CN120019342A - 工艺处理装置的诊断装置、诊断系统以及诊断方法 - Google Patents

工艺处理装置的诊断装置、诊断系统以及诊断方法 Download PDF

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Publication number
CN120019342A
CN120019342A CN202380046757.1A CN202380046757A CN120019342A CN 120019342 A CN120019342 A CN 120019342A CN 202380046757 A CN202380046757 A CN 202380046757A CN 120019342 A CN120019342 A CN 120019342A
Authority
CN
China
Prior art keywords
component
diagnostic
degradation
process treatment
treatment device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380046757.1A
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English (en)
Chinese (zh)
Inventor
梅田祥太
朝仓凉次
角屋诚浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Publication of CN120019342A publication Critical patent/CN120019342A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/0227—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions
    • G05B23/0235—Qualitative history assessment, whereby the type of data acted upon, e.g. waveforms, images or patterns, is not relevant, e.g. rule based assessment; if-then decisions based on a comparison with predetermined threshold or range, e.g. "classical methods", carried out during normal operation; threshold adaptation or choice; when or how to compare with the threshold
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0262—Confirmation of fault detection, e.g. extra checks to confirm that a failure has indeed occurred
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Physics (AREA)
  • Testing And Monitoring For Control Systems (AREA)
CN202380046757.1A 2023-09-15 2023-09-15 工艺处理装置的诊断装置、诊断系统以及诊断方法 Pending CN120019342A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/033673 WO2025057394A1 (ja) 2023-09-15 2023-09-15 プロセス処理装置の診断装置、診断システム、および診断方法

Publications (1)

Publication Number Publication Date
CN120019342A true CN120019342A (zh) 2025-05-16

Family

ID=95021035

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380046757.1A Pending CN120019342A (zh) 2023-09-15 2023-09-15 工艺处理装置的诊断装置、诊断系统以及诊断方法

Country Status (5)

Country Link
JP (1) JPWO2025057394A1 (https=)
KR (1) KR20250040892A (https=)
CN (1) CN120019342A (https=)
TW (1) TW202514853A (https=)
WO (1) WO2025057394A1 (https=)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011258261A (ja) * 2010-06-07 2011-12-22 Mitsubishi Electric Corp 劣化度判定装置及びコンピュータプログラム及び劣化度判定方法
JP5259797B2 (ja) 2011-09-05 2013-08-07 株式会社東芝 学習型プロセス異常診断装置、およびオペレータ判断推測結果収集装置
JP6723669B2 (ja) * 2016-09-27 2020-07-15 東京エレクトロン株式会社 異常検知プログラム、異常検知方法および異常検知装置
JP2018147385A (ja) * 2017-03-08 2018-09-20 三菱日立パワーシステムズ株式会社 保守作業計画システム、保守作業計画方法及びプログラム
JP7321452B2 (ja) * 2019-10-11 2023-08-07 Ｂｉｐｒｏｇｙ株式会社 プログラム、情報処理装置、情報処理方法及び学習済みモデルの生成方法
EP4160342A4 (en) * 2020-05-29 2024-07-17 Daicel Corporation Abnormal modulation cause identification device, abnormal modulation cause identification method, and abnormal modulation cause identification program
JP7289992B1 (ja) * 2021-07-13 2023-06-12 株式会社日立ハイテク 診断装置及び診断方法並びにプラズマ処理装置及び半導体装置製造システム
WO2023148967A1 (ja) * 2022-02-07 2023-08-10 株式会社日立ハイテク 診断装置、診断方法、半導体製造装置システム及び半導体装置製造システム

Also Published As

Publication number Publication date
WO2025057394A1 (ja) 2025-03-20
JPWO2025057394A1 (https=) 2025-03-20
TW202514853A (zh) 2025-04-01
KR20250040892A (ko) 2025-03-25

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