CN1182471A - 凹曲滑动件及其制造方法 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 238000009792 diffusion process Methods 0.000 claims abstract description 22
- 238000010894 electron beam technology Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 35
- 239000011159 matrix material Substances 0.000 claims description 29
- 239000010410 layer Substances 0.000 claims description 27
- 238000007740 vapor deposition Methods 0.000 claims description 25
- 239000012791 sliding layer Substances 0.000 claims description 22
- 239000011248 coating agent Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 13
- 239000000956 alloy Substances 0.000 claims description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 10
- 239000006200 vaporizer Substances 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 238000000889 atomisation Methods 0.000 claims description 6
- 239000011135 tin Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 229910052718 tin Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052793 cadmium Inorganic materials 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 4
- 239000010949 copper Substances 0.000 claims 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000004215 Carbon black (E152) Substances 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 239000004411 aluminium Substances 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 238000002309 gasification Methods 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 238000005019 vapor deposition process Methods 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- 238000002485 combustion reaction Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009834 vaporization Methods 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
- 238000009826 distribution Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 239000005435 mesosphere Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- 229910020888 Sn-Cu Inorganic materials 0.000 description 2
- 229910019204 Sn—Cu Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 239000011265 semifinished product Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- F16C33/04—Brasses; Bushes; Linings
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Abstract
根据本发明,一个多层体系被涂覆于一个基体(1)上,中间层(2)被扩散阻挡层(3)覆盖,扩散阻挡层(3)被滑动层(4)覆盖。至少滑动层是采用电子束气相沉积来涂覆,在相对于基体的弧顶处至少±70°的角度范围内,层厚变化小于15%。这些滑动件被作为重载轴承或轴瓦优先用于内燃机中。
Description
本发明涉及一种凹曲滑动件,该滑动件的特别地在真空中涂覆于基体上的多层体系包含至少一层金属扩散合金滑动层(Gleitschicht)。这种滑动件具有重大价值,例如可在内燃机中作为高负荷轴承或轴瓦。本发明还涉及这种滑动件,也被称为径向轴承的制造方法。
对径向轴承来说,最大应力,即磨损负荷,一般出现在轴瓦的弧顶区。相反,在局部表面附近,即远离弧顶区,磨损负荷和动态负荷显著减小。已经尝试通过预先的机械加工改变几何形状,例如改变弧形,来保证形成一层最佳润滑膜及抗杂粒嵌入的性能。
如果在多层体系的形成过程中,弧顶区和局部表面区的厚度出现差异,滑动面将偏离理想的弧形。预先对基体进行机械加工,可以对此作些补偿。但是,这种方法使得预先的机械加工相当困难并且费用相当昂贵。
壁厚均匀的轴瓦也可用于V型发动机及具有斜分活塞杆的发动机。其主载荷区位于弧顶区之外。
就高负荷滑动件来说,可采用真空镀膜来形成滑动层。这时采用雾化(溅射)Al-Sn-Cu的方法在基层上形成滑动层(DE2853724C3;DE2940376A1;DE3729414A1)。
同样也可在层面上喷射整体塑料颗粒(DE2914618C2)。
此外,用于雾化法制造滑动轴承的一种专门与轴瓦涂层几何形状相符的雾化设备以及一种用于夹紧基体的设备已为人们所知。一般地,在真空中通过雾化法涂覆上述材料可得到高负荷滑动层(AT-PS392291B;EP0452647A1)。但是,由于其工作机理,雾化法是一种价格昂贵的方法,这是因为高于一定的极限值,沉积速率就不能再增加。因此雾化方法具有狭窄的应用范围。另一方面,雾化具有即使在弯曲的部件,例如滑动轴承上也能得到均匀涂层的优点。
从条形半成品制造滑动轴承,其中采用真空气相沉积来形成条形半成品上滑动层的方法也为人们所知(DE3606529C2;DE2935417)。这种已知方法的目的是更为经济地制造滑动轴承。但是,用这种方法涂覆的长条来进而加工成滑动轴承的努力没有得到可用的结果,这是因为变形程度大从而导致多层复合体损坏或开裂。
本发明的目的是构造高负荷滑动件或滑动轴承的多层体系的各层使滑动件和滑动轴承满足所有工作条件下的负荷对它们提出的要求,同时减小制造成本。将得到一最佳滑动层,该层对滑动件的使用寿命具有决定作用。本发明的方法将减少环境污染,即至少将部分废除电镀方法,并且提高生产率。
本发明的目的是由以下说明的本发明的特征实现的。下面描述了制造滑动件的方法和改进的滑动件结构及制造方法。
本发明使得对于成形件,例如滑动轴承轴瓦仅保留一道预加工工序及采用一种经济的,更为高效的覆层沉积方法成为可能,迄今为止这种沉积方法的使用既不能得到必要的覆层均匀性,也不能得到满足要求的覆层性能。意想不到的是根据本发明制造的滑动件的性能优于以前的技术制造的滑动件的性能,并且更为经济。特别地,这样得到的覆层的疲劳极限比电镀得到的覆层更高。试验表明:如果覆层是采用电子束气相沉积制得,在额定负荷下使用寿命得到明显的改善。下面是其决定性的原因:
由于高沉积速率气相沉积中的能量条件,扩散进来的各成份极其均匀地分布在扩散合金基体中。这样形成的层的结构保证了高承载负荷能力且承载能力随着层厚度的增加而增加。在轴瓦的一个大区域(±70°)内覆层厚度的高均匀性以及电子束气相沉积所得到的层结构和内部结构保证了滑动件具有高的质量。它对于润滑膜的形成及抗杂粒嵌入的能力和磨损具有决定性的作用。
已经证实为滑动件,例如径向轴承在基体和覆层之间提供一层扩散阻挡层是特别有利的。该层的厚度在基于弧顶的±70°角度范围内变化最大为±15%。
含有Al、Pb、Cd、Sn、Zn、Ni和Cu中至少一种金属的金属扩散合金已被证实特别适合于基于本发明的滑动件。扩散合金最好含有15~36重量百分率的Sn和0.1~30重量百分率的Cu和Al。
本发明还提供一种制造包含多层体系,其中至少一层是在真空中形成的滑动件的方法。经过已有方法的预处理后,至少滑动层通过蒸发器产生的电子束气相沉积被沉积到基体上。本方法的特征在于覆层的沉积是在严格限制的涂层几何条件及规定沉积速率下进行的。已经证明,借助于这些方法特征,可形成具有最佳层结构的滑动层,并使基体上各成份非常均匀地分布。和迄今所知方法制得的滑动层相比,本发明得到的滑动层表现出高的承载能力及良好的摩损性能。除了沉积速率外,气相沉积时入射角度也是决定所述滑动层微观结构的形成并进而决定其性能的因素。
本发明的方法还具有以下优点滑动层的扩散合金可从一个蒸发器气相沉积得到,扩散合金的至少两个组分也可从彼此靠近的各个蒸发坩埚中气相沉积得到。
通过供给活性气体和/或等离子体活化,气相沉积涂敷滑动层和/或扩散阻挡层的过程能被活化。该方法基本上根据气相沉积材料的选择来选用。
以下借助于附图所示实施例来详细说明本发明,其中:
图1为轴瓦的立体图。
图2为轴瓦气相沉积设备的示意图。
图1表示了一个轴瓦,它包含钢的基体1,在基体1上涂覆的铅青铜中间层2,Ni-Cr扩散阻挡层3和Al-Sn-Cu滑动层4。它们形成一个多层体系。多层体系主要是扩散阻挡层3和滑动层4的分布,即厚度关系如下:在以弧顶区5为基准的±80°角度范围内,层厚偏差低于弧顶区处的最大层厚的15%。基体1和中间层的厚度也是连续的。局部表面6形成轴瓦的侧面。
图2说明了制造轴瓦的方法。该方法按如下步骤进行。
以一种已知的方法将铅青铜中间层2和镍扩散阻挡层3电镀在基体1上,或者如果扩散阻挡层为Ni-Cr,那么就通过溅射将其镀上。涂覆后的基体1随后进行表面除油和清洗。
将经过预处理的基体1送入真空气相沉积装置中,在真空气相沉积装置抽成真空,真空度为0.01Pa后,进行溅射和酸洗。在气相沉积前首先用一块可控制的屏蔽物(图中未示出)将基体1保护起来。
至少一个基体1在和蒸发器中熔融金属表面平行的平面7上沿着箭头方向经过蒸发器8。安排基体1使其轴线方向和移动方向成适当的角度。控制基体直线移动的速度使其进入和离开气相云区的速度大于经过气化物形成的射束中心时的速度。速度分布V(α)连续并符合下述等式:
V(α)=Vmax-V0COS(2α)
α是蒸发器8中心的法线9和弧顶区5之间的夹角。角度α的最佳范围为-45°到+45°。
Vmax是进入和离开气化物射束时的最大速度,其值约为1m/min。
V0为标准值,其变化范围为0.5~0.7m/min。
蒸发坩埚8和基体1的弧顶区5的平面7之间的距离设定为200mm。蒸发坩埚中充满用于形成滑动层的合金材料AlSn20Cu0.25。蒸发坩埚被轴向电子枪的电子束加热(图中未示出)。采用的是一种已知的蒸发过程,它可保证气化物成分和覆层材料成分广泛对应一致。基体1的弧顶区5的平面7上的沉积速率调整为300nm/s。
一个15mm粗的电加热棒10被布置在蒸发坩埚8和弧顶区5的平面7之间,它距离蒸发坩埚8的表面150mm。被加热的棒10作为气化物的屏蔽物,其表面温度高于气化物的熔点。这样,可避免气化物在棒10上显著凝固。
开启屏蔽并移动基体1使其进入气相沉积区(α=-45度),气相沉积开始。进入气相沉积区后,基体1按照上述的速度分布经过蒸发坩埚8上方。80秒后关闭屏蔽,气相沉积中断。通过上述涂覆参数的设定,对于曲率半径为25mm的基体1在弧顶区5得到厚度为18±1μm的覆层,在局部表面6得到17±1μm的层厚。
层厚分布于是和前面提到的要求相一致。在所给出的条件下电子束气相沉积形成的覆层4可达到最高的质量要求。
为了提高本方法的生产率,以一种已知的方法采用直线状的蒸发器,一批滑动件沿轴线方向彼此相邻地同时被布置在蒸发器上方。
Claims (15)
1.一种凹曲滑动件,它的特别地在真空中涂覆于基体上的多层体系,至少包含一层金属扩散合金层,该层首先应是滑动层,其特征在于至少多层体系的这一层是采用电子束气相沉积涂覆的,并且在以基体(1)的弧顶区(5)为基准的至少±70°的角度范围内该层厚度偏差小于最大层厚的15%。
2.如权利要求1所述的滑动件,其特征在于,多层体系的另一层是扩散阻挡层(3)。
3.如权利要求1和2所述的滑动件,其特征在于,扩散阻挡层(3)也是采用电子束气相沉积涂覆的,并且在以基体(1)的弧顶区(5)为基准的至少±70°的角度范围内该层厚度偏差小于最大层厚的15%。
4.如权利要求1至3所述的滑动件,其特征在于,滑动层(4)是至少含有铝、铅、镉、锡、锌、镍和铜中的一种金属的金属扩散合金。
5.如权利要求4所述的滑动件,其特征在于,扩散合金含有15~35重量百分率的Sn及0.1~3重量百分率的Cu和Al。
6.如权利要求4和5所述的滑动件,其特征在于,扩散合金的成分中主要是它们的金属形式,零散的氧化物、氮化物或碳化物。
7.如权利要求1至3中的任一权利要求所述的滑动件,其特征在于扩散阻挡层(3)含有镍、镍/锡、镍/铜、镍/铬、钛或氮化钛。
8.如权利要求1所述的包含有多层体系,至少一层是在真空中涂覆的凹曲滑动件的制造方法,其特征在于,基体经预处理后,至少一层,首先是滑动层采用电子束气相沉积方法沉积,沉积时蒸发器和滑动件弧顶区的平面之间的距离调整为150~350mm,气相沉积过程中,蒸发器和基体以不均匀的速度彼此相对作直线移动,基体移动方向和其轴向方向成适当角度,部分蒸气流被相对于蒸发器固定并且最好布置于蒸气流中央的屏蔽物所屏蔽,在基体弧顶区沉积的凝聚速率调整到不低于80nm/s。
9.如权利要求8所述的方法,其特征在于,至少在屏蔽物面对蒸气流的一侧,温度设定为高于气化材料的熔点。
10.如权利要求8或9所述的方法,其特征在于,扩散合金的至少两个成分从彼此靠近的各自的蒸发坩埚被气相沉积。
11.如权利要求8或9所述的方法,其特征在于,扩散合金是从一个蒸发坩埚被气相沉积的。
12.如权利要求8至11的至少一个权利要求所述的方法,其特征在于,滑动层和/或扩散阻挡层是在没有活性气体的真空中气相沉积的。
13.如权利要求8至11的至少一个权利要求所述的方法,其特征在于,滑动层和/或扩散阻挡层通过供给活性气体和/或等离子体活化被活性涂覆。
14.如权利要求13所述的方法,其特征在于,氧、氮或碳氢化合物或者这些气体的混合物被用作活性气体。
15.如权利要求8至14的至少一个权利要求所述的方法,其特征在于,采用雾化方法沉积扩散阻挡层,随后在一真空周期中采用电子束气相沉积涂覆滑动层。
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Application Number | Priority Date | Filing Date | Title |
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DE1995114835 DE19514835C1 (de) | 1995-04-21 | 1995-04-21 | Verfahren zur Herstellung gleitflächenseitig konkav gekrümmter Gleitelemente |
DE19514835.5 | 1995-04-21 |
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CN1182471A true CN1182471A (zh) | 1998-05-20 |
CN1072334C CN1072334C (zh) | 2001-10-03 |
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CN96193422A Expired - Fee Related CN1072334C (zh) | 1995-04-21 | 1996-04-19 | 凹曲滑动件及其制造方法 |
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Country | Link |
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US (1) | US5955202A (zh) |
EP (1) | EP0821770B1 (zh) |
JP (1) | JPH11503808A (zh) |
KR (1) | KR100411625B1 (zh) |
CN (1) | CN1072334C (zh) |
AT (1) | ATE199440T1 (zh) |
BR (1) | BR9608078A (zh) |
DE (2) | DE19514835C1 (zh) |
ES (1) | ES2155936T3 (zh) |
PT (1) | PT821770E (zh) |
WO (1) | WO1996033352A1 (zh) |
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CN103620245A (zh) * | 2011-06-09 | 2014-03-05 | 菲特尔莫古威斯巴登有限公司 | 具有在轴向方向上成型的滑动面的表面几何形状的滑动轴承壳 |
CN104373462A (zh) * | 2013-08-13 | 2015-02-25 | 西门子公司 | 液态金属滑动轴承 |
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US6318898B1 (en) * | 1999-10-15 | 2001-11-20 | Reliance Electric Technologies, Llc | Corrosion-resistant bearing and method for making same |
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US7147926B2 (en) * | 2003-09-25 | 2006-12-12 | Reliance Electric Technologies, Llc | Corrosion-resistant and stain-resistant component and method for manufacturing same |
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- 1996-04-19 CN CN96193422A patent/CN1072334C/zh not_active Expired - Fee Related
- 1996-04-19 ES ES96913435T patent/ES2155936T3/es not_active Expired - Lifetime
- 1996-04-19 KR KR1019970707343A patent/KR100411625B1/ko not_active IP Right Cessation
- 1996-04-19 JP JP8531406A patent/JPH11503808A/ja active Pending
- 1996-04-19 BR BR9608078A patent/BR9608078A/pt not_active IP Right Cessation
- 1996-04-19 WO PCT/DE1996/000729 patent/WO1996033352A1/de active IP Right Grant
- 1996-04-19 US US08/945,247 patent/US5955202A/en not_active Expired - Fee Related
- 1996-04-19 EP EP96913435A patent/EP0821770B1/de not_active Expired - Lifetime
- 1996-04-19 DE DE59606516T patent/DE59606516D1/de not_active Expired - Fee Related
- 1996-04-19 AT AT96913435T patent/ATE199440T1/de not_active IP Right Cessation
- 1996-04-19 PT PT96913435T patent/PT821770E/pt unknown
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103620245A (zh) * | 2011-06-09 | 2014-03-05 | 菲特尔莫古威斯巴登有限公司 | 具有在轴向方向上成型的滑动面的表面几何形状的滑动轴承壳 |
CN103620245B (zh) * | 2011-06-09 | 2016-02-10 | 菲特尔莫古威斯巴登有限公司 | 具有在轴向方向上成型的滑动面的滑动轴承壳 |
CN104373462A (zh) * | 2013-08-13 | 2015-02-25 | 西门子公司 | 液态金属滑动轴承 |
US9890812B2 (en) | 2013-08-13 | 2018-02-13 | Siemens Aktiengesellschaft | Liquid metal bearing |
CN104373462B (zh) * | 2013-08-13 | 2018-11-16 | 西门子公司 | 液态金属滑动轴承 |
Also Published As
Publication number | Publication date |
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BR9608078A (pt) | 1999-01-26 |
KR100411625B1 (ko) | 2004-03-24 |
US5955202A (en) | 1999-09-21 |
JPH11503808A (ja) | 1999-03-30 |
CN1072334C (zh) | 2001-10-03 |
PT821770E (pt) | 2001-06-29 |
ATE199440T1 (de) | 2001-03-15 |
EP0821770B1 (de) | 2001-02-28 |
ES2155936T3 (es) | 2001-06-01 |
DE19514835C1 (de) | 1997-01-23 |
DE59606516D1 (de) | 2001-04-05 |
WO1996033352A1 (de) | 1996-10-24 |
EP0821770A1 (de) | 1998-02-04 |
KR19990007820A (ko) | 1999-01-25 |
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