtong paldal Gu Dong 1009-1 N3. Tada Building 8 Patentee after: Display Manufacturing Service Co.,Ltd. Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Address before: Gyeonggi Do, South Korea Patentee before: Display Manufacturing Service Co.,Ltd. |
|
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: Display Manufacturing Service Co.,Ltd. Address before: Eight Floors of Aitian Building, 1009-1 Lingtong Cave, Bada District, Shuiyuan City, Gyeonggi Province Patentee before: Display Manufacturing Service Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
|
CP03 | Change of name, title or address | ||
CX01 | Expiry of patent term |
Granted publication date: 20051228 |
|
CX01 | Expiry of patent term |