CN121003031A - 碳化硅半导体装置 - Google Patents

碳化硅半导体装置

Info

Publication number
CN121003031A
CN121003031A CN202480026118.3A CN202480026118A CN121003031A CN 121003031 A CN121003031 A CN 121003031A CN 202480026118 A CN202480026118 A CN 202480026118A CN 121003031 A CN121003031 A CN 121003031A
Authority
CN
China
Prior art keywords
layer
region
gate
jfet
silicon carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480026118.3A
Other languages
English (en)
Chinese (zh)
Inventor
片野拓真
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of CN121003031A publication Critical patent/CN121003031A/zh
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/81Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation

Landscapes

  • Junction Field-Effect Transistors (AREA)
CN202480026118.3A 2023-04-26 2024-04-25 碳化硅半导体装置 Pending CN121003031A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023072621A JP2024157941A (ja) 2023-04-26 2023-04-26 炭化珪素半導体装置
JP2023-072621 2023-04-26
PCT/JP2024/016352 WO2024225407A1 (ja) 2023-04-26 2024-04-25 炭化珪素半導体装置

Publications (1)

Publication Number Publication Date
CN121003031A true CN121003031A (zh) 2025-11-21

Family

ID=93256764

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202480026118.3A Pending CN121003031A (zh) 2023-04-26 2024-04-25 碳化硅半导体装置

Country Status (3)

Country Link
JP (1) JP2024157941A (enExample)
CN (1) CN121003031A (enExample)
WO (1) WO2024225407A1 (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111052393B (zh) * 2018-02-14 2023-11-14 富士电机株式会社 半导体装置
JP7635524B2 (ja) * 2020-09-08 2025-02-26 富士電機株式会社 半導体装置および半導体装置の製造方法
JP7647239B2 (ja) * 2021-03-30 2025-03-18 富士電機株式会社 半導体装置
JP7593225B2 (ja) * 2021-05-14 2024-12-03 株式会社デンソー 炭化珪素半導体装置
JP7643179B2 (ja) * 2021-05-24 2025-03-11 富士電機株式会社 炭化珪素半導体装置

Also Published As

Publication number Publication date
JP2024157941A (ja) 2024-11-08
WO2024225407A1 (ja) 2024-10-31

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