CN117410219A - 载体移送设备、物品保管系统及其载体安放方法 - Google Patents
载体移送设备、物品保管系统及其载体安放方法 Download PDFInfo
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Abstract
本发明涉及移送对象物的载体移送设备和将其包括的物品保管系统还有物品保管系统的载体安放方法。载体移送设备包括:工作台,具备被安放载体的安放面,所述载体容纳有物品;移送单元,通过在所述工作台的安放面中形成的通孔升降,并用于支承所述载体的下面而移送所述载体;以及控制部,控制所述移送单元,在所述移送单元的上面具备与设置在所述载体的下面的位置确定槽对应的位置确定销,所述控制部控制为,在所述载体安放到所述工作台的安放面之前,所述移送单元上升至所述安放面高度而待机,从而当安放所述载体时,设置在所述载体下面的位置确定槽和设置在所述移送单元上面的位置确定销彼此嵌合而能够实现载体的位置确定。
Description
技术领域
本发明涉及载体移送设备、移送且保管物品的物品保管系统及物品保管系统的载体安放方法。
背景技术
通常地,用于制造半导体元件的半导体工艺装置连续地配置而针对半导体基板执行各种工艺。执行半导体元件工艺的对象物可以以容纳于载体(容器)的状态向各半导体工艺装置提供或者从各半导体工艺装置回收。作为容纳对象物的载体的例可以举出FOUP(前开式晶圆传送盒,Front Open Unified POD)、FOSB(前开式晶片运输盒,Front OpeningShipping Box)、料盒(Magazine)、光罩盒(Reticle Pod)等。
载体可以通过天花板移送装置(OHT,Overhead Hoist Transport)的载具移送。载具可以把持容纳有对象物的载体而向半导体工艺装置的装载端口移送,并且将容纳有完成工艺处理的对象物的载体从装载端口拾起而向外部搬运。
载体可以通过塔式升降机(Tower Lift)之类的移送装置垂直移送,可以装载而保管在储存机(Stocker)之类的保管装置的搁板。这时,载体可以通过载具向装置的装载端口移送,但也可以通过使用者移送。
发明内容
本发明提供一种防止通过作业者的对象物的非正常安放问题且引导对象物的正常安放的物品保管系统。
本发明要解决的课题不限于此,只要是通常的技术人员可以从以下记载明确地理解没有提及的其它课题。
根据本发明的一实施例,可以是,提供一种载体移送设备包括:工作台,具备被安放载体的安放面,所述载体容纳有物品;移送单元,通过在所述工作台的安放面中形成的通孔升降,并用于支承所述载体的下面而移送所述载体;以及控制部,控制所述移送单元,在所述移送单元的上面具备与设置在所述载体的下面的位置确定槽对应的位置确定销,所述控制部控制为,在所述载体安放到所述工作台的安放面之前,所述移送单元上升至所述安放面高度而待机,从而当安放所述载体时,设置在所述载体下面的位置确定槽和设置在所述移送单元上面的位置确定销彼此嵌合而能够实现载体的位置确定。
在一实施例中,可以是,所述控制部包括:警报模组,当所述载体安放到所述工作台上时,在设置在所述载体下面的位置确定槽和设置在所述移送单元的上面的位置确定销没有彼此嵌合的情况下产生警报。
在一实施例中,可以是,所述工作台包括:第一感测模组,感测所述载体的存在与否;以及第二感测模组,感测所述载体的对齐状态。
在一实施例中,可以是,所述警报模组构成为在判断为通过所述第一感测模组以及所述第二感测模组感测的所述载体的安放状态为非正常的情况下产生警报。
在一实施例中,可以是,所述移送单元包括:手部,支承所述载体的下面,并在上面具备与设置在所述载体的下面的位置确定槽对应的位置确定销;以及驱动单元,移动所述手部。
另一方面,可以是,所述载体移送设备还包括:壳体,收容所述移送单元;以及轨道部,设为使所述壳体水平移动。
在一实施例中,可以是,所述工作台包括于构成为使用者能够将载体手动安放的手动端口中。
根据本发明的一实施例,可以是,提供一种物品保管系统包括:载体移送部,移送容纳有物品的载体;以及保管部,包括用于装载所述载体的多个搁板。所述载体移送部包括:装载端口,包括具备被安放所述载体的安放面的工作台;移送单元,通过在所述工作台的安放面中形成的通孔升降,并用于支承所述载体的下面而移送所述载体;以及控制部,控制所述移送单元,在所述移送单元的上面具备与设置在所述载体的下面的位置确定槽对应的位置确定销,所述控制部控制为,在所述载体安放到所述工作台的安放面之前,所述移送单元上升至所述安放面高度而待机,从而当安放所述载体时,设置在所述载体下面的位置确定槽和设置在所述移送单元上面的位置确定销彼此嵌合而能够实现载体的位置确定。
在一实施例中,可以是,所述装载端口包括构成为使用者能够将载体手动安放的手动端口。
根据本发明的一实施例,可以是,提供一种所述物品保管系统的载体安放方法,用于在具备被安放载体的安放面的工作台上正常地安放所述载体,所述载体容纳有物品。所述物品保管系统的载体安放方法包括:第一步骤,使移送单元位于与所述安放面相同的高度,所述移送单元通过在所述工作台的安放面中形成的通孔升降,并支承所述载体的下面而移送所述载体;第二步骤,在所述工作台上安放所述载体;以及第三步骤,通过所述移送单元来移送所述载体。
在一实施例中,可以是,所述物品保管系统的载体安放方法还包括:第四步骤,保管根据第三步骤移送的所述载体。
在一实施例中,可以是,所述第二步骤包括:随着设置在所述载体下面的位置确定槽和设置在所述移送单元的上面的位置确定销彼此嵌合而执行所述载体的位置确定的步骤。
在一实施例中,可以是,所述第二步骤还包括:当所述载体安放到所述工作台上时,在设置在所述载体下面的位置确定槽和设置在所述移送单元的上面的位置确定销没有彼此嵌合的情况下产生警报的步骤。
在一实施例中,可以是,所述第二步骤还包括:感测所述载体的存在与否的步骤;以及感测所述载体的对齐状态的步骤。
在一实施例中,所述第二步骤还包括:在所述载体的存在与否以及所述载体的对齐状态中的至少一者为非正常的情况下产生警报的步骤。
另一方面,可以是,所述工作台包括于构成为使用者能够将载体手动安放的手动端口中。
根据本发明,将对象物的非正常安放即时地认知给作业者而诱导对象物的正常安放,从而可以防止根据对象物的非正常安放发生的搬运延迟。尤其,仅仅以现有构成要件的驱动逻辑变更在没有额外的硬件设计以及制造费用就可以体现对象物的安放引导,因此可以提升物品保管系统的对象物安放正确度因此在费用面是有效的。
另外,和在工作台上具备的多个传感器一起整体地使得确认对象物的安放状态,在对象物的非正常安放时产生警报,从而可以在更短时间内诱导对象物安放状态的正常化。
另外,将其适用于通过作业者手动将载体安放在工作台而构成的手动端口,从而具有防止通过作业者的物品的非正常安放问题的效果。
发明的效果不限于此,没有提及的其它效果若是通常的技术者则可以从本说明书以及所附的附图明确地理解。
附图说明
图1是示意性地示出根据本发明的一实施例的物品保管系统的正面图。
图2是示意性地示出根据本发明的一实施例的物品保管系统的平面图。
图3是用于说明图1以及图2示出的载体移送部的一部分的放大图。
图4示出图3的另一实施例。
图5是示出本发明适用的待机状态的移送单元的侧面图。
图6是用于帮助理解附图的图5的分离侧面图。
图7是示出控制部的构成的结构图。
图8是根据本发明的一实施例的物品保管系统的载体安放方法的示意性的流程图。
图9是示意性地示出图8的第二步骤的流程图。
(附图标记说明)
10:载体
100:物品保管系统
110:装载端口
112:工作台
120:搁板
130:移送单元
132:手部
150:控制部
152:警报模组
210:位置确定销
220:位置确定槽
230:引导部件
240:第一感测模组
250:第二感测模组
具体实施方式
以下,参照所附附图而针对本发明的实施例进行详细地说明。本发明可以以各种不同的形式体现且不限于在此说明的实施例。在以下的各附图中,利用XYZ坐标系而说明附图中的方向。在所述XYZ坐标系中,铅直方向为Z方向,水平方向为X方向、Y方向。
为了明确地说明本发明,与本发明的本质无关的部分可以省略针对其的详细的说明,通过整个说明书对相同或类似的构成要件附加相同的附图标记。
另外,在参照的附图中,为了便于理解,多少夸张或者缩小地示出构成要件的大小、线的厚度等。
另外,在某个部分“包括”某个构成要件时,意指只要没有特别相反的记载就还可以包括其它构成要件而不是排除其它构成要件。在此使用的术语仅仅是用于提及特定实施例,并不用于限定本发明,只要在本说明书中没有不同的定义就可以以通过在本发明所属技术领域中具有通常的知识的人所理解的概念解释。
只要没有不同的定义,在这里使用的包括技术术语或者科学术语的所有术语,具有与通过在本发明所属技术领域中具有通常知识的人通常所理解的含义相同的含义。通常使用的词典中所定义的术语之类的术语应被解释为具有与相关技术的文脉上含义相同的含义,只要在本申请中没有明确地定义,不应被解释为过于理想化或者过于形式化的含义。
图1以及图2示出根据本发明的一实施例的物品保管系统100。根据本发明的一实施例的物品保管系统100可以包括载体移送部以及保管部。根据本发明的一实施例的物品保管系统100可以移送且保管各种种类的载体。例如,物品保管系统100可以包括多元储存机、混合储存机、前开式晶圆盒(Foup)和传输盒(Pod)并行搬运塔式升降机(Tower Lifter)中一个以上。
载体移送部可以包括装载端口110和移送单元130。
装载端口110给容纳有物品的载体10提供安放的空间,将载体10装载或者卸载。装载端口110是用于将载体10从物品保管系统100的外部向物品保管系统100的内部空间传递,或从物品保管系统100的内部空间向物品保管系统100的外部传递。装载端口110可以具备多个。在载体10的下面可以具备一个以上的位置确定槽220。
载体10可以是前开式晶片传送盒(FOUP,Front Open Unified POD)、前开式晶圆运输盒(FOSB,Front Opening Shipping Box),多应用载体(MAC,Multi ApplicationCarrier)、料盒、传输盒(POD)、光罩盒(Reticle Pod)等。物品可以是半导体基板、印刷电路基板、光罩等。
虽然没有详细地示出,但装载端口110可以包括接收从OHT(Overhead hoisttransfer)移送的载体10向物品保管系统100内部传递或者将物品保管系统100内部的载体10向OHT传递的OHT装载端口、将通过使用者手动安放的载体10向物品保管系统100内部传递或者将要给使用者的具备于物品保管系统100内部的载体10向外部传递的指南装载端口。
多个晶圆或光罩等之类利用于半导体制造工艺的物品可以以收容于载体10的状态安放在装载端口110的工作台112的安放面上。
移送单元130可以作为用于支承载体10的下面而移送安放在工作台112中的载体10的构成,将安放在工作台112的载体10从工作台112抬起向物品保管系统100内部移送。移送单元130可以将载体10向保管部传递。
保管部可以包括用于装载载体10的多个搁板120。搁板120可以在水平方向(X轴方向,Y轴方向)以及垂直方向(Z轴方向)上排列。例如,多个行和列在水平方向上可以分别整齐地配置,并且多个段在垂直方向上整齐地配置。在各个搁板120底面中可以具备对齐销(未示出)。当载体10装载在搁板120时,搁板120的对齐销(未示出)插入载体10的位置确定槽,从而可以将载体10在各搁板120正确地装载。
虽然没有详细地示出,但可以在保管部内部具备用于在保管部内部搬运载体10的搬运模组。搬运模组可以设置为能够在X方向、Y方向、Z方向的各方向上将载体10搬运且在装载端口110和搁板120之间,以及/或从搁板120向其它搁板120搬运载体10。作为一例,搬运模组可以为了载体10的搬运设置为能够在X轴方向、Z轴方向上移动以及旋转移动。
以下,虽然本发明的工作台以包括构成为使用者将载体手动安放的手动端口为例进行说明,但不是为了限定其。
图3是用于具体说明图1以及图2所示的载体移送部的一部分构成的放大图。
参照图3,根据本发明的实施例的移送单元130包括用于支承载体10的下面的托架(saddle)形式的手部132,并且在手部132的上面具备与设置在载体10的下面的位置确定槽220对应的位置确定销210。
工作台112包括托架(saddle)形式的通孔和多个引导部件230。作为一例,多个引导部件230以用于引导载体10的正位置的构成配置于与载体10的下面四个顶点对应的位置。
即,手部132可以具有与形成在工作台112的安放面的通孔的形状相同的形状且形成为比通孔小而通过通孔提供为能够升降。虽然没有详细地示出,但移送单元130可以还包括用于使手部132通过工作台112的通孔升降移动的驱动单元(未示出)。
另一方面,如图4所示那样工作台112可以还包括第一感测模组240和第二感测模组250。
第一感测模组240可以分别设置在工作台112上面的四个边角中相对的两个边角区域而设置为能够感测载体10的存在与否的传感器。
第二感测模组250可以分别设置在工作台112的四个顶点中相对的两个顶点而能够感测载体10的对齐状态。即,第二感测模组250可以代替两个引导部件230。作为一例,第二感测模组250可以包括收光部和发光部。若在发光部中照射的光收光于收光部,则判断为安放在工作台112中的载体10没有倾斜而是水平状态。若在发光部照射的光不收光于收光部,则判断为安放在工作台112的载体10倾斜。
图5示出载体10安放在工作台112的安放面之前的工作台112和移送单元130,图6是为了附图的理解而将图5分离示出的。
如图5所示那样载体10安放在工作台112的安放面之前,根据本发明的移送单元130以位于与工作台112的安放面相同的高度的状态待机。因此,当载体10正常安放于安放面时,设置在载体10下面的位置确定槽220和设置在移送单元130的上面的位置确定销210彼此嵌合而实现载体10的位置确定。
载体移送部可以还包括用于控制其的控制部。
图7是用于说明控制部150的构成的结构图。
在载体10安放在工作台112的安放面之前,控制部150可以控制为移送单元130上升至安放面高度而待机,从而移送单元130的上面,即控制为以手部132的上面和工作台112的安放面位于相同的高度的状态待机。因此,当载体10安放在工作台112的安放面时,可以控制为设置在载体10下面的位置确定槽220和设置在手部132的上面的位置确定销210彼此嵌合而实现载体的位置确定。
控制部150可以包括警报模组152。
当载体10安放于工作台112的安放面时,在设置在载体10下面的位置确定槽220和设置在移送单元130的上面的位置确定销210彼此没有嵌合的情况下,警报模组152可以产生警报。当载体10安放于工作台112的安放面时,在设置在载体10下面的位置确定槽220和设置在移送单元130的上面的位置确定销210彼此没有嵌合的情况下,意味着载体10的非正常安放因此产生警报,从而用于使载体的非正常安放认知给使用者。使载体的非正常安放即时认知给使用者,从而可以诱导载体10的正常安放,防止不能认知载体10的非正常安放从而发生的搬运延迟。
将其适用于构成为使用者(作业者)将载体手动安放的手动端口,从而可以防止通过作业者的物品的非正常安放问题且引导物品的正常安放。
另外,控制部150可以从第一感测模组240、第二感测模组250接收感测结果。控制部150可以以从第一感测模组240以及第二感测模组250接收的感测结果为基础控制警报模组152。
在通过第一感测模组240没有感测到载体10的存在或者通过第二感测模组250感测的载体10的对齐不是水平的情况下,警报模组152可以产生警报。即,判断为在通过第一感测模组240以及第二感测模组250感测的载体10的安放状态为非正常的情况下警报模组152可以产生警报。这时,可以在通过第一感测模组240以及第二感测模组250的感测结果中的至少一者的结果为在非正常的情况下控制为警报模组152产生警报。
另一方面,虽然没有详细地示出,载体移送部可以以还包括将移送单元130收容的壳体和将壳体水平移动的轨道部的塔式升降机形式提供。
图8以及图9作为根据本发明的一实施例的载体安放方法,示出之前说明的物品保管系统的载体安放方法。图8示出根据本发明的一实施例的整体的流程图,图9是用于具体说明图8的第二步骤的流程图。根据本发明的一实施例的载体安放方法如之前所说明的那样可以适用于包括于构成为使用者能够将载体手动安放的手动端口中的工作台。
参照图8,根据本发明的一实施例的物品保管系统的载体安放方法可以包括:第一步骤S100,使移送单元130位于与工作台112的安放面相同的高度;第二步骤S200,使载体10安放于工作台112的安放面;以及第三步骤S300,移送安放在工作台112的载体10。移送了的载体可以保管在具备多个搁板120的保管部(S400)。
第一步骤S100为支承载体10的下面而使载体10移送的移送单元上升而使移送单元130的上面位于与工作台112的安放面相同的高度,从而使移送单元130的手部132在工作台112的安放面中形成的通孔插入的位置待机的步骤。
第二步骤S200为使载体10安放在以手部132插入工作台112的通孔的状态待机的工作台112上的步骤,如图9所示那样包括感测载体的存在与否的步骤(S210)、感测设置在载体10下面的位置确定槽220和设置在移送单元130的手部132上面的位置确定销210的嵌合与否的步骤S220、感测载体10的对齐状态的正常与否的步骤(S230)以及警报发生步骤(S250)。
在第二步骤S200中,可以随着设置在载体10下面的位置确定槽220和设置在移送单元130的手部132上面的位置确定销210彼此嵌合而执行位置确定。
当载体10安放在工作台112上时,设置在载体10下面的位置确定槽220和设置在移送单元130的手部132上面的位置确定销210彼此不嵌合时,可以仅在载体的存在与否以及载体的对齐状态中的至少一者非正常时执行警报发生步骤(S250)。
第二步骤S200可以在位置确定销210和位置确定槽220的嵌合状态、载体10的存在与否以及载体10的对齐状态都是正常的情况下结束。
如上所述,本发明将对象物(例:容纳有物品的载体)的非正常安放即时认知给作业者而诱导对象物的正常安放,从而事前防止通过对象物的非正常安放的搬运延迟等之类问题。尤其,可以仅仅以现有构成要件的驱动逻辑变更,在没有额外的硬件设计以及制造费用就能够实现对象物的安放引导,因此提升物品保管系统的对象物安放正确度而在费用面是有效的。
另一方面,在工作台上还具备多个传感器,从而使得整体地确认对象物的安放状态,当对象物非正常安放时产生警报,从而在更短时间内诱导对象物安放状态的正常化。
另外,将其适用于构成为通过作业者(使用者)将载体手动安放在工作台的手动端口,从而具有防止通过作业者的物品的非正常安放问题的效果。
以上的说明只不过是举例说明本发明的技术构思,只要是在本发明所属的技术领域中具有通常的知识的人,就能够在不脱离本发明的本质性特性的范围内进行各种修改和变形。因此,本发明记载的实施例不是为了限定本发明的技术构思,而是为了说明本发明的技术构思,本发明的技术构思不限定于这些实施例。本发明的保护范围应根据所附的权利要求书进行解释,与其等同范围内的所有技术构思应被解释为包括在本发明的权利范围内。
Claims (20)
1.一种载体移送设备,其特征在于,包括:
工作台,具备被安放载体的安放面,所述载体容纳有物品;
移送单元,通过在所述工作台的安放面中形成的通孔升降,并用于支承所述载体的下面而移送所述载体;以及
控制部,控制所述移送单元,
在所述移送单元的上面具备与设置在所述载体的下面的位置确定槽对应的位置确定销,
所述控制部控制为,在所述载体安放到所述工作台的安放面之前,所述移送单元上升至所述安放面高度而待机,从而当安放所述载体时,设置在所述载体下面的位置确定槽和设置在所述移送单元上面的位置确定销彼此嵌合而能够实现载体的位置确定。
2.根据权利要求1所述的载体移送设备,其特征在于,
所述控制部包括:警报模组,当所述载体安放到所述工作台上时,在设置在所述载体下面的位置确定槽和设置在所述移送单元的上面的位置确定销没有彼此嵌合的情况下产生警报。
3.根据权利要求2所述的载体移送设备,其特征在于,
所述工作台包括:
第一感测模组,感测所述载体的存在与否;以及
第二感测模组,感测所述载体的对齐状态。
4.根据权利要求3所述的载体移送设备,其特征在于,
所述警报模组在判断为通过所述第一感测模组以及所述第二感测模组感测的所述载体的安放状态为非正常的情况下产生警报。
5.根据权利要求1所述的载体移送设备,其特征在于,
所述移送单元包括:
手部,支承所述载体的下面,并在上面具备与设置在所述载体的下面的位置确定槽对应的位置确定销;以及
驱动单元,移动所述手部。
6.根据权利要求1所述的载体移送设备,其特征在于,
所述载体移送设备还包括:
壳体,收容所述移送单元;以及
轨道部,设为使所述壳体水平移动。
7.根据权利要求1所述的载体移送设备,其特征在于,
所述工作台包括于构成为使用者能够将载体手动安放的手动端口中。
8.一种物品保管系统,其特征在于,包括:
载体移送部,移送容纳有物品的载体;以及
保管部,包括用于装载所述载体的多个搁板,
所述载体移送部包括:
装载端口,包括具备被安放所述载体的安放面的工作台;
移送单元,通过在所述工作台的安放面中形成的通孔升降,并用于支承所述载体的下面而移送所述载体;以及
控制部,控制所述移送单元,
在所述移送单元的上面具备与设置在所述载体的下面的位置确定槽对应的位置确定销,
所述控制部控制为,在所述载体安放到所述工作台的安放面之前,所述移送单元上升至所述安放面高度而待机,从而当安放所述载体时,设置在所述载体下面的位置确定槽和设置在所述移送单元上面的位置确定销彼此嵌合而能够实现载体的位置确定。
9.根据权利要求8所述的物品保管系统,其特征在于,
所述装载端口包括构成为使用者能够将载体手动安放的手动端口。
10.根据权利要求9所述的物品保管系统,其特征在于,
所述控制部包括:警报模组,当使用者将所述载体安放到所述工作台上时,在设置在所述载体下面的位置确定槽和设置在所述移送单元的上面的位置确定销没有彼此嵌合的情况下产生警报。
11.根据权利要求10所述的物品保管系统,其特征在于,
所述工作台包括:
第一感测模组,感测所述载体的存在与否;以及
第二感测模组,感测所述载体的对齐状态。
12.根据权利要求11所述的物品保管系统,其特征在于,
所述警报模组在判断为通过所述第一感测模组以及所述第二感测模组感测的所述载体的安放状态是非正常的情况下产生警报。
13.根据权利要求8所述的物品保管系统,其特征在于,
所述移送单元包括:
手部,支承所述载体的下面,并在上面具备与设置在所述载体的下面的位置确定槽对应的位置确定销;以及
驱动单元,移动所述手部。
14.根据权利要求8所述的物品保管系统,其特征在于,
所述载体移送设备还包括:
壳体,收容所述移送单元;以及
轨道部,设为使所述壳体水平移动。
15.一种物品保管系统的载体安放方法,其特征在于,用于在具备被安放载体的安放面的工作台上正常地安放所述载体,所述载体容纳有物品,所述物品保管系统的载体安放方法包括:
第一步骤,使移送单元位于与所述安放面相同的高度,所述移送单元通过在所述工作台的安放面中形成的通孔升降,并支承所述载体的下面而移送所述载体;
第二步骤,在所述工作台上安放所述载体;以及
第三步骤,通过所述移送单元来移送所述载体。
16.根据权利要求15所述的物品保管系统的载体安放方法,其特征在于,
所述第二步骤包括:随着设置在所述载体下面的位置确定槽和设置在所述移送单元的上面的位置确定销彼此嵌合而执行所述载体的位置确定的步骤。
17.根据权利要求16所述的物品保管系统的载体安放方法,其特征在于,
所述第二步骤还包括:当所述载体安放到所述工作台上时,在设置在所述载体下面的位置确定槽和设置在所述移送单元的上面的位置确定销没有彼此嵌合的情况下产生警报的步骤。
18.根据权利要求17所述的物品保管系统的载体安放方法,其特征在于,
所述第二步骤还包括:
感测所述载体的存在与否的步骤;以及
感测所述载体的对齐状态的步骤。
19.根据权利要求18所述的物品保管系统的载体安放方法,其特征在于,
所述第二步骤还包括:在所述载体的存在与否以及所述载体的对齐状态中的至少一者为非正常的情况下产生警报的步骤。
20.根据权利要求15所述的物品保管系统的载体安放方法,其特征在于,
所述工作台包括于构成为使用者能够将载体手动安放的手动端口中。
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