CN102175239A - Integrated optic chip for three-axis fiber optic gyroscope - Google Patents
Integrated optic chip for three-axis fiber optic gyroscope Download PDFInfo
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- CN102175239A CN102175239A CN 201110054661 CN201110054661A CN102175239A CN 102175239 A CN102175239 A CN 102175239A CN 201110054661 CN201110054661 CN 201110054661 CN 201110054661 A CN201110054661 A CN 201110054661A CN 102175239 A CN102175239 A CN 102175239A
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Abstract
The invention provides an integrated optic chip for a three-axis fiber optic gyroscope, in which an input optical waveguide, a first direction coupler, a second direction coupler, a third direction coupler, an optical waveguide attenuator with a Mach-Zehnder structure, an output optical waveguide, a first Y-branch coupler, a second Y-branch coupler, a third Y-branch coupler and a designed metal electrode are integrated. The chip is prepared by low-loss organic polymer optical waveguide material and organic polymer electrooptical material. In comparison with a conventional discrete device optical system, a plurality of waveguide devices with key functions are uniformly integrated on the chip; the multifunctional chip can implement functions, such as modulation, attenuation, splitting, wave combination and the like, on light beams; and the multifunctional chip has the advantages of excellent consistency, high stability, low power, small volume, light weight and the like, and can be used for developing the three-axis fiber optic gyroscope.
Description
Technical field
The invention belongs to integrated optics and fiber optic sensor technology field, particularly a kind of integrated optics chip that is used for three axis optical fibre gyro.
Background technology
Optical fibre gyro is a kind of inertia angular velocity measurement instrument, is mainly used in the platform navigation, missile guidance, sighting stabilization, fields such as attitude control, location.The principle that optical fibre gyro detects angular velocity is the Sagnac effect: promptly light beam is divided into the light wave that two bundle reverse directions are propagated after entering system, and they in phase return the beam splitting point through same optical path after propagating in the opposite direction.If wind axis perpendicular to plane, light path place, exist rotational angular velocity with respect to inertial space, the light path difference that the light beam that then positive and negative direction is propagated is passed by, thus producing optical path difference, its optical path difference is directly proportional with the angular velocity of rotation.By calculating optical path difference and phase information correspondingly, can record corresponding angular velocity.In the inertia system of reality is measured, generally need to measure the angular speed information of three some directions of hanging down mutually, therefore, utilize single inertia sensing device to realize three-axis measurement, meet inertia device miniaturization, development trend cheaply, have important application prospects in the inertia system context of detection.
Present three axis optical fibre gyro is discrete optical fibre device and combines, and need a plurality of fiber directional couplers, optical phase modulator etc., so the total system volume is big, the quality height, and also stability and consistance are relatively poor.Wherein, optical phase modulator is the core devices of three axis optical fibre gyro, and the optical modulator of being used widely in optical fibre gyro system at present is the lithium columbate crystal modulator that separates.This modulator technology cost height, complex technical process is also bigger with the insertion loss of fiber alignment.
In the last few years, the integrated optical waveguide device in plane had obtained development widely.Compare with traditional discrete optical component, integrated optical device is made of planar optical waveguide, the size of its function element only is that tens of microns are to several millimeters, and can realize the chipization of optical function device, having reduced the volume of optical system widely, is one of main direction of further developing of following optical sensor device and system.Simultaneously, organic polymer optical waveguide material and electrooptical material have obtained greatly development in recent years, provide more outstanding functional material for developing high performance integrated optical wave guide device and high-speed electro-optic modulator spare etc.
Summary of the invention
Technical matters: the present invention proposes a kind of integrated optics chip that is used for three axis optical fibre gyro, adopt organic polymer optical waveguide material and electrooptical material to realize having phase modulation (PM), beam split, close ripple, multi-functional integrated optics chip such as decay, be used to develop the triaxial integration optical fibre gyro.This chip has light source utilization factor height, high conformity, integrated level height, light weight, is easy to advantages such as production in enormous quantities.
Technical scheme: the integrated optics chip that is used for three axis optical fibre gyro that the present invention proposes, input waveguide links to each other with two input ports of first direction coupling mechanism with output optical waveguide, two output ports of first direction coupling mechanism link to each other with an input end of second direction coupling mechanism and third direction coupling mechanism respectively, second direction coupling mechanism and third direction coupling mechanism another one input end separately are connected the lightguide damping device of first Mach-Zehnder structure respectively, the lightguide damping device of second Mach-Zehnder structure, two output ports of second direction coupling mechanism link to each other with a Y branch coupler with the lightguide damping device of the 3rd Mach-Zehnder structure respectively, and two output ports of third direction coupling mechanism link to each other with the 3rd Y branch coupler with the 2nd Y branch coupler respectively; Be equipped with a metal electrode on the waveguide of the lightguide damping device of each Mach-Zehnder structure; Two output ports of the one Y branch coupler link to each other with first output optical waveguide, second output optical waveguide respectively, two output ports of the 2nd Y branch coupler link to each other with the 3rd output optical waveguide, the 4th output optical waveguide respectively, and two output ports of the 3rd Y branch coupler link to each other with the 5th output optical waveguide, the 6th output optical waveguide respectively; On each output optical waveguide, be equipped with a metal electrode.
Each input waveguide on the chip, output optical waveguide and each function element are formed by optical waveguide sandwich layer, optical waveguide top covering, optical waveguide under-clad layer and substrate, optical waveguide sandwich layer width and thickness are several microns, and optical waveguide top covering and optical waveguide under-clad layer thickness are more than several microns; Close the position of metal electrode and optical waveguide sandwich layer: metal electrode is positioned on the optical waveguide top covering, and is parallel with the optical waveguide sandwich layer, and metal electrode thickness is hundreds of nanometers between several microns, width be several microns between tens of microns.
The lightguide damping device of the lightguide damping device of input waveguide, first direction coupling mechanism, second direction coupling mechanism, third direction coupling mechanism, first Mach-Zehnder structure, the lightguide damping device of second Mach-Zehnder structure, the 3rd Mach-Zehnder structure and output optical waveguide are by low-loss organic polymer optical waveguide material preparation; The one Y branch coupler, the 2nd Y branch coupler, the 3rd Y branch coupler, first output optical waveguide, second output optical waveguide, the 3rd output optical waveguide, the 4th output optical waveguide, the 5th output optical waveguide and the 6th output optical waveguide are prepared by the organic polymer electrooptical material.
A kind of integrated optics chip light path that is used for three axis optical fibre gyro proposed by the invention is as follows: light source enters chip by input waveguide, is divided into the light beam that two-beam equates by force along the first direction coupling mechanism and enters second direction coupling mechanism and third direction coupling mechanism respectively.The second direction coupling mechanism is further divided into the light beam that two-beam equates by force with light beam, enters the lightguide damping device of a Y branch coupler and Mach-Zehnder structure respectively.Third direction
Coupling mechanism is further divided into the light beam that two-beam equates by force with light beam, enters the 2nd Y branch coupler and the 3rd Y branch coupler respectively.The light signal that enters the lightguide damping device of Mach-Zehnder structure is decayed rapidly.The three-beam signal that light intensity equates enters respectively in three Y branch couplers, be divided into the light signal that six bundle light intensity equate by the Y branch coupler again, enter six output optical waveguides that have metal electrode respectively, after phase modulation (PM), enter three optical fiber loops of corresponding rectangular coordinate system X, Y, three directions of Z respectively, after circulation, return waveguide port separately.Light signal returns along original optical path in chip, finally enters into photo-detector.By test to the photo-detector output intensity, can calculate the angular velocity of X, Y, three directions of Z, realize that three axis angular rates detect.
Beneficial effect: the present invention has following advantage compared with prior art:
1, the integrated optics chip of three axis optical fibre gyro proposed by the invention is compared with the three axis optical fibre gyro that traditional discrete device constitutes, need not discrete devices such as each fiber coupler, modulator are assembled again, its key function device is chipization all, can realize modulation, decay, the beam splitting of light beam and close wave energy etc. by this multifunction chip.
2, the integrated optics chip of three axis optical fibre gyro proposed by the invention is with optical waveguide coupler array, Y branch coupler and phase modulator array chipization, simultaneously multiplexing light source and photo-detector have high conformity, stability is high, power is low, volume is little and numerous advantages such as light weight.
3, the integrated optics chip of three axis optical fibre gyro of the present invention is by high performance organic polymer low-loss optically waveguide material and the preparation of organic polymer electrooptical material, compare with traditional lithium niobate material, loss is low, electrooptical coefficient is high, and preparation technology is simple, and cost significantly reduces.
Description of drawings
Fig. 1 is the integrated optics chip structural representation of three axis optical fibre gyro.
Fig. 2 is the cross sectional representation of optical waveguide and electrode in the integrated optics chip of three axis optical fibre gyro.
Fig. 3 is based on the structural representation of three axis optical fibre gyro of the integrated optics chip of three axis optical fibre gyro.
Embodiment
Below in conjunction with accompanying drawing technical scheme of the present invention is further described.
The integrated optics chip structure of the three axis optical fibre gyro that the present invention proposes is as shown in Figure 1: this chip comprises lightguide damping device, metal electrode 4, a Y branch coupler 51, the 2nd Y branch coupler 52, the 3rd Y branch coupler 53, the output optical waveguide of input waveguide 1, first direction coupling mechanism 21, second direction coupling mechanism 22, third direction coupling mechanism 23, Mach-Zehnder structure.From the input end to the output terminal, collect respectively
Become input waveguide 1, the 7th output optical waveguide 67, the lightguide damping device 3 of two Mach-Zehnder structures and metal electrode 4, first direction coupling mechanism 21, second direction coupling mechanism 22 and third direction coupling mechanism 23, the lightguide damping device 31 of first Mach-Zehnder structure, the lightguide damping device 33 and the metal electrode 4 of lightguide damping device 32, the three Mach-Zehnder structures of second Mach-Zehnder structure, the one Y branch coupler 51, the 2nd Y branch coupler 52, the 3rd Y branch coupler 53 and first output optical waveguide 61, second output optical waveguide 62, the 3rd output optical waveguide 63, the 4th output optical waveguide 64, the 5th output optical waveguide 65, the 6th output optical waveguide 66 and metal electrode 4.The structure of waveguide device is as follows: input waveguide 1 links to each other with first direction coupling mechanism 21 with output optical waveguide 67, two output ports of first direction coupling mechanism 21 link to each other with the input end of second direction coupling mechanism 22 with third direction coupling mechanism 23 respectively, other two input ends of second direction coupling mechanism 22 and third direction coupling mechanism 23 are connected the lightguide damping device 31 of first Mach-Zehnder structure respectively, the lightguide damping device 32 of second Mach-Zehnder structure, two output ports of second direction coupling mechanism 22 link to each other with a Y branch coupler 51 with the lightguide damping device 33 of the 3rd Mach-Zehnder structure respectively, two output ports of third direction coupling mechanism 23 link to each other with the 3rd Y branch coupler 53 with the 2nd Y branch coupler 52 respectively, three metal electrodes 4 lay respectively on the waveguide of lightguide damping device of three Mach-Zehnder structures, the one Y branch coupler 51 and first output optical waveguide 61, second output optical waveguide 62 links to each other, the 2nd Y branch coupler 52 and the 3rd output optical waveguide 63, the 4th output optical waveguide 64 links to each other, the 3rd Y branch coupler 53 and the 5th output optical waveguide 65, the 6th output optical waveguide 66 links to each other, and six metal electrodes 4 lay respectively at first output optical waveguide 61, second output optical waveguide 62, the 3rd output optical waveguide 63, the 4th output optical waveguide 64, the 5th output optical waveguide 65, on the 6th output optical waveguide 66.
Wherein, the device in dotted line left side in Fig. 1 chip, comprise the lightguide damping device 31 of input waveguide 1, first direction coupling mechanism 21, second direction coupling mechanism 22, third direction coupling mechanism 23, first Mach-Zehnder structure, the lightguide damping device 32 of second Mach-Zehnder structure, the lightguide damping device 33 of the 3rd Mach-Zehnder structure, the 7th output optical waveguide 67 can guarantee that by low-loss organic polymer optical waveguide material preparation light signal has lower optical attenuator in transmission course.The device on dotted line right side in the chip, comprise a Y branch coupler 51, the 2nd Y branch coupler 52, the 3rd Y branch coupler 53, first output optical waveguide 61, second output optical waveguide 62, the 3rd output optical waveguide 63, the 4th output optical waveguide 64, the 5th output optical waveguide 65, the 6th output optical waveguide 66 is prepared by the organic polymer electrooptical material, utilize the optics electrooptical effect, by 4 pairs first output optical waveguides 61 of metal electrode, second output optical waveguide 62, the 3rd output optical waveguide 63, the 4th output optical waveguide 64, the 5th output optical waveguide 65, light signal in the 6th output optical waveguide 66 carries out phase modulation (PM); Metal electrode is used to feed electric signal by the preparation of metals such as gold, silver and aluminium.The effect that first direction coupling mechanism 21 in this chip, second direction coupling mechanism 22, third direction coupling mechanism 23 mainly play beam split, close ripple, the light signal that light source 81 is provided are divided into the light signal that the three beams light intensity equates and output to a Y branch coupling
The organic polymer electrooptical material has high electrooptical coefficient, can carry out the high-speed phase modulation by the electrode pair waveguide.The major function of first output optical waveguide 61, second output optical waveguide 62, the 3rd output optical waveguide 63, the 4th output optical waveguide 64, the 5th output optical waveguide 65, the 6th output optical waveguide 66 and the metal electrode above output optical waveguide 4 provides light intensity and equates, the six bundle light signals that light phase is adjustable, carry out phase modulation (PM) by 4 pairs six bundles of metal electrode light signal, light modulated is entered in corresponding three axial first fiber optic coils 71, second fiber optic coils 72, the 3rd fiber optic coils 73.
The optical waveguide in the integrated optics chip of the three axis optical fibre gyro that the present invention proposes and the spatial relation of metal electrode be as shown in Figure 2: each input waveguide on the chip, output optical waveguide and each function element are formed by optical waveguide sandwich layer 11, optical waveguide top covering 12, optical waveguide under-clad layer 13 and substrate 14, optical waveguide sandwich layer 11 width and thickness are several microns, and optical waveguide top covering 12 and optical waveguide under-clad layer 13 thickness are more than several microns.Metal electrode 4 closes with the position of optical waveguide sandwich layer 11: metal electrode 4 is positioned on the optical waveguide top covering 12, and is parallel with optical waveguide sandwich layer 11, and metal electrode thickness is hundreds of nanometers between several microns, width be several microns between tens of microns.
The integrated optical fiber gyro chip that the present invention proposes is applied to the optical fibre gyro field, the three axis optical fibre gyro of using this chip as shown in Figure 3: the optical signals input waveguide 1 in the light source 81 enters chip, along first
Claims (3)
1. integrated optics chip that is used for three axis optical fibre gyro, it is characterized in that, input waveguide (1) links to each other with two input ports of output optical waveguide (67) with first direction coupling mechanism (21), two output ports of first direction coupling mechanism (21) link to each other with an input end of second direction coupling mechanism (22) and third direction coupling mechanism (23) respectively, second direction coupling mechanism (22) and third direction coupling mechanism (23) another one input end separately are connected the lightguide damping device (31) of first Mach-Zehnder structure respectively, the lightguide damping device (32) of second Mach-Zehnder structure, two output ports of second direction coupling mechanism (22) link to each other with a Y branch coupler (51) with the lightguide damping device (33) of the 3rd Mach-Zehnder structure respectively, and two output ports of third direction coupling mechanism (23) link to each other with the 3rd Y branch coupler (53) with the 2nd Y branch coupler (52) respectively; Be equipped with a metal electrode (4) on the waveguide of the lightguide damping device of each Mach-Zehnder structure; Two output ports of the one Y branch coupler (51) link to each other with first output optical waveguide (61), second output optical waveguide (62) respectively, two output ports of the 2nd Y branch coupler (52) link to each other with the 3rd output optical waveguide (63), the 4th output optical waveguide (64) respectively, and two output ports of the 3rd Y branch coupler (53) link to each other with the 5th output optical waveguide (65), the 6th output optical waveguide (66) respectively; On each output optical waveguide, be equipped with a metal electrode (4).
2. a kind of integrated optics chip that is used for three axis optical fibre gyro according to claim 1, it is characterized in that each input waveguide, output optical waveguide and each function element on the chip form by optical waveguide sandwich layer (11), optical waveguide top covering (12), optical waveguide under-clad layer (13) and substrate (14), optical waveguide sandwich layer (11) width and thickness are several microns, and optical waveguide top covering (12) and optical waveguide under-clad layer (13) thickness are more than several microns; Metal electrode (4) closes with the position of optical waveguide sandwich layer (11): metal electrode (4) is positioned on the optical waveguide top covering (12), parallel with optical waveguide sandwich layer (11), metal electrode thickness is hundreds of nanometers between several microns, width be several microns between tens of microns.
3. a kind of integrated optics chip that is used for three axis optical fibre gyro according to claim 1 is characterized in that the lightguide damping device (33) of lightguide damping device (32), the 3rd Mach-Zehnder structure of lightguide damping device (31), second Mach-Zehnder structure of input waveguide (1), first direction coupling mechanism (21), second direction coupling mechanism (22), third direction coupling mechanism (23), first Mach-Zehnder structure and output optical waveguide (67) are by low-loss organic polymer optical waveguide material preparation; The one Y branch coupler (51), the 2nd Y branch coupler (52), the 3rd Y branch coupler (53), first output optical waveguide (61), second output optical waveguide (62), the 3rd output optical waveguide (63), the 4th output optical waveguide (64), the 5th output optical waveguide (65) and the 6th output optical waveguide (66) are prepared by the organic polymer electrooptical material.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360438A (en) * | 2014-11-14 | 2015-02-18 | 四川飞阳科技有限公司 | Method for measuring etching depth of forks of Y structures and base material |
| CN109612452A (en) * | 2018-12-12 | 2019-04-12 | 天津津航技术物理研究所 | Silicon substrate-LN base hybrid integrated optical chip for three axis optical fibre gyro |
| CN110595527A (en) * | 2019-09-10 | 2019-12-20 | 中国人民解放军国防科技大学 | Calibration method for controllable phase shifter in multistage staggered Mach-Zehnder interferometer on optical chip |
| CN112485929A (en) * | 2019-09-12 | 2021-03-12 | 源杰科技股份有限公司 | Optical signal generating device |
| CN112833872A (en) * | 2020-03-11 | 2021-05-25 | 天津领芯科技发展有限公司 | Integrated optical chip based on lithium niobate waveguide and integrated optical assembly |
| CN114706162A (en) * | 2022-03-31 | 2022-07-05 | 重庆电子工程职业学院 | Silicon light subset emitter chip |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202041212U (en) * | 2011-03-08 | 2011-11-16 | 东南大学 | Integrated optical chip for three-axis optical fiber gyro |
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| CN202041212U (en) * | 2011-03-08 | 2011-11-16 | 东南大学 | Integrated optical chip for three-axis optical fiber gyro |
Non-Patent Citations (2)
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104360438A (en) * | 2014-11-14 | 2015-02-18 | 四川飞阳科技有限公司 | Method for measuring etching depth of forks of Y structures and base material |
| CN104360438B (en) * | 2014-11-14 | 2017-02-22 | 四川飞阳科技有限公司 | Method for measuring etching depth of forks of Y structures and base material |
| CN109612452A (en) * | 2018-12-12 | 2019-04-12 | 天津津航技术物理研究所 | Silicon substrate-LN base hybrid integrated optical chip for three axis optical fibre gyro |
| CN110595527A (en) * | 2019-09-10 | 2019-12-20 | 中国人民解放军国防科技大学 | Calibration method for controllable phase shifter in multistage staggered Mach-Zehnder interferometer on optical chip |
| CN112485929A (en) * | 2019-09-12 | 2021-03-12 | 源杰科技股份有限公司 | Optical signal generating device |
| CN112485929B (en) * | 2019-09-12 | 2022-12-20 | 源杰科技股份有限公司 | Optical signal generating device |
| CN112833872A (en) * | 2020-03-11 | 2021-05-25 | 天津领芯科技发展有限公司 | Integrated optical chip based on lithium niobate waveguide and integrated optical assembly |
| CN114706162A (en) * | 2022-03-31 | 2022-07-05 | 重庆电子工程职业学院 | Silicon light subset emitter chip |
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Application publication date: 20110907 |