CN113884085B - Based on SiO2Integrated optical chip for fiber-optic gyroscope with-SiN coupled chip structure - Google Patents
Based on SiO2Integrated optical chip for fiber-optic gyroscope with-SiN coupled chip structure Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 81
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 117
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 117
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 117
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 117
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 117
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 117
- 239000000835 fiber Substances 0.000 claims abstract description 24
- XGRYDJSRYGHYOO-KJYQHMRQSA-N bis[[(1r,8r)-2,3,5,6,7,8-hexahydro-1h-pyrrolizin-1-yl]methyl] 2,4-bis(4-hydroxyphenyl)cyclobutane-1,3-dicarboxylate Chemical compound C1=CC(O)=CC=C1C1C(C(=O)OC[C@H]2[C@H]3CCCN3CC2)C(C=2C=CC(O)=CC=2)C1C(=O)OC[C@H]1[C@H]2CCCN2CC1 XGRYDJSRYGHYOO-KJYQHMRQSA-N 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims abstract description 4
- 239000013307 optical fiber Substances 0.000 claims description 31
- 230000008878 coupling Effects 0.000 claims description 20
- 238000010168 coupling process Methods 0.000 claims description 20
- 238000005859 coupling reaction Methods 0.000 claims description 20
- 238000005452 bending Methods 0.000 claims description 14
- 238000009826 distribution Methods 0.000 claims description 6
- 238000013461 design Methods 0.000 abstract description 9
- 239000000463 material Substances 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 3
- 230000010287 polarization Effects 0.000 description 11
- 230000010354 integration Effects 0.000 description 5
- 230000008033 biological extinction Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
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- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
- G01C19/72—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
- G01C19/725—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers using nxn optical couplers, e.g. 3x3 couplers
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Abstract
The embodiment of the invention discloses a SiO-based material2Integrated optical chip for a fiber optic gyroscope of the-SiN coupled chip configuration, comprising a first optical fiber-SiO2Waveguide mode converter, second optical fiber-SiO2Waveguide mode converter, first 3dB SiO2Coupler, first SiO2-SiN waveguide mode converter, SiN continuous curvature curved waveguide polarizer, second SiO2-SiN waveguide mode converter, second 3dB SiO2Coupler and third optical fiber-SiO2Waveguide mode converter and fourth optical fiber-SiO2A waveguide mode converter. The invention can effectively improve the stability and reliability of the open-loop fiber optic gyroscope while ensuring the precision of the open-loop fiber optic gyroscope, and realizes the design and process of smaller size, lower power consumption, lower cost and simpler structure of the open-loop fiber optic gyroscope.
Description
Technical Field
The invention relates to the technical field of integrated optics and inertial sensing, in particular to a sensor based on SiO2Integrated optical chip for fiber optic gyroscope of SiN coupled chip architecture.
Background
Because the angular displacement can be accurately measured, the gyroscope with high sensitivity plays a vital role in a series of fields, such as aviation navigation, robots, unmanned automobile driving, geographical mapping and the like, and the gyroscope with low cost and compactness is widely demanded by the market. Optical gyros based on the Sagnac effect have been developed as a versatile mature technology due to their high sensitivity. Compared with the traditional mechanical gyroscope based on angular momentum conservation, the optical gyroscope has no motion module, so that the optical gyroscope is not influenced by gravity, impact and vibration, and does not need any special universal suspension frame or packaging means.
Through recent development, the implementation modes of the optical gyroscope mainly include a laser gyroscope, a fiber optic gyroscope and an integrated optical gyroscope. With the development of integrated photonics, integrated optical gyroscopes have become a hot point of research in the current gyroscope field due to their advantages of small size, integration, light weight, and low cost. By integrating all active and passive optical devices required by the optical gyroscope except the sensing coil, an Integrated Optical Drive (IOD) chip is formed, and the drive chip can be connected with the sensing coil, such as a passive optical fiber or an ultra-low loss silicon nitride waveguide, to form the interference optical gyroscope. Therefore, the integrated driving chip greatly reduces the size, weight, power consumption and manufacturing cost of the optical gyroscope, thereby playing an important role in promoting the popularization of the optical gyroscope.
The prior integrated optical gyroscope still stays at the development stage of a discrete prototype, and has larger volume and low integration degree. The factors restricting the realization of integration of the optical gyroscope are that the integration design and the processing technology of each key optical device are not mature enough; secondly, a plurality of challenges and problems exist for realizing each key device (such as a low-insertion-loss coupler, a high-extinction-ratio polarizer and the like) meeting the performance requirement by using a single material platform.
Disclosure of Invention
The technical problem to be solved by the embodiment of the invention is to provide a SiO-based material2The integrated optical chip for the optical fiber gyroscope with the SiN coupling chip structure effectively improves the stability and the reliability of the integrated optical chip, and simultaneously realizes the design and the process of smaller size, lower power consumption, lower cost and simpler structure of the open-loop optical fiber gyroscope.
In order to solve the above technical problems, an embodiment of the present invention provides a SiO-based optical device2Integrated optical chip for a fiber optic gyroscope of the-SiN coupled chip configuration, comprising a first optical fiber-SiO2Waveguide mode converter, second optical fiber-SiO2Waveguide mode converter, first 3dB SiO2Coupler, first SiO2-SiN waveguide mode converter, SiN continuous curvature curved waveguide polarizer, second SiO2-SiN waveguide mode converter, second 3dB SiO2Coupler and third optical fiber-SiO2Waveguide mode converter and fourth optical fiber-SiO2A waveguide mode converter;
first optical fiber-SiO2One end of the waveguide mode converter is connected with an external light source through an optical fiber, and the first optical fiber-SiO2The other end of the waveguide mode converter is connected with the first 3dB SiO2One branch of the coupler is connected; second optical fiber-SiO2One end of the waveguide mode converter is connected with an external photoelectric detector through an optical fiber, and the second optical fiber-SiO2The other end of the waveguide mode converter is connected with the first 3dB SiO2The other branch of the coupler is connected;
first 3dB SiO2Base waveguide and first SiO of coupler2-one end of the SiN waveguide mode converter is aligned coupled; first SiO2The other end of the SiN waveguide mode converter is connected to one end of a SiN continuous curvature curved waveguide polarizer; the other end of the SiN continuous curvature bent waveguide polarizer and the second SiO2-one end of the SiN waveguide mode converter is connected; second SiO2The other end of the-SiN waveguide mode converter is connected to the second 3dB SiO2The fundamental waveguide of the coupler is coupled in alignment; second 3dB SiO2One branch of the coupler and the third optical fiber-SiO2One end of the waveguide mode converter is connected with the second 3dB SiO2The other branch of the coupler and a fourth optical fiber-SiO2One end of the waveguide mode converter is connected; third optical fiber-SiO2The other end of the waveguide mode converter and a fourth optical fiber-SiO2The other end of the waveguide mode converter is connected with two ends of the external optical fiber ring respectively.
Further, the first, second, third and fourth optical fibers-SiO2The waveguide mode converters all adopt an inverted taper structure to realize the mode field diameter matching with the optical fiber, and the working wavelength range is 800-900 nm.
Further, the first 3dB SiO2Coupler and second 3dB SiO2The couplers are all 1 × 2MMI couplers, and the working wavelength range is 800-900 nm.
Further, the first SiO2-SiN waveguide mode converter and second SiO2The SiN waveguide mode converters adopt inverted taper structures, and first and second 3dB SiO are realized at the coupling end faces2Base waveguides of couplers and their respective SiO2Mode field diameter matching between the SiN waveguides in the SiN waveguide mode converter, reducing coupling losses, with an operating wavelength range of 800 and 900 nm.
Further, the SiN continuous curvature bending waveThe polarizer is composed of a curved waveguide with a curvature continuous distribution with a high aspect ratio, and the width and the height of the waveguide, the minimum bending radius of the curved waveguide part and the total length of the curved waveguide satisfy the following conditions: height of waveguide<80nm, high aspect ratio of waveguide width>25, the minimum bending radius of the bending waveguide part is in the range of [300um, 900um]Total curved waveguide length of 6 π RminWherein R isminIs the minimum bend radius.
The invention has the beneficial effects that:
1. using SiO with refractive index close to that of the fibre2The waveguide serves as an intermediary to convert a larger mode field in the optical fiber into a smaller mode field, and then the smaller mode field is coupled into the SiN waveguide for polarization, so that smaller overall coupling loss can be realized.
2. Larger birefringence may be achieved in SiN waveguides based on size design, while waveguides with high birefringence may provide better phase error suppression.
3. The polarizer design realized based on the curved waveguide structure with continuous curvature can ensure accurate TE0Achieving quasi-TE at very small mode propagation loss0/TM0High extinction ratio between the two modes: (>50 dB) so that the polarization-dependent phase error in the fiber-optic gyroscope can be well suppressed.
4. The temperature stability and reliability of the open-loop fiber optic gyroscope are improved, and the miniaturization of the open-loop fiber optic gyroscope is realized. Due to SiO2And the thermal light coefficient of the SiN material is small, so that the influence of the change of the environmental temperature on the optical transmission characteristic of the polarizer is small, the temperature drift effect is further inhibited to a certain extent, and the temperature stability of the gyroscope is improved. In addition, by integrating the optical waveguide and the device, parasitic reflection introduced by adopting a separation device, insertion loss increased at a connecting point, polarization mismatch sensitive to the environment and the like are avoided, the reliability of the system is further improved, the size is reduced, the optical waveguide and the device are suitable for integration of a miniaturized open-loop optical fiber gyroscope, and the cost of the open-loop optical fiber gyroscope is further reduced.
Drawings
FIG. 1 (a) shows an optical fiber-SiO2Waveguide modeA top view of the transducer; (b) is optical fiber-SiO2A cross-sectional view of a waveguide mode converter.
Fig. 2 is a schematic structural diagram of a 1 × 2MMI coupler according to an embodiment of the present invention.
In FIG. 3, (a) is SiO2-a top view of a SiN waveguide mode converter; (b) is SiO2-a cross-sectional view of a SiN waveguide mode converter.
FIG. 4 is a schematic diagram of the structure of a SiN continuous curvature curved waveguide polarizer according to an embodiment of the present invention.
FIG. 5 is a plot of curvature of a SiN continuous curvature curved waveguide polarizer along the length of the curved waveguide according to an embodiment of the present invention.
FIG. 6 shows an embodiment of the present invention based on SiO2-structural schematic of an integrated optical chip for a fiber optic gyroscope of SiN coupled chip architecture.
Description of the reference numerals
First optical fiber-SiO2Waveguide mode converter 1-1, second fiber-SiO2Waveguide mode converter 1-2, first 3dB SiO2Coupler 2, coupling region 3, first SiO2A SiN waveguide mode converter 4, a SiN continuous curvature curved waveguide polarizer 5, a second SiO2SiN waveguide mode converter 6, second 3dB SiO2Coupler 7, third fiber-SiO2Waveguide mode converter 8-1, fourth fiber-SiO2The waveguide mode converter 8-2 has an arrow direction of reference numeral 9 as a direction of light output from the external light source, and an arrow direction of reference numeral 10 as a direction of light output to the external optical fiber ring.
Detailed Description
It should be noted that the embodiments and features of the embodiments in the present application can be combined with each other without conflict, and the present invention is further described in detail with reference to the drawings and specific embodiments.
Referring to fig. 1 to 6, in an embodiment of the invention, a SiO-based film is formed2An integrated optical chip for a fiber optic gyroscope of the-SiN coupled chip configuration comprises a first optical fiber-SiO2Waveguide mode converter 1-1, second optical fiber-SiO2Waveguide mode converter 1-2, first3dB SiO2 Coupler 2, first SiO2A SiN waveguide mode converter 4, a SiN continuous curvature curved waveguide polarizer 5, a second SiO2SiN waveguide mode converter 6, second 3dB SiO2Coupler 7 and third optical fiber-SiO2Waveguide mode converter 8-1 and fourth optical fiber-SiO2Waveguide mode converter 8-2.
First optical fiber-SiO2One end of the waveguide mode converter 1-1 is connected with an external light source through an optical fiber, and the first optical fiber-SiO2The other end of the waveguide mode converter 1-1 is connected to the first 3dB SiO2One branch of the coupler 2 is connected; second optical fiber-SiO2One end of the waveguide mode converter 1-2 is connected with an external photoelectric detector through an optical fiber, and a second optical fiber-SiO2The other end of the waveguide mode converter 1-2 is connected to the first 3dB SiO2The other branch of the coupler 2 is connected.
First 3dB SiO2Base waveguide and first SiO of coupler 22One end of the SiN waveguide mode converter 4 is coupled aligned; first SiO2The other end of the SiN waveguide mode converter 4 is connected to one end of a SiN continuous curvature curved waveguide polarizer 5; the other end of the SiN continuous curvature bent waveguide polarizer 5 and the second SiO2The SiN waveguide mode converter 6 is connected at one end; second SiO2The other end of the-SiN waveguide mode converter 6 is connected to the second 3dB SiO2The fundamental conduction of the coupler 7 is coupled in alignment; second 3dB SiO2One branch of the coupler 7 and the third fiber-SiO2One end of the waveguide mode converter 8-1 is connected with the second 3dB SiO2The other branch of the coupler 7 and a fourth optical fiber-SiO2One end of the waveguide mode converter 8-2 is connected; third optical fiber-SiO2The other end of the waveguide mode converter 8-1 and a fourth optical fiber-SiO2The other end of the waveguide mode converter 8-2 is connected to both ends of the external optical fiber ring, respectively.
Referring to FIG. 6, light from an external light source is coupled to a first optical fiber-SiO via an optical fiber in the direction indicated by arrow 9 on the chip2Waveguide mode converter 1-1, the light output from mode converter 1-1 comprising two different polarization modes (quasi-TE)0And TM0) (ii) a Two kinds ofDifferent polarization modes pass through the first 3dB SiO2 Coupler 2, coupling region 3 and first SiO2After the SiN waveguide mode converter 4, the straight waveguide is passed into the SiN continuous curvature curved waveguide polarizer 5, and the quasi-TM is formed due to the polarization selection of the polarizer 50Mode is leaked to SiO2In the cladding layer, while only quasi-TE remains in the SiN waveguide0A mode; the TE0Mode through second SiO2SiN waveguide mode converter 6 and coupling region 3 into the second 3dB SiO2A coupler 7 divided into two beams passing through third and fourth optical fibers-SiO2After the waveguide mode converters 8-1 and 8-2 are coupled into the optical fiber ring; the two beams of light are respectively transmitted in the fiber ring in the clockwise direction and the anticlockwise direction, and the two beams of light meet the coherence condition. When the fiber is rotated about its central axis, the Sagnac effect is created, returning to the second 3dB SiO2The intensity of the interference light at the coupler 7 changes; the interference optical signal passes through the second 3dB SiO2Coupler 7, coupling region 3, second SiO2SiN waveguide mode converter 6, polarizer 5, first SiO2SiN waveguide mode converter 4, coupling region 3, first 3dB SiO2Coupler 2, second optical fiber-SiO2After the waveguide mode converter 1-2, the light is coupled and output to an external photoelectric detector (the direction of the light is shown as an arrow 10 in fig. 6), so that the changed light intensity is detected, and the rotation angular velocity information is obtained after the detection.
In one embodiment, the first, second, third and fourth optical fibers are SiO2The waveguide mode converters all adopt an inverted taper structure to realize the mode field diameter matching with the optical fiber, and the working wavelength range is 800-900 nm. For inverted taper structure, SiO is fixed2Under the condition of waveguide thickness, the width of the waveguide at the input end is optimized, so that the matching with the diameter of the optical fiber mode field can be realized; when the tap length is long enough, higher coupling efficiency can be realized, and the mode crosstalk can be ignored. As shown in fig. 1; taking an ultra-fine diameter polarization maintaining optical fiber as an example, the cladding diameter is 40um, the core diameter is 3um, and at the wavelength of 830nm, the quasi-TE in the optical fiber0Mode field diameter of the mode is about 3.7 um; for the inverted taper structure, it is fixedSiO2Under the condition of waveguide thickness, the width of the waveguide at the input end is optimized, so that the matching with the diameter of the optical fiber mode field can be realized; with SiO2Waveguide thickness of 1um for example, where the optimal waveguide width is 394nm, corresponding to the quasi-TE in the waveguide0The mode field diameter of the mode under 830nm is about 3.7um, so that mode field matching between the two is realized, 93% coupling efficiency is realized, and mode crosstalk can be ignored. In this example, SiO2The waveguide thickness is 1um, the input end waveguide width is 394nm, corresponding to the quasi-TE in the waveguide0The mode field diameter of the mode at 830nm is about 3.7 um. The length of the input end straight waveguide is 100um, the length of the taper is 500um, the width of the output end waveguide is 2um, and the corresponding coupling efficiency is 93 percent.
As an embodiment, the first 3dB SiO2Coupler and second 3dB SiO2The couplers are all 1 × 2MMI couplers, and the working wavelength range is 800-900 nm. In order to reduce parasitic reflection and reduce processing errors, the embodiment of the invention can optimize the structure of the 1 × 2MMI coupler, suppress backward reflection, and the structural design is shown in fig. 2; SiO with width of 2um and height of 1um2For example, the waveguide size, at a wavelength of 830nm, the optimal structural parameters of the 1 × 2MMI coupler are: the width of the coupling region is 25um, the length is 370um, and the interval between the two output channels is 0.3um, at this time for TE0The insertion loss of the mode is-0.04 dB. In this example, SiO2The waveguide width is 2um, the height is 1um, the coupling region width is 25um, the length is 370um, the interval between two output channels is 0.3um, the length of input and output taper is 225um, and the width connected with the coupling region is 10 um; at this time for TE0The insertion loss of the mode is-0.04 dB.
As an embodiment, the first SiO2-SiN waveguide mode converter and second SiO2the-SiN waveguide mode converters all adopt inverted taper structures to realize SiN waveguide and input SiO2The mode field diameters of the waveguides are matched, and the working wavelength range is 800-900 nm. For the SiN inverted taper structure, under the condition of fixing the thickness of the SiN waveguide, the SiO can be input by optimizing the width of the input end waveguide2Waveguide mode field straightThe matching of the paths, the mode crosstalk is negligible. As shown in fig. 3; SiO with width of 2um and height of 1um2Waveguide dimensions are for example quasi-TE in a waveguide at a wavelength of 830nm0Mode field diameter of the mode is about 2 um; for the SiN inverted taper structure, under the condition of fixing the thickness of the SiN waveguide, the SiO can be input by optimizing the width of the input end waveguide2Matching the waveguide mode field diameter; taking the SiN waveguide thickness as 45nm as an example, the optimal waveguide width is 539nm corresponding to the quasi-TE in the waveguide0The mode field diameter of the mode under 830nm is about 2um, so that mode field matching between the two is realized, 93.2% of coupling efficiency can be realized, and mode crosstalk can be ignored. In this example, the SiN waveguide thickness is 45nm and the input end waveguide width is 539nm, corresponding to the quasi-TE in the waveguide0The mode field diameter of the mode at 830nm is about 2 um. The length of the input end straight waveguide is 50um, the length of the taper is 500um, and the width of the output end waveguide is 1200 nm.
In one embodiment, as shown in FIG. 4, the SiN continuous curvature curved waveguide polarizer is composed of a curved waveguide with a continuous distribution of curvature having a relatively high aspect ratio. The width and height of the waveguide, the minimum bending radius of the bending waveguide part and the total bending waveguide length satisfy the following conditions: height of waveguide<80nm, high aspect ratio of waveguide width>25, the minimum bending radius of the bending waveguide part is in the range of [300um, 900um]Total curved waveguide length of 6 π RminWherein R isminIs the minimum bend radius.
The design principle of the polarizer is as follows: within the target working wavelength range of 800-900nm, the waveguide size is reasonably selected to have a large enough width-high aspect ratio, so that only quasi-TE is supported in the waveguide0/TM0Two modes with a sufficiently large effective refractive index difference between them, such that the TM0Mode field size much larger than TE0So that at the same bend radius, TM0Bending radiation loss far greater than TE0So as to realize polarization selection under a sufficiently long transmission distance; on the other hand, the appropriate bend radius is selected to ensure quasi-TE at a reasonable length of propagation distance0Mode propagation loss is smallAt 0.5dB, and is quasi-TE0/TM0The polarization extinction ratio between the two modes is greater than 50 dB; further, in the case where the bending radius is fixed, for the connection of the input/output straight waveguide with the curved circular arc and the circular arc having the curvature of the opposite sign, discontinuity of the mode field distribution is caused due to the discontinuity of the curvature, thereby causing quasi-TE0Scattering of the mode results in propagation loss. Aiming at the problems, the technical scheme designs a curved waveguide structure with the curvature continuously distributed from the input end to the output end, and the distribution of the curvature along with the length is shown in figure 5, thereby avoiding TE0Mode scattering loss due to curvature discontinuity, further reducing TE0The total propagation loss of the mode improves the polarization extinction ratio of the polarizer.
In this embodiment, the SiN waveguide dimensions are 1200 × 45nm, the minimum bend radius is 500um, the total length of the curved waveguide is 9.4mm, and the corresponding curvature distribution along the length of the curved waveguide is shown in fig. 5.
The invention can effectively improve the stability and reliability of the open-loop fiber optic gyroscope while ensuring the precision of the open-loop fiber optic gyroscope, and improve a plurality of performances of the open-loop fiber optic gyroscope, thereby realizing the design and process of the open-loop fiber optic gyroscope with smaller size, lower power consumption, lower cost and simpler structure.
Because the refractive index of the optical fiber is greatly different from that of SiN, the mode field size of the tip of the SiN-based inverted cone mode converter cannot be well matched with a single-mode optical fiber, and the coupling loss between the optical fiber and the single-mode optical fiber is large; therefore, the invention selects SiO with refractive index close to that of the optical fiber2The waveguide serves as an intermediary to convert a larger mode field in the fiber to a smaller mode field, and then the smaller mode field is coupled into the SiN waveguide for polarization, so that smaller overall coupling loss is realized.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. Based on SiO2-integrated optical chip for a fiber optic gyroscope of SiN coupled chip architecture, characterized in that it comprises a first optical fiber-SiO2Waveguide mode converter, second optical fiber-SiO2Waveguide mode converter, first 3dB SiO2Coupler, first SiO2-SiN waveguide mode converter, SiN continuous curvature curved waveguide polarizer, second SiO2-SiN waveguide mode converter, second 3dB SiO2Coupler and third optical fiber-SiO2Waveguide mode converter and fourth optical fiber-SiO2A waveguide mode converter;
first optical fiber-SiO2One end of the waveguide mode converter is connected with an external light source through an optical fiber, and the first optical fiber-SiO2The other end of the waveguide mode converter is connected with the first 3dB SiO2One branch of the coupler is connected; second optical fiber-SiO2One end of the waveguide mode converter is connected with an external photoelectric detector through an optical fiber, and the second optical fiber-SiO2The other end of the waveguide mode converter is connected with the first 3dB SiO2The other branch of the coupler is connected;
first 3dB SiO2Base waveguide and first SiO of coupler2-one end of the SiN waveguide mode converter is aligned coupled; first SiO2The other end of the SiN waveguide mode converter is connected to one end of a SiN continuous curvature curved waveguide polarizer; the other end of the SiN continuous curvature bent waveguide polarizer and the second SiO2-one end of the SiN waveguide mode converter is connected; second SiO2The other end of the-SiN waveguide mode converter is connected to the second 3dB SiO2The fundamental waveguide of the coupler is coupled in alignment; second 3dB SiO2One branch of the coupler and the third optical fiber-SiO2One end of the waveguide mode converter is connected with the second 3dB SiO2The other branch of the coupler and a fourth optical fiber-SiO2One end of the waveguide mode converter is connected; third optical fiber-SiO2The other end of the waveguide mode converter and a fourth optical fiber-SiO2The other end of the waveguide mode converter is connected with two ends of the external optical fiber ring respectively.
2. The method of claim 1Based on SiO2-an integrated optical chip for a fiber optic gyroscope of SiN coupled chip architecture, characterized in that said first, second, third and fourth optical fibers-SiO2The waveguide mode converters all adopt an inverted taper structure to realize the mode field diameter matching with the optical fiber, and the working wavelength range is 800-900 nm.
3. SiO-based according to claim 12-an integrated optical chip for a fiber optic gyroscope of SiN coupled chip architecture, characterized in that said first 3dB SiO2Coupler and second 3dB SiO2The couplers are all 1 × 2MMI couplers, and the working wavelength range is 800-900 nm.
4. SiO-based according to claim 12-an integrated optical chip for a fiber optic gyroscope of SiN coupled chip architecture, characterized in that said first SiO is2-SiN waveguide mode converter and second SiO2The SiN waveguide mode converters adopt inverted taper structures, and first and second 3dB SiO are realized at the coupling end faces2Base waveguides of couplers and their respective SiO2Mode field diameter matching between the SiN waveguides in the SiN waveguide mode converter, reducing coupling losses, with an operating wavelength range of 800 and 900 nm.
5. SiO-based according to claim 12-an integrated optical chip for a fiber optic gyroscope of SiN coupled chip architecture, characterized in that said SiN continuous curvature curved waveguide polarizer consists of a curved waveguide with a continuous distribution of curvature with a high aspect ratio, whose waveguide width and height, minimum bending radius of the curved waveguide section and total curved waveguide length satisfy: height of waveguide<80nm, high aspect ratio of waveguide width>25, the minimum bending radius of the bending waveguide part is in the range of [300um, 900um]Total curved waveguide length of 6 π RminWherein R isminIs the minimum bend radius.
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