CN117403202A - Roll-to-roll transmission heating structure of vacuum coating system - Google Patents
Roll-to-roll transmission heating structure of vacuum coating system Download PDFInfo
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- CN117403202A CN117403202A CN202311390871.4A CN202311390871A CN117403202A CN 117403202 A CN117403202 A CN 117403202A CN 202311390871 A CN202311390871 A CN 202311390871A CN 117403202 A CN117403202 A CN 117403202A
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 119
- 230000005540 biological transmission Effects 0.000 title claims abstract description 82
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 31
- 239000000463 material Substances 0.000 claims abstract description 24
- 230000006698 induction Effects 0.000 claims abstract description 9
- 230000008859 change Effects 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 7
- 230000002159 abnormal effect Effects 0.000 claims description 5
- 238000005524 ceramic coating Methods 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 238000007405 data analysis Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000001276 controlling effect Effects 0.000 claims description 2
- 238000000151 deposition Methods 0.000 abstract description 6
- 230000008021 deposition Effects 0.000 abstract description 6
- 230000003068 static effect Effects 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 5
- 238000012546 transfer Methods 0.000 description 4
- 239000007888 film coating Substances 0.000 description 3
- 238000009501 film coating Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910002609 Gd2Zr2O7 Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000001845 vibrational spectrum Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Devices For Conveying Motion By Means Of Endless Flexible Members (AREA)
Abstract
The invention discloses a roll-to-roll transmission heating structure of a vacuum coating system, which belongs to the technical field of heating of vacuum coating systems and comprises a transmission belt, a heating component and a control system; the transmission belt comprises a belt material, a belt wheel assembly, a driving motor and an induction device. According to the roll-to-roll transmission heating structure of the vacuum coating system, the base band of roll-to-roll transmission is heated by the transmission belt, and the transmission belt and the moving base band have transmission synchronism, so that the problem of belt tension caused by friction between the base band and the heating structure due to film deposition on the traditional static heating plate can be reduced or avoided, and the continuous transmission stability of the belt is improved.
Description
Technical Field
The invention relates to the technical field of heating of vacuum coating systems, in particular to a roll-to-roll transmission heating structure of a vacuum coating system.
Background
The roll-to-roll vacuum coating system is an efficient continuous production process designed to help improve the transfer efficiency, speed and uniformity in the length direction, and is suitable for a variety of different coating materials. In roll-to-roll vacuum coating systems, the coating process is typically required to be performed at relatively high temperatures, ranging between 800 ℃ and 1300 ℃. Therefore, it is often necessary to heat the roll-to-roll driven base tape to ensure that the base tape reaches the proper temperature to improve the crystalline phase quality, adhesion and uniformity of the film.
At present, most of roll-to-roll vacuum coating systems heat and coat films on a base band through a heating plate, and because coating is carried out on a stationary heating plate, when coating is carried out on the base band, part of films can be coated on the heating plate from a gap between paths of the base band which is continuously driven, so that the heating plate is overlapped and piled with the films in the coating process. Because the growth rate of the film is very high and can reach 100nm/s at most, the film deposited on the heating plate can quickly form a certain thickness, so that friction is generated between the heating plate and the base band to influence the tape running tension of the base band, thereby influencing continuous and stable mechanical transmission of the base band. The reduced tape running stability of the base tape also affects the heat distribution and heat efficiency of the heating plate, resulting in uneven heating of the surface of the base tape, thereby reducing the quality of the coating film. In addition, the width of the strip is generally between 4 and 20mm, and the thickness is between 0.01 and 0.02mm, when the strip rubs with the supporting heat transfer component, the transmission is unstable, and the narrow and thin strip is deformed in the transmission process, so that the quality of the coating film is affected. Actual production shows that in a strip with the length of 1000m, in a coating period (> 10 h), when the tension change amplitude exceeds +/-5N/mm, the continuous transmission stability of the strip is reduced by 10% in a straight line, and the production efficiency is reduced and the reject ratio of the product is increased sharply.
To solve these problems, the related personnel have tried various improvements such as optimizing the shape of the heating plate, dynamic tension adjustment, etc., but these methods have not fundamentally solved the problems. Therefore, there is a need to design a new roll-to-roll coating heating structure.
Disclosure of Invention
The invention aims to provide a roll-to-roll transmission heating structure of a vacuum coating system, which is used for carrying out transmission heating on a roll-to-roll transmission baseband through a transmission belt, has transmission synchronism with a moving baseband, can reduce or avoid the problem of belt tension caused by friction between the baseband and a heating structure due to film deposition on a traditional static heating plate, and improves the continuous transmission stability of the belt.
In order to achieve the above purpose, the invention provides a roll-to-roll transmission heating structure of a vacuum coating system, which comprises a transmission belt, a heating component and a control system; the transmission belt comprises a belt material, a belt wheel assembly, a driving motor and an induction device.
Preferably, the belt material is made of high-temperature-resistant and high-strength materials, the thickness of the belt material is between 0.5cm and 1cm, the width of the belt material is between 8cm and 20cm, and the vertical distance between the upper surface and the lower surface of the driving belt is between 5cm and 15cm.
Preferably, the pulley assembly comprises a driving wheel, a driven wheel and a supporting wheel, the driving wheel and the driven wheel are used for driving the driving belt to run in a linkage way, and the supporting wheel is used for supporting and assisting the driving belt to run stably; the supporting wheel comprises at least one tensioning wheel for adjusting the tension of the transmission belt; the driving wheel is driven by the driving motor.
Preferably, the pulley assembly surface is coated with a ceramic coating that acts as a thermal barrier layer; the vertical distance of the supporting wheel from the heating component is not higher than 0.8cm.
Preferably, the driving motor is used for controlling the rotating speed of the belt wheel assembly so as to adjust the running speed of the driving belt; the running speed of the driving belt is set to be in the range of 0.2mm/s-3mm/s, and the running speed of the driving belt is synchronous with the running speed of the base band.
Preferably, the sensing device comprises a wireless vibration sensor, which is used for continuously monitoring the vibration characteristic of the driving belt, identifying the abnormal vibration mode or change of the driving belt, recording the vibration state information of the driving belt, transmitting the vibration state information to the control system, and performing data analysis and automatically adjusting the running state of the driving belt after the control system obtains the feedback information of the sensing device; the sensing device is embedded inside the strip.
Preferably, the heating elements of the heating assembly are symmetrically arranged and synchronously heat, so that the whole driving belt is heated uniformly, and the uniformity of the surface temperature of the driving belt is maintained; the operation state of the heating component is regulated and controlled by the control system; the temperature control range of the heating component is 700-1300 ℃, and the total power of the heating component is 1.2 kilowatts.
Preferably, the heating assembly is mounted within a central spaced region of the belt between the upper and lower belts.
Preferably, the distance between the heating component and the upper and lower strips is precisely controlled to be 10mm, and the distance between the heating component and the two sides of the driving belt is the same and controlled to be 30mm-80 mm.
Preferably, the control system comprises a controller, and the control system is connected with the driving motor, the sensing device and the heating component.
Therefore, the roll-to-roll transmission heating structure of the vacuum coating system has the beneficial effects compared with the prior art that:
(1) According to the invention, the traditional heating plate is designed into a transmission heating structure, so that heating of the base band and synchronous transmission of the base band and the transmission belt are realized in the transmission heating process, and the problem of unstable tension is effectively avoided. The design greatly improves the tape feeding stability of the base tape in the vacuum coating system, and further remarkably improves the efficiency of the coating process and the quality of products.
(2) The wireless vibration sensor in the induction device is added to continuously monitor the vibration characteristic of the driving belt, identify any abnormal vibration mode or change, and help to rapidly judge the tension condition between the base belt and the driving belt, so that the state of the driving belt is timely regulated, the driving belt is kept in a proper running state, and the influence of the tension on the driving stability of the base belt is further reduced.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
FIG. 1 is a schematic diagram of example 1 of a roll-to-roll type transmission heating structure of a vacuum coating system according to the present invention;
FIG. 2 is a schematic cross-sectional view of example 1 of a roll-to-roll type transmission heating structure of a vacuum coating system according to the present invention;
FIG. 3 is a graph showing vibration of the surface of a belt at 1h intervals in the interval of 0-10h in the process of coating the belt according to example 1 of the present invention under specific conditions;
FIG. 4 is a schematic cross-sectional view of example 2 of a roll-to-roll type transmission heating structure of a vacuum coating system according to the present invention;
FIG. 5 is a graph showing vibration patterns of the surface of a stationary heating plate at 1h intervals in the interval of 0-10h during the coating of a strip material in comparative example 1 under specific conditions.
Reference numerals
1. A transmission belt; 2. a strip; 31. a driving wheel; 32. driven wheel; 33. a support wheel; 331. a tensioning wheel; 332. a tension adjusting section; 333. a support wheel drive belt; 4. a driving motor; 5. an induction device; 6. a heating assembly; 7. a control system; 8. a base band; 9. and a roller.
Detailed Description
The technical scheme of the invention is further described below through the attached drawings and the embodiments.
Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The terms "first," "second," and the like, as used herein, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.
Example 1
As shown in fig. 1 and 2, the invention provides a roll-to-roll transmission heating structure of a vacuum coating system, which comprises a transmission belt 1, a heating assembly 6 and a control system 7, wherein the transmission belt 1 comprises a belt material 2, a belt wheel assembly, a driving motor 4 and an induction device 5.
The strip 2 is made of a high temperature resistant and high strength material, such as C276, DH3128, INCONEL601, etc., and in this embodiment, the strip 2 is made of C276 with tensile strength: not less than 620MPa, yield strength: not less than 290MPa, and the extensibility: more than or equal to 30 percent, the thickness is 0.5cm, the width is 8cm, and the vertical distance range between the upper surface and the lower surface of the driving belt 1 is 8cm.
The pulley assembly comprises a driving wheel 31, a driven wheel 32 and a supporting wheel 33, the driving belt 1 is driven to run through the linkage of the driving wheel 31 and the driven wheel 32, and the driving wheel 31 is driven to rotate through a driving motor 4. The supporting wheel 33 plays a role in supporting and driving, namely, the whole driving belt 1 structure and the auxiliary driving belt 1 are supported to stably run, the supporting wheel 33 comprises a tensioning wheel 331 with a tensioning function, the tensioning wheel 331 is connected with a tensioning adjusting part 332, the tensioning adjusting part 332 is used for adjusting the tensioning degree of the tensioning wheel 331, the tensioning degree is self-adaptive to the tension of the driving belt 1, the driving belt 1 can keep proper tightness, the driving positioning precision is guaranteed, and the problems of abrasion and the like of the driving belt 1 are effectively avoided. The center of band pulley subassembly all is equipped with the round hole, embedded bearing, and wherein, the quantity of supporting wheel 33 is symmetrical from top to bottom, and 6 respectively, and both ends are provided with cylinder 9 about this heating structure, and the accessible cylinder 9 in baseband 8 both ends realize smooth diversion.
The surface of the belt wheel component is coated with Gd2Zr2O7 ceramic coating serving as a thermal barrier layer, and the thickness of the ceramic coating is 300 mu m, so that the belt wheel component can be prevented from being damaged by high temperature.
The running speed range of the driving belt 1 is set between 0.2mm/s and 3mm/s, and specific numerical values are set according to the driving speed of the base belt 8, so that the driving belt 1 and the base belt 8 are synchronous in driving.
The sensing device 5 comprises a wireless vibration sensor for continuously monitoring the vibration characteristic of the driving belt 1, identifying any abnormal vibration mode or change, recording the vibration state information of the driving belt, transmitting the vibration state information to the control system, and after the control system obtains the feedback information of the sensing device 5, carrying out data analysis and automatically adjusting the running state of the driving belt, so that the driving belt is kept in a proper running state, and further adapting to the process requirements. The induction device 5 is embedded inside the strip 2 of the drive belt 1 at a distance of 5mm from the strip surface.
The heating component 6 can select heating elements such as SiC electric heating elements, high-temperature resistance wires, etc., and in this embodiment, the heating element of the heating component 6 is a SiC heating tube. The SiC heating pipes are symmetrically arranged, the number of the SiC heating pipes is 10, and the heating pipes synchronously heat, so that the whole driving belt 1 is heated uniformly, and the uniformity of the surface temperature of the driving belt 1 is maintained. The switch, heating power and the like of the heating component 6 are regulated and controlled by the control system 7, the temperature of the heating component 6 is set at 1000 ℃, and the power of the heating component 6 is 1.2 kilowatts.
The heating element 6 is firmly installed in the central interval area of the driving belt 1 and is positioned between the upper belt material 2 and the lower belt material 2, the distance between the upper belt material 2 and the lower belt material 2 of the driving belt 1 is precisely controlled to be 10mm, the distances between the heating element 6 and the lower belt material 2 are respectively equal to 35mm from the two sides of the driving belt 1, the interval between the heating element 6 and the belt material 2 is ensured to be uniform, so that the uniform heat transmission is ensured, and the heating efficiency is improved to the greatest extent.
The control system 7 comprises a controller, the control system 7 is connected with the driving motor 4, the sensing device 5 and the heating component 6, the driving force is changed by adjusting the parameter setting of the driving motor 4 on the control system 7, the feedback information of the sensing device 5 is received by the control system 7, and the operation parameters of the driving belt 1 are automatically or manually adjusted, including the state of the tensioning wheel 331 with tensioning function, and the power and the current of the heating component 6 are also adjusted by the control system 7.
Specifically: the control system 7 is used for setting the running speed parameter of the driving belt 1 and the heating power parameter of the heating assembly 6, and then a switch is started to enable the running speed of the driving belt 1 to be consistent with the moving speed of the base belt 8, and the heating temperature reaches the requirement. In the coating process, the sensing device 5 can continuously monitor the vibration characteristic of the driving belt 1, identify any abnormal vibration or change, thereby rapidly judging the tension condition between the base belt 8 and the driving belt 1, and timely adjusting the state of the driving belt 1 to keep the driving belt in a proper running state all the time. The whole roll-to-roll transmission heating structure is continuously heated along with film coating, and the film coated at the fixed position of the fixed heating plate is dispersed on the surface of the whole transmission belt 1, so that the deposition rate and deposition thickness of the film on the surface of the heating structure are greatly reduced, the generation of overlarge tension caused by overlarge film between the heating structure and the base belt 8 is avoided or reduced, and the belt conveying stability of the belt 2 is improved.
By adopting the roll-to-roll transmission heating structure of the vacuum coating system, under the vacuum condition, single-time heating coating is carried out on a base band 8 with the length of 3 km, the width of 12mm and the thickness of 0.01mm, 5 channels are formed on the base band 8 in a multi-channel spiral winding mode, the interval between the channels is 3.5mm, the transmission speed of the base band 8 is 0.35mm/s, at the moment, a vibration sensor is positioned between the 3 rd channel and the 4 th channel of the multi-channel base band, the transmission linear speed of a transmission belt 1 is set to be 0.35mm/s, the transmission is synchronous with the transmission of the base band 8, the film growth rate on the surface of the strip 2 is 100nm/s, and the coating duration is 10 hours.
As shown in fig. 3, in the process of heating and coating the strip 2, the vibration curve data of the surface of the driving belt 1 are obtained every 1 hour of the heating time period collected by the sensing device 5. It can be observed from the graph that the vibration of the surface of the belt 1 is kept stable within the range of film growth rate up to 100nm/s and film coating duration of 10 hours, the amplitude is almost 0, the tension change of the belt 2 caused by friction between the base belt 8 and the belt 1 is always kept within the allowable range in the process, and the continuous transmission stability of the belt 2 is improved to more than 99.5%.
Example two
As shown in fig. 4, the second embodiment is a modification of the first embodiment, and is different from the first embodiment in that the structure of the supporting wheel 33 is changed, the supporting wheel 33 still plays a role in supporting transmission, and includes a tensioning wheel 331 with a tensioning function, meanwhile, a supporting wheel transmission belt 333 is sleeved between the tensioning wheels 331, so as to realize power transfer, and when the running speed of the transmission belt 1 is changed, the tension between the belt wheel and the belt body of the transmission belt 1 is more stably balanced.
Other technical implementation schemes and effects of the embodiment can be the same as or similar to those of the first embodiment.
Comparative example one
Comparative example one differs from example one in that comparative example one uses a conventional stationary heating plate in which an induction device is embedded. As shown in fig. 5, in the heating structure of the comparative example, the spectrum of the vibration sensor is obviously fluctuated when the film plating is performed for 8 hours, and the vibration spectrum is fluctuated with time, which means that the thickness of the film deposited on the heating plate reaches a certain height when the film plating is performed only for 8 hours, so that friction is generated between the base band and the heating plate, the friction force is gradually increased, the tension of the strip is obviously increased, the transmission stability of the base band is affected, and finally the quality of the roll-to-roll vacuum film plating strip is greatly reduced.
Comparative example two
The second comparative example is different from the first comparative example in that the second comparative example was set to a speed of 0.35mm/s, for example, 0.8mm/s, which is not synchronized with the base belt transmission, except that the second comparative example was set to a speed of 0.35mm/s, which is the same as the first comparative example. By adopting the transmission heating structure, when the film thickness of the surface of the transmission belt at the later stage of film coating is increased to a certain thickness, the induction device cannot accurately estimate the actual friction condition generated between the transmission belt and the base belt, and meanwhile, the base belt generates relative motion when passing through the surface of the transmission belt, so that the influence of the heating structure on the transmission stability of the belt is deepened.
Comparative example three
The third comparative example is different from the first example in that the third comparative example is the same as the first example except that a heat transfer belt is directly provided outside the conventional stationary heating plate, heat is transferred to the belt through the heating plate, and the base belt is heated. The roll-to-roll transmission heating structure of the vacuum coating system prepared by the method is characterized in that the heating temperature is set at 900-1000 ℃ to reach the specified temperature range, the total time is 12 minutes, the heating process of the heating structure of the third comparative example is too slow, and the heating efficiency is low.
Therefore, the roll-to-roll type transmission heating structure of the vacuum coating system is adopted, the running speed of the transmission belt is synchronous with the moving speed of the base band, the running state of the transmission belt can be correspondingly adjusted according to the requirements of different transmission speeds of different base bands, the transmission belt transmission heating process disperses the film originally coated on the fixed area of the static heating plate on the surface of the whole transmission belt, the deposition speed and deposition thickness of the film on the surface of the heating structure are greatly reduced, the probability of overlarge tension caused by friction between the base band and the heating structure due to the fact that the film on the surface of the heating structure is too thick is reduced, and the transmission stability of the base band is improved.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention and not for limiting it, and although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that: the technical scheme of the invention can be modified or replaced by the same, and the modified technical scheme cannot deviate from the spirit and scope of the technical scheme of the invention.
Claims (10)
1. A roll-to-roll transmission heating structure of a vacuum coating system is characterized in that: comprises a driving belt, a heating component and a control system; the transmission belt comprises a belt material, a belt wheel assembly, a driving motor and an induction device.
2. The roll-to-roll transmission heating structure of a vacuum coating system of claim 1, wherein: the belt material is made of high-temperature-resistant and high-strength materials, the thickness of the belt material is between 0.5cm and 1cm, the width of the belt material is between 8cm and 20cm, and the vertical distance between the upper surface and the lower surface of the driving belt is between 5cm and 15cm.
3. The roll-to-roll transmission heating structure of a vacuum coating system of claim 1, wherein: the belt wheel assembly comprises a driving wheel, a driven wheel and a supporting wheel, the driving wheel and the driven wheel are used for driving the transmission belt to run in a linkage way, and the supporting wheel is used for supporting and assisting the transmission belt to run stably; the supporting wheel comprises at least one tensioning wheel for adjusting the tension of the transmission belt; the driving wheel is driven by the driving motor.
4. A roll-to-roll transmission heating structure of a vacuum coating system as recited in claim 3, wherein: the surface of the belt wheel component is coated with a ceramic coating serving as a thermal barrier layer; the vertical distance of the supporting wheel from the heating component is not higher than 0.8cm.
5. The roll-to-roll transmission heating structure of a vacuum coating system of claim 1, wherein: the driving motor is used for controlling the rotating speed of the belt wheel assembly so as to adjust the running speed of the transmission belt; the running speed of the driving belt is set to be in the range of 0.2mm/s-3mm/s, and the running speed of the driving belt is synchronous with the running speed of the base band.
6. The roll-to-roll transmission heating structure of a vacuum coating system of claim 1, wherein: the sensing device comprises a wireless vibration sensor, is used for continuously monitoring the vibration characteristic of the driving belt, identifying the abnormal vibration mode or change of the driving belt, recording the vibration state information of the driving belt, transmitting the vibration state information to the control system, and automatically adjusting the running state of the driving belt by carrying out data analysis after the control system obtains the feedback information of the sensing device; the sensing device is embedded inside the strip.
7. The roll-to-roll transmission heating structure of a vacuum coating system of claim 1, wherein: the heating elements of the heating assembly are symmetrically arranged and synchronously heat, so that the whole driving belt is heated uniformly, and the surface temperature uniformity of the driving belt is maintained; the operation state of the heating component is regulated and controlled by the control system; the temperature control range of the heating component is 700-1300 ℃, and the total power of the heating component is 1.2 kilowatts.
8. The roll-to-roll transmission heating structure of a vacuum coating system of claim 7, wherein: the heating assembly is mounted within a central spaced region of the belt between the upper and lower belts.
9. The roll-to-roll transmission heating structure of a vacuum coating system of claim 8, wherein: the distance between the heating component and the belt materials is precisely controlled to be 10mm, the distance between the heating component and the belt materials is the same from two sides of the driving belt, and the distance between the heating component and the belt materials is controlled to be 30mm-80 mm.
10. The roll-to-roll transmission heating structure of a vacuum coating system of claim 1, wherein: the control system comprises a controller, and is connected with the driving motor, the sensing device and the heating component.
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| US20150140212A1 (en) * | 2012-05-31 | 2015-05-21 | Sony Corporation | Film-forming apparatus and film-forming method |
| KR20160116990A (en) * | 2015-03-31 | 2016-10-10 | (주)맥스필름 | Roll-To-Roll Sputtering System |
| KR20180024412A (en) * | 2016-08-30 | 2018-03-08 | 임성기 | method for sputtering using roll to roll deposition system |
| CN108642470A (en) * | 2018-07-18 | 2018-10-12 | 广州市中昊装饰材料有限公司 | A kind of band multicell continuous vacuum plasma coating system |
| CN110791745A (en) * | 2019-12-12 | 2020-02-14 | 上海超导科技股份有限公司 | Orthogonal radiation auxiliary conduction heating equipment suitable for roll-to-roll continuous strip |
| CN116904956A (en) * | 2023-07-27 | 2023-10-20 | 上海超导科技股份有限公司 | Roll-to-roll magnetron sputtering coating device |
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