CN117007840A

CN117007840A - Cantilever type probe card device and focusing probe thereof

Info

Publication number: CN117007840A
Application number: CN202210473776.XA
Authority: CN
Inventors: 苏伟志; 曾照晖; 郑皓严; 赖融暘
Original assignee: Taiwan Zhonghua Precision Measurement Technology Co ltd
Current assignee: Taiwan Zhonghua Precision Measurement Technology Co ltd
Priority date: 2022-04-29
Filing date: 2022-04-29
Publication date: 2023-11-07

Abstract

The invention discloses a cantilever type probe card device and a focusing type probe thereof. The focusing probe comprises a welding section, a testing section, two outer elastic arms arranged at intervals and a focusing part. The test section and the welding section are arranged at intervals in a configuration direction, and the test section is provided with a needle point and an outer edge and an inner edge which are respectively positioned at two opposite sides of the needle point. Each outer spring arm has two ends that connect the welding segment and the inner edge of the test segment, respectively. The focusing part is connected with the inner edge of the test section and is positioned between the needle point and the two outer elastic arms. The focusing part is provided with a plurality of focusing points on one side far away from the two outer elastic arms. Accordingly, the focusing probe can effectively reduce the probability of misjudgment of the position of the needle tip by the arrangement of the focusing part.

Description

Cantilever type probe card device and focusing probe thereof

Technical Field

The present invention relates to probe cards, and more particularly, to a cantilever type probe card apparatus and a focusing probe thereof.

Background

The prior cantilever probe card comprises a base and a plurality of cantilever probes fixed on the base, and each cantilever probe comprises a needle section and a test section which is connected with the needle section approximately vertically. However, since a needle tip of the test section is adjacent to the needle body section and the size of the needle tip is too small (e.g., less than 5 microns), it is easy for the detection device to misjudge the position of the needle tip (e.g., the needle body section near the needle tip reflects light, which would affect the focusing of the needle tip).

Accordingly, the present inventors considered that the above-mentioned drawbacks could be improved, and have intensively studied and combined with the application of scientific principles, and finally have proposed an invention which is reasonable in design and effectively improves the above-mentioned drawbacks.

Disclosure of Invention

An objective of the present invention is to provide a cantilever type probe card device and a focusing probe thereof, which can effectively improve the defects of the existing cantilever type probe card.

The embodiment of the invention discloses a cantilever type probe card device, which comprises: a substrate; and a plurality of focus type probes fixed to the substrate, each focus type probe including: a welding section having a first end and a second end located at opposite sides, and the first end being welded to the substrate; a test section disposed at a distance from the welding section in a direction of arrangement, the test section having a needle tip and an outer edge and an inner edge on opposite sides; two outer elastic arms each having two ends respectively connecting the second end of the welding section and the inner edge of the test section, and arranged at a distance from each other; the focusing part is connected with the inner edge and positioned between the needle tip and the two outer elastic arms; the focusing part is provided with a plurality of focusing points on one side far away from the two outer elastic arms; in each focusing probe, the needle tip and the focusing points can form an observation point in the observation operation of a detection device, so as to know the position of the needle tip.

Preferably, in each focusing probe, the tip has a width not greater than 5 microns in the arrangement direction, and the tip is spaced apart from an adjacent focusing point by a predetermined distance of 100-400 microns in the arrangement direction.

Preferably, in each focusing probe, a plurality of focusing points of the focusing part have different shapes so as to form observation points with different sizes in the observation operation of the detection device.

Preferably, the needle tip is more proximal to the outer edge than the inner edge, and the inner edge defines a gap between the needle tip and an adjacent pair of foci.

Preferably, each focusing probe further comprises at least one inner elastic arm located between the two outer elastic arms, and two ends of the at least one inner elastic arm are respectively connected to the second end of the welding section and the inner edge of the testing section.

Preferably, at least one of the inner resilient arms has a predetermined thickness that is equivalent to the thickness of either end of each of the outer resilient arms.

Preferably, the thickness of at least one of the two outer elastic arms is gradually increased from the two ends toward each other.

Preferably, the thickness of at least one of the two outer elastic arms tapers from the two ends toward each other.

Preferably, in each focusing probe, one end of the focusing part far from the inner edge is connected with an adjacent outer elastic arm so as to jointly enclose and form a closed space.

The embodiment of the invention also discloses a focusing probe of the cantilever type probe card device, which comprises: a welding section having a first end and a second end located at opposite sides, and the first end is used for welding on a substrate; a test section disposed at a distance from the welding section in a direction of arrangement, the test section having a needle tip and an outer edge and an inner edge on opposite sides; two outer elastic arms each having two ends respectively connecting the second end of the welding section and the inner edge of the test section, and arranged at a distance from each other; the focusing part is connected with the inner edge and positioned between the needle tip and the two outer elastic arms; the focusing part is provided with a plurality of focusing points on one side far away from the two outer elastic arms.

In summary, according to the cantilever-type probe card device and the focusing-type probe thereof disclosed in the embodiments of the present invention, the focusing portion (e.g., the focusing portion is connected to the inner edge and located between the tip and the two outer elastic arms, and the focusing portion is formed with a plurality of focusing points on a side away from the two outer elastic arms), so as to effectively reduce the probability of misjudging the position of the tip by the detection device.

For a further understanding of the nature and the technical aspects of the present invention, reference should be made to the following detailed description of the invention and the accompanying drawings, which are included to illustrate and not to limit the scope of the invention.

Drawings

Fig. 1 is a schematic perspective view of a cantilever-type probe card apparatus according to a first embodiment of the present invention.

Fig. 2 is a schematic plan view of the cantilever probe of fig. 1.

Fig. 3 is a schematic plan view of another embodiment of the cantilever probe of fig. 1.

Fig. 4 is a schematic perspective view of a cantilever-type probe card apparatus according to a second embodiment of the present invention.

Fig. 5 is a schematic plan view of the cantilever probe of fig. 4.

Fig. 6 is a schematic plan view of the cantilever probe of fig. 5 pressed against an object to be measured.

Fig. 7 is a schematic plan view of another embodiment of a cantilever probe according to the second embodiment of the present invention.

Fig. 8 is a schematic plan view of the cantilever probe of fig. 7 pressed against an object to be measured.

Fig. 9 is a schematic plan view of a cantilever probe according to a second embodiment of the present invention.

Fig. 10 is a schematic plan view of a focusing probe according to a third embodiment of the present invention, in which a thickened outer elastic arm is formed.

Fig. 11 is a schematic plan view of a spring arm type probe according to a third embodiment of the present invention, in which a thickened outer spring arm is formed.

Fig. 12 is a schematic plan view of a focusing probe according to a third embodiment of the present invention, in which a thin outer elastic arm is formed.

Fig. 13 is a schematic plan view of a spring arm probe according to a third embodiment of the present invention, in which a thin outer spring arm is formed.

Detailed Description

The following specific examples are presented to illustrate the embodiments of the present invention disclosed herein with respect to a cantilever-type probe card apparatus and a focusing probe thereof, and those skilled in the art will appreciate the advantages and effects of the present invention from the disclosure herein. The invention is capable of other and different embodiments and its several details are capable of modifications and various other uses and applications, all of which are obvious from the description, without departing from the spirit of the invention. The drawings of the present invention are merely schematic illustrations, and are not intended to be drawn to actual dimensions. The following embodiments will further illustrate the related art content of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.

It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or signal from another signal. In addition, the term "or" as used herein shall include any one or combination of more of the associated listed items as the case may be.

Example one

Please refer to fig. 1 to 3, which illustrate a first embodiment of the present invention. The embodiment discloses a cantilever probe card device 100, which comprises a substrate 2 and a plurality of cantilever probes 1 fixed on the substrate 2. That is, any probe that is not cantilever-type is different from the cantilever probe 1 disclosed in the present embodiment.

It should be noted that, in this embodiment, the cantilever probe 1 may be referred to as a focusing probe 1a, and the configurations of the focusing probes 1a are substantially the same, so that only a single focusing probe 1a will be described below for easy understanding, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the configuration of a plurality of the focus type probes 1a may be slightly different.

In the present embodiment, the cantilever-type probe card apparatus 100 is described with a plurality of focusing probes 1a fixed to the substrate 2, but not limited thereto. For example, in other embodiments of the invention not shown, the focusing probe 1a may be used alone (e.g., by vending) or in combination with other components.

As shown in fig. 2, the focusing probe 1a is formed as a single piece in this embodiment, and the cross section of the focusing probe 1a is generally rectangular. In this embodiment, the focusing probe 1a includes a soldering section 11, a testing section 12, two outer elastic arms 13 connecting the soldering section 11 and the testing section 12, at least one inner elastic arm 14 between the two outer elastic arms 13, and a focusing portion 15 connected to the testing section 12, but the invention is not limited thereto. For example, in other embodiments of the invention not shown, the focusing probe 1a may omit at least one of the inner elastic arms 14.

Further, the soldering section 11 has a first end 111 and a second end 112 located at opposite sides, and the focusing probe 1a is soldered to the substrate 2 by the first end 111 of the soldering section 11. In this embodiment, the welding manner between the first end 111 and the substrate 2 may be adjusted and changed according to design requirements, for example: the invention is not limited in this regard as to surface mount technology (surface mount technology, SMT), pin-in-paste (PIP) form, or other soldering forms.

The test sections 12 are arranged at intervals from the soldering sections 11 in an arrangement direction D, which in the present embodiment is parallel to the surface of the substrate 2. Wherein the test section 12 has a needle tip 121 and an outer edge 122 and an inner edge 123 on opposite sides of the needle tip 121. Wherein the needle tip 121 has a width in the arrangement direction D of no more than 5 micrometers (μm), and the needle tip 121 may be more adjacent to the outer edge 122 than the inner edge 123 as shown in fig. 2; alternatively, the needle tip 121 may be located at the substantial center of the inner edge 123 and the outer edge 122 as shown in FIG. 3. That is, the needle tip 121 is preferably excluded from being adjacent to the inner edge 123 in this embodiment.

As shown in fig. 2, each of the outer elastic arms 13 has two ends 131 that connect the second end 112 of the welding section 11 and the inner edge 123 of the test section 12, respectively, and the two outer elastic arms 13 are arranged at a distance from each other along a test direction T perpendicular to the arrangement direction D. In more detail, each of the outer elastic arms 13 is in a straight strip shape in the present embodiment and is connected to the test section 12 and the welding section 11 substantially vertically, and the length of each of the outer elastic arms 13 is at least 1.5 times the length of the test section 12, but the invention is not limited thereto.

The number of at least one of the inner resilient arms 14 is illustrated as one in the present embodiment, but in other embodiments not shown in the present invention, the number of the inner resilient arms 14 may be plural. Wherein both ends of at least one of the inner elastic arms 14 are respectively connected to the second end 112 of the welding section 11 and the inner edge 123 of the test section 12, and at least one of the inner elastic arms 14 is respectively arranged at intervals from two of the outer elastic arms 13 along the test direction T. Furthermore, at least one of the inner elastic arms 14 is also in a straight strip shape in the present embodiment and is connected to the test section 12 and the welding section 11 substantially vertically, and the length of at least one of the inner elastic arms 14 is at least 1.5 times the length of the test section 12, but the invention is not limited thereto.

The focusing part 15 is connected to the inner edge 123 of the test section 12 and is located between the needle tip 121 and the two outer elastic arms 13. Stated another way, the focusing portion 15 is located substantially within the space enclosed by the inner edge 123 of the test section 12 and one of the outer resilient arms 13 adjacent to the needle tip 121.

In the present embodiment, one end of the focusing portion 15 is connected to the inner edge 123, and the other end of the focusing portion 15 is a free end, but the invention is not limited thereto. For example, as shown in fig. 3, an end of the focusing portion 15 away from the inner edge 123 (e.g., the right end of the focusing portion 15 in fig. 3) is connected to an adjacent one of the outer elastic arms 13 to jointly enclose a closed space, thereby effectively reducing noise that may be generated by the focusing portion 15.

In more detail, as shown in fig. 2, the focusing portion 15 is formed with a plurality of focusing points 151 on a side away from the two outer elastic arms 13 (e.g. on a lower side of the focusing portion 15 in fig. 2), and the needle tip 121 and the adjacent one of the focusing points 151 are preferably separated by a predetermined distance D151 between 100 micrometers and 400 micrometers in the arrangement direction D, and the distance between any two adjacent focusing points 151 is different from the predetermined distance D151.

As described above, each of the needle tip 121 and the focal points 151 can form an observation point in the observation operation of a detecting device 200 (e.g. a camera) for knowing the position of the needle tip 121 (i.e. pushing the actual position of the needle tip 121 back and forth through the observation points corresponding to the focal points 151). Accordingly, the cantilever-type probe card apparatus 100 and the focusing-type probe 1a according to the embodiments of the present invention can effectively reduce the probability of misjudging the position of the probe tip 121 by the detecting device 200 by the arrangement of the focusing portion 15.

Further, the focusing points 151 of the focusing portion 15 may have different shapes (as shown in fig. 2 and 3), so as to form different sizes of the observation points in the observation operation of the detecting apparatus 200, thereby facilitating to determine the actual position of the needle tip 121 more quickly and accurately. It should be noted that the shape of the focusing portion 15 may be adjusted and changed according to the design requirement, and is not limited to fig. 2 and 3 of the present embodiment.

In addition, when the needle tip 121 may be located closer to the outer edge 122 than the inner edge 123 as shown in fig. 2, the inner edge 123 of the test section 12 preferably has a notch 124 formed between the needle tip 121 and the adjacent one of the pair of foci 151, so as to disperse the stress applied to the test section 12, thereby reducing the probability of breakage of the test section 12.

Example two

Please refer to fig. 4 to fig. 9, which illustrate a second embodiment of the present invention. Since this embodiment is similar to the first embodiment, the same parts of the two embodiments (e.g. the connection between the soldering section 11 of the cantilever probe 1 and the substrate 2, the basic connection relationship between the components of the cantilever probe 1) will not be described in detail, and the difference between this embodiment and the first embodiment is mainly that: the cantilever probe 1 is constructed.

Specifically, as shown in fig. 5 and 6, the cantilever probe 1 may also be referred to as a spring arm type probe 1b in the present embodiment, and the configurations of a plurality of spring arm type probes 1b are substantially the same, so that only the configuration of a single spring arm type probe 1b will be described below for ease of understanding, but the present invention is not limited thereto. For example, in other embodiments of the invention not shown, the configuration of the plurality of the arm-spring probes 1b may also be slightly different.

In the present embodiment, the cantilever-type probe card apparatus 100 is described with the plurality of spring-arm-type probes 1b fixed to the substrate 2, but the invention is not limited thereto. For example, in other embodiments of the invention not shown, the arm-spring probe 1b may be used alone (e.g., by vending) or in combination with other components.

Further, one of the two outer elastic arms 13 is adjacent to the needle tip 121 and defined as a first outer elastic arm 13a, and the other of the two outer elastic arms 13 is defined as a second outer elastic arm 13b, and the length of the first outer elastic arm 13a is greater than the length of the second outer elastic arm 13 b. The length of the first outer elastic arm 13a and the length of the second outer elastic arm 13b preferably have a length difference between 10 micrometers and 200 micrometers, but the invention is not limited thereto.

In more detail, the second end 112 of the welding segment 11 has a layout edge 1121 non-parallel to the arrangement direction D (or non-parallel to the substrate 2) such that the inner edge 123 is spaced apart from the layout edge 1121 by different distances in the arrangement direction D. In the present embodiment, the layout edge 1121 is inclined and forms a layout angle σ1121 between 10 degrees and 85 degrees with the arrangement direction D parallel to the board surface of the substrate 2, but the present invention is not limited thereto.

Furthermore, any one of the outer resilient arms 13 is non-parallel to the arrangement direction D (or non-parallel to the substrate 2), and the needle tip 121 of the test section 12 is non-perpendicular to the arrangement direction D (or non-perpendicular to the substrate 2). In the present embodiment, a first angle σ1 between any one of the outer elastic arms 13 and the arrangement direction D is between 0 degrees and 75 degrees, and a second angle σ2 between the test section 12 and any one of the outer elastic arms 13 is between 45 degrees and 150 degrees, but the present invention is not limited thereto.

As described above, when the tip 121 of each arm-spring probe 1b is pressed against the object 300 to be tested, at least one of the two outer elastic arms 13 is elastically deformed, so as to effectively absorb the reaction force and effectively promote the displacement D121 of the tip 121 in the arrangement direction D to be smaller than 20 μm.

It should be noted that, when the tip 121 is pressed against the object 300, the distance that the arm-spring probe 1b moves toward the object 300 along the testing direction T is preferably between 80 micrometers and 200 micrometers. In the process of moving the arm-spring type probe 1b towards the object 300 to be tested, the test section 12 can rotate towards the position of the needle point 121 perpendicular to the arrangement direction D, so as to effectively absorb (or reduce) the deformation amount required by the two outer elastic arms 13, thereby helping to reduce the displacement D121 of the needle point 121.

In addition, although the structure of the arm-spring type probe 1b is described with reference to fig. 5 and 6, the effect of reducing the displacement D121 can be achieved to a large extent, and the present invention is not limited thereto. That is, the structure of the spring arm type probe 1b can be adjusted and changed according to the design requirement; as shown in fig. 7 and 8, any one of the outer elastic arm 13 and at least one of the inner elastic arms 14 may be parallel to the arrangement direction D (or the substrate 2), the needle tip 121 of the test section 12 may be perpendicular to the arrangement direction D (or the substrate 2), and the focusing portion 15 may be omitted; alternatively, as shown in FIG. 9, the layout edge 1121 may be non-sloped (e.g., stepped). In the present embodiment, any of the cantilever probes 1 having the focusing portion 15 formed thereon may be also referred to as a focusing probe.

Example III

Please refer to fig. 10 to 13, which is a third embodiment of the present invention. Since the present embodiment is similar to the first and second embodiments, the same parts of the first embodiment will not be described again, and the differences between the first and second embodiments are described below:

in fig. 10 and 11 of the present embodiment, the thickness of at least one of the two outer elastic arms 13 (e.g., the first outer elastic arm 13 a) is gradually increased from the two end portions 131 toward each other. Wherein at least one of said inner elastic arms 14 has a preset thickness T14, which is equivalent to the thickness of any one of said ends 131 of each of said outer elastic arms 13.

In fig. 12 and 13 of the present embodiment, the thickness of at least one of the two outer elastic arms 13 (e.g., the first outer elastic arm 13 a) tapers from the two end portions 131 toward each other. Wherein at least one of said inner elastic arms 14 has a preset thickness T14, which is equivalent to the thickness of any one of said ends 131 of each of said outer elastic arms 13.

That is, in the case where the thickness of at least one of the two outer elastic arms 13 is changed, the thickness of at least one of the inner elastic arms 14 and the thickness of any one of the end portions 131 are maintained as constant as possible (e.g., maintained at the preset thickness T14), thereby reducing the thickness change of any one of the outer elastic arms 13 from having an excessive influence on the overall operability.

Accordingly, the cantilever probe 1 (e.g., the focusing probe 1a or the spring arm probe 1 b) of the cantilever probe card apparatus 100 can adjust its structural characteristics by the thickness variation of at least one of the outer spring arms 13 to meet different testing requirements.

[ technical Effect of embodiments of the invention ]

In summary, the cantilever-type probe card device and the focusing-type probe disclosed in the embodiments of the present invention can effectively reduce the probability of misjudgment of the position of the probe tip by the detection device by the configuration of the focusing part (for example, the focusing part is connected to the inner edge and located between the probe tip and the two outer elastic arms, and the focusing part is formed with a plurality of focusing points on one side away from the two outer elastic arms).

Furthermore, the cantilever-type probe card device and the spring arm-type probe disclosed in the embodiments of the present invention can be configured by the structure design of the spring arm-type probe (for example, the length of the first outer elastic arm is greater than that of the second outer elastic arm), so that when the tip is pressed against the object to be tested, at least one of the two outer elastic arms is elastically deformed, so as to effectively absorb the reaction force, and effectively promote the displacement of the tip in the configuration direction to be less than 20 micrometers.

The foregoing disclosure is only illustrative of the preferred embodiments of the present invention and is not to be construed as limiting the scope of the invention, as all changes which come within the meaning and range of equivalency of the description and drawings are therefore intended to be embraced therein.

Claims

1. A cantilever probe card apparatus, the cantilever probe card apparatus comprising:

a substrate; and

a plurality of focus type probes fixed to the substrate, and each of the focus type probes includes:

a welding section having a first end and a second end located at opposite sides, and the first end being welded to the substrate;

a test section disposed at a distance from the welding section in a direction of arrangement, the test section having a needle tip and an outer edge and an inner edge on opposite sides;

two outer elastic arms each having two ends respectively connecting the second end of the welding section and the inner edge of the test section, and arranged at a distance from each other; a kind of electronic device with high-pressure air-conditioning system

A focusing part connected to the inner edge and located between the needle tip and the two outer elastic arms; the focusing part is provided with a plurality of focusing points on one side far away from the two outer elastic arms;

in each focusing probe, the needle tip and the focusing points can form an observation point in the observation operation of a detection device, so as to know the position of the needle tip.

2. The cantilever type probe card apparatus of claim 1, wherein in each of the focusing type probes, the tip has a width of not more than 5 μm in the arrangement direction, and the tip is spaced apart from the adjacent one of the focusing points by a predetermined distance of 100 μm to 400 μm in the arrangement direction.

3. The cantilever-type probe card apparatus of claim 2, wherein the plurality of focusing points of the focusing part have different shapes in each of the focusing-type probes, so as to form the observation points of different sizes in the observation operation of the inspection device.

4. The cantilever probe card apparatus of claim 1, wherein the tip is positioned further adjacent to the outer edge than the inner edge, and the inner edge defines a gap between the tip and an adjacent one of the focal points.

5. The cantilever probe card apparatus of claim 1, wherein each of the focusing probes further comprises at least one inner spring arm disposed between two of the outer spring arms, and wherein two ends of the at least one inner spring arm are connected to the second end of the soldering section and the inner edge of the test section, respectively.

6. The cantilever probe card apparatus of claim 5, wherein at least one of said inner spring arms has a predetermined thickness equivalent to the thickness of any one of said ends of each of said outer spring arms.

7. The cantilever probe card apparatus of claim 6, wherein the thickness of at least one of the two outer resilient arms increases progressively from the two ends toward each other.

8. The cantilever probe card apparatus of claim 6, wherein at least one of the two outer resilient arms has a thickness that tapers from the two ends toward each other.

9. The cantilever type probe card apparatus of claim 1, wherein in each of the focusing probes, an end of the focusing portion remote from the inner edge is connected to an adjacent one of the outer elastic arms to jointly enclose a closed space.

10. A focus probe of a cantilever-type probe card apparatus, the focus probe of the cantilever-type probe card apparatus comprising:

a welding section having a first end and a second end located at opposite sides, and the first end is used for welding on a substrate;

two outer elastic arms each having two ends respectively connecting the second end of the welding section and the inner edge of the test section, and arranged at a distance from each other; and

a focusing part connected to the inner edge and located between the needle tip and the two outer elastic arms; the focusing part is provided with a plurality of focusing points on one side far away from the two outer elastic arms.