CN120826293A - 激光加工中的被加工物的检查方法及检查装置 - Google Patents

激光加工中的被加工物的检查方法及检查装置

Info

Publication number
CN120826293A
CN120826293A CN202480019400.9A CN202480019400A CN120826293A CN 120826293 A CN120826293 A CN 120826293A CN 202480019400 A CN202480019400 A CN 202480019400A CN 120826293 A CN120826293 A CN 120826293A
Authority
CN
China
Prior art keywords
surface roughness
signal
workpiece
calculated
training data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480019400.9A
Other languages
English (en)
Chinese (zh)
Inventor
藤原和树
船见浩司
中井出
白石龙朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN120826293A publication Critical patent/CN120826293A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Laser Beam Processing (AREA)
CN202480019400.9A 2023-03-27 2024-02-21 激光加工中的被加工物的检查方法及检查装置 Pending CN120826293A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023-049726 2023-03-27
JP2023049726 2023-03-27
PCT/JP2024/006388 WO2024202744A1 (ja) 2023-03-27 2024-02-21 レーザ加工における被加工物の検査方法及び検査装置

Publications (1)

Publication Number Publication Date
CN120826293A true CN120826293A (zh) 2025-10-21

Family

ID=92905140

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202480019400.9A Pending CN120826293A (zh) 2023-03-27 2024-02-21 激光加工中的被加工物的检查方法及检查装置

Country Status (4)

Country Link
US (1) US20250387851A1 (https=)
JP (1) JPWO2024202744A1 (https=)
CN (1) CN120826293A (https=)
WO (1) WO2024202744A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121856149A (zh) * 2024-10-11 2026-04-14 三星Sdi株式会社 结合强度检查设备和结合系统

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5987993A (ja) * 1982-11-11 1984-05-21 Inoue Japax Res Inc 加工表面仕上加工装置
JPS62124085A (ja) * 1985-11-25 1987-06-05 Kawasaki Steel Corp ロ−ルの粗面化方法およびその装置
US8536483B2 (en) * 2007-03-22 2013-09-17 General Lasertronics Corporation Methods for stripping and modifying surfaces with laser-induced ablation
KR101485451B1 (ko) * 2007-12-19 2015-01-23 가부시키가이샤 토쿄 세이미쯔 레이저 다이싱 장치 및 다이싱 방법

Also Published As

Publication number Publication date
JPWO2024202744A1 (https=) 2024-10-03
WO2024202744A1 (ja) 2024-10-03
US20250387851A1 (en) 2025-12-25

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