CN117943695A - 加工装置以及加工方法 - Google Patents

加工装置以及加工方法 Download PDF

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Publication number
CN117943695A
CN117943695A CN202410288952.1A CN202410288952A CN117943695A CN 117943695 A CN117943695 A CN 117943695A CN 202410288952 A CN202410288952 A CN 202410288952A CN 117943695 A CN117943695 A CN 117943695A
Authority
CN
China
Prior art keywords
processing
workpiece
unit
light
layered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202410288952.1A
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English (en)
Chinese (zh)
Inventor
宫川智树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to CN202410288952.1A priority Critical patent/CN117943695A/zh
Publication of CN117943695A publication Critical patent/CN117943695A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
CN202410288952.1A 2019-12-26 2019-12-26 加工装置以及加工方法 Pending CN117943695A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410288952.1A CN117943695A (zh) 2019-12-26 2019-12-26 加工装置以及加工方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN202410288952.1A CN117943695A (zh) 2019-12-26 2019-12-26 加工装置以及加工方法
CN201980103236.9A CN114845833B (zh) 2019-12-26 2019-12-26 射束加工装置以及射束加工方法
PCT/JP2019/051135 WO2021130962A1 (ja) 2019-12-26 2019-12-26 ビーム加工装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201980103236.9A Division CN114845833B (zh) 2019-12-26 2019-12-26 射束加工装置以及射束加工方法

Publications (1)

Publication Number Publication Date
CN117943695A true CN117943695A (zh) 2024-04-30

Family

ID=76575835

Family Applications (3)

Application Number Title Priority Date Filing Date
CN202410288952.1A Pending CN117943695A (zh) 2019-12-26 2019-12-26 加工装置以及加工方法
CN202410288953.6A Pending CN117943696A (zh) 2019-12-26 2019-12-26 加工装置以及加工方法
CN201980103236.9A Active CN114845833B (zh) 2019-12-26 2019-12-26 射束加工装置以及射束加工方法

Family Applications After (2)

Application Number Title Priority Date Filing Date
CN202410288953.6A Pending CN117943696A (zh) 2019-12-26 2019-12-26 加工装置以及加工方法
CN201980103236.9A Active CN114845833B (zh) 2019-12-26 2019-12-26 射束加工装置以及射束加工方法

Country Status (5)

Country Link
US (1) US12594628B2 (https=)
EP (1) EP4082713B1 (https=)
JP (2) JP7435626B2 (https=)
CN (3) CN117943695A (https=)
WO (1) WO2021130962A1 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117943695A (zh) 2019-12-26 2024-04-30 株式会社尼康 加工装置以及加工方法
US20240416449A1 (en) * 2021-10-27 2024-12-19 Nikon Corporation Data generation method, cloud system, processing apparatus, computer program, and recording medium
CN119300948A (zh) * 2022-05-31 2025-01-10 株式会社 尼康 加工系统
EP4512567A1 (en) * 2023-08-24 2025-02-26 Valstybinis Moksliniu Tyrimu Institutas Fiziniu Ir Technologijos Mokslu Centras A system for forming a three-dimensional cavity and a method for forming a three-dimensional cavity
JP7585451B1 (ja) 2023-12-27 2024-11-18 株式会社ソディック 三次元除去加工システム、加工プログラムの生成装置、三次元造形物の製造方法、および、プログラム
JP2026027896A (ja) * 2024-08-06 2026-02-19 浜松ホトニクス株式会社 レーザ加工方法、及び、レーザ加工装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000071086A (ja) 1998-08-31 2000-03-07 Yasuoka:Kk レーザ光による形状加工方法及び装置
DE10157647C5 (de) 2001-11-26 2012-03-08 Cl Schutzrechtsverwaltungs Gmbh Verfahren zur Herstellung von dreidimensionalen Werkstücken in einer Laser-Materialbearbeitungsanlage oder einer Stereolitographieanlage
JP3842769B2 (ja) 2003-09-01 2006-11-08 株式会社東芝 レーザ加工装置、レーザ加工方法、及び半導体装置の製造方法
US20050100578A1 (en) * 2003-11-06 2005-05-12 Schmid Steven R. Bone and tissue scaffolding and method for producing same
DE102007012816B4 (de) 2007-03-16 2009-12-03 Sauer Gmbh Lasertec Verfahren und Vorrichtung zur Werkstückbearbeitung
DE102010011508B4 (de) * 2010-03-15 2015-12-10 Ewag Ag Verfahren zur Herstellung zumindest einer Spannut und zumindest einer Schneidkante und Laserbearbeitungsvorrichtung
JP2012071314A (ja) * 2010-09-27 2012-04-12 Mitsubishi Heavy Ind Ltd 複合材の加工方法及び複合材の加工装置
US20210331273A1 (en) * 2016-09-22 2021-10-28 Electro Scientific Industries, Inc. Laser processing apparatus and methods of laser-processing workpieces
RU2742207C1 (ru) * 2017-10-20 2021-02-03 Арселормиттал Способ производства листовой стали с предварительно нанесенным покрытием и соответствующий лист
BR112020006289A2 (pt) * 2017-11-30 2020-10-06 Saint-Gobain Glass France painel laminado com parte de anexação elétrica integrada
KR102631904B1 (ko) * 2018-09-28 2024-01-31 주식회사 엘지화학 이종 소재 접합체의 제조방법 및 이종 소재 접합체
DE112018008110T5 (de) * 2018-12-03 2021-08-19 Mitsubishi Electric Corporation Laserbearbeitungsverfahren und Laserbearbeitungsvorrichtung
WO2020194603A1 (ja) * 2019-03-27 2020-10-01 三菱重工業株式会社 レーザ加工システム及びレーザ加工方法
CN117943695A (zh) 2019-12-26 2024-04-30 株式会社尼康 加工装置以及加工方法

Also Published As

Publication number Publication date
JP7435626B2 (ja) 2024-02-21
WO2021130962A1 (ja) 2021-07-01
US20230029429A1 (en) 2023-01-26
EP4082713B1 (en) 2025-12-03
EP4082713A4 (en) 2023-10-04
JP2024040305A (ja) 2024-03-25
CN114845833B (zh) 2024-04-05
US12594628B2 (en) 2026-04-07
EP4082713A1 (en) 2022-11-02
CN117943696A (zh) 2024-04-30
CN114845833A (zh) 2022-08-02
JP7772114B2 (ja) 2025-11-18
JPWO2021130962A1 (https=) 2021-07-01

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