CN117606461B - Double-ring differential ultra-high rotation speed photon chip optical fiber gyro - Google Patents

Double-ring differential ultra-high rotation speed photon chip optical fiber gyro Download PDF

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CN117606461B
CN117606461B CN202410096268.3A CN202410096268A CN117606461B CN 117606461 B CN117606461 B CN 117606461B CN 202410096268 A CN202410096268 A CN 202410096268A CN 117606461 B CN117606461 B CN 117606461B
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waveguide
light
ring
photonic chip
interference
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CN117606461A (en
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邓麟
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Zhuhai Osno Automation Co ltd
Guangdong Osno Industry Co ltd
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Zhuhai Osno Automation Co ltd
Guangdong Osno Industry Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses
    • G01C19/64Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/72Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses
    • G01C19/64Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/72Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
    • G01C19/721Details

Abstract

The embodiment of the invention discloses a double-ring differential type ultra-high-rotation-speed photonic chip fiber gyroscope, which comprises a photonic chip, a light source, a signal detection circuit and 2 groups of detectors, wherein a mode converter, a first beam splitter and two paths of equal-interference light paths are integrated on the photonic chip, each interference light path comprises a second beam splitter, a polarizer, a third beam splitter and a waveguide ring which are sequentially connected, a phase modulator is arranged on the waveguide ring, and a preset modulation phase is added on the waveguide ring by the phase modulator. According to the invention, 2 interference waveguide rings with different optical scale factors are integrated in a set of optical path system, the measurement dynamic range corresponding to a far-exceeding single waveguide ring is realized by utilizing the differential signal of the Sagnac interference intensity of two waveguide rings, and the large-rotation-speed measurement is realized on the basis of ensuring the small volume and low cost of the gyroscope by using a full-chip integration scheme.

Description

Double-ring differential ultra-high rotation speed photon chip optical fiber gyro
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to a double-ring differential ultra-high-rotation-speed photonic chip optical fiber gyroscope.
Background
The fiber optic gyroscope is used for sensing the rotation angular velocity of the carrier, and is a core sensor for carrier inertial navigation, gesture stabilization and motion control. The working principle of the fiber-optic gyroscope is based on the rotating Sagnac effect, as shown in formula (1).
(1)
Wherein,The Sagnac phase generated by rotation, that is, the phase difference of two light beams is transmitted in the optical fiber loop in the forward and backward directions. For the traditional optical fiber gyro L taking optical fibers as media, the length of an optical fiber ring is the length of a sensitive waveguide ring for the photonic chip gyro L; d is the equivalent diameter of the sensitive waveguide ring; lambda is the working wavelength; c is the speed of light in vacuum, and Ω is the rotational angular velocity. From the equation, it can be seen that the Sagnac interference phase is proportional to the rotational angular velocity, and the longer the sensitive ring length is, the larger the surrounding area is, and the larger the Sagnac phase difference is at the same rotational angular velocity. The rotational angular velocity can be realized by detecting the phase difference interference intensity. The interference light intensity I can be expressed by the formula (2).
(2)
Wherein I 0 is the input light intensity,The amplitude of the modulation phase artificially increased for increasing the sensitivity of the interference demodulation may be pi/2, 3 pi/4, 7 pi/8, etc. Taking the-pi/2 modulation phase as an example, equation (2) can be simplified as:
(3)
As can be seen from the expression (3), the monotonic resolving interval of the fiber-optic gyroscope is only [ -pi/2, pi/2 ] without using demodulation across interference fringes. Since the fiber optic gyroscope generally adopts a wide-spectrum light source, the coherence length is shorter, and the coherence contrast is poorer as the interference level is higher, even if a more complex cross-stripe resolving technology is adopted, the dynamic range can be only expanded by a plurality of times. More importantly, the cross-stripe solving technology is only applicable to a system with the rotation speed gradually increasing from small to large, but is not applicable to a system with high angular acceleration such as a high-spin shell.
Will beSubstitution of = ±pi/2 into (1) gives the maximum measured angular velocity Ω max as,
(4)
In the case of a defined operating wavelength, the shorter the length of the sensitive waveguide ring, the smaller the surrounding area, the greater the maximum measured angular velocity. Taking the commonly adopted 1310nm working wavelength as an example, the equivalent surrounding diameter is 20mm (the bending loss can be obviously increased when the surrounding area is too small), and the equivalent surrounding diameter is calculated by substituting formula (4), so that the measuring range of the gyroscope exceeds 300 revolutions/s (corresponding to 1884 rad/s), the equivalent length L of the sensitive ring is smaller than 2.5m, and the intrinsic modulation frequency f corresponding to the waveguide is calculated as follows:
(5)
wherein n is the refractive index of the waveguide, the optical fiber is 1.46, and the lithium niobate is about 2.2; c is the speed of light in vacuum. It is calculated that a 2.5m equivalent length waveguide requires a modulation frequency in excess of 40 MHz. The higher the modulation frequency, the higher the control circuit frequency and the detection frequency, and the lower the signal-to-noise ratio of the gyroscope.
The large dynamic range requires the gyro to shorten the waveguide length, and simply shortening the waveguide length can lead to the reduction of the signal to noise ratio of the gyro, which contradiction leads to the very difficult realization of ultra-high rotation speed measurement by using the traditional fiber optic gyro architecture.
In addition, low cost, miniaturization is a constant theme for the development of fiber optic gyroscopes. Particularly for high spin systems, the sensor is required to be smaller, lighter in weight, highly reliable without connection points, and inexpensive. The traditional fiber-optic gyroscope is manufactured by welding discrete fiber-optic devices one by one. Low production efficiency, large device size, and excessive melting point also creates reliability problems at high spin.
Disclosure of Invention
The technical problem to be solved by the embodiment of the invention is to provide the double-ring differential type ultra-high-rotation-speed photonic chip fiber gyroscope so as to realize ultra-high-rotation-speed measurement.
In order to solve the technical problems, the embodiment of the invention provides a double-ring differential type ultra-high-rotation-speed photonic chip fiber gyroscope, which comprises a photonic chip, a light source, a signal detection circuit and 2 groups of detectors, wherein a mode converter, a first beam splitter and two paths of equal interference light paths are integrated on the photonic chip, the mode converter converts a mode field of light emitted by the light source into a waveguide mode field on the photonic chip, light entering the chip is split by the first beam splitter, and half of light enters the two sets of interference light paths respectively; the interference light path comprises a second beam splitter, a polarizer, a third beam splitter and a waveguide ring which are sequentially connected, a phase modulator is arranged on the waveguide ring, and a preset modulation phase is added on the waveguide ring by the phase modulator; the 2 groups of detectors respectively measure the light intensity of interference signals of the two paths of interference light paths and send the light intensity to the signal detection circuit for detection and processing.
Further, the signal detection circuit calculates the rotation angular velocity Ω according to the following formula:
wherein, I 1、I2 is the light intensity of the interference signal measured by the 2 groups of detectors, and K 1、K2 is the optical scale factor of the waveguide ring of the two interference light paths.
Further, the optical scale factors of the waveguide rings of the two interference light paths satisfy:
Wherein Ω max is a preset maximum angular velocity, L 1、L2 is the waveguide length of the waveguide ring of the two interference light paths, D 1、D2 is the waveguide surrounding diameter of the waveguide ring of the two interference light paths, and c is the light velocity.
Further, the light source is coupled to the photonic chip in alignment and mounted to the side of the photonic chip.
Furthermore, the polarizer adopts a curved waveguide, and utilizes the principle that TE light and TM light have different curved losses to realize TM light filtering and keep TE light low-loss transmission.
Further, the waveguide layer of the photonic chip is made of a thin film lithium niobate material.
Further, the waveguide ring adopts a ridge waveguide structure, and the phase modulator adopts a push-pull structure.
Further, the first beam splitter and the third beam splitter are equal-amplitude beam splitters, and a1×2 multimode interference type structure is adopted.
Further, the mode converter is arranged on the end face of the photon chip.
The beneficial effects of the invention are as follows:
1. According to the invention, the differential calculation of the interference intensity of the two waveguide rings is utilized to realize the calculation of the ultrahigh rotating speed, the length of a single waveguide ring is not required to be shortened, and the low modulation frequency and the high signal-to-noise ratio of each waveguide ring are ensured.
2. The invention replaces discrete devices manufactured one by one and assembled one by one in the traditional fiber optic gyroscope by adopting the monolithically integrated photon chip, and combines the photoelectronic photoetching technology of CMOS manufacture, thereby remarkably improving the production efficiency, reducing the product volume and lowering the product cost.
3. The invention adopts the film lithium niobate as the base material of the photon chip, realizes the propagation, mode field and phase control of the light wave, and completes the integration of two interference waveguide rings.
Drawings
FIG. 1 is a schematic diagram of a dual-ring differential ultra-high speed photonic chip fiber optic gyroscope according to an embodiment of the invention.
Fig. 2 is a schematic structural view of a crisscross waveguide structure according to an embodiment of the present invention.
Fig. 3 is a propagation field diagram of a crisscrossed waveguide structure of an embodiment of the present invention.
Description of the reference numerals
The device comprises a light source 1, a mode converter 2, a first beam splitter 3, a second beam splitter 4, a polarizer 5, a phase modulator 6, a waveguide ring 7 of one interference light path, a waveguide ring 8 of the other interference light path, a detector 9, a signal detection circuit 10 and a third beam splitter 11.
Detailed Description
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other, and the present application will be further described in detail with reference to the drawings and the specific embodiments.
In the embodiment of the present invention, if there is a directional indication (such as up, down, left, right, front, and rear … …) only for explaining the relative positional relationship, movement condition, etc. between the components in a specific posture (as shown in the drawing), if the specific posture is changed, the directional indication is correspondingly changed.
In addition, the description of "first," "second," etc. in this disclosure is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implying an indication of the number of features being indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature.
Referring to fig. 1 to 3, a dual-ring differential ultra-high rotation speed photonic chip fiber optic gyroscope according to an embodiment of the invention includes a photonic chip, a light source, a signal detection circuit, and 2 groups of detectors.
The photon chip is integrated with a mode converter, a first beam splitter and two paths of equal interference light paths. The interference light path comprises a second beam splitter, a polarizer, a third beam splitter and a waveguide ring which are sequentially connected. The invention can match 850nm, 1310nm and 1550nm multi-working wavelength gyroscopes through the design of waveguide dimensions.
The light source is a semiconductor light source, which is typically a broad spectrum Superluminescent Light Emitting Diode (SLED). The light source is coupled with the photon chip and aligned with the photon chip side. Light emitted by the light source is converted into a mode field of a waveguide on the photonic chip by the mode converter, so that the light is coupled into the photonic chip with lower loss. The light source incident port is vertically arranged, the light source coupling structure is arranged at 90 degrees with the main part of the gyro light path, and stray light coupled into the chip by the light source can be prevented from directly entering the interference light path to influence the signal to noise ratio of the gyro.
Light entering the photonic chip is split by a first beam splitter, and half of the light enters two sets of equivalent interference light paths. Taking one set of interference light path as an example, 50% of light enters the second beam splitter, 50% of light enters the polarizer after beam splitting, TM components of the incident light are filtered, TE components are reserved for transmission in the light path, and accordingly polarization-related errors of the gyroscope are restrained. The polarization-filtered light enters a third beam splitter connected to the fiber optic ring and is split into light transmitted clockwise and light transmitted counterclockwise.
Taking the waveguide ring 7 of one path of interference light path as an example, clockwise and anticlockwise light enters the waveguide ring 7 and travels around the waveguide respectively, and Sagnac phase difference is added to the clockwise and anticlockwise light when the carrier rotates. For the waveguide ring 8 of the other path of interference light path, the Sagnac phase difference/>, is added when the carrier rotates, for the clockwise and anticlockwise light. Since the optical scale factors of waveguide ring 7 and waveguide ring 8 are different (waveguide length and surrounding area are different), therefore/>≠/>. In order to make the gyro more sensitive, a phase modulator is added on two waveguide rings, and a preset modulation phase/>, is added on the waveguide ringsTo/>For example, = -pi/2, the intensity after interference is shown below.
(5)
(6)
The light intensities I 1 and I 2 of the two interference signals are measured by two detectors respectively, and are detected and processed at a signal detection circuit. The treatment method comprises the following steps: the monotonic solution interval of the interference intensities represented by the formulas (5) and (6) is [ ‒ pi/2, pi/2 ], that is, the monotonic period is pi. For small angular rate solutions, the interference phase is within a monotonic interval. However, for large angular rate demodulation, such as 300 revolutions/s, where the interference phase would exceed the monotonic interval, the interference phase can be expressed as:
(7)
(8)
Wherein m 1,m2 is a non-negative integer, θ 12 is a non-integer residual phase, lying within [ ‒ pi/2, pi/2 ]. Defining the optical scale factor K 1、K2 for two interference waveguide loops:
(9)
(10)
Then ,/>C is the speed of light. The waveguide length L 1、L2 and the waveguide surrounding diameter D 1、D2 are designed such that
(11)
Where Ω max is the maximum angular velocity of the system design, under this condition, m 1=m2 =m. The rotational angular velocity Ω can thus be calculated by the difference between the two signals:
(12)
therefore, the resolution of the large angular velocity is realized through two paths of interference light intensity.
The conventional scheme shown in the formula (4) requires an extremely short waveguide to achieve a large angular velocity measurement of about 300 rpm. By the double-loop difference calculation method shown in the formula (12), the length of each waveguide loop can be greatly increased, and the length difference of two waveguide loops (such as the waveguide diameter of 20mm and the length of 50m and 52m respectively) is controlled so as to meet the condition shown in the formula (11), thereby reducing the modulation frequency of each loop and improving the signal-to-noise ratio of each waveguide loop interference signal.
The photonic chip adopts a film lithium niobate substrate, integrates optical fiber gyro devices such as a polarizer, a beam splitter, a phase modulator and the like on a single film lithium niobate substrate, and integrates 2 closed waveguide rings on the substrate to realize Sagnac phase detection. The waveguide ring length and the surrounding diameter satisfy the condition shown in the formula (11). In this example, the average diameter of the two waveguides is 20mm, and the waveguide ring lengths are 50m and 52m, respectively. At this time, when the maximum rotation speed is 300 rotations per second,The resolving condition is satisfied.
In this example, the light source employs a superluminescent diode chip mounted on a heat sink, and its operating wavelength may be 850nm, 480 nm,1310nm,1550nm, etc. The light source is attached to the photonic integrated chip by adopting an end surface coupling process. The end face of the photon chip is designed with a mode field converter to match the mode fields of the light source and the waveguide, and the mode field converter can adopt an inverted cone scheme. In order to avoid interference of stray light of the light source to the light path, the light source is arranged perpendicular to the main light path, as shown in fig. 1. In the design example, the beam splitter adopts a1×2 multimode interference (MMI) design scheme, the polarizer adopts a curved waveguide, and the filtering of the TM light is realized by utilizing the principle that the TE light and the TM light have different bending losses, and the low-loss transmission of the TE light is reserved. In an example, the lithium niobate thin film has a waveguide thickness of 180nm, the lithium niobate ridge waveguide size is 800×60nm, the bending radius is 150 μm, and the total length of the bent waveguide is 1.88mm.
The phase modulator is realized by adopting a lithium niobate thin film structure, electrodes are designed on two sides of a waveguide by utilizing the electro-optical characteristic of the thin film lithium niobate, and double-ring phase modulation is realized by applying voltage. The electro-optic coefficient r 33 is 30pm/V, and the crystal cutting adopts an x-cut or y-cut scheme. The lithium niobate waveguide adopts a ridge waveguide structure, and the phase modulator adopts a push-pull structure. The phase modulator comprises a SiO 2 cladding layer, a metal electrode, a lithium niobate thin film, a SiO 2 cladding layer and a Si substrate. By reasonably optimizing the thickness of the lithium niobate thin film, the interval between two electrodes and the ridge waveguide width, the modulation efficiency of the phase modulator is maximized and the waveguide transmission loss is minimized. In this example, the lithium niobate ridge waveguide size was 3000×60nm, the sleb thickness of the lithium niobate thin film was 180nm, the electrode spacing was 5um, and the single-arm modulation efficiency of the phase modulator was about 1.8v·cm.
Referring to fig. 2 and 3, the waveguide ring 7 and the waveguide ring 8 are connected by adopting a crisscross structure to realize connection between the other port of the waveguide ring and the port of the phase modulator, wherein L, H is the width and the height of the waveguide, C1 and C2 are the right-angle side length of the inner region of the white frame and the distance from the inflection point of the outer boundary to the right-angle side shown in fig. 2, R1 and R2 are the radii of the inner arc and the outer arc of the half-moon-shaped gap, P is the distance from the midpoint of the inner arc to the crossing center point, W is the interval between the inner arc and the outer arc, and D is the length of the inner arc and the outer arc in the vertical direction; the cross structure adopts reverse optimization design, and single-node insertion loss of <0.175 dB and crosstalk of < -37dB can be realized in 1550nm wave band by optimizing the internal and boundary distribution of the cross part.
The invention adopts an integrated optical technology capable of large-scale mass production, integrates a beam splitter, a polarizer, a phase modulator, a waveguide ring and the like on a photon chip, thereby greatly improving the production efficiency of the gyroscope and reducing the size and the cost of the gyroscope. And two interference waveguide rings with different scale factors are integrated on the photon chip at the same time, and the interference light intensity difference of the two waveguide rings is calculated, so that the measuring dynamic range corresponding to the single waveguide ring is far exceeded.
The invention utilizes a unique optical architecture, integrates a gyro light path on a photon chip, realizes the measurement of ultrahigh rotating speed with low cost and miniaturization, and solves the difficulty that the rotation angular velocity of the application such as high spin bullet, machine tool and the like is not measurable by a sensor.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.

Claims (7)

1. The double-ring differential ultra-high-rotation-speed photonic chip fiber optic gyroscope comprises a photonic chip, a light source, a signal detection circuit and 2 groups of detectors, and is characterized in that a mode converter, a first beam splitter and two paths of equal-interference light paths are integrated on the photonic chip, the mode converter converts a mode field of light emitted by the light source into a waveguide mode field on the photonic chip, light entering the chip is split by the first beam splitter, and half of light enters the two sets of interference light paths respectively; the interference light path comprises a second beam splitter, a polarizer, a third beam splitter and a waveguide ring which are sequentially connected, a phase modulator is arranged on the waveguide ring, and a preset modulation phase is added on the waveguide ring by the phase modulator; the 2 groups of detectors respectively measure the light intensity of interference signals of the two paths of interference light paths and send the light intensity to a signal detection circuit for detection processing; the signal detection circuit calculates a rotational angular velocity Ω according to:
wherein, I 0 is input light intensity, I 1、I2 is light intensity of interference signals measured by 2 groups of detectors, and K 1、K2 is optical scale factor of waveguide ring of two interference light paths;
the optical scale factors of the waveguide rings of the two interference light paths satisfy the following conditions:
Wherein Ω max is a preset maximum angular velocity, L 1、L2 is the waveguide length of the waveguide ring of the two interference light paths, D 1、D2 is the waveguide surrounding diameter of the waveguide ring of the two interference light paths, c is the light velocity, and λ is the working wavelength.
2. The dual-ring differential ultra-high rotation speed photonic chip fiber optic gyroscope of claim 1, wherein the light source is coupled to the photonic chip in alignment and mounted to a side of the photonic chip.
3. The dual-ring differential ultra-high rotation speed photonic chip fiber optic gyroscope of claim 1, wherein the polarizer adopts a curved waveguide, and utilizes the principle that the TE light and the TM light have different bending losses to realize the filtering of the TM light and retain the low-loss transmission of the TE light.
4. The dual-ring differential ultra-high rotation speed photonic chip fiber optic gyroscope of claim 1, wherein the waveguide layer of the photonic chip is a thin film lithium niobate material.
5. The dual-ring differential ultra-high rotation speed photonic chip fiber optic gyroscope of claim 4, wherein the waveguide ring is a ridge waveguide structure and the phase modulator is a push-pull structure.
6. The dual-ring differential ultra-high rotation speed photonic chip fiber optic gyroscope of claim 1, wherein the first beam splitter and the third beam splitter are equal-amplitude beam splitters and adopt a1 x2 multimode interference structure.
7. The dual-ring differential ultra-high rotation speed photonic chip fiber optic gyroscope of claim 1, wherein the mode converter is disposed on an end face of the photonic chip.
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CN115356867A (en) * 2022-08-09 2022-11-18 松山湖材料实验室 Lithium niobate thin film integrated chip, photoelectronic device and optical fiber gyroscope
CN115143949A (en) * 2022-09-05 2022-10-04 中国船舶重工集团公司第七0七研究所 Ultrahigh-precision fiber gyroscope eigenfrequency compensation and fault diagnosis processing method
CN115560741A (en) * 2022-09-23 2023-01-03 北京航空航天大学 Differential fiber-optic gyroscope based on polarization mode multiplexing
CN117433500A (en) * 2023-12-21 2024-01-23 广东奥斯诺工业有限公司 Polarization mode multiplexing double-optical-path fiber gyroscope based on photon chip

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