JP4173968B2 - 力学的に平衡の超小型可動子 - Google Patents

力学的に平衡の超小型可動子 Download PDF

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Publication number
JP4173968B2
JP4173968B2 JP2002059745A JP2002059745A JP4173968B2 JP 4173968 B2 JP4173968 B2 JP 4173968B2 JP 2002059745 A JP2002059745 A JP 2002059745A JP 2002059745 A JP2002059745 A JP 2002059745A JP 4173968 B2 JP4173968 B2 JP 4173968B2
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JP
Japan
Prior art keywords
plate
pair
plates
moving
micro
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Expired - Fee Related
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Japanese (ja)
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JP2002331499A (ja
JP2002331499A5 (enExample
Inventor
ヨープスト・ブラント
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HP Inc
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Hewlett Packard Co
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type

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  • Micromachines (AREA)
  • Linear Motors (AREA)
JP2002059745A 2001-03-07 2002-03-06 力学的に平衡の超小型可動子 Expired - Fee Related JP4173968B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/800560 2001-03-07
US09/800,560 US6583524B2 (en) 2001-03-07 2001-03-07 Micro-mover with balanced dynamics

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008124776A Division JP2008213141A (ja) 2001-03-07 2008-05-12 力学的に平衡の超小型可動子

Publications (3)

Publication Number Publication Date
JP2002331499A JP2002331499A (ja) 2002-11-19
JP2002331499A5 JP2002331499A5 (enExample) 2005-04-07
JP4173968B2 true JP4173968B2 (ja) 2008-10-29

Family

ID=25178715

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2002059745A Expired - Fee Related JP4173968B2 (ja) 2001-03-07 2002-03-06 力学的に平衡の超小型可動子
JP2008124776A Withdrawn JP2008213141A (ja) 2001-03-07 2008-05-12 力学的に平衡の超小型可動子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2008124776A Withdrawn JP2008213141A (ja) 2001-03-07 2008-05-12 力学的に平衡の超小型可動子

Country Status (5)

Country Link
US (1) US6583524B2 (enExample)
EP (1) EP1239580A3 (enExample)
JP (2) JP4173968B2 (enExample)
CN (1) CN1199154C (enExample)
HK (1) HK1048881B (enExample)

Families Citing this family (54)

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US7813634B2 (en) 2005-02-28 2010-10-12 Tessera MEMS Technologies, Inc. Autofocus camera
US6882019B2 (en) 2002-05-28 2005-04-19 Hewlett-Packard Development Company, L.P. Movable micro-electromechanical device
KR100552687B1 (ko) 2003-08-22 2006-02-20 삼성전자주식회사 대면적 스테이지를 구비한 2축 액츄에이터
US7355305B2 (en) * 2003-12-08 2008-04-08 Shen-Etsu Chemical Co., Ltd. Small-size direct-acting actuator
US7026189B2 (en) * 2004-02-11 2006-04-11 Hewlett-Packard Development Company, L.P. Wafer packaging and singulation method
US7133322B2 (en) * 2004-06-28 2006-11-07 Hewlett-Packard Development Company, L.P. Probe storage device
US7172978B2 (en) * 2004-07-21 2007-02-06 Hewlett-Packard Development Company, L.P. MEMS device polymer film deposition process
US7422962B2 (en) * 2004-10-27 2008-09-09 Hewlett-Packard Development Company, L.P. Method of singulating electronic devices
US7646969B2 (en) * 2005-02-28 2010-01-12 Siimpel Corporation Camera snubber assembly
US20060212978A1 (en) * 2005-03-15 2006-09-21 Sarah Brandenberger Apparatus and method for reading bit values using microprobe on a cantilever
US20070291623A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20070290282A1 (en) * 2006-06-15 2007-12-20 Nanochip, Inc. Bonded chip assembly with a micro-mover for microelectromechanical systems
US20070121477A1 (en) * 2006-06-15 2007-05-31 Nanochip, Inc. Cantilever with control of vertical and lateral position of contact probe tip
US20080074984A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Architecture for a Memory Device
US20080074792A1 (en) * 2006-09-21 2008-03-27 Nanochip, Inc. Control scheme for a memory device
US8619378B2 (en) 2010-11-15 2013-12-31 DigitalOptics Corporation MEMS Rotational comb drive Z-stage
US8768157B2 (en) 2011-09-28 2014-07-01 DigitalOptics Corporation MEMS Multiple degree of freedom actuator
JP4542615B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP4493057B2 (ja) * 2007-03-30 2010-06-30 パイオニア株式会社 駆動装置
US7913376B2 (en) * 2007-12-13 2011-03-29 International Business Machines Corporation Method of forming an actuating mechanism for a probe storage system
US8000214B2 (en) * 2007-12-13 2011-08-16 International Business Machines Corporation Hermetic seal for a scanner assembly of a probe storage device
US20090155727A1 (en) * 2007-12-13 2009-06-18 International Business Machines Corporation Method of forming a flat media table for probe storage device
US7440155B1 (en) 2007-12-13 2008-10-21 International Business Machines Corporation Mass-balanced actuating mechanism for a micro scanning device
US7876663B2 (en) * 2007-12-13 2011-01-25 International Business Machines Corporation Scanning system for a probe storage device
US7792010B2 (en) * 2007-12-13 2010-09-07 International Business Machines Corporation Scanning system for a probe storage device
US7864653B2 (en) * 2007-12-13 2011-01-04 International Business Machines Corporation Probe storage device
US7965615B2 (en) * 2007-12-13 2011-06-21 International Business Machines Corporation Probe storage device scanner chip having a multi-layer media support table
US8430580B2 (en) 2010-11-15 2013-04-30 DigitalOptics Corporation MEMS Rotationally deployed actuators
US8547627B2 (en) 2010-11-15 2013-10-01 DigitalOptics Corporation MEMS Electrical routing
US8941192B2 (en) 2010-11-15 2015-01-27 DigitalOptics Corporation MEMS MEMS actuator device deployment
US8605375B2 (en) 2010-11-15 2013-12-10 DigitalOptics Corporation MEMS Mounting flexure contacts
US8358925B2 (en) 2010-11-15 2013-01-22 DigitalOptics Corporation MEMS Lens barrel with MEMS actuators
US9019390B2 (en) 2011-09-28 2015-04-28 DigitalOptics Corporation MEMS Optical image stabilization using tangentially actuated MEMS devices
US8803256B2 (en) 2010-11-15 2014-08-12 DigitalOptics Corporation MEMS Linearly deployed actuators
US9052567B2 (en) 2010-11-15 2015-06-09 DigitalOptics Corporation MEMS Actuator inside of motion control
US9061883B2 (en) 2010-11-15 2015-06-23 DigitalOptics Corporation MEMS Actuator motion control features
US8608393B2 (en) 2010-11-15 2013-12-17 DigitalOptics Corporation MEMS Capillary actuator deployment
US8337103B2 (en) 2010-11-15 2012-12-25 DigitalOptics Corporation MEMS Long hinge actuator snubbing
US8637961B2 (en) 2010-11-15 2014-01-28 DigitalOptics Corporation MEMS MEMS actuator device
US8947797B2 (en) 2010-11-15 2015-02-03 DigitalOptics Corporation MEMS Miniature MEMS actuator assemblies
US9352962B2 (en) 2010-11-15 2016-05-31 DigitalOptics Corporation MEMS MEMS isolation structures
US9515579B2 (en) 2010-11-15 2016-12-06 Digitaloptics Corporation MEMS electrical contact systems and methods
US8604663B2 (en) 2010-11-15 2013-12-10 DigitalOptics Corporation MEMS Motion controlled actuator
US8521017B2 (en) 2010-11-15 2013-08-27 DigitalOptics Corporation MEMS MEMS actuator alignment
US8884381B2 (en) 2010-11-15 2014-11-11 DigitalOptics Corporation MEMS Guard trench
US8571405B2 (en) 2011-09-28 2013-10-29 DigitalOptics Corporation MEMS Surface mount actuator
US9281763B2 (en) 2011-09-28 2016-03-08 DigitalOptics Corporation MEMS Row and column actuator control
US8853975B2 (en) 2011-09-28 2014-10-07 DigitalOptics Corporation MEMS Electrostatic actuator control
US8869625B2 (en) 2011-09-28 2014-10-28 DigitalOptics Corporation MEMS MEMS actuator/sensor
US8616791B2 (en) 2011-09-28 2013-12-31 DigitalOptics Corporation MEMS Rotationally deployed actuator devices
US9350271B2 (en) 2011-09-28 2016-05-24 DigitalOptics Corporation MEMS Cascaded electrostatic actuator
US8855476B2 (en) 2011-09-28 2014-10-07 DigitalOptics Corporation MEMS MEMS-based optical image stabilization
CN103776381A (zh) * 2014-02-25 2014-05-07 重庆邮电大学 一种mems微结构平面位移测量方法
DE102017215276B4 (de) * 2017-08-31 2023-02-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multidirektionale Übersetzungs- und Neigungsplattform unter Verwendung von Biegeaktuatoren als aktive Entität

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5557596A (en) * 1995-03-20 1996-09-17 Gibson; Gary Ultra-high density storage device
US5834864A (en) 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
US5986381A (en) 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
JP4194151B2 (ja) * 1998-07-16 2008-12-10 キヤノン株式会社 駆動ステージ、走査型プローブ顕微鏡、加工装置
US6411589B1 (en) * 1998-07-29 2002-06-25 Hewlett-Packard Company System and method for forming electrostatically actuated data storage mechanisms

Also Published As

Publication number Publication date
US20020125789A1 (en) 2002-09-12
EP1239580A2 (en) 2002-09-11
US6583524B2 (en) 2003-06-24
JP2002331499A (ja) 2002-11-19
EP1239580A3 (en) 2003-09-24
CN1373471A (zh) 2002-10-09
HK1048881A1 (en) 2003-04-17
HK1048881B (zh) 2005-12-09
JP2008213141A (ja) 2008-09-18
CN1199154C (zh) 2005-04-27

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