CN118541598A - 信息处理装置、方法及程序 - Google Patents

信息处理装置、方法及程序 Download PDF

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Publication number
CN118541598A
CN118541598A CN202280088664.0A CN202280088664A CN118541598A CN 118541598 A CN118541598 A CN 118541598A CN 202280088664 A CN202280088664 A CN 202280088664A CN 118541598 A CN118541598 A CN 118541598A
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CN
China
Prior art keywords
information
distribution
severity
crack
information processing
Prior art date
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Pending
Application number
CN202280088664.0A
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English (en)
Chinese (zh)
Inventor
平良允俊
与那霸诚
田中瑛一
稻木誓哉
池田辽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
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Fujifilm Corp
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Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Publication of CN118541598A publication Critical patent/CN118541598A/zh
Pending legal-status Critical Current

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    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/0008Industrial image inspection checking presence/absence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T5/00Image enhancement or restoration
    • G06T5/40Image enhancement or restoration using histogram techniques
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/50Depth or shape recovery
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/60Analysis of geometric attributes
    • G06T7/62Analysis of geometric attributes of area, perimeter, diameter or volume
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00Arrangements for image or video recognition or understanding
    • G06V10/40Extraction of image or video features
    • G06V10/42Global feature extraction by analysis of the whole pattern, e.g. using frequency domain transformations or autocorrelation
    • G06V10/422Global feature extraction by analysis of the whole pattern, e.g. using frequency domain transformations or autocorrelation for representing the structure of the pattern or shape of an object therefor
    • G06V10/426Graphical representations
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/646Specific applications or type of materials flaws, defects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00Investigating materials by wave or particle radiation
    • G01N2223/60Specific applications or type of materials
    • G01N2223/652Specific applications or type of materials impurities, foreign matter, trace amounts
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2200/00Indexing scheme for image data processing or generation, in general
    • G06T2200/24Indexing scheme for image data processing or generation, in general involving graphical user interfaces [GUIs]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10072Tomographic images
    • G06T2207/10081Computed x-ray tomography [CT]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10116X-ray image
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20081Training; Learning
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/20Special algorithmic details
    • G06T2207/20084Artificial neural networks [ANN]
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30164Workpiece; Machine component
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V2201/00Indexing scheme relating to image or video recognition or understanding
    • G06V2201/06Recognition of objects for industrial automation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Quality & Reliability (AREA)
  • Multimedia (AREA)
  • Geometry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN202280088664.0A 2022-01-14 2022-12-14 信息处理装置、方法及程序 Pending CN118541598A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-004406 2022-01-14
JP2022004406 2022-01-14
PCT/JP2022/045980 WO2023136032A1 (ja) 2022-01-14 2022-12-14 情報処理装置、方法及びプログラム

Publications (1)

Publication Number Publication Date
CN118541598A true CN118541598A (zh) 2024-08-23

Family

ID=87278935

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280088664.0A Pending CN118541598A (zh) 2022-01-14 2022-12-14 信息处理装置、方法及程序

Country Status (5)

Country Link
US (1) US20240362769A1 (https=)
EP (1) EP4465028A4 (https=)
JP (1) JPWO2023136032A1 (https=)
CN (1) CN118541598A (https=)
WO (1) WO2023136032A1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4052733B2 (ja) * 1998-06-11 2008-02-27 株式会社日立ハイテクノロジーズ パターン付きウエハの異物検査方法
JP4109799B2 (ja) * 1999-06-28 2008-07-02 株式会社ルネサステクノロジ 半導体装置の製造方法
JP2002269109A (ja) * 2001-03-12 2002-09-20 Hitachi Ltd 薄膜デバイス製造工程管理システムおよび薄膜デバイス製造工程管理方法
JP4728144B2 (ja) * 2006-02-28 2011-07-20 株式会社日立ハイテクノロジーズ 回路パターンの検査装置
JP4910888B2 (ja) * 2007-05-30 2012-04-04 ブラザー工業株式会社 画像処理装置
JP5572293B2 (ja) * 2008-07-07 2014-08-13 株式会社日立ハイテクノロジーズ 欠陥検査方法及び欠陥検査装置
GB2496040B (en) * 2011-10-24 2019-04-03 Fisher Rosemount Systems Inc Predicted fault analysis
CN112204385A (zh) 2018-06-29 2021-01-08 富士胶片株式会社 缺陷显示装置及方法
JP7289427B2 (ja) * 2020-02-28 2023-06-12 株式会社Pros Cons プログラム、情報処理方法及び情報処理装置

Also Published As

Publication number Publication date
WO2023136032A1 (ja) 2023-07-20
EP4465028A1 (en) 2024-11-20
EP4465028A4 (en) 2025-05-21
US20240362769A1 (en) 2024-10-31
JPWO2023136032A1 (https=) 2023-07-20

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