CN1199154C - 具有平衡的动态特性的微推动器 - Google Patents

具有平衡的动态特性的微推动器 Download PDF

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Publication number
CN1199154C
CN1199154C CNB011427981A CN01142798A CN1199154C CN 1199154 C CN1199154 C CN 1199154C CN B011427981 A CNB011427981 A CN B011427981A CN 01142798 A CN01142798 A CN 01142798A CN 1199154 C CN1199154 C CN 1199154C
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CN
China
Prior art keywords
plate
plates
pair
flat
micro
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Expired - Fee Related
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CNB011427981A
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English (en)
Chinese (zh)
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CN1373471A (zh
Inventor
J·布兰德特
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HP Inc
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Hewlett Packard Co
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Publication of CN1373471A publication Critical patent/CN1373471A/zh
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Publication of CN1199154C publication Critical patent/CN1199154C/zh
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type

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  • Micromachines (AREA)
  • Linear Motors (AREA)
CNB011427981A 2001-03-07 2001-12-07 具有平衡的动态特性的微推动器 Expired - Fee Related CN1199154C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/800560 2001-03-07
US09/800,560 US6583524B2 (en) 2001-03-07 2001-03-07 Micro-mover with balanced dynamics

Publications (2)

Publication Number Publication Date
CN1373471A CN1373471A (zh) 2002-10-09
CN1199154C true CN1199154C (zh) 2005-04-27

Family

ID=25178715

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB011427981A Expired - Fee Related CN1199154C (zh) 2001-03-07 2001-12-07 具有平衡的动态特性的微推动器

Country Status (5)

Country Link
US (1) US6583524B2 (enExample)
EP (1) EP1239580A3 (enExample)
JP (2) JP4173968B2 (enExample)
CN (1) CN1199154C (enExample)
HK (1) HK1048881B (enExample)

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US6882019B2 (en) 2002-05-28 2005-04-19 Hewlett-Packard Development Company, L.P. Movable micro-electromechanical device
KR100552687B1 (ko) 2003-08-22 2006-02-20 삼성전자주식회사 대면적 스테이지를 구비한 2축 액츄에이터
US7355305B2 (en) * 2003-12-08 2008-04-08 Shen-Etsu Chemical Co., Ltd. Small-size direct-acting actuator
US7026189B2 (en) * 2004-02-11 2006-04-11 Hewlett-Packard Development Company, L.P. Wafer packaging and singulation method
US7133322B2 (en) * 2004-06-28 2006-11-07 Hewlett-Packard Development Company, L.P. Probe storage device
US7172978B2 (en) * 2004-07-21 2007-02-06 Hewlett-Packard Development Company, L.P. MEMS device polymer film deposition process
US7422962B2 (en) * 2004-10-27 2008-09-09 Hewlett-Packard Development Company, L.P. Method of singulating electronic devices
US7646969B2 (en) * 2005-02-28 2010-01-12 Siimpel Corporation Camera snubber assembly
US20060212978A1 (en) * 2005-03-15 2006-09-21 Sarah Brandenberger Apparatus and method for reading bit values using microprobe on a cantilever
US20070291623A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems
US20070121477A1 (en) * 2006-06-15 2007-05-31 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20080074984A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Architecture for a Memory Device
US20080074792A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Control scheme for a memory device
US8619378B2 (en) 2010-11-15 2013-12-31 DigitalOptics Corporation MEMS Rotational comb drive Z-stage
US8768157B2 (en) 2011-09-28 2014-07-01 DigitalOptics Corporation MEMS Multiple degree of freedom actuator
JP4542615B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP4493057B2 (ja) * 2007-03-30 2010-06-30 パイオニア株式会社 駆動装置
US7913376B2 (en) * 2007-12-13 2011-03-29 International Business Machines Corporation Method of forming an actuating mechanism for a probe storage system
US8000214B2 (en) * 2007-12-13 2011-08-16 International Business Machines Corporation Hermetic seal for a scanner assembly of a probe storage device
US20090155727A1 (en) * 2007-12-13 2009-06-18 International Business Machines Corporation Method of forming a flat media table for probe storage device
US7440155B1 (en) 2007-12-13 2008-10-21 International Business Machines Corporation Mass-balanced actuating mechanism for a micro scanning device
US7876663B2 (en) * 2007-12-13 2011-01-25 International Business Machines Corporation Scanning system for a probe storage device
US7792010B2 (en) * 2007-12-13 2010-09-07 International Business Machines Corporation Scanning system for a probe storage device
US7864653B2 (en) * 2007-12-13 2011-01-04 International Business Machines Corporation Probe storage device
US7965615B2 (en) * 2007-12-13 2011-06-21 International Business Machines Corporation Probe storage device scanner chip having a multi-layer media support table
US8430580B2 (en) 2010-11-15 2013-04-30 DigitalOptics Corporation MEMS Rotationally deployed actuators
US8547627B2 (en) 2010-11-15 2013-10-01 DigitalOptics Corporation MEMS Electrical routing
US8941192B2 (en) 2010-11-15 2015-01-27 DigitalOptics Corporation MEMS MEMS actuator device deployment
US8605375B2 (en) 2010-11-15 2013-12-10 DigitalOptics Corporation MEMS Mounting flexure contacts
US8358925B2 (en) 2010-11-15 2013-01-22 DigitalOptics Corporation MEMS Lens barrel with MEMS actuators
US9019390B2 (en) 2011-09-28 2015-04-28 DigitalOptics Corporation MEMS Optical image stabilization using tangentially actuated MEMS devices
US8803256B2 (en) 2010-11-15 2014-08-12 DigitalOptics Corporation MEMS Linearly deployed actuators
US9052567B2 (en) 2010-11-15 2015-06-09 DigitalOptics Corporation MEMS Actuator inside of motion control
US9061883B2 (en) 2010-11-15 2015-06-23 DigitalOptics Corporation MEMS Actuator motion control features
US8608393B2 (en) 2010-11-15 2013-12-17 DigitalOptics Corporation MEMS Capillary actuator deployment
US8337103B2 (en) 2010-11-15 2012-12-25 DigitalOptics Corporation MEMS Long hinge actuator snubbing
US8637961B2 (en) 2010-11-15 2014-01-28 DigitalOptics Corporation MEMS MEMS actuator device
US8947797B2 (en) 2010-11-15 2015-02-03 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
US9352962B2 (en) 2010-11-15 2016-05-31 DigitalOptics Corporation MEMS MEMS isolation structures
US9515579B2 (en) 2010-11-15 2016-12-06 Digitaloptics Corporation MEMS electrical contact systems and methods
US8604663B2 (en) 2010-11-15 2013-12-10 DigitalOptics Corporation MEMS Motion controlled actuator
US8521017B2 (en) 2010-11-15 2013-08-27 DigitalOptics Corporation MEMS MEMS actuator alignment
US8884381B2 (en) 2010-11-15 2014-11-11 DigitalOptics Corporation MEMS Guard trench
US8571405B2 (en) 2011-09-28 2013-10-29 DigitalOptics Corporation MEMS Surface mount actuator
US9281763B2 (en) 2011-09-28 2016-03-08 DigitalOptics Corporation MEMS Row and column actuator control
US8853975B2 (en) 2011-09-28 2014-10-07 DigitalOptics Corporation MEMS Electrostatic actuator control
US8869625B2 (en) 2011-09-28 2014-10-28 DigitalOptics Corporation MEMS MEMS actuator/sensor
US8616791B2 (en) 2011-09-28 2013-12-31 DigitalOptics Corporation MEMS Rotationally deployed actuator devices
US9350271B2 (en) 2011-09-28 2016-05-24 DigitalOptics Corporation MEMS Cascaded electrostatic actuator
US8855476B2 (en) 2011-09-28 2014-10-07 DigitalOptics Corporation MEMS MEMS-based optical image stabilization
CN103776381A (zh) * 2014-02-25 2014-05-07 重庆邮电大学 一种mems微结构平面位移测量方法
DE102017215276B4 (de) * 2017-08-31 2023-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multidirektionale Übersetzungs- und Neigungsplattform unter Verwendung von Biegeaktuatoren als aktive Entität

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Publication number Priority date Publication date Assignee Title
US5557596A (en) * 1995-03-20 1996-09-17 Gibson; Gary Ultra-high density storage device
US5834864A (en) 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
US5986381A (en) 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
JP4194151B2 (ja) * 1998-07-16 2008-12-10 キヤノン株式会社 駆動ステージ、走査型プローブ顕微鏡、加工装置
US6411589B1 (en) * 1998-07-29 2002-06-25 Hewlett-Packard Company System and method for forming electrostatically actuated data storage mechanisms

Also Published As

Publication number Publication date
US20020125789A1 (en) 2002-09-12
EP1239580A2 (en) 2002-09-11
US6583524B2 (en) 2003-06-24
JP2002331499A (ja) 2002-11-19
EP1239580A3 (en) 2003-09-24
CN1373471A (zh) 2002-10-09
HK1048881A1 (en) 2003-04-17
HK1048881B (zh) 2005-12-09
JP2008213141A (ja) 2008-09-18
JP4173968B2 (ja) 2008-10-29

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Granted publication date: 20050427

Termination date: 20101207