CN120418629A - 传感器元件、传感器元件的制造方法和气体测定装置 - Google Patents

传感器元件、传感器元件的制造方法和气体测定装置

Info

Publication number
CN120418629A
CN120418629A CN202380088473.9A CN202380088473A CN120418629A CN 120418629 A CN120418629 A CN 120418629A CN 202380088473 A CN202380088473 A CN 202380088473A CN 120418629 A CN120418629 A CN 120418629A
Authority
CN
China
Prior art keywords
gas
sensor element
tertiary amine
film
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380088473.9A
Other languages
English (en)
Chinese (zh)
Inventor
高桥真由美
政冈雷太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of CN120418629A publication Critical patent/CN120418629A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CN202380088473.9A 2022-12-28 2023-12-27 传感器元件、传感器元件的制造方法和气体测定装置 Pending CN120418629A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202263435648P 2022-12-28 2022-12-28
US63/435,648 2022-12-28
PCT/JP2023/046994 WO2024143488A1 (ja) 2022-12-28 2023-12-27 センサ素子、センサ素子の製造方法およびガス測定装置

Publications (1)

Publication Number Publication Date
CN120418629A true CN120418629A (zh) 2025-08-01

Family

ID=91717710

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380088473.9A Pending CN120418629A (zh) 2022-12-28 2023-12-27 传感器元件、传感器元件的制造方法和气体测定装置

Country Status (3)

Country Link
JP (1) JPWO2024143488A1 (https=)
CN (1) CN120418629A (https=)
WO (1) WO2024143488A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0320762Y2 (https=) * 1984-12-24 1991-05-07
TWI688776B (zh) * 2016-12-30 2020-03-21 美商陶氏全球科技責任有限公司 氣體感測器及其製造方法
JP7414749B2 (ja) * 2020-03-17 2024-01-16 株式会社東芝 分子センサ、分子検出装置及び分子検出方法
JP2022027167A (ja) * 2020-07-31 2022-02-10 太陽誘電株式会社 においセンサ、ガス吸着膜、およびにおいセンサの製造方法

Also Published As

Publication number Publication date
JPWO2024143488A1 (https=) 2024-07-04
WO2024143488A1 (ja) 2024-07-04

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