KR102340877B1 - The roll-to-roll graphine film manufacturing apparatus provided with tension modulation unit in the lower - Google Patents

Abstract

The present invention relates to a roll-to-roll graphene film manufacturing apparatus equipped with a tension control unit at the bottom, and more particularly, the catalytic metal film on which graphene is deposited by maintaining a constant tension on the catalytic metal film during the manufacturing process of the graphene film. It relates to a roll-to-roll graphene film manufacturing apparatus provided at the bottom with a tension control unit that prevents damage and facilitates cooling of the catalytic metal film on which graphene is deposited,
In the unidirectional roll-to-roll graphene film manufacturing apparatus provided at the bottom with a tension control unit for depositing graphene while transferring the catalytic metal film in a roll to roll method, supplying the catalytic metal film to the deposition chamber a supply roller for, an upper direction conversion roller for changing the direction so as to feed the catalyst metal film supplied from the supply roller downward, and in close contact with the upper direction conversion roller, while giving a certain tension to the catalytic metal film together with the upper direction conversion roller an upper chamber composed of an auxiliary roller for supplying downward; a deposition chamber connected to a lower portion of the upper chamber and in which graphene is deposited on the catalytic metal film; and a lower direction changing roller for changing the direction of the catalytic metal film transferred from the deposition chamber, and a tension adjusting roller for changing the direction while applying a certain tension to the catalytic metal film transferred from the lower direction changing roller It provides a roll-to-roll graphene film manufacturing apparatus equipped with a tension control unit at the lower part, and a lower chamber comprising a winding roller on which the catalyst metal film transferred from the tension control roller is wound.

Description

The roll-to-roll graphene film manufacturing apparatus provided with tension modulation unit in the lower}

The present invention relates to a roll-to-roll graphene film manufacturing apparatus equipped with a tension control unit at the lower part, and more particularly, the catalytic metal film on which graphene is deposited by maintaining a certain tension on the catalytic metal film during the manufacturing process of the graphene film. It relates to a roll-to-roll graphene film manufacturing apparatus provided with a lower portion of the tension control unit that prevents damage and facilitates cooling of the catalytic metal film on which graphene is deposited.

In general, graphene is a material in which carbon is connected to each other in a hexagonal shape to form a honeycomb-shaped two-dimensional planar structure, and its thickness is very thin, transparent, and has very high electrical conductivity. Attempts are being made to apply graphene to a transparent display or a flexible display by using these characteristics.

A conventional method for producing a graphene film is described in Patent Publication No. 10-2012-0111659 (a film production method including graphene, published on October 10, 2012).

In the above publication, for mass production, graphene is formed while the catalyst metal film is transferred in one direction in a roll-to-roll method, and the transfer film is applied to one side of the catalyst metal film in which graphene is not formed. It is described with respect to the step of forming, and the mechanical configuration required for each step is described.

Specifically, a winding roller and a transfer roller for winding and transporting a catalytic metal film, and a graphene formation space for depositing graphene by supplying a carbon supply gas to the catalytic metal film are described.

The prior art suggests a roll-to-roll type graphene film manufacturing apparatus, but there is a problem in that the catalyst metal film is damaged due to the difference in roller speed between the feed roller and the take-up roller.

(Document 1) Patent Publication No. 10-2012-0061224 (published on June 13, 2012) (Document 2) Registered Patent Publication No. 10-1262327 (Registered on June 2, 2013) (Document 3) Registered Patent Publication No. 10-1874317 (Registered on June 28, 2018) (Document 4) Registered Patent Publication No. 10-1760653 (Registered on July 18, 2017)

In order to solve the above problems, the present invention is a roll-to-roll method in a manufacturing apparatus for manufacturing a graphene film, a catalytic metal film on which graphene is deposited to be wound on a winding roller by providing a tension control unit in the lower chamber An object of the present invention is to provide an apparatus for manufacturing a roll-to-roll graphene film provided with a tension control unit at the lower portion that can prevent damage to the catalytic metal film by making the tension acting on the film constant.

In addition, the present invention can prevent damage to the catalytic metal film due to torsion, etc. occurring during the movement of the catalytic metal film by providing a guide roller that gives a certain tension while guiding the movement of the catalytic metal film on which the graphene is deposited. An object of the present invention is to provide an apparatus for producing a roll-to-roll graphene film having a tension control unit provided at the lower portion.

In addition, the present invention aims to provide an apparatus for manufacturing a roll-to-roll graphene film having a tension control unit provided at the bottom having a cooling tube capable of lowering the temperature of the film as quickly as possible in the process of discharging the film on which the graphene is deposited. do.

In addition, an object of the present invention is to provide a roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the lower portion capable of preventing the catalytic metal film on which graphene is deposited from sagging due to its own weight.

In order to achieve the above object, the present invention is a unidirectional roll-to-roll graphene film manufacturing apparatus equipped with a tension control unit for depositing graphene while transporting a catalytic metal film in a roll-to-roll manner. In the following, a supply roller for supplying the catalytic metal film to the deposition chamber, an upper direction conversion roller for changing the direction so as to transport the catalyst metal film supplied from the supply roller downward, and the upper direction conversion roller in close contact with the upper direction conversion roller an upper chamber composed of an auxiliary roller for supplying the catalyst metal film in a downward direction while applying a constant tension together with the roller; a deposition chamber connected to a lower portion of the upper chamber and in which graphene is deposited on the catalytic metal film; and a lower direction changing roller for changing the direction of the catalytic metal film transferred from the deposition chamber, and a tension adjusting roller for changing the direction while applying a certain tension to the catalytic metal film transferred from the lower direction changing roller It provides a roll-to-roll graphene film manufacturing apparatus equipped with a tension control unit at the lower part, and a lower chamber comprising a winding roller on which the catalyst metal film transferred from the tension control roller is wound.

In the present invention, the deposition chamber includes: a deposition chamber body composed of a rectangular frame; an upper inclined roller and a lower inclined roller positioned inside the deposition chamber body and conveying the catalyst metal film supplied from the upper chamber while giving tension by tilting it downward at a predetermined angle; a plurality of process gas supply nozzles mounted inside the deposition chamber body for constantly supplying process gases from both sides of the catalytic metal film to deposit graphene on the catalytic metal film transferred downward through the lower inclined roller; heaters mounted on both sides of the process gas supply nozzle inside the deposition chamber body; and a heat-blocking shield mounted around the heater inside the deposition chamber body.

In the present invention, the tension control unit, located inside the lower chamber, the tension control roller for adjusting the tension acting on the catalyst metal film; The tension control roller is mounted on the lower end, the tension adjusting weight is formed on the upper end, a rotation bar to which the rotation shaft is connected to the lower portion of the tension adjusting weight by a predetermined distance; a rotating shaft to which the rotating bar is connected to the front side, and the angle measuring bar is connected to the rear side; an angle measuring bar located outside the lower chamber and connected to the rotating shaft to measure the angle of the rotating bar rotating according to the tension of the catalyst metal film; and a sensor unit mounted on one end and the other end of the angle measuring bar from the outside of the lower chamber to detect a rotation angle according to the rotation of the angle measuring bar.

In the present invention, the angle measuring bar is characterized in that the lower side is made of a long axis bar around the rotation axis, and the upper side is made of a short axis bar.

In the present invention, the angle measuring bar is characterized in that it is formed in a straight or 'L' shape.

The present invention has an effect of preventing damage to the catalytic metal film on which graphene is deposited by providing a tension control unit so that a constant tension can be maintained in the catalytic metal film.

In addition, the present invention has an effect of increasing productivity because heat inside the deposition chamber can be quickly cooled through the cooling tube of the deposition chamber.

In addition, the present invention has an advantage in that it is possible to prevent damage to the catalyst metal film in advance because a tension adjusting unit is provided in the lower chamber and the tension acting on the catalyst metal film can be accurately grasped by the sensor.

In addition, the present invention has an advantage in that it is possible to prevent scratches due to the roller because one surface of the graphene deposited on the catalytic metal film does not come in contact with the roller, so that high-quality graphene can be obtained.

1 is an overall perspective view of an apparatus for manufacturing a roll-to-roll graphene film having a tension control unit provided at a lower portion according to the present invention;
Figure 2 is a perspective view showing an upper chamber according to the present invention.
Figure 3 is a perspective view of a state in which the upper chamber body is removed from the upper chamber of Figure 2;
4 is a perspective view showing a deposition chamber according to the present invention.
5 is a cut-away perspective view showing the connection between the upper chamber and the deposition chamber according to the present invention.
6 is a perspective view of a state in which the deposition chamber body is removed from the deposition chamber according to the present invention;
7 is a perspective view of the lower chamber according to the present invention.
8 is a perspective view of a state in which the lower chamber body of the lower chamber according to the present invention is removed.
Fig. 9 is a rear perspective view of Fig. 8;

Hereinafter, embodiments of the present invention in which the above object can be specifically realized will be described in detail with reference to the accompanying drawings. In the description of the present embodiments, the same names and symbols are used for the same components, and an additional description thereof will be omitted.

1 is an overall perspective view of an apparatus for manufacturing a roll-to-roll graphene film provided with a tension control unit at the lower portion according to the present invention, FIG. 2 is a perspective view showing an upper chamber according to the present invention, and FIG. 3 is an upper chamber of FIG. It is a perspective view with the upper chamber body removed, FIG. 4 is a perspective view showing the deposition chamber according to the present invention, FIG. 5 is a cut-away perspective view showing the connection between the upper chamber and the deposition chamber according to the present invention, and FIG. 6 is this view A perspective view of a state in which the deposition chamber body is removed from the deposition chamber according to the present invention, FIG. 7 is a perspective view of the lower chamber according to the present invention, and FIG. 8 is a perspective view of the lower chamber body of the lower chamber according to the present invention is removed, FIG. 9 is a rear perspective view of FIG. 8 .

1 is an overall perspective view of a roll-to-roll graphene film manufacturing apparatus 1 having a tension control unit provided at a lower portion according to the present invention. As shown in the figure, the graphene film manufacturing apparatus 1 has an upper chamber 10, a deposition chamber 20, a lower chamber 30, and a tension adjusting unit 40 installed in the lower chamber 30. and a support part 50 supporting the entire chamber in the lower part of the lower chamber.

2 to 3 are views of the upper chamber 10 of the graphene film manufacturing apparatus 1 according to the present invention. As shown in FIG. 2 , the upper chamber 10 includes an upper chamber body 11 , a supply roller 12 mounted inside the upper chamber body 11 , and a catalyst metal film transferred from the supply roller 12 . An upper direction conversion roller 13 that changes the direction of (F) to a lower direction, and an auxiliary roller 14 for imparting tension to the catalytic metal film (F) transferred in close contact with the upper direction conversion roller 13 is composed The upper chamber body 11 has an opening 111 in which a door (not shown) is mounted in the front is formed, and the roll on which the catalyst metal film F is wound is fed to the supply roller 12 through the opening 111 . is mounted A through hole 18 is formed in the lower portion of the upper chamber body 11 so that the catalyst metal film can be transferred. 3, the supply roller 12, the upper direction changing roller 13 and the auxiliary roller 14 are mounted on the upper roller support plate 15 on the rear side of the rollers, and the upper roller support plate 15 is mounted inside the upper chamber body 11 . In addition, the supply roller 12, the upper direction changing roller 13 and the auxiliary roller 14 are driven by the motors 16a, 16b, 16c. Since the auxiliary roller 14 is in close contact with the upper direction changing roller 13, the motor cannot be directly mounted on the rear side of the auxiliary roller 14. Accordingly, the auxiliary roller 14 may be driven by a chain or a belt. The chain or belt is mounted in the power transmission unit 17 connected to the motor 16c and is connected to the rotation shaft of the auxiliary roller 14 . The catalyst metal film F is transferred from the supply roller 12 to the deposition chamber 20 through the through hole 18 of the connection body 19 by the upper direction changing roller 13 and the auxiliary roller 14 .

4 to 6 are views of the deposition chamber 20 . As shown in the drawing, the deposition chamber 20 includes a deposition chamber body 21 having a rectangular frame, and a catalyst metal film positioned inside the deposition chamber body 21 and supplied from the upper chamber 10 . Graphene is deposited on the catalytic metal film that is transferred downward through the upper inclined roller 23 and the lower inclined roller 24 and the lower inclined roller 24 that are transferred while giving tension by inclining downward at a certain angle (F). A plurality of process gas supply nozzles 26 for constantly supplying process gas from both sides of the catalyst metal film, heaters 25a and 25b mounted on both sides of the process gas supply nozzle 26, and heaters 25a, 25b) is composed of a heat-blocking shield 22 mounted on the periphery. The catalyst metal film F is transferred to the deposition chamber 20 through the through hole 18, and the upper inclined roller 23 and the lower inclined roller 24 are mounted on the chamber body 21 of the deposition chamber 20. As a result, the catalyst metal film (F) descends downwardly, and is inclined at a certain angle, passes through the lower inclined roller (24), and descends again vertically. The catalyst metal film (F) is brought into symmetrical contact with each other on the upper inclined roller 23 and the lower inclined roller 24, and accordingly, the catalyst metal film (F) is formed by the upper inclined roller 23 and the lower inclined roller 24. F) maintains a predetermined tension. The catalyst metal film (F) enters into the thermal shield 22 through the through hole 221 of the thermal shield 22 as it enters the chamber body 21 of the deposition chamber, and the Graphene on the process gas supplied through the process gas supply nozzle 26 mounted inside is deposited on the catalyst metal film. Heaters 25a and 25b are provided on both sides of the supply nozzle 26 for graphene deposition. The catalytic metal film F on which graphene is deposited is formed in the lower chamber 30 through the through hole 222 formed at the lower end of the thermal shield 22 and the through hole 27 formed at the lower end of the deposition chamber body 21 . ) is transferred to 5 and 6, the corner of the chamber body 21 of the deposition chamber is made of a 'C'-shaped steel frame 211, and a cooling tube for cooling the deposition chamber in the inner space of the frame 211 ( 212a, 212b) are provided. Therefore, the graphene-deposited film can be taken out through rapid cooling of the graphene film manufacturing apparatus 1 after the deposition is completed.

7 and 8 show the lower chamber 30 according to the present invention. The lower chamber 30 includes a lower connection body 35 connected to the deposition chamber 20 , a lower chamber body 31 , and a catalyst transferred from the deposition chamber 20 mounted inside the lower chamber body 31 . A lower direction conversion roller 32 for changing the direction of the metal film, a tension control roller 41 for changing the direction while applying a certain tension to the catalyst metal film transferred from the lower direction conversion roller 32, and a tension control roller It consists of a winding roller (34) on which the catalyst metal film transferred in (41) is wound. Between the lower direction conversion roller 32 and the tension control roller 41, an angle forming roller 33 for giving a certain inclination angle to the catalyst metal film transferred from the lower direction conversion roller 32 may be added. The lower direction changing roller 32 and the winding roller 34 are driven by a motor. When the winding of the catalytic metal film on which the graphene is deposited on the winding roller 34 is completed, cooling water is introduced into the cooling tubes 212a and 212b of the deposition chamber 20 for cooling, and when the cooling is completed, the winding roll is collected do.

8 and 9 show a view of the roller and the tension adjusting unit 40 mounted on the lower chamber (30). The lower direction changing roller 32 , the winding roller 34 , the angle forming roller 33 , and the tension adjusting unit 40 are mounted on the lower roller support plate 36 . The tension control unit 40 includes a tension control roller 41 mounted inside the chamber body 31 of the lower chamber 30 and a tension control roller 41 hinged at the bottom to be rotatably mounted, and the tension at the top A tension adjusting weight 44 for adjustment is mounted, and a rotating bar 42 connected to a rotating shaft 43 is connected to a lower portion of the tension adjusting weight by a predetermined distance, and a rotating bar 42 is connected to the front side, and an angle to the rear side. Measuring the angle of the rotating shaft 43 to which the measuring bar 45 is connected, and the rotating bar 42 located outside the lower chamber 30, connected to the rotating shaft 43 and rotating according to the tension of the catalyst metal film Sensors (46a, 46b) for detecting the rotation angle according to the rotation of the angle measuring bar (45) and the angle measuring bar (45) at one end and the other end of the angle measuring bar (45) from the outside of the lower chamber (30) is made of The sensors 46a and 46b are mounted on the rear side of the lower roller support plate 36 , and are mounted so as to sense an angle at the upper end and the lower end of the angle measuring bar 45 . The angle measuring bar 45 has a lower side of the rotation shaft 43 as a center, and a long axis bar, and an upper side of the short axis bar. The shape of the angle measuring bar 45 may be formed in a 'L' shape or a straight shape. That is, the sensor 46, the upper sensor 46a measures the rotation angle of the short axis bar, and the lower sensor 46b measures the rotation angle of the long axis bar. The rotation angle of the long axis bar detects minute rotation, and the rotation angle of the short axis bar is larger than the rotation angle of the long axis bar, so a large rotation is detected. The sensed signal is transmitted to a controller (not shown) of the graphene film manufacturing apparatus 1, and the controller controls the driving of the roller by controlling the driving of the motor to prevent damage to the catalytic metal film.

It is obvious to those of ordinary skill in the art that the present invention is not limited to the above embodiments and can be variously modified and modified within the scope without departing from the technical gist of the present invention. will be.

1: Graphene film manufacturing device
10: upper chamber 11: upper chamber body
12: supply roller 13: upper direction conversion roller
14: auxiliary roller 15: upper roller support plate
16 (16a, 16b, 16c): Motor 17: Power transmission unit
18: through hole 19: connection body
20: deposition chamber 21: deposition chamber body
22: thermal shield 23: upper inclined roller
24: lower inclined roller 25 (25a, 25b): heater
26: process gas supply nozzle 27: through hole
30: lower chamber 31: lower chamber body
32: lower direction conversion roller 33: angle forming roller
34: winding roller 35: lower connection body
36: lower roller support plate
40: tension control unit 41: tension control roller
42: rotation bar 43: rotation shaft
44: tension control weight 45: angle measuring bar
46 (46a, 46b): sensor

Claims (5)

In the unidirectional roll-to-roll graphene film manufacturing apparatus provided with a lower tension control unit for depositing graphene while transferring the catalytic metal film in a roll-to-roll manner,
A supply roller for supplying the catalytic metal film to the deposition chamber, an upper direction conversion roller for changing the direction so as to feed the catalyst metal film supplied from the supply roller downward, and the upper direction conversion roller in close contact with the upper direction conversion roller an upper chamber composed of auxiliary rollers for supplying the catalyst metal film in a downward direction while applying a constant tension;
a deposition chamber connected to a lower portion of the upper chamber and in which graphene is deposited on the catalytic metal film; and
A tension control unit comprising a lower direction changing roller for changing the direction of the catalytic metal film transferred from the deposition chamber, and a tension adjusting roller for changing the direction while applying a certain tension to the catalytic metal film transferred from the lower direction changing roller and a lower chamber composed of a winding roller on which the catalytic metal film transferred from the tension control roller is wound;
The tension control unit, located inside the lower chamber, the tension control roller for adjusting the tension acting on the metal catalyst film; The tension control roller is mounted on the lower end, the tension adjusting weight is formed on the upper end, a rotation bar to which the rotation shaft is connected to the lower portion of the tension adjusting weight by a predetermined distance; a rotating shaft to which the rotating bar is connected to the front side, and the angle measuring bar is connected to the rear side; In order to measure the angle of a rotating bar located outside the lower chamber, connected to the rotating shaft and rotating according to the tension of the catalyst metal film, the lower side of the rotating shaft is made of a long axis bar, and the upper side is made of a short axis bar. angle measuring bar; and a sensor unit mounted on one end and the other end of the angle measuring bar from the outside of the lower chamber to detect a rotation angle according to the rotation of the angle measuring bar; a roll-to-roll graph with a tension adjusting unit provided in the lower part, characterized in that it consists of Pin film manufacturing equipment.
According to claim 1,
The deposition chamber,
a deposition chamber body composed of a rectangular frame;
an upper inclined roller and a lower inclined roller positioned inside the deposition chamber body and conveying the catalytic metal film supplied from the upper chamber by inclining downward at a predetermined angle while giving tension;
a plurality of process gas supply nozzles mounted inside the deposition chamber body for constantly supplying process gases from both sides of the catalytic metal film to deposit graphene on the catalytic metal film transferred downward through the lower inclined roller;
heaters mounted on both sides of the process gas supply nozzle inside the deposition chamber body; and
a thermal barrier shield mounted around the heater inside the deposition chamber body;
A roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the lower portion, characterized in that it consists of.
delete delete 3. The method of claim 2,
The angle measuring bar is a roll-to-roll graphene film manufacturing apparatus provided with a tension control unit at the bottom, characterized in that formed in a straight or 'L' shape.

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