CN117505852A - Preparation tool and preparation method of diamond aluminum sheet - Google Patents

Preparation tool and preparation method of diamond aluminum sheet Download PDF

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Publication number
CN117505852A
CN117505852A CN202311508143.9A CN202311508143A CN117505852A CN 117505852 A CN117505852 A CN 117505852A CN 202311508143 A CN202311508143 A CN 202311508143A CN 117505852 A CN117505852 A CN 117505852A
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CN
China
Prior art keywords
aluminum
copper
sheath
diamond
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311508143.9A
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Chinese (zh)
Inventor
杨义兵
苏国军
胡兵
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Haitexinke New Material Technology Co ltd
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Haitexinke New Material Technology Co ltd
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Priority to CN202311508143.9A priority Critical patent/CN117505852A/en
Publication of CN117505852A publication Critical patent/CN117505852A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02Compacting only
    • B22F3/03Press-moulding apparatus therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/003Apparatus, e.g. furnaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02Compacting only
    • B22F3/093Compacting only using vibrations or friction
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/05Mixtures of metal powder with non-metallic powder
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C26/00Alloys containing diamond or cubic or wurtzitic boron nitride, fullerenes or carbon nanotubes

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention relates to the technical field of diamond aluminum plate preparation, and discloses a diamond aluminum plate preparation tool which comprises a copper sheath and an aluminum sheath arranged in the copper sheath, wherein the aluminum sheath is of a flat cuboid structure and is made of pure aluminum; a storage cavity is arranged in the aluminum sheath, an annular cavity is formed between the outer side of the aluminum sheath and the inner side of the copper sheath, and the outer side of the aluminum sheath is coated with a heat-resistant isolation layer; the side of aluminium package cover is equipped with the first connecting hole that is used for intercommunication storage chamber and annular chamber, and the side of copper package cover is equipped with the second connecting hole with annular chamber intercommunication, is equipped with the exhaust tube in the second connecting hole, the inner and the annular chamber intercommunication of exhaust tube. Meanwhile, the preparation process of the diamond aluminum sheet is also disclosed. The preparation process is combined with the preparation tool, so that the preparation cost of the diamond aluminum sheet is greatly reduced.

Description

Preparation tool and preparation method of diamond aluminum sheet
Technical Field
The invention relates to the technical field of diamond aluminum plate preparation, in particular to a tool and a method for preparing a diamond aluminum plate.
Background
In the technical field of chips, materials with small thermal expansion coefficient and good heat conduction performance are required for chip carrier and packaging bottom plate, and with the development of chip technology and continuous improvement of chip power density, tungsten copper, molybdenum copper, CMC and CPC composite materials cannot meet the heat dissipation requirement. Some research studies currently use diamond-metal composites, such as three diamond-metal composites of diamond copper, diamond silver, and diamond aluminum, for chip carrier and package substrate, with the diamond silver having the highest thermal conductivity, diamond copper the lowest thermal conductivity. Because the diamond aluminum density is the lowest (under the condition of the same diamond volume fraction), the manufacturing process is relatively simple, and has good market prospect.
At present, aluminum powder and diamond powder are generally mixed uniformly according to a certain proportion, are put into a die and hot-pressed to enable the aluminum powder and the diamond powder to be closely stacked, then a discharge plasma method (SPS) is used for producing diamond aluminum ingots, and finally, laser cutting is used for cutting the diamond aluminum ingots into thin slices for chip carrier and packaging bottom plates. However, the process still has the problem of high process preparation cost, the discharge plasma method has high equipment cost, and the subsequent laser cutting cost is also high.
Disclosure of Invention
The invention aims to solve the problems in the prior art, and provides a tool and a method for preparing a diamond aluminum sheet, by which the diamond aluminum sheet can be directly prepared at relatively low cost, meanwhile, the cost of subsequent laser cutting is saved, the overall manufacturing cost is greatly reduced, and the tool and the method have great market application prospect and commercial value.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the preparation tooling of the diamond aluminum sheet comprises a copper sheath and an aluminum sheath arranged in the copper sheath, wherein the aluminum sheath is of a flat cuboid structure and is made of pure aluminum; the aluminum sheath is internally provided with a closed storage cavity for filling diamond powder, an annular cavity is formed between the outer side of the aluminum sheath and the inner side of the copper sheath, and the outer side of the aluminum sheath is coated with a heat-resistant isolation layer;
the side surface of the aluminum sheath is provided with a first connecting hole for communicating the storage cavity with the annular cavity, the side surface of the copper sheath is provided with a second connecting hole communicated with the annular cavity, an exhaust pipe is arranged in the second connecting hole, and the inner end of the exhaust pipe is communicated with the annular cavity;
when the outer end of the exhaust pipe is exhausted, the annular cavity and the storage cavity can be vacuumized.
Preferably, the first connecting holes and the second connecting holes are coaxially distributed, the inner end of the exhaust pipe stretches into the first connecting holes to be communicated with the discharging cavity, and the side face of the exhaust pipe is provided with an air suction hole communicated with the annular cavity.
Preferably, a tungsten wire isolation net or a molybdenum wire isolation net is arranged at the inner end of the exhaust tube. The tungsten wire isolation net or the molybdenum wire isolation net can prevent the diamond powder from being extracted during vacuum pumping.
Preferably, the copper cladding comprises two copper connecting plates, a concave cavity is formed in the side face of each copper connecting plate, the edges of the opening ends of the concave cavities on the copper connecting plates are outwards connected to form a connecting surface, a plurality of connecting holes are formed in the connecting surface, and when the connecting plates of the two copper connecting plates are attached, the two connecting surfaces are connected through bolts. The copper sheath is formed by connecting two parts, and is more convenient to install and detach.
Preferably, the ratio of the thickness of the side wall to the thickness of the bottom of the concave cavity in the copper connecting plate is 1.5-2.5; the junction of the outer side surface and the connecting surface of the copper connection is provided with a plurality of convex ribs, and the ratio of the height of the convex ribs to the thickness of the copper connection plate is 0.3-0.5. The thickness of the side wall of the copper connecting plate is larger than that of the bottom, so that when the copper connecting plate is softened and subjected to internal and external pressure difference, the copper connecting plate is not easy to collapse and deform due to the large thickness of the edge part, and the bottom is small in thickness and is more easy to be pressed to extrude liquid pure aluminum; set up protruding muscle, on the one hand is advanced to increase edge strength, is difficult for deformation when softening the pressurized, and on the other hand protruding muscle highly is less than whole thickness for when the bottom pressurized, the junction of bottom and side wall also can be synchronous shape along with the deformation of bottom, makes whole bottom surface can wholly extrude liquid pure aluminum.
Preferably, the heat-resistant isolation layer is an aluminum silicate fiber layer, and the copper cladding adopts T2 copper.
A preparation process of a diamond aluminum sheet comprises the following steps:
s1, filling diamond powder into a storage cavity of the aluminum sheath from a first connecting hole until the storage cavity is filled with the diamond powder;
s2, tightly wrapping the aluminum sheath by using a heat-resistant isolation layer, then filling the aluminum sheath into the copper sheath, and connecting the exhaust tube with a second connecting hole on the copper sheath;
s3, vacuumizing through an exhaust pipe, and when the vacuum degree in the copper sheath reaches 1x10 -2 Pa-1.2x10 -4 Pa, sealing the exhaust tube;
s4, placing the copper sheath into a heating furnace, heating under the protection of nitrogen at normal pressure, wherein the heating temperature is set to 700-900 ℃, the heating time is 5-60min, the aluminum sheath is completely melted to form liquid pure aluminum in the heating process, and meanwhile, the copper sheath is heated, softened and flattened under the action of internal and external pressure difference, and the liquid pure aluminum is infiltrated into the diamond powder after being pressed;
and S5, taking out the copper sheath from the heating furnace, after cooling to normal temperature, disassembling the copper sheath, removing the heat-resistant isolation layer to obtain a diamond aluminum substrate with aluminum coated on both sides, and processing the surface of the diamond aluminum substrate to be smooth according to a preset size to obtain the diamond aluminum sheet.
Preferably, in step s1, after the diamond powder is filled in the storage cavity, the diamond powder is compacted by vibration until the whole storage cavity is filled with the diamond powder.
The preparation process is simpler, only conventional vacuumizing equipment, normal-pressure heating equipment and the like are used, expensive equipment such as a vacuum heating furnace and the like is omitted, and the equipment cost is obviously reduced; vacuum pumping and normal pressure heating are skillfully utilized before heating, and the pressure difference is utilized to enable the copper sheath to carry out pressure infiltration on liquid pure aluminum, so that a diamond aluminum sheet (diamond aluminum billets are prepared in the prior art) with a sheet is directly obtained, and a large amount of laser cutting operation is omitted.
In the step s3, the air exhaust pipe is preferably a T2 copper pipe, after the vacuumizing is finished, the air exhaust pipe is flattened, the flattened part is bent, and finally the outer end of the air exhaust pipe is welded and sealed.
Preferably, in step s5, after the copper sheathing is taken out of the heating furnace, the copper sheathing is placed in ultrasonic waves with power of 150-250W and frequency of 80-150 kHz for 3 minutes, and then naturally cooled to normal temperature. When the copper cladding is taken out from the heating furnace, the inside of the copper cladding is still in a liquid state, and the liquid aluminum and the diamond powder are further infiltrated and fused through the energy infiltration of ultrasonic waves, so that the infiltration of the particles of the liquid aluminum and the diamond powder is more uniform.
Therefore, the invention uses ingenious technology and simple special tooling, avoids some expensive equipment when preparing the diamond aluminum sheet, can prepare the diamond aluminum sheet by adopting common conventional and low-cost equipment, and greatly reduces the preparation cost.
Drawings
Fig. 1 is a schematic structural diagram of the tooling.
Fig. 2 is an exploded view of fig. 1.
Fig. 3 shows a first embodiment of the exhaust tube.
Fig. 4 shows a second embodiment of the exhaust tube.
Detailed Description
In order to make the technical problems, technical solutions and advantageous technical effects to be solved by the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and a plurality of exemplary embodiments. It should be understood that the detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the invention.
It should be appreciated that the expressions "first", "second", etc. are used herein for descriptive purposes only and are not to be construed as indicating or implying relative importance or as implying any particular order of number of technical features indicated. Features defining "first", "second" or "first" may be expressed or implied as including at least one such feature.
The preparation tooling of the diamond aluminum sheet shown in the figures 1-3 comprises a copper sheath 1 and an aluminum sheath 2 arranged in the copper sheath, wherein the aluminum sheath 2 is of a flat cuboid structure and is made of pure aluminum; the aluminum sheath 2 is internally provided with a closed storage cavity 20 for filling diamond powder 3, an annular cavity 22 is formed between the outer side of the aluminum sheath 2 and the inner side of the copper sheath, and the outer side of the aluminum sheath is coated with a heat-resistant isolation layer 4; the side surface of the aluminum sheath 2 is provided with a first connecting hole 21 for communicating the storage cavity 20 with the annular cavity, the side surface of the copper sheath 1 is provided with a second connecting hole 10 communicated with the annular cavity, the second connecting hole is internally provided with an exhaust pipe 5, and the inner end of the exhaust pipe is communicated with the annular cavity; when the outer end of the exhaust pipe 5 is exhausted, the annular cavity and the storage cavity can be vacuumized.
In some embodiments, as shown in fig. 4, the first connecting hole 21 and the second connecting hole 10 are coaxially distributed, the inner end of the air extraction pipe 5 extends into the first connecting hole to be communicated with the discharging cavity, and the side surface of the air extraction pipe 5 is provided with an air suction hole 50 communicated with the annular cavity; the inner end of the exhaust pipe 5 is provided with a tungsten wire isolation net or a molybdenum wire isolation net 6.
In some embodiments, the heat-resistant isolation layer 4 is an aluminum silicate fiber layer, the copper sheath adopts T2 copper, and the exhaust tube also adopts a T2 copper tube; when the copper sheath is pumped to a preset vacuum, the air exhaust pipe is flattened, the flattened part is bent, and finally the outer end of the air exhaust pipe is welded and sealed. The heat-resistant isolation layer completely isolates the copper sheath from the aluminum sheath on one hand, prevents the copper sheath and the aluminum sheath from being bonded together after heating, plays a role in heat preservation on the whole after heating on the other hand, slows down the cooling rate of liquid aluminum, and enables the liquid aluminum to better infiltrate with diamond powder and be more fully blended.
As shown in fig. 2, the copper cladding 1 comprises two copper connecting plates 100, a concave cavity 101 is arranged on the side surface of each copper connecting plate, the edges of the opening ends of the concave cavities on the copper connecting plates 100 are outwards connected to form a connecting surface 102, a plurality of connecting holes 103 are formed in the connecting surface, and when the connecting plates of the two copper connecting plates are attached, the two connecting surfaces are connected through bolts 104; in some embodiments, the ratio of the sidewall thickness to the bottom thickness of the cavity in the copper web 100 is 1.5-2.5; the junction of the outer side surface of the copper connection and the connection surface is provided with a plurality of convex ribs 105, one end of each convex rib is connected with the connection surface, and the ratio of the height of each convex rib to the thickness of the copper connection plate is 0.3-0.5.
A preparation process of a diamond aluminum sheet comprises the following steps:
s1, filling diamond powder 3 into a storage cavity 20 of the aluminum sheath 2 from a first connecting hole 21, vibrating the diamond powder to compact the storage cavity by vibration until the whole storage cavity is filled with the diamond powder and is tightly filled;
s2, tightly wrapping the aluminum sheath 2 by using a heat-resistant isolation layer 4, then loading the aluminum sheath 2 into the copper sheath 1, and connecting the exhaust tube 5 with a second connecting hole on the copper sheath, wherein the state is shown in figure 3;
s3, vacuumizing through an exhaust pipe, and when the vacuum degree in the copper sheath reaches 1x10 -2 Pa-1.2x10 -4 Flattening the air suction pipe clamp after the vacuumizing is finished, bending the flattened part, and finally welding and sealing the outer end of the air suction pipe; preferred vacuum is 1.2x10 -3 Pa;
S4, placing the copper sheath into a heating furnace, heating under the protection of nitrogen at normal pressure, wherein the heating temperature is set to 700-900 ℃, the heating time is 5-60min, the aluminum sheath is completely melted to form liquid pure aluminum in the heating process, and meanwhile, the copper sheath is heated, softened and flattened under the action of internal and external pressure difference, and the liquid pure aluminum is infiltrated into the diamond powder after being pressed; the preferable heating temperature is set to 800 ℃, and the heating time is set to 30min;
s5, taking out the copper sheath from the heating furnace, after cooling to normal temperature, disassembling the copper sheath, removing the heat-resistant isolation layer to obtain a diamond aluminum substrate with aluminum coated on both sides, and coating the surface of the diamond aluminum substrate with aluminum coated on both sides
In some embodiments, in step s5, after the copper sheathing is taken out of the heating furnace, the copper sheathing is placed in ultrasonic waves with power of 150-250W and frequency of 80-150 kHz for 3 minutes, and then naturally cooled to normal temperature. The preferred power of the ultrasonic wave is 200W and the frequency is 120kHz.
According to the invention, a simple special tool is matched through a smart process, and the copper cladding is heated and softened and the pressure difference between the inside and the outside is utilized to melt the molten pure aluminum into the diamond powder, so that the liquid pure aluminum and the diamond powder are mixed together; the process has the advantages that the adopted tooling is very simple, and meanwhile, some expensive equipment is avoided, so that the manufacturing cost is greatly simplified; finally, the diamond aluminum sheet is directly manufactured, and laser cutting of diamond aluminum billets is omitted. The diamond aluminum plate has low preparation cost and great market application prospect and commercial value.
In the description of the present invention, it should be understood that the directions or positional relationships indicated by the upper, lower, left, right, inner, outer, one end, the other end, etc. are based on the orientations or positional relationships shown in the drawings, and are merely for the purpose of more clearly describing the technical solution of the present invention, and are not meant to indicate or imply that the device or element to be referred to must be provided with a specific direction, be configured and operated in a specific orientation, and should not be construed as limiting the present invention.
Although specific embodiments of the invention have been described in detail herein, they are presented for purposes of illustration only and are not to be construed as limiting the scope of the invention. Various substitutions, alterations, and modifications can be made without departing from the spirit and scope of the invention.

Claims (10)

1. The preparation tooling of the diamond aluminum sheet is characterized by comprising a copper sheath and an aluminum sheath arranged in the copper sheath, wherein the aluminum sheath is of a flat cuboid structure and is made of pure aluminum; the aluminum sheath is internally provided with a closed storage cavity for filling diamond powder, an annular cavity is formed between the outer side of the aluminum sheath and the inner side of the copper sheath, and the outer side of the aluminum sheath is coated with a heat-resistant isolation layer;
the side surface of the aluminum sheath is provided with a first connecting hole for communicating the storage cavity with the annular cavity, the side surface of the copper sheath is provided with a second connecting hole communicated with the annular cavity, an exhaust pipe is arranged in the second connecting hole, and the inner end of the exhaust pipe is communicated with the annular cavity;
when the outer end of the exhaust pipe is exhausted, the annular cavity and the storage cavity can be vacuumized.
2. The tooling for preparing the diamond aluminum sheet according to claim 1, wherein the first connecting holes and the second connecting holes are coaxially distributed, the inner ends of the air extraction pipes extend into the first connecting holes and are communicated with the discharging cavity, and the side surfaces of the air extraction pipes are provided with air suction holes communicated with the annular cavity.
3. The process for preparing a diamond aluminum sheet according to claim 2, wherein a tungsten wire isolation net or a molybdenum wire isolation net is arranged at the inner end of the exhaust tube.
4. The tooling for preparing the diamond aluminum sheet according to claim 1, wherein the copper cladding comprises two copper connecting plates, a concave cavity is formed in the side face of each copper connecting plate, the edges of the open ends of the concave cavities on the copper connecting plates are outwards connected to form a connecting surface, a plurality of connecting holes are formed in the connecting surface, and when the connecting plates of the two copper connecting plates are attached, the two connecting surfaces are connected through bolts.
5. The tooling for manufacturing the diamond aluminum sheet according to claim 4, wherein the ratio of the thickness of the side wall to the thickness of the bottom of the concave cavity in the copper connecting plate is 1.5-2.5; the junction of the outer side surface and the connecting surface of the copper connection is provided with a plurality of convex ribs, and the ratio of the height of the convex ribs to the thickness of the copper connection plate is 0.3-0.5.
6. The tooling for preparing the diamond aluminum sheet according to claim 1, wherein the heat-resistant isolation layer is an aluminum silicate fiber layer, and the copper cladding is T2 copper.
7. A process for preparing a diamond aluminum sheet by adopting the preparation tool as claimed in any one of claims 1 to 6, which is characterized by comprising the following steps:
s1, filling diamond powder into a storage cavity of the aluminum sheath from a first connecting hole until the storage cavity is filled with the diamond powder;
s2, tightly wrapping the aluminum sheath by using a heat-resistant isolation layer, then filling the aluminum sheath into the copper sheath, and connecting the exhaust tube with a second connecting hole on the copper sheath;
s3, vacuumizing through an exhaust pipe, and when the vacuum degree in the copper sheath reachesTo 1x10 -2 Pa-1.2x10 -4 Pa, sealing the exhaust tube;
s4, placing the copper sheath into a heating furnace, heating under the protection of nitrogen at normal pressure, wherein the heating temperature is set to 700-900 ℃, the heating time is 5-60min, the aluminum sheath is completely melted to form liquid pure aluminum in the heating process, and meanwhile, the copper sheath is heated, softened and flattened under the action of internal and external pressure difference, and the liquid pure aluminum is infiltrated into the diamond powder after being pressed;
and S5, taking out the copper sheath from the heating furnace, after cooling to normal temperature, disassembling the copper sheath, removing the heat-resistant isolation layer to obtain a diamond aluminum substrate with aluminum coated on both sides, and processing the surface of the diamond aluminum substrate to be smooth according to a preset size to obtain the diamond aluminum sheet.
8. The process according to claim 7, wherein in step s1, after the diamond powder is filled in the storage cavity, the diamond powder is compacted by vibration until the entire storage cavity is tightly filled with the diamond powder.
9. The process for preparing a diamond aluminum sheet according to claim 7, wherein in the step s3, the exhaust tube is a T2 copper tube, after the evacuation is completed, the exhaust tube is flattened, the flattened portion is bent, and finally the outer end of the exhaust tube is welded and sealed.
10. The process for producing an aluminum diamond sheet according to claim 7, wherein in step s5, after the copper sheathing is taken out from the heating furnace, the copper sheathing is placed in ultrasonic waves with a power of 150 to 250W and a frequency of 80 to 150 kHz for 3 minutes, and then naturally cooled to room temperature.
CN202311508143.9A 2023-11-13 2023-11-13 Preparation tool and preparation method of diamond aluminum sheet Pending CN117505852A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311508143.9A CN117505852A (en) 2023-11-13 2023-11-13 Preparation tool and preparation method of diamond aluminum sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311508143.9A CN117505852A (en) 2023-11-13 2023-11-13 Preparation tool and preparation method of diamond aluminum sheet

Publications (1)

Publication Number Publication Date
CN117505852A true CN117505852A (en) 2024-02-06

Family

ID=89754524

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311508143.9A Pending CN117505852A (en) 2023-11-13 2023-11-13 Preparation tool and preparation method of diamond aluminum sheet

Country Status (1)

Country Link
CN (1) CN117505852A (en)

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