CN117007511A - Optical detection system based on laser light source and laser optical system - Google Patents
Optical detection system based on laser light source and laser optical system Download PDFInfo
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- CN117007511A CN117007511A CN202211033799.5A CN202211033799A CN117007511A CN 117007511 A CN117007511 A CN 117007511A CN 202211033799 A CN202211033799 A CN 202211033799A CN 117007511 A CN117007511 A CN 117007511A
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- 238000001514 detection method Methods 0.000 title claims abstract description 81
- 230000003287 optical effect Effects 0.000 title claims abstract description 76
- 238000005286 illumination Methods 0.000 claims abstract description 26
- 238000003384 imaging method Methods 0.000 claims abstract description 26
- 238000002073 fluorescence micrograph Methods 0.000 claims abstract description 20
- 238000001917 fluorescence detection Methods 0.000 claims abstract description 9
- 239000000835 fiber Substances 0.000 claims description 19
- 239000013307 optical fiber Substances 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 12
- 230000005284 excitation Effects 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 4
- 239000000084 colloidal system Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000265 homogenisation Methods 0.000 description 3
- 241001270131 Agaricus moelleri Species 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6402—Atomic fluorescence; Laser induced fluorescence
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/04—Batch operation; multisample devices
- G01N2201/0407—Batch operation; multisample devices with multiple optical units, e.g. one per sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/061—Sources
- G01N2201/06113—Coherent sources; lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/10—Scanning
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- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
An optical detection system based on a laser light source comprises at least one laser light source device, at least one sensing device and an image detection device. The laser light source device provides laser to the target object through the illumination light path, so that the target object generates fluorescence. The sensing device receives fluorescence generated from the target object via the imaging light path to generate a fluorescence image. The image detection device is connected to the sensing device and is used for receiving and analyzing the fluorescence image so as to obtain a fluorescence detection result. A laser optical system is also provided.
Description
Technical Field
The invention relates to an optical detection system based on a laser light source and a laser optical system.
Background
With the progress of the automation industry, automated optical inspection (Automated Optical Inspection, AOI) is widely used in industrial production instead of manual inspection. In general, automatic optical detection is to acquire a surface image of a target object by a camera and then analyze defects such as abnormal objects and image anomalies by using an image processing technique. The fluorescence detection uses the organic matters in the target object to generate fluorescence, which can provide higher detection quality, thus becoming one of the options of automatic optical detection. For example, the transparent colloid can clearly show the appearance of the colloid by fluorescence generated after the colloid is irradiated with excitation light.
In addition, in the use of the light source for automatic optical detection, the laser light source can provide light with a wavelength range close to that of a single light source, so that the energy conversion efficiency of fluorescence is higher, and the laser light source can be used as a light source with better fluorescence detection. However, the laser light has good coherence, so that the laser light is easy to generate a spot (speckle) pattern (i.e., a pattern with uneven brightness) on the target object due to interference phenomenon during the transmission. Therefore, the use of the laser light source causes poor image quality, thereby affecting the detection result after image analysis.
Disclosure of Invention
An object of the present invention is to provide an optical detection system based on a laser light source.
Another object of the present invention is to provide a laser optical system, which can effectively reduce the flare phenomenon of the excitation light irradiated on the target object, so that the imaging quality is better, and the reliability of the detection result is improved.
An embodiment of the invention provides an optical detection system based on a laser light source, which comprises at least one laser light source device, at least one sensing device and an image detection device. The laser light source device provides laser to the target object through the illumination light path, so that the target object generates fluorescence. The sensing device receives fluorescence generated from the target object via the imaging light path to generate a fluorescence image. The image detection device is connected to the sensing device and is used for receiving and analyzing the fluorescence image so as to obtain a fluorescence detection result.
An embodiment of the invention provides an optical detection system based on a laser light source, which comprises an objective lens, a laser light source device, a light source filter module, a line scanning camera, a sensing device filter module and an image detection device. The objective lens images the target object via an imaging optical path. The laser light source device provides laser to the target object through the objective lens via the illumination light path, so that the target object generates fluorescence. The light source filter module passes the excitation light wavelength component of the laser to the target object through the illumination light path. Via the imaging light path, the line scan camera receives fluorescence from the object through the objective lens to obtain a fluorescence image. The sensing device filter module passes wavelength components of the fluorescence through the imaging light path, thereby generating a fluorescence image. The image detection device is connected to the line scanning camera and receives and analyzes the fluorescence image to obtain a fluorescence detection result.
An embodiment of the present invention provides a laser optical system including a light emitting unit, a homogenizing fiber, and a high frequency oscillator. The light-emitting unit provides laser to the target object through the illumination light path, so that the laser generates an image of the target object on the sensing device. The homogenizing fiber receives and transmits the laser light via the illumination light path. The high-frequency oscillator is arranged at the light inlet end of the homogenizing optical fiber and vibrates the homogenizing optical fiber, so that light spots on the target object image are reduced.
Based on the above, in the optical detection system and the laser optical system according to an embodiment of the present invention, besides homogenizing the laser beam by using the homogenizing fiber, the transmission path of the laser beam in the homogenizing fiber is not fixed by using the high-frequency oscillator, so as to suppress the interference effect of the laser beam, further suppress the flare on the target image, and improve the reliability of the detection result.
Drawings
FIG. 1 is a schematic diagram of an optical detection system according to a first embodiment of the present invention;
FIG. 2 is a schematic view of the laser light source device of FIG. 1;
FIG. 3A is a schematic diagram of an optical detection system according to a second embodiment of the present invention;
FIG. 3B is a schematic diagram of one of the objective lens systems of FIG. 3A;
FIG. 4 is a schematic diagram of an optical detection system according to a third embodiment of the present invention;
fig. 5 is a schematic diagram of an optical detection system according to a fourth embodiment of the present invention.
Detailed Description
Fig. 1 is a schematic diagram of an optical detection system according to a first embodiment of the present invention. Referring to fig. 1, an embodiment of the present invention provides a laser light source-based optical detection system 10 (or a laser optical system) including at least one laser light source device 110, at least one sensing device 200, and an image detection device 300.
Fig. 2 is a schematic view of the laser light source device in fig. 1. Referring to fig. 1 and 2, in the present embodiment, the laser light source device 110 includes a light emitting unit 114, a homogenizing fiber 120, and a high frequency oscillator 130. The light emitting unit 114 includes a gaussian distributed laser light source. The light emitting unit 114 is configured to provide a laser beam L onto the target W via the illumination light path EO, so that the laser beam L generates an image of the target on the sensing device 200. The laser light L may be red light, green light, blue light, UV light, IR light, or other color light. The target W includes, but is not limited to, for example, a semiconductor device, a semiconductor wafer, a semiconductor chip, a circuit board, or a display panel.
In the present embodiment, the homogenizing fiber 120 is connected to the light emitting unit 114. The homogenizing fiber 120 receives and transmits the laser light L from the light emitting unit 114 via the illumination light path EO. The high frequency oscillator 130 is disposed at the light entrance end 120S1 of the homogenizing optical fiber 120, and vibrates the homogenizing optical fiber 120, thereby reducing the light spot on the target image. The homogenizing Fiber 120 may be a multimode Fiber (Multi-mode Fiber), a Fiber roughened at the light entrance end 120S1 or the light exit end 120S2, or a Fiber spliced by sub-fibers with different diameters. The high-frequency oscillator 130 may be an oscillator made of a piezoelectric material (piezoelectric material), but the invention is not limited thereto.
Referring to fig. 1, in the present embodiment, the sensing device 200 receives the laser light R reflected from the target W via the imaging light path IO to generate an image of the target. Types of sensing device 200 may include a Line Scan Camera (Line Scan Camera) and/or a Area Scan Camera (Area Scan Camera), among others. In one embodiment, the line scan camera can be used for high-precision detection, and the surface scan camera can be used for rechecking, so that the functions of image detection and image rechecking are realized on the same system.
In the present embodiment, the image detection device 300 is connected to the sensing device 200, and is used for receiving and analyzing the target image to obtain the image detection result. The image detection apparatus 300 is, for example, a central processing unit (central processing unit, CPU), a microprocessor (microprocessor), a digital signal processor (digital signal processor, DSP), a programmable processing apparatus, a programmable logic device (programmable logic device, PLD), or other similar apparatus or a combination thereof, which is not limited by the present invention. Further, in an embodiment, the functions of the image detection apparatus 300 may be implemented as a plurality of program codes. These program codes are stored in a memory and executed by the image detection device 300. Alternatively, in an embodiment, the functions of the image detection apparatus 300 may be implemented as one or more circuits. The present invention is not limited to implementation of the functions of the image detection apparatus 300 in software or hardware.
In one embodiment, the reflected laser light R may be fluorescence (e.g., fluorescence F shown in fig. 3A). That is, the laser light L irradiates the target W to generate fluorescence, and the sensing device 200 receives the fluorescence generated from the target W to generate a fluorescence image. The image detection device 300 is connected to the sensing device 200 for receiving and analyzing the fluorescence image to obtain a fluorescence detection result. The target W may further include, but is not limited to, for example, a semiconductor device, a semiconductor wafer, a semiconductor chip, a circuit board, a display panel, or other organic matter-containing objects. For example, the laser light L may be ultraviolet light or blue light, and the target W may convert the ultraviolet light (laser light L) into blue light (fluorescence F) or may convert the blue light (laser light L) into green light (fluorescence F), but the invention is not limited thereto.
In this embodiment, the optical detection system 10 further includes a beam splitter 140. The beam splitter 140 directs the laser light L onto the target W from the laser light source device 110 via the illumination light path EO, and directs the reflected laser light R (or fluorescence) from the target W to the sensing device 200 via the imaging light path IO.
Based on the above, in the optical detection system 10 according to an embodiment of the present invention, in addition to the homogenization of the laser light L by the homogenization fiber 120, the transmission path of the laser light L within the homogenization fiber 120 is not fixed by the high-frequency oscillator 130 to suppress the interference effect of the laser light L, thereby further suppressing the flare on the target object image. In one embodiment, the laser light source device 110 includes a gaussian-distributed laser light source 112, so that the laser light L forms a flat-top light type with uniform energy after passing through the homogenizing fiber 120, except for reducing the influence of light spots, and the energy loss can be lower than 10%.
Fig. 3A is a schematic diagram of an optical detection system according to a second embodiment of the present invention. Referring to fig. 3A, the optical detection system 20 based on the laser light source of the present embodiment is similar to the optical detection system 10 of fig. 1, and the following differences are provided. In the present embodiment, the optical detection system 20 further includes a light source filter module 150 and a sensor filter module 210. The light source filter module 150 is disposed between the laser light source device 110 and the beam splitter 140. The light source filter module 150 passes the excitation light wavelength component of the laser light L through the illumination light path IO onto the target W. The sensing device filter module 210 is disposed between the sensing device 200 and the beam splitter 140. The sensor filter module 210 passes the wavelength component of the fluorescence F through the imaging light path IO, thereby generating a fluorescence image.
Fig. 3B is a schematic diagram of one of the objective lens systems of fig. 3A. Referring to fig. 3A and 3B, in the present embodiment, via the illumination light path EO, the sensing device 200 receives fluorescence F generated from the target W through the objective lens system or the fixed focus lens system 160 to generate a fluorescence image. An objective lens system or fixed focus lens system 160 is disposed between the beam splitter 140 and the target object W on the illumination light path EO or imaging light path IO. Taking fig. 3B as an example, the objective system may include a plurality of objective lenses 162 and a rotating disk 164. Each objective lens 162 has a different objective lens aperture. The turntable 164 carries the objective lenses 162, thereby switching movement of any one of the objective lenses 162 onto the illumination optical path EO or the imaging optical path IO.
Based on the above, the optical detection system 20 of the present embodiment is substantially similar to the optical detection system 10 of fig. 1, and will not be described herein.
Fig. 4 is a schematic diagram of an optical detection system according to a third embodiment of the present invention. Referring to fig. 4, the optical detection system 30 is similar to the optical detection system 20 of fig. 3A, with the main differences that: the laser light source device 110 of the optical detection system 30 includes a plurality of side light sources 116, irradiates the target W at different incident angles, and generates fluorescence F from the target W. Since the side light source 116 in the optical detection system 30 irradiates the W target at different incident angles, the light pattern of the laser light L irradiated on the target W is relatively uniform. Further, the provision of a plurality of light sources contributes to an increase in illumination energy, and thus increases the signal-to-noise ratio of the fluorescent image, and further increases the detection speed. The remaining advantages of the optical detection system 30 are similar to those of the optical detection system 20 of fig. 3A, and will not be described again.
Fig. 5 is a schematic diagram of an optical detection system according to a fourth embodiment of the present invention. Referring to fig. 5, the optical detection system 40 is similar to the optical detection system 20 of fig. 3A, with the main differences that: the laser light source-based optical detection system 40 includes an objective lens 162, a laser light source device 110, a light source filter module 150, a line scanning camera 200' ", a sensing device filter module 210, and an image detection device 300. In the present embodiment, the objective lens 162 images the target object W via the imaging optical path IO. The laser light source device 110 supplies laser light L to the target W through the objective lens 162 via the illumination light path EO, and causes the target W to generate fluorescence F. Via the imaging optical path IO, the line scanning camera 200' "receives fluorescence F from the target object W through the objective lens 162 to obtain a fluorescence image. The image detection device 300 is connected to the line scanning camera 200' ", receives and analyzes the fluorescence image to obtain a fluorescence detection result.
In this embodiment, the optical detection system 40 further includes a beam splitter 140. The beam splitter 140 is disposed between the illumination light path EO and the imaging light path IO, and guides the laser light source device 110 to the target W, and guides the fluorescence F from the target W to the line scan camera 200' "via the imaging light path IO.
Based on the above, the remaining advantages of the optical detection system 40 of the present embodiment are similar to those of the optical detection system 20 of fig. 3A, and will not be described herein.
In summary, in the optical detection system and the laser optical system according to the embodiments of the present invention, besides the homogenizing optical fiber is used to homogenize the laser, the high-frequency oscillator is used to make the transmission path of the laser in the homogenizing optical fiber unfixed, so as to suppress the interference effect of the laser, and further suppress the flare on the target image. In one embodiment, the laser light source device comprises a gaussian-distributed laser light source, so that the laser light forms a flat-top light type with uniform energy after passing through the homogenized optical fiber, besides reducing the influence of light spots, and the energy loss can be lower than 10%.
Claims (18)
1. An optical detection system based on a laser light source, comprising:
at least one laser light source device for providing laser to the target object via the illumination light path to make the target object generate fluorescence;
at least one sensing device for receiving the fluorescence generated from the target object via an imaging light path to generate a fluorescence image; and
the image detection device is connected to the at least one sensing device and is used for receiving and analyzing the fluorescence image so as to obtain a fluorescence detection result.
2. The laser light source-based optical inspection system of claim 1, wherein the target comprises a semiconductor device, a semiconductor wafer, a semiconductor chip, a circuit board, a display panel, or other organic-containing object.
3. The laser light source-based optical detection system according to claim 1, wherein the laser light source device comprises a plurality of side light sources, and the object is irradiated with different incident angles to generate fluorescence.
4. The laser light source-based optical detection system of claim 1, further comprising:
a spectroscope, which guides the laser from the laser light source device to the target object via the illumination light path, and guides the fluorescence from the target object to the sensing device via the imaging light path.
5. The laser light source-based optical detection system of claim 1, wherein the sensing device receives the fluorescence generated from the target object via the illumination light path through an objective lens system or a fixed focus lens system to generate the fluorescence image.
6. The laser light source based optical detection system according to claim 1, wherein the type of sensing means comprises a line scan camera and/or a surface scan camera.
7. The laser light source-based optical detection system of claim 1, further comprising:
a light source filter module for passing the excitation light wavelength component of the laser beam to a target object through the illumination light path; and
and a sensing device filter module for passing the wavelength component of the fluorescence through the imaging light path to generate the fluorescence image.
8. The laser light source-based optical detection system according to claim 1, wherein the laser light source device comprises:
a light emitting unit for providing the laser;
a homogenizing fiber connected to the light emitting unit, receiving and transmitting the laser light; and
the high-frequency oscillator is arranged at the light inlet end of the homogenizing optical fiber so as to vibrate the homogenizing optical fiber.
9. The laser light source-based optical detection system of claim 8, wherein the light emitting unit comprises a gaussian distributed laser light source.
10. An optical detection system based on a laser light source, comprising:
an objective lens for imaging the target object via an imaging optical path;
a laser light source device for providing laser to the target object through the objective lens via an illumination light path to enable the target object to generate fluorescence;
a light source filter module for passing the excitation light wavelength component of the laser beam to the target object through the illumination light path;
a line scan camera receiving the fluorescence from the target object through the objective lens via the imaging optical path to obtain a fluorescence image;
a sensing device filter module for passing wavelength components of the fluorescence through the imaging light path to generate the fluorescence image; and
and the image detection device is connected to the line scanning camera and is used for receiving and analyzing the fluorescence image so as to obtain a fluorescence detection result.
11. The laser light source based optical detection system of claim 10, wherein the target comprises a semiconductor device, a semiconductor wafer, a semiconductor chip, a circuit board, a display panel, or other organic-containing object.
12. The laser light source-based optical detection system of claim 10, further comprising:
the spectroscope is arranged between the illumination light path and the imaging light path, guides the laser from the laser light source device to the target object, and guides the fluorescence from the target object to the line scanning camera through the imaging light path.
13. The laser light source-based optical detection system according to claim 10, wherein the laser light source device comprises:
a light emitting unit for providing the laser;
a homogenizing fiber connected to the light emitting unit, receiving and transmitting the laser light; and
the high-frequency oscillator is arranged at the light inlet end of the homogenizing optical fiber so as to vibrate the homogenizing optical fiber.
14. The laser light source-based optical detection system of claim 13, wherein the light emitting unit comprises a gaussian distributed laser light source.
15. A laser optical system, comprising:
the light-emitting unit provides laser to the target object through the illumination light path, so that the laser generates a target object image on the sensing device;
a homogenizing fiber receiving and transmitting the laser light from the light emitting unit via the illumination light path;
the high-frequency oscillator is arranged at the light inlet end of the homogenizing optical fiber and vibrates the homogenizing optical fiber, so that light spots on the target object image are reduced.
16. The laser optical system of claim 15 wherein the light emitting unit comprises a gaussian distributed laser light source.
17. The laser optical system as claimed in claim 15, further comprising:
the sensing device receives the laser reflected from the target object via an imaging light path to generate the target object image; and
and the image detection device is connected with the sensing device and is used for receiving and analyzing the target object image so as to obtain an image detection result.
18. The laser optical system as claimed in claim 17, further comprising:
and a spectroscope for guiding the laser from the light emitting unit to the target object via the illumination light path and guiding the laser from the target object to the sensing device via the imaging light path.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111116355A TWI814365B (en) | 2022-04-29 | 2022-04-29 | Optical inspection system based on laser light source and laser optical system |
| TW111116355 | 2022-04-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117007511A true CN117007511A (en) | 2023-11-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202211033799.5A Pending CN117007511A (en) | 2022-04-29 | 2022-08-26 | Optical detection system based on laser light source and laser optical system |
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| CN (1) | CN117007511A (en) |
| TW (1) | TWI814365B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI442043B (en) * | 2012-01-17 | 2014-06-21 | Univ Nat Taiwan Science Tech | Photoluminescence measuring system and measuring method thereof |
| TWI693471B (en) * | 2015-08-19 | 2020-05-11 | 日商富士軟片股份有限公司 | Coloring composition, fluorescent sensor and method of manufacturing fluorescent sensor |
| TWI662273B (en) * | 2018-08-20 | 2019-06-11 | 友達晶材股份有限公司 | Defect detecting equipment and defect detecting method |
| CN212514276U (en) * | 2020-05-27 | 2021-02-09 | 苏州影睿光学科技有限公司 | Wide-spectrum fluorescence multi-channel real-time imaging system |
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- 2022-08-26 CN CN202211033799.5A patent/CN117007511A/en active Pending
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| Publication number | Publication date |
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| TWI814365B (en) | 2023-09-01 |
| TW202342961A (en) | 2023-11-01 |
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