CN210756897U - Ceramic target edging equipment convenient to clearance sweeps - Google Patents

Ceramic target edging equipment convenient to clearance sweeps Download PDF

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Publication number
CN210756897U
CN210756897U CN201921605135.5U CN201921605135U CN210756897U CN 210756897 U CN210756897 U CN 210756897U CN 201921605135 U CN201921605135 U CN 201921605135U CN 210756897 U CN210756897 U CN 210756897U
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CN
China
Prior art keywords
wall
rigid coupling
diaphragm
threaded rod
ceramic target
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201921605135.5U
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Chinese (zh)
Inventor
胥小勇
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Fujian Waneng Technology Co ltd
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Fujian Waneng Technology Co ltd
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Application filed by Fujian Waneng Technology Co ltd filed Critical Fujian Waneng Technology Co ltd
Priority to CN201921605135.5U priority Critical patent/CN210756897U/en
Application granted granted Critical
Publication of CN210756897U publication Critical patent/CN210756897U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a ceramic target edging equipment convenient to clearance sweeps, including the diaphragm, slewing mechanism is installed on the bottom right side of diaphragm, the inner wall processing of diaphragm has the opening, the inside rigid coupling of opening has the fan, the bottom clearance fit of diaphragm has the lug, the bottom rigid coupling of lug has the square chest, the top rigid coupling of diaphragm has the side. This ceramic target edging equipment convenient to clearance sweeps, the problem of current ceramic target edging equipment unable effectual clearance sweeps in work has been solved through the cooperation of fan and square chest, scrap sneak into the air has been avoided, the surrounding environment has been guaranteed, staff's healthy has been ensured, danger has been reduced, and the problem that edging equipment can not be adjusted has been solved through the cooperation of control mechanism and edging mechanism, ceramic target edging is inhomogeneous has been avoided, the outward appearance has been guaranteed, rework has been avoided, the work load has been reduced, time saving, practicability is improved, and the promotion is facilitated.

Description

Ceramic target edging equipment convenient to clearance sweeps
Technical Field
The utility model relates to an edging technical field specifically is a ceramic target edging equipment convenient to clearance sweeps.
Background
Ceramic target material is the sputtering source that forms various functional films through magnetron sputtering, many arcs ion plating or coating system of other types sputter under suitable process conditions on the base plate, say briefly, the target is exactly the target material of high-speed charged energy particle bombardment, but current ceramic target material edging equipment can't effectual clearance sweeps in work, lead to the sweeps to sneak into the air easily, influence to the surrounding environment, cause the harm to staff's healthy, the danger has been improved, and edging equipment can not adjust, lead to ceramic target material edging inhomogeneous easily, cause the outward appearance impaired, need rework, increase work load, waste time, the practicality has been reduced, modern user demand that is not conform to.
Disclosure of Invention
An object of the utility model is to provide a pottery target edging equipment convenient to clearance sweeps to propose current pottery target edging equipment in solving above-mentioned background art and can't effectual clearance sweeps in work, lead to the sweeps to sneak into the air easily, produce the influence to the surrounding environment, cause harm to staff's healthy, danger has been improved, and edging equipment can not adjust, it is inhomogeneous to lead to the pottery target edging easily, cause the outward appearance impaired, need do over again, increase work load, waste time, the problem of practicality has been reduced.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a ceramic target edging equipment convenient to clearance sweeps, includes the diaphragm, slewing mechanism is installed on the bottom right side of diaphragm, the inner wall processing of diaphragm has the opening, the inside rigid coupling of opening has the fan, the bottom clearance fit of diaphragm has the lug, the bottom rigid coupling of lug has the square chest, the top rigid coupling of diaphragm has the square frame, fixture is installed on the right side of square frame, the inner wall processing of square frame also has the spout, the internally mounted of spout has control mechanism, edging mechanism is installed on control mechanism's right side, the equal rigid coupling in both ends has the base about the bottom of diaphragm.
Preferably, the rotating mechanism comprises a support, a first motor, a short rod, a first bearing and a first straight plate, the top of the support is fixedly connected with the bottom of the transverse plate, the inner wall of the support is fixedly connected with the outer wall of the first motor, the top of the first motor is fixedly connected with the bottom of the short rod, the outer wall of the short rod is rotatably connected with the inner wall of the transverse plate through the first bearing, and the top of the short rod is fixedly connected with the bottom of the first straight plate.
Preferably, the clamping mechanism comprises a first threaded rod, a second bearing, a concave plate, a second straight plate and a first handle, the outer wall of the first threaded rod is in threaded connection with the top of the square frame, the top of the first threaded rod is fixedly connected with the bottom of the first handle, the bottom of the first threaded rod is rotatably connected with the inner wall of the concave plate through the second bearing, and the bottom of the concave plate is fixedly connected with the top of the second straight plate.
Preferably, control mechanism includes flange, third bearing, second threaded rod and second handle, the outer wall of flange and the inner wall slip joint of spout, the left side of flange is passed through the right side rotation of third bearing and second threaded rod and is linked to each other, the outer wall of second threaded rod and the positive top threaded connection of square frame, the left side of second threaded rod and the right side looks rigid coupling of second handle.
Preferably, the convex plate, the second threaded rod and the sliding groove form a sliding mechanism.
Preferably, edging mechanism includes bent plate, second motor, montant and round bar, the bottom of bent plate and the top looks rigid coupling of convex plate, the right side of bent plate and the left side looks rigid coupling of second motor, the output of second motor and the top looks rigid coupling of montant, the outer wall of montant and the inner wall clearance fit of convex plate, the bottom of montant and the top threaded connection of round bar.
Compared with the prior art, the beneficial effects of the utility model are that: this ceramic target edging equipment convenient to clearance sweeps, the problem of current ceramic target edging equipment unable effectual clearance sweeps in work has been solved through the cooperation of fan and square chest, scrap sneak into the air has been avoided, the surrounding environment has been guaranteed, staff's healthy has been ensured, danger has been reduced, and the problem that edging equipment can not be adjusted has been solved through the cooperation of control mechanism and edging mechanism, ceramic target edging is inhomogeneous has been avoided, the outward appearance has been guaranteed, rework has been avoided, the work load has been reduced, time saving, practicability is improved, and the promotion is facilitated.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic view of the connection relationship between the horizontal plate, the bump and the square box in fig. 1.
Fig. 3 is a schematic view showing a connection relationship between the first threaded rod, the second bearing and the concave plate in fig. 1.
Fig. 4 is a schematic view of a connection structure of the convex plate, the third bearing and the second threaded rod in fig. 1.
In the figure: 1. the device comprises a transverse plate, 2, a rotating mechanism, 201, a support, 202, a first motor, 203, a short rod, 204, a first bearing, 205, a first straight plate, 3, a clamping mechanism, 301, a first threaded rod, 302, a second bearing, 303, a concave plate, 304, a second straight plate, 305, a first handle, 4, a control mechanism, 401, a convex plate, 402, a third bearing, 403, a second threaded rod, 404, a second handle, 5, an edge grinding mechanism, 501, a bent plate, 502, a second motor, 503, a vertical rod, 504, a round rod, 6, a square frame, 7, a sliding groove, 8, a through hole, 9, a fan, 10, a convex block, 11, a square box, 12 and a base.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides a technical solution: the utility model provides a ceramic target edging equipment convenient to clearance sweeps, including diaphragm 1, slewing mechanism 2 is installed on diaphragm 1's bottom right side, diaphragm 1's inner wall processing has opening 8, opening 8's inside rigid coupling has fan 9, fan 9's model is DL-FS335, diaphragm 1's bottom clearance fit has lug 10, lug 10's bottom rigid coupling has square chest 11, diaphragm 1's top rigid coupling has square frame 6, fixture 3 is installed on square frame 6's right side, square frame 6's inner wall processing also has spout 7, the internally mounted of spout 7 has control mechanism 4, edging mechanism 5 is installed on control mechanism 4's right side, the equal rigid coupling in both ends has base 12 about diaphragm 1's bottom.
The rotating mechanism 2 comprises a support 201, a first motor 202, a short rod 203, a first bearing 204 and a first straight plate 205, the top of the support 201 is fixedly connected with the bottom of the transverse plate 1, the inner wall of the support 201 is fixedly connected with the outer wall of the first motor 202, the model of the first motor 202 is 5IK120RGU-CF, the top of the first motor 202 is fixedly connected with the bottom of the short rod 203, the outer wall of the short rod 203 is rotatably connected with the inner wall of the transverse plate 1 through the first bearing 204, the short rod 203 is forced to rotate through the first bearing 204, the top of the short rod 203 is fixedly connected with the bottom of the first straight plate 205, the clamping mechanism 3 comprises a first threaded rod 301, a second bearing 302, a concave plate 303, a second straight plate 304 and a first grip 305, the outer wall of the first threaded rod 301 is in threaded connection with the top of the square frame 6, the top of the first threaded rod 301 is fixedly connected with the bottom of the first grip 305, and the first grip 305 is convenient for rotating the first, the bottom of the first threaded rod 301 is rotationally connected with the inner wall of the concave plate 303 through a second bearing 302, the first threaded rod 301 is stressed to rotate through the second bearing 302, the bottom of the concave plate 303 is fixedly connected with the top of the second straight plate 304, the control mechanism 4 comprises a convex plate 401, a third bearing 402, a second threaded rod 403 and a second handle 404, the outer wall of the convex plate 401 is in sliding clamping connection with the inner wall of the sliding groove 7, the convex plate 401 is stressed to slide through the sliding groove 7, the left side of the convex plate 401 is rotationally connected with the right side of the second threaded rod 403 through the third bearing 402, the second threaded rod 403 is stressed to rotate through the third bearing 402, the outer wall of the second threaded rod 403 is in threaded connection with the top of the front of the square frame 6, the left side of the second threaded rod 403 is fixedly connected with the right side of the second handle 404, the second handle 404 is convenient to rotate the second threaded rod 403, the convex plate 401, the second threaded rod 403 and, rotate second threaded rod 403 and drive flange 401 and remove about through spout 7, edging mechanism 5 includes bent plate 501, second motor 502, montant 503 and round bar 504, the bottom of bent plate 501 and the top of flange 401 are rigid coupling mutually, the right side of bent plate 501 and the left side rigid coupling of second motor 502, the model of second motor 502 is 5IK120RGU-CF, the output of second motor 502 and the top of montant 503 are rigid coupling mutually, the outer wall of montant 503 and the inner wall clearance fit of flange 401, the montant 503 atress rotates through the inner wall of flange 401, the bottom of 503 montant and the top threaded connection of round bar 504, round bar 504 is the cavernosum.
In this embodiment, when the apparatus is used, a ceramic target is placed on the top of the first straight plate 205, the first handle 305 is rotated to drive the first threaded rod 301 to rotate downwards through the top of the square frame 6, so as to drive the concave plate 303 to move downwards through the second bearing 302, the concave plate 303 is moved downwards to drive the first straight plate 304 to abut against the ceramic target, the first handle 305 is stopped to rotate, the second handle 404 is rotated to drive the second threaded rod 403 to rotate towards the right, the rotated second threaded rod 403 drives the convex plate 401 to move towards the right on the inner wall of the chute 7, so as to drive the curved plate 501 to move towards the right, when the edge of the round rod 504 and the ceramic target are attached towards each other, the second handle 404 is stopped to rotate, the fan 9 is connected with an external power supply, the fan 9 is operated, and then the first motor 202 and the second motor 502 are connected with the external power supply to operate the two motors, first motor 202 drives quarter butt 203 and rotates through first bearing 204 to drive ceramic target through first straight board 205 and rotate, the second is electronic 501 drives round bar 504 through montant 503 and rotates and then to ceramic target edging, and the sweeps of production enters into inside the square chest 11 through fan 9.
In the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "both ends", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "disposed," "connected," "fixed," "screwed" and the like are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate medium, and may be connected through the inside of two elements or in an interaction relationship between two elements, unless otherwise specifically defined, and the specific meaning of the above terms in the present invention will be understood by those skilled in the art according to specific situations.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a ceramic target edging equipment convenient to clearance sweeps, includes diaphragm (1), its characterized in that: slewing mechanism (2) are installed on the bottom right side of diaphragm (1), the inner wall processing of diaphragm (1) has opening (8), the inside rigid coupling of opening (8) has fan (9), the bottom clearance fit of diaphragm (1) has lug (10), the bottom rigid coupling of lug (10) has square chest (11), the top rigid coupling of diaphragm (1) has square frame (6), fixture (3) are installed on the right side of square frame (6), the inner wall processing of square frame (6) also has spout (7), the internally mounted of spout (7) has control mechanism (4), edging mechanism (5) are installed on the right side of control mechanism (4), the equal rigid coupling in both ends has base (12) about the bottom of diaphragm (1).
2. The ceramic target material edging device convenient for cleaning scraps as claimed in claim 1, wherein: the rotating mechanism (2) comprises a support (201), a first motor (202), a short rod (203), a first bearing (204) and a first straight plate (205), the top of the support (201) is fixedly connected with the bottom of the transverse plate (1), the inner wall of the support (201) is fixedly connected with the outer wall of the first motor (202), the top of the first motor (202) is fixedly connected with the bottom of the short rod (203), the outer wall of the short rod (203) is rotatably connected with the inner wall of the transverse plate (1) through the first bearing (204), and the top of the short rod (203) is fixedly connected with the bottom of the first straight plate (205).
3. The ceramic target material edging device convenient for cleaning scraps as claimed in claim 1, wherein: fixture (3) include first threaded rod (301), second bearing (302), concave plate (303), the straight board of second (304) and first handle (305), the top threaded connection of the outer wall of first threaded rod (301) and square frame (6), the top of first threaded rod (301) and the bottom rigid coupling of first handle (305), the inner wall rotation that the bottom of first threaded rod (301) passes through second bearing (302) and concave plate (303) links to each other, the bottom of concave plate (303) and the top rigid coupling of the straight board of second (304) mutually.
4. The ceramic target material edging device convenient for cleaning scraps as claimed in claim 1, wherein: control mechanism (4) include flange (401), third bearing (402), second threaded rod (403) and second handle (404), the outer wall of flange (401) and the inner wall slip joint of spout (7), the left side of flange (401) is passed through the right side rotation of third bearing (402) and second threaded rod (403) and is linked to each other, the outer wall of second threaded rod (403) and the positive top threaded connection of square frame (6), the left side of second threaded rod (403) and the right side looks rigid coupling of second handle (404).
5. The ceramic target material edging device convenient for cleaning scraps as claimed in claim 4, wherein: the convex plate (401), the second threaded rod (403) and the sliding groove (7) form a sliding mechanism.
6. The ceramic target material edging device convenient for cleaning scraps as claimed in claim 1, wherein: edging mechanism (5) are including bent plate (501), second motor (502), montant (503) and round bar (504), the bottom of bent plate (501) and the top looks rigid coupling of protruding board (401), the right side of bent plate (501) and the left side looks rigid coupling of second motor (502), the output of second motor (502) and the top looks rigid coupling of montant (503), the outer wall of montant (503) and the inner wall clearance fit of protruding board (401), the bottom of montant (503) and the top threaded connection of round bar (504).
CN201921605135.5U 2019-09-25 2019-09-25 Ceramic target edging equipment convenient to clearance sweeps Expired - Fee Related CN210756897U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921605135.5U CN210756897U (en) 2019-09-25 2019-09-25 Ceramic target edging equipment convenient to clearance sweeps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921605135.5U CN210756897U (en) 2019-09-25 2019-09-25 Ceramic target edging equipment convenient to clearance sweeps

Publications (1)

Publication Number Publication Date
CN210756897U true CN210756897U (en) 2020-06-16

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ID=71051239

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CN201921605135.5U Expired - Fee Related CN210756897U (en) 2019-09-25 2019-09-25 Ceramic target edging equipment convenient to clearance sweeps

Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111805335A (en) * 2020-07-29 2020-10-23 佘峰 Edge grinding device with automatic steering function for circuit board production
CN117655898A (en) * 2023-12-07 2024-03-08 佛山市顺德区顺崇机械制造有限公司 Automatic polishing device for side edges of target material and using method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111805335A (en) * 2020-07-29 2020-10-23 佘峰 Edge grinding device with automatic steering function for circuit board production
CN117655898A (en) * 2023-12-07 2024-03-08 佛山市顺德区顺崇机械制造有限公司 Automatic polishing device for side edges of target material and using method thereof

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CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20200616

Termination date: 20200925