CN1232858C - 带有自限制微型机械元件的双层介质反射空间光调制器 - Google Patents

带有自限制微型机械元件的双层介质反射空间光调制器 Download PDF

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Publication number
CN1232858C
CN1232858C CNB988142236A CN98814223A CN1232858C CN 1232858 C CN1232858 C CN 1232858C CN B988142236 A CNB988142236 A CN B988142236A CN 98814223 A CN98814223 A CN 98814223A CN 1232858 C CN1232858 C CN 1232858C
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CN
China
Prior art keywords
deflecting element
spatial light
light modulator
medium
layer
Prior art date
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Expired - Fee Related
Application number
CNB988142236A
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English (en)
Chinese (zh)
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CN1309782A (zh
Inventor
A·G·休博斯
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Reflectivity Inc
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Reflectivity Inc
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Publication of CN1309782A publication Critical patent/CN1309782A/zh
Application granted granted Critical
Publication of CN1232858C publication Critical patent/CN1232858C/zh
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CNB988142236A 1998-09-24 1998-09-24 带有自限制微型机械元件的双层介质反射空间光调制器 Expired - Fee Related CN1232858C (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1998/020161 WO2000017695A1 (en) 1998-09-24 1998-09-24 A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNB2005100679297A Division CN100343717C (zh) 1998-09-24 1998-09-24 带有自限制微型机械元件的双层介质反射空间光调制器

Publications (2)

Publication Number Publication Date
CN1309782A CN1309782A (zh) 2001-08-22
CN1232858C true CN1232858C (zh) 2005-12-21

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNB988142236A Expired - Fee Related CN1232858C (zh) 1998-09-24 1998-09-24 带有自限制微型机械元件的双层介质反射空间光调制器

Country Status (7)

Country Link
EP (1) EP1116063B1 (enExample)
JP (1) JP2002525676A (enExample)
KR (1) KR100635589B1 (enExample)
CN (1) CN1232858C (enExample)
AU (1) AU9583798A (enExample)
DE (1) DE69834847T2 (enExample)
WO (1) WO2000017695A1 (enExample)

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US7307775B2 (en) * 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US20040069742A1 (en) * 2002-06-19 2004-04-15 Pan Shaoher X. Fabrication of a reflective spatial light modulator
US20050094241A1 (en) * 2003-11-01 2005-05-05 Fusao Ishii Electromechanical micromirror devices and methods of manufacturing the same
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
US6862127B1 (en) * 2003-11-01 2005-03-01 Fusao Ishii High performance micromirror arrays and methods of manufacturing the same
TW593127B (en) 2003-08-18 2004-06-21 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
CN100549493C (zh) * 2003-12-10 2009-10-14 硅光机器公司 二维空间光调制器
JP4651302B2 (ja) * 2004-04-28 2011-03-16 よこはまティーエルオー株式会社 マイクロミラー素子の製造方法
US7573547B2 (en) 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device
US7184202B2 (en) * 2004-09-27 2007-02-27 Idc, Llc Method and system for packaging a MEMS device
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
BRPI0607880A2 (pt) * 2005-02-23 2009-10-20 Pixtronix Inc aparelho de visualização e método de formação de uma imagem em um aparelho de visualização
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
CN101576656B (zh) * 2005-02-23 2012-05-30 皮克斯特罗尼克斯公司 显示方法和装置
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
JP4743630B2 (ja) 2005-10-20 2011-08-10 株式会社リコー 光偏向装置、光偏向装置アレイおよび画像投影表示装置
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
JP2007233065A (ja) 2006-03-01 2007-09-13 Ricoh Co Ltd 光偏向装置とその製造方法並びに光投影装置
US7528933B2 (en) * 2006-04-06 2009-05-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method utilizing a MEMS mirror with large deflection using a non-linear spring arrangement
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
KR20120132680A (ko) 2010-02-02 2012-12-07 픽스트로닉스 인코포레이티드 저온 실 유체 충전된 디스플레이 장치의 제조 방법
WO2011097258A1 (en) 2010-02-02 2011-08-11 Pixtronix, Inc. Circuits for controlling display apparatus
CN102236224B (zh) * 2010-04-30 2014-01-15 北京京东方光电科技有限公司 显示面板及制造方法和显示器
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US9580304B2 (en) * 2015-05-07 2017-02-28 Texas Instruments Incorporated Low-stress low-hydrogen LPCVD silicon nitride
TWI638419B (zh) * 2016-04-18 2018-10-11 村田製作所股份有限公司 一種掃描鏡設備與其製造方法

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US4229732A (en) * 1978-12-11 1980-10-21 International Business Machines Corporation Micromechanical display logic and array
CH633902A5 (fr) * 1980-03-11 1982-12-31 Centre Electron Horloger Dispositif de modulation de lumiere.
FR2710161B1 (fr) * 1993-09-13 1995-11-24 Suisse Electronique Microtech Réseau miniature d'obturateurs de lumière.
US5454906A (en) * 1994-06-21 1995-10-03 Texas Instruments Inc. Method of providing sacrificial spacer for micro-mechanical devices
US5784190A (en) * 1995-04-27 1998-07-21 John M. Baker Electro-micro-mechanical shutters on transparent substrates
US5768009A (en) * 1997-04-18 1998-06-16 E-Beam Light valve target comprising electrostatically-repelled micro-mirrors
US5808780A (en) * 1997-06-09 1998-09-15 Texas Instruments Incorporated Non-contacting micromechanical optical switch

Also Published As

Publication number Publication date
EP1116063A1 (en) 2001-07-18
JP2002525676A (ja) 2002-08-13
EP1116063A4 (en) 2003-08-20
WO2000017695A1 (en) 2000-03-30
DE69834847D1 (de) 2006-07-20
KR100635589B1 (ko) 2006-10-18
KR20010106484A (ko) 2001-11-29
CN1309782A (zh) 2001-08-22
DE69834847T2 (de) 2007-02-15
AU9583798A (en) 2000-04-10
EP1116063B1 (en) 2006-06-07

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Termination date: 20140924

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