CN117655898A - Automatic polishing device for side edges of target material and using method thereof - Google Patents
Automatic polishing device for side edges of target material and using method thereof Download PDFInfo
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- CN117655898A CN117655898A CN202311666848.3A CN202311666848A CN117655898A CN 117655898 A CN117655898 A CN 117655898A CN 202311666848 A CN202311666848 A CN 202311666848A CN 117655898 A CN117655898 A CN 117655898A
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- 238000005498 polishing Methods 0.000 title claims abstract description 124
- 238000000034 method Methods 0.000 title claims abstract description 19
- 239000013077 target material Substances 0.000 title description 9
- 238000012545 processing Methods 0.000 claims abstract description 37
- 238000003825 pressing Methods 0.000 claims abstract description 13
- 238000003754 machining Methods 0.000 claims description 20
- 238000013508 migration Methods 0.000 claims description 2
- 230000006872 improvement Effects 0.000 description 8
- 244000137852 Petrea volubilis Species 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000010030 laminating Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 241001311547 Patina Species 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
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- 238000012797 qualification Methods 0.000 description 1
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Abstract
The utility model relates to the technical field of automatic polishing of target side edges, in particular to an automatic polishing device for the target side edges and a use method thereof. The device comprises a processing support base, wherein the surface of the processing support base is provided with a rotary moving guide assembly, the rotary moving guide assembly is used for setting a transverse placing point for target polishing, and meanwhile, friction between the transverse placing point and a target is limited through a rubber block; the surface of the rotary movable guide component is provided with a movable side polishing and processing component which is used for polishing the side surface of the target; when rotating through the link, can drive the clutch blocks and remove along the target side, the in-process that the clutch blocks removed clears up the piece of target side to improve the polishing quality of polisher, and pressing plate and clutch blocks are in the four corners department of target side respectively, carry out spacingly to target lateral shifting, thereby offset the driving force that produces when the polisher processing, make the target continuously be in steady state.
Description
Technical Field
The utility model relates to the technical field of automatic polishing of target side edges, in particular to an automatic polishing device for the target side edges and a use method thereof.
Background
At present, impurities and foreign matters on the main surface of the LCD target are mainly removed through polishing machines, however, the foreign matters, oxides and non-target integrated matters on the side surface of the LCD target are mainly removed through manual sand paper or pneumatic polishing machines, the sand paper polishing patina is difficult to remove, the efficiency is low, the LCD target is directly polished through the sand paper or the pneumatic polishing machines, the roughness is unstable, the fluctuation is large, and therefore the quality is unstable, and the current total production amount and quality requirements are difficult to meet.
For automatic polishing of the target side, there are many prior art techniques, such as:
chinese patent publication No. CN113021166B discloses an automatic polishing device for a target side and a method for using the same, where the polishing device includes a polishing platform, a polishing robot, a robot ground rail, a circuit control cabinet, and a tool platform; the two polishing platforms are arranged in parallel on two sides of the robot ground rail; the circuit control cabinet is positioned between the two polishing platforms and is arranged at any end of the robot ground rail; the tool platform is arranged on the circuit control cabinet; the polishing robot is placed on the robot ground rail; the polishing robot comprises a main body and a mechanical arm, wherein a clamping hole is formed in the front end of the mechanical arm, and a polishing head is connected in the clamping hole; a target material is placed on the polishing platform; the polishing device realizes the automatic polishing function of the side edge of the target material through the optimal design of various structures, has a simple use method, obviously improves the production efficiency and the product qualification rate, and has better industrial application prospect.
The utility model discloses a target surface polishing device, which comprises a base, wherein corresponding polishing mechanisms are arranged on two sides of the base, two sliding rails are arranged in the middle of the base, and clamping mechanisms are arranged on the two sliding rails.
Therefore, most of the target side polishing devices vertically place targets, drive the targets to rotate and finish polishing the sides of the targets, but the sides of the targets to be polished are uneven, when the targets rotate, the circular movement limitation of the clamping device blocks the rotating path of the targets, the targets are deformed when forcibly rotated, the targets are scrapped, meanwhile, the polishing machine applies an impetus to the targets when contacting the targets for polishing, the targets are rotated, the surface convex points cannot pass through the clamping device, the targets are blocked in the polishing device, automatic polishing cannot be finished, if the thickness of the targets is low, the targets are easy to deform, and uneven sides and uneven curves of the targets are likely to occur.
In view of the above, the utility model provides an automatic polishing device for a target side and a using method thereof.
Disclosure of Invention
The utility model aims to provide an automatic polishing device for a target side and a using method thereof, so as to solve the problems in the background technology.
In order to achieve the above object, one of the purposes of the present utility model is to provide an automatic polishing device for the side edge of the target, which is capable of positioning the target horizontally and limiting the target in all directions during polishing, and meanwhile, avoiding that when polishing, the polishing quality is low due to the fact that the polishing quality is low in one-time polishing, multiple times of cyclic polishing is needed, the protruding portion of the target can be cleaned during polishing, but the cleaned fragments adhere to the side surface of the target, and the subsequent polishing quality of the target is affected.
The polishing device comprises a processing support base, wherein a rotary moving guide assembly is arranged on the surface of the processing support base and is used for setting a transverse placing point for target polishing, and meanwhile, friction between the transverse placing point and a target is limited through a rubber block;
the rotary moving guide assembly is provided with a moving side polishing machining assembly on the surface, the moving side polishing machining assembly is used for polishing the side of a target, the machining range is adjusted according to the size of the target, the rotary moving guide assembly is provided with a target fixing clamping assembly on the surface, the target fixing clamping assembly is used for limiting the vertical movement of the target, and meanwhile, the target fixing clamping assembly and the moving side polishing machining assembly form supporting points on four corners of the side of the target and are used for counteracting acting force generated when the moving side polishing machining assembly collides the target, limiting the target to move transversely, and the target fixing clamping assembly drives the moving side polishing machining assembly to circularly rotate along the rotary moving guide assembly to finish polishing on the side of the target.
As a further improvement of the technical scheme, the rotary movement guiding assembly comprises a first elastic piece, the first elastic piece is installed inside the processing support base, the other end of the first elastic piece is connected with an anti-deflection block, and a circular guide rail is arranged on the surface of the processing support base.
As a further improvement of the technical scheme, the movable side polishing machining assembly comprises a connecting frame, wherein the connecting frame is in sliding connection with a machining support base and a circular guide rail and is used for limiting the moving path of the connecting frame, and an electric rotating wheel is arranged at the bottom of the connecting frame.
As a further improvement of the technical scheme, the mechanical arm is arranged on the surface of the connecting frame, a first motor used for rotating is arranged on the surface of the mechanical arm, a polisher is arranged on the surface of the first motor, and a polishing disk is arranged on the surface of the polisher.
As a further improvement of the technical scheme, the target fixing and clamping assembly comprises a fixing rod, the fixing rod is arranged on the surface of the connecting frame, the surface of the connecting frame is rotationally connected with a threaded rod, and the surface of the fixing rod is provided with a second motor for driving the threaded rod to rotate.
As a further improvement of the technical scheme, the surface of the threaded rod is in threaded connection with a fixing frame, and the fixing frame is in sliding connection with the fixing rod and used for limiting the moving path of the fixing frame.
As a further improvement of the technical scheme, the pressing disc is slidably connected inside the fixing frame, the anti-slip block is arranged at the bottom of the pressing disc, and the top and the bottom of the target are respectively attached to the anti-slip block and the anti-slip block to limit the vertical movement of the target.
As a further improvement of the technical scheme, the second elastic piece is arranged in the connecting frame, the other end of the second elastic piece is connected with the moving frame, and the moving frame is in sliding connection with the connecting frame and used for limiting the moving path of the moving frame.
As a further improvement of the technical scheme, a third elastic piece is arranged in the movable frame, the other end of the third elastic piece is connected with a friction block, and the friction block is in sliding connection with the movable frame and used for limiting the moving path of the friction block.
The second object of the present utility model is to provide a method for using an automatic polishing device for a target side, comprising the following steps:
s1, placing a target on a processing support base, and limiting vertical movement and transverse movement of the target by a rotary movement guide assembly and a target fixing and clamping assembly;
s2, the side polishing processing assembly is moved to drive the target fixing and clamping assembly to rotate, and polishing of the side of the target is completed.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the automatic polishing device for the side edges of the targets and the use method of the automatic polishing device, when the connecting frame rotates, the friction blocks are driven to move along the side faces of the targets, scraps on the side faces of the targets are cleaned in the moving process of the friction blocks, so that the polishing quality of the polisher is improved, the pressing disc and the friction blocks are respectively positioned at four corners of the side faces of the targets, the targets are limited in transverse movement, and therefore the driving force generated during processing of the polisher is counteracted, and the targets are in a stable state continuously.
2. According to the automatic polishing device for the side edges of the target materials and the use method thereof, the mechanical arm is moved along the circular guide rail through the movement of the electric rotating wheel, so that the polishing disc contacts all positions of the side surfaces of the target materials, polishing is completed, the phenomenon that the target materials are blocked by the clamping device during processing is avoided, the stress deformation of the target materials is caused, and the stability of the target materials during processing of the device is improved.
3. In this automatic burnishing device of target side and application method thereof, make its surface antiskid piece laminating target top through the clamp plate downshifting to laminating target bottom through the piece that prevents shifting, the clamp plate laminating target top is spacing to the vertical removal of target, makes the target fix fast and processing support base surface, and can't break away from.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model;
FIG. 2 is a schematic diagram of a structural anti-migration block of the present utility model;
FIG. 3 is a schematic view of a first resilient member of the structure of the present utility model;
FIG. 4 is a schematic view of a second resilient member of the structure of the present utility model;
FIG. 5 is a schematic diagram of a second motor according to the present utility model;
FIG. 6 is a schematic diagram of the utility model at A of block diagram 5;
FIG. 7 is a schematic view of a structural press plate of the present utility model;
fig. 8 is a schematic view of a structural fixing frame of the present utility model.
The meaning of each reference sign in the figure is:
11. processing a supporting base;
20. a rotary movement guide assembly; 21. a first elastic member; 22. an anti-offset block; 23. a circular guide rail;
30. moving the side polishing processing assembly; 31. a connecting frame; 32. an electric wheel; 33. a mechanical arm; 34. a first motor; 35. a polisher; 36. polishing disk;
40. a target fixing and clamping assembly; 41. a fixed rod; 42. a threaded rod; 43. a second motor; 44. a fixing frame; 45. pressing a disc; 46. a second elastic member; 47. a moving rack; 48. a third elastic member; 49. friction blocks.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
Impurities and foreign matters on the main surface of the target are mainly removed by polishing through a polishing machine, however, the foreign matters, oxides and non-target integrated matters on the side surface of the LCD target are mainly removed by using manual sand paper or pneumatic polishing machine, the rust is difficult to remove by polishing the sand paper, the efficiency is low, and the polishing is directly performed by using the sand paper or pneumatic polishing machine, the roughness is unstable, the fluctuation is large, so that the quality is unstable, and the current total production amount and quality requirements are difficult to meet.
Referring to fig. 1-8, an objective of the present embodiment is to provide an automatic polishing apparatus for a target side;
the polishing device comprises a processing support base 11, wherein a rotary moving guide assembly 20 is arranged on the surface of the processing support base 11, the rotary moving guide assembly 20 is used for setting a transverse placing point for target polishing, and meanwhile friction between the transverse placing point and a target is limited through a rubber block;
the rotary movement guiding component 20 surface is equipped with the removal side and polishes processing subassembly 30, remove side and polish processing subassembly 30 and be used for polishing the target side, simultaneously according to target size regulation machining scope, the rotary movement guiding component 20 surface is equipped with the fixed clamping component 40 of target, the fixed clamping component 40 of target is used for restricting the vertical removal of target, simultaneously the fixed clamping component 40 of target and remove side and polish processing subassembly 30 all form the supporting point to target side four corners department, be used for counteracting the effort that removes side and polish processing subassembly 30 and bump the target and produce, restrict target lateral shifting, and the fixed clamping component 40 of target drives removal side and polish processing subassembly 30 along the circular circulation rotation of rotary movement guiding component 20, accomplish the polishing to the side department of target.
When the target rotates, the circular movement limitation of the clamping device blocks the rotating path of the target, deformation can occur when the target is forced to rotate, the target is scrapped, meanwhile, when the polishing machine contacts the target for polishing, a pushing force is applied to the target by the polishing opportunity, the target cannot finish automatic polishing because surface bumps cannot pass through the clamping device and are clamped in the polishing device, if the thickness of the target is low, the target is easy to deform, uneven side surfaces and uneven curves of the target can possibly occur, therefore, the rotating movement guide assembly 20 comprises a first elastic piece 21, the first elastic piece 21 is arranged in the processing support base 11, the other end of the first elastic piece 21 is connected with an anti-offset block 22, the surface of the processing support base 11 is provided with a circular guide rail 23, the moving side polishing processing assembly 30 comprises a connecting frame 31, the connecting frame 31 is connected with the processing support base 11 and the circular guide rail 23 in a sliding way, the bottom of the connecting frame 31 is provided with an electric rotating wheel 32, the surface of the connecting frame 31 is provided with a mechanical arm 33, the surface of the mechanical arm 33 is provided with a first motor 34 for rotating, and the surface of the first motor 34 is provided with a polishing disc 35, and the surface of the polishing disc 35 is provided with a polishing disc 36;
as shown in fig. 3 to 7, when the side polishing of the target is required to be fixed, the target is firstly placed at the top of the anti-offset block 22, the anti-offset block 22 is pressed by the target to compress the first elastic piece 21 downwards, then the second motor 43 is started to work, the second motor 43 works to drive the threaded rod 42 to rotate, the threaded rod 42 rotates to enable the fixing frame 44 to move downwards, the fixing frame 44 moves downwards to drive the pressing disc 45 to move downwards, the pressing disc 45 moves downwards to enable the surface anti-sliding block to be attached to the top of the target, the pressing disc 45 is attached to the bottom of the target through the anti-offset block 22, and the vertical movement of the target is limited, so that the target is quickly fixed on the surface of the processing support base 11 and cannot be separated.
As shown in fig. 2 and 8, when the side of the target needs to be polished, the electric rotating wheel 32 is started to work, the electric rotating wheel 32 works to drive the connecting frame 31 to rotate, the connecting frame 31 rotates and simultaneously starts the first motor 34 to work, the first motor 34 works to drive the mechanical arm 33 to rotate, the mechanical arm 33 rotates to adjust the angle of the polisher 35, when the first motor 34 drives the polishing disc 36 to contact the side surface of the target, the polisher 35 is started to work, the polisher 35 works to drive the polishing disc 36 to polish the side surface of the target, and meanwhile, the electric rotating wheel 32 moves to enable the mechanical arm 33 to move along the circular guide rail 23, so that the polishing disc 36 contacts all positions of the side surface of the target, polishing is completed, the occurrence of clamping devices during processing of the target is avoided, the stress deformation of the target is caused, and the stability of the target during processing of the device is improved.
When the target is polished, the polishing quality of the disposable polishing is low, repeated cyclic polishing is needed, the protruded part of the target is cleaned, but cleaned scraps are adhered to the side surface of the target to influence the subsequent polishing quality of the target, therefore, the target fixing and clamping assembly 40 comprises a fixed rod 41, the fixed rod 41 is arranged on the surface of a connecting frame 31, a threaded rod 42 is rotationally connected to the surface of the connecting frame 31, a second motor 43 for driving the threaded rod 42 to rotate is arranged on the surface of the fixed rod 41, a fixing frame 44 is in threaded connection with the surface of the threaded rod 42, the fixing frame 44 is in sliding connection with the fixed rod 41, the moving path of the fixing frame 44 is limited, a pressing disc 45 is in sliding connection with the inside of the fixing frame 44, an anti-sliding block is arranged at the bottom of the pressing disc 45, the top and the bottom of the target are respectively attached to the top and the bottom of the target through the anti-sliding block 22, a second elastic piece 46 is arranged inside the connecting frame 31, the other end of the second elastic piece 46 is connected with a moving frame 47, the moving frame 47 is in sliding connection with the connecting frame 31, the moving path of the moving frame 47 is limited, a third elastic piece 48 is arranged inside the moving frame 47, and a third elastic piece 48 is connected with the other end 49 and the sliding block 49 is used for limiting the moving path of the moving frame 47;
as shown in fig. 5 to 8, when the target side needs to be cleaned, when the target is placed on the surface of the processing support base 11, the friction blocks 49 are extruded to enable the movable frame 47 to move, the movable frame 47 is moved to enable the second elastic piece 46 to be elongated, when the second elastic piece 46 rebounds to drag the movable frame 47 to reset, the friction blocks 49 are driven to be attached to the target side through the movable frame 47, when the connecting frame 31 rotates, the friction blocks 49 are driven to move along the target side, chips on the target side are cleaned in the moving process of the friction blocks 49, so that the polishing quality of the polisher 35 is improved, the pressing disc 45 and the friction blocks 49 are respectively located at four corners of the target side, and the lateral movement of the target is limited, so that the pushing force generated during processing of the polisher 35 is offset, and the target is kept in a stable state.
Another object of the present embodiment is to provide a method for using an automatic polishing apparatus for a target side, including the following method steps:
s1, placing a target on a processing support base 11, and limiting vertical movement and lateral movement of the target by a rotary movement guide assembly 20 and a target fixing and clamping assembly 40;
s2, the side polishing processing assembly 30 is moved to drive the target fixing and clamping assembly 40 to rotate, and polishing of the side of the target is completed.
The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the above-described embodiments, and that the above-described embodiments and descriptions are only preferred embodiments of the present utility model, and are not intended to limit the utility model, and that various changes and modifications may be made therein without departing from the spirit and scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (10)
1. An automatic burnishing device of target side, its characterized in that: the polishing device comprises a processing support base (11), wherein a rotary movement guide assembly (20) is arranged on the surface of the processing support base (11), the rotary movement guide assembly (20) is used for arranging a transverse placement point for target polishing, and meanwhile friction between the transverse placement point and a target is limited through a rubber block;
the rotary mobile guide assembly (20) is characterized in that the surface of the rotary mobile guide assembly (20) is provided with a mobile side polishing machining assembly (30), the mobile side polishing machining assembly (30) is used for polishing the side of a target, meanwhile, the machining range is adjusted according to the size of the target, the surface of the rotary mobile guide assembly (20) is provided with a target fixing clamping assembly (40), the target fixing clamping assembly (40) is used for limiting the vertical movement of the target, meanwhile, the target fixing clamping assembly (40) and the mobile side polishing machining assembly (30) form supporting points at four corners of the side of the target, the supporting points are used for counteracting acting force generated when the mobile side polishing machining assembly (30) collides the target, the target is limited to transversely move, and the target fixing clamping assembly (40) drives the mobile side polishing machining assembly (30) to circularly rotate along the rotary mobile guide assembly (20), so that polishing is completed at the side of the target.
2. The automatic target side polishing device according to claim 1, wherein: the rotary movement guiding assembly (20) comprises a first elastic piece (21), the first elastic piece (21) is installed inside the machining supporting base (11), the other end of the first elastic piece (21) is connected with an anti-deflection block (22), and a circular guide rail (23) is arranged on the surface of the machining supporting base (11).
3. The automatic target side polishing device according to claim 2, wherein: the movable side polishing machining assembly (30) comprises a connecting frame (31), wherein the connecting frame (31) is in sliding connection with a machining support base (11) and a circular guide rail (23) and is used for limiting the moving path of the connecting frame (31), and an electric rotating wheel (32) is arranged at the bottom of the connecting frame (31).
4. The automatic target side polishing device according to claim 3, wherein: the polishing device is characterized in that a mechanical arm (33) is arranged on the surface of the connecting frame (31), a first motor (34) used for rotating is arranged on the surface of the mechanical arm (33), a polisher (35) is arranged on the surface of the first motor (34), and a polishing disc (36) is arranged on the surface of the polisher (35).
5. The automatic target side polishing device according to claim 3, wherein: the target fixing and clamping assembly (40) comprises a fixing rod (41), the fixing rod (41) is installed on the surface of the connecting frame (31), a threaded rod (42) is connected to the surface of the connecting frame (31) in a rotating mode, and a second motor (43) used for driving the threaded rod (42) to rotate is installed on the surface of the fixing rod (41).
6. The automatic target side polishing device according to claim 5, wherein: the surface of the threaded rod (42) is in threaded connection with a fixing frame (44), and the fixing frame (44) is in sliding connection with the fixing rod (41) and used for limiting the moving path of the fixing frame (44).
7. The automatic target side polishing device according to claim 6, wherein: the inside sliding connection of mount (44) has pressing plate (45), pressing plate (45) bottom is equipped with the antiskid block, laminates the top and the bottom of target respectively through antiskid block and anti-migration piece (22), restricts the vertical removal of target.
8. The automatic target side polishing device according to claim 3, wherein: the connecting frame (31) internally mounted has second elastic component (46), the other end of second elastic component (46) is connected with and removes frame (47), remove frame (47) and connecting frame (31) sliding connection for carry out spacingly to the travel path that removes frame (47).
9. The automatic target side polishing device according to claim 8, wherein: the movable frame (47) is internally provided with a third elastic piece (48), the other end of the third elastic piece (48) is connected with a friction block (49), and the friction block (49) is in sliding connection with the movable frame (47) and used for limiting the moving path of the friction block (49).
10. A method of use for implementing an automatic target side polishing apparatus according to any one of claims 1-9, characterized in that: the method comprises the following steps:
s1, placing a target on a processing support base (11), and limiting vertical movement and transverse movement of the target by a rotary movement guide assembly (20) and a target fixing and clamping assembly (40);
s2, the side polishing machining assembly (30) is moved to drive the target fixing and clamping assembly (40) to rotate, and polishing of the side of the target is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311666848.3A CN117655898A (en) | 2023-12-07 | 2023-12-07 | Automatic polishing device for side edges of target material and using method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311666848.3A CN117655898A (en) | 2023-12-07 | 2023-12-07 | Automatic polishing device for side edges of target material and using method thereof |
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| CN117655898A true CN117655898A (en) | 2024-03-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311666848.3A Pending CN117655898A (en) | 2023-12-07 | 2023-12-07 | Automatic polishing device for side edges of target material and using method thereof |
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| CN208866919U (en) * | 2018-09-18 | 2019-05-17 | 广西晶联光电材料有限责任公司 | A kind of angle adjustable target beveler |
| CN210756897U (en) * | 2019-09-25 | 2020-06-16 | 福建瓦能科技有限公司 | Ceramic target edging equipment convenient to clearance sweeps |
| KR102201336B1 (en) * | 2020-05-11 | 2021-01-08 | 에스케이씨솔믹스 주식회사 | Wafer holder for apparatus manufacturing a semiconductor device and edge ring assembly comprising the same |
| CN216327488U (en) * | 2021-11-30 | 2022-04-19 | 深圳恒泰克科技有限公司 | Automatic polishing equipment for alloy target |
| CN217045911U (en) * | 2022-03-25 | 2022-07-26 | 济宁海富光学科技有限公司 | Glass apron corner burnishing machine |
| CN217750870U (en) * | 2022-05-31 | 2022-11-08 | 深圳市灿元金属材料有限公司 | Preparation facilities of high-purity niobium oxide sputter coating target |
| CN217942956U (en) * | 2022-06-22 | 2022-12-02 | 亚芯半导体材料(江苏)有限公司 | Polishing equipment for molybdenum-sodium alloy target of thin-film solar cell |
| CN116237858A (en) * | 2023-02-10 | 2023-06-09 | 芜湖映日科技股份有限公司 | ITO rotary target surface preparation equipment applied to target production |
| CN116638429A (en) * | 2023-06-20 | 2023-08-25 | 苏州博宏源机械制造有限公司 | Adjustable wafer edge polishing device |
| CN116766029A (en) * | 2023-08-02 | 2023-09-19 | 苏州博宏源机械制造有限公司 | Wafer clamping type edge polishing device and process thereof |
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