KR20190057635A - Electronic scanning equipment using terahertz wave - Google Patents

Abstract

The present invention relates to an electronic scanning apparatus using a terahertz wave which incorporates a terahertz imaging technique capable of inspecting a semiconductor chip in a nondestructive manner to manufacture an electronic scanning system. An objective of the present invention is to include a TX barrel to focus and parallelize a terahertz wave generated by a terahertz wave transmission module and an RX barrel to parallelize and focus a terahertz wave reflected from a target, and couple the TX barrel and the RX barrel to install a galvano-scanning module for controlling high speed propagation of a terahertz wave on one surface of the TX barrel to allow the reflected terahertz wave to sequentially propagate through a f-θ lens and the galvano-scanning module to enter the RX barrel and input the terahertz wave entering the RX barrel into a terahertz wave reception module to visualize the signal to determine a defect in the target. According to the present invention, the apparatus includes the terahertz wave transmission module and the terahertz wave reception module involved in generation and detection of a terahertz wave, integrally forms the TX barrel and the RX barrel with embedded first and second focusing lenses and first and second parallel ray lenses, and matches a distance by which a terahertz wave enters the target and a path in which the terahertz wave is reflected from the target to return without adjusting the angles of the TX barrel and the RX barrel to quickly visualize a defect of the target to inspect the target.

Description

[0001] The present invention relates to an electronic scanning device using a terahertz wave,

More particularly, the present invention relates to a scanning device, and more particularly, to a scanning device, and more particularly, to a scanning device in which a terahertz wave radiated from a fiber coupled terahertz transmission module and a TX barrel is sequentially passed through a galvanometer scanning module and an f- (E.g., a sample, a semiconductor chip, etc.), and the terahertz wave reflected from the target is passed through the f-theta lens and the galvano scanning module in the same manner as the incident path to detect and detect the terahertz wave in the optical fiber- To an electron scanning device using a terahertz wave for detecting whether or not there is a defect existing inside a target.

In general, semiconductor chips are the core components required by computers, all electronic products, and information products, and perform arithmetic operations, information storage and transmission, and control of other chips.

Particularly, such a semiconductor chip is a semiconductor chip packaged in a miniaturized plastic having a size of about 10 x 10 mm 2, and it is almost impossible to check the presence or absence of defects such as cracks, peeling, impossible.

Patent Document 1 discloses a conventional inspection apparatus using a terahertz wave, which comprises a test table for placing a semiconductor sample thereon, and a terahertz wave emitted from the generator installed in the upward tilting direction of the test table in a spot shape An optical waveguide for focusing and a detector for detecting a terahertz wave reflected from the sample so as to face the optical waveguide.

At this time, the inspection table is moved in a predetermined direction by the X-axis driving unit and the Y-axis driving unit, and positions the sample at a predetermined position between the optical waveguide and the detector.

Thereafter, the terahertz wave is focused on the sample through the lens of the optical waveguide, and then the reflected terahertz wave from the sample is reflected in the direction of the detector and then again enters the other focusing lens and the terahertz wave is detected .

Then, the terahertz wave detected by the detector is transmitted to the image processing unit through the signal processing unit, and the signal of the image output unit is outputted to the display unit to check the state of the sample through the display unit.

However, in the above-described Patent Document 1, the optical waveguide and the detector are separately constructed, and the angle of reflection of the optical waveguide and the detector is checked, and the optical waveguide and the detector are fixedly installed at a predetermined angle, none.

On the other hand, since the optical waveguide and the detector are adjusted at an arbitrary angle, it is difficult to precisely control the reflection angle of the terahertz wave, and the optical waveguide and the detector are separated from each other There is a restriction on installation space.

In particular, when a terahertz wave reflected from a semiconductor chip due to a reflection angle error is also reflected to the outside of the detector, a terahertz wave can not be detected by the detector, and in such a case, it becomes difficult to determine whether the sample is normal or defective. Is lowered.

KR 10-2015-0004146 A

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems and it is an object of the present invention to provide an electronic scanning system by combining a terahertz imaging technology capable of nondestructively testing semiconductor chips, And a RX barrel for collimating and focusing the reflected terahertz waves. The TX barrel and the RX barrel are combined to provide a high-speed propagation of the terahertz wave. Install the Galvano scanning module to be controlled on one side of the TX barrel.

Then, a femtosecond laser beam is input to the terahertz transmission module after attaching an f-theta lens which is arranged at the bottom of the scanning module to the exit of the galvano scanning module and collecting the terahertz wave directed toward the target, Due to this, the terahertz wave generated from the terahertz transmission module passes through the TX barrel and the galvano scanning module and travels in the direction of the f-theta lens, passes through the f-theta lens and is focused and reflected on the target.

The reflected THz waves are sequentially incident on the RX barrel through the f-theta lens and the galvano scanning module, and the terahertz wave incident on the RX barrel is input to the terahertz receiving module. By imaging the signal, The present invention provides a terahertz wave electronic scanning device capable of discriminating whether or not there is an internal defect.

According to an aspect of the present invention, there is provided an apparatus for scanning an electron beam using a terahertz wave, the apparatus comprising: a laser generator for generating a terahertz wave by receiving a laser signal; A terahertz wave transmitting / receiving module which is provided orthogonally to the TX barrel and receives the terahertz reflected wave returning to the entrance and forms an RX barrel which outputs the signal to the outside; A terahertz wave reflected from the terahertz wave transmitting / receiving module is received in the terahertz wave transmitting / receiving module, and the terahertz wave reflected from the terahertz wave transmitting / receiving module is inputted to the terahertz wave receiving / A Galvano scanning module for changing the incidence or reflection direction of the terahertz reflected wave; The terahertz wave modulator is installed on the bottom surface of the galvano scanning module so as to be orthogonal to the terahertz wave transmitting / receiving module. The terahertz wave is guided to be converged to a predetermined point of the target by receiving the terahertz wave, And an f-&thetas; lens guiding the light to be reflected in the direction of the no-scanning module.

The terahertz wave transmission / reception module may include a transceiver that is formed to be inclined in one direction between the TX barrel and the RX barrel so that the terahertz wave transmitted through the terahertz wave is passed through the terahertz wave transmission / reception module And a beam splitter for reflecting the terahertz wave reflected in the direction of the entrance toward the RX barrel.

In the electron scanning device using the terahertz wave according to the present invention, the TX barrel of the terahertz wave transmitting / receiving module includes: a first jig having a hollow tube shape; A terahertz transmission module which is installed inside the first jig and is formed to be horizontal with the entrance and generates a terahertz wave in the direction of the entrance by receiving a laser signal; A first focusing lens installed between the terahertz transmission module and the entrance and guiding a terahertz wave generated from the terahertz transmission module toward the entrance; And a first parallel optical lens provided between the beam splitter and the first focusing lens and guiding the terahertz wave to move in parallel by the first focusing lens.

The first jig of the TX barrel passes through the first collimating lens and the first collimating lens and transmits a terahertz wave contact which contacts the beam splitter And a penetrating hole for guiding the reflected THz wave to the outside is further formed on an inner wall surface orthogonal to the emission direction of the THz wave as a reference.

In the electron scanning device using the terahertz wave according to the present invention, the RX barrel of the terahertz wave transmitting / receiving module may include a second jig having a hollow tube shape and installed orthogonal to the first jig of the TX barrel; A terahertz receiving module provided on the inner side of the second jig and orthogonally installed to the entrance and receiving the terahertz reflected wave reflected by the beam distributor and outputting the reflected terahertz wave to the outside; A second focusing lens installed between the beam splitter and the terahertz receiving module for guiding the reflected terahertz wave reflected from the beam splitter to be input to the terahertz receiving module; And a second parallel optical lens provided between the beam splitter and the second focusing lens for guiding the terahertz wave to move in parallel by the second focusing lens.

In the electro-scanning device using a terahertz wave according to the present invention, the galvano scanning module may include a galvano mirror which is fixed at a predetermined angle within the Galvano scanning module, and forms a Galvano reflector that changes the traveling direction of the reflected wave of terahertz wave or terahertz .

In the electron scanning device using a terahertz wave according to the present invention, the f-theta lens has a hollow shape and an f-.theta. Lens barrel inlet is formed on one side, and the other side opposite to the f- & ? barrel body in which an f-? barrel outlet is formed; A convex concave lens provided on an inner side of the f-theta barrel main body corresponding to the f-? Barrel inlet; A flat convex lens provided on the inner side corresponding to the f-? Barrel outlet of the f-? Barrel main body; And a convex lens provided between the convex concave lens and the plano convex lens; And a fixing ring provided between the convex concave lens, the plano convex lens, and the convex lens so that the convex concave lens, the plano convex lens and the convex lens are fixed in the f- &thetas; do.

According to the present invention, a TX barrel having a first focusing lens and a first parallel optical lens and an RX barrel integrally including a terahertz transmission module and a terahertz receiving module involved in generation and detection of terahertz waves are formed It is not necessary to adjust the angle between the TX barrel and the RX barrel, and the distance of the terahertz wave incident to the target and the path reflected back to the target coincide with each other.

In addition, since the incident path of the terahertz wave incident on the sample and the reflection path reflected from the sample are precisely matched by the galvano scanning module, no error occurs in the detection of the terahertz wave signal, and the error of the terahertz wave signal In particular, the terahertz wave is incident and reflected at a predetermined point of the target via the f-theta lens, and is scanned at high speed by the galvano scanning module to be present inside the target. Damage, scratches, and scratches (e.g., bonding such as peeling, voids, cracks, etc.).

1 is a perspective view illustrating an electron scanning device using a terahertz wave according to the present invention;
2 is a simplified exploded perspective view of Fig.
3 is a perspective view showing an exploded view of a terahertz wave transmitting module and a receiving module in an electronic scanning apparatus using a terahertz wave according to the present invention.
FIG. 4 is an exemplary view illustrating a state in which an electronic scanning apparatus using a terahertz wave according to the present invention is installed in a housing for systemizing. FIG.
5 is a side cross-sectional view illustrating a process in which a terahertz wave enters a target from a terahertz transmission module through an electron scanning device using a terahertz wave according to the present invention.
6 is a side cross-sectional view illustrating a process in which a terahertz wave is reflected from a target to a terahertz receiving module through an electron scanning device using a terahertz wave according to the present invention.
7 is a cross-sectional side view showing an embodiment of changing the angle of the galvano reflector built in the galvano scanning module of the electron scanning device using the terahertz wave according to the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 to 7, a terahertz wave transmission / reception module 100 receives a laser signal to generate a terahertz wave, and transmits the terahertz wave through a TX lens barrel The RX tube 120 is disposed orthogonally to the TX tube 110 and receives the terahertz reflected wave returning to the entrance 111 and outputs the reflected signal to the outside.

It is preferable that the TX barrel 110 and the RX barrel 120 of the terahertz wave transmission / reception module 100 are connected in a "C" shape.

The terahertz wave transmission and reception module 100 is formed to be inclined in one direction between the TX barrel 110 and the RX barrel 120 to pass a terahertz wave radiated in the direction of the entrance 111, And reflects the reflected terahertz wave reflected in the direction of the arrow 111 toward the direction of the RX mirror barrel 120.

The beam splitter 130 is formed to be inclined downward from the left to the right with respect to the direction in which the terahertz waves are incident, passes the terahertz wave, and transmits the terahertz wave reflected in a direction opposite to the direction of incidence of the terahertz wave, .

remind The beam splitter 130 Terahertz  And is inclined downward by 45 degrees from the left to the right with respect to the incidence direction.

The TX barrel 110 of the terahertz wave transmission and reception module 100 includes a first jig 112 in the form of a hollow tube and a second jig 112 disposed inside the first jig 112 to be parallel to the entrance 111 A terahertz transmission module 113 receiving a laser signal and generating a terahertz wave in the direction of the entrance 111, a terahertz transmission module 113 installed between the terahertz transmission module 113 and the entrance 111, A first focusing lens 114a for guiding a terahertz wave generated by the Hertz transmission module 113 toward the entrance 111 and a second focusing lens 114b provided between the beam splitter 130 and the first focusing lens 114a, And a first parallel optical lens 114b for guiding the terahertz wave to move in parallel by the first focusing lens 114a .

The first jig 112 of the TX barrel 110 transmits the first collimating lens 114b and the first condenser lens 114a and the contact point of the terahertz wave which contacts the beam splitter 130, A penetrating hole 112a for guiding a terahertz wave reflected while being transmitted through the beam splitter 130 to the outside is further formed on an inner wall surface orthogonal to a firing direction of the terahertz wave.

The transmission hole 112a guides the terahertz wave reflected from the beam splitter 130 to the outside so as to prevent the terahertz wave from being irregularly reflected in the first jig 112. [

Wherein the first jig (112) forms a through hole (112b) for passing the THz reflected wave reflected by the beam splitter 130 on the inside surface that is orthogonal to the entrance 111. The

The terahertz transmission module 113 receives a laser signal through a TX optical fiber cable 113a formed at one end of the terahertz transmission module 113 and transmits a terahertz wave signal through a terahertz device (not shown) .

The first parallel optical lens 114b collimates the terahertz wave radiated from the terahertz transmission module 113 and then transmits a terahertz wave through the first focusing lens 114a to the entrance 111 As shown in FIG.

The RX tubular body 120 of the terahertz wave transmission and reception module 100 has a hollow tubular shape and includes a second jig 121 provided orthogonally to the first jig 112 of the TX barrel 110, A terahertz reception module 120 disposed inside the second jig 121 and orthogonal to the entrance 111 for receiving the terahertz reflected wave reflected by the beam splitter 130 and outputting the terahertz reflected wave to the outside, A terahertz receiving module 122 installed between the beam splitter 130 and the terahertz receiving module 122 for guiding reflected terahertz waves reflected from the beam splitter 130 to the terahertz receiving module 122, a second focusing lens (123a), provided between the beam splitter 130 and the second focusing lens (123a), the second focusing lens (123a) And a second parallel optical lens 123b for guiding the terahertz wave to move in parallel .

The lower end of the second jig 121 is opened and the lower end of the second jig 121 communicates with the through hole 112b of the first jig 112 to generate a terahertz wave reflected from the beam splitter 130 .

The terahertz receiving module 122 receives the terahertz reflected wave and transmits a terahertz reflected wave detection signal to an external device through the RX optical fiber cable 122a.

The second collimating lens 123a and the second collimating lens 123b proceed parallel light so that the terahertz wave reflected by the beam splitter 130 is detected by the terahertz receiving module 122, Guide to focusing.

The Galvano scanning module 200 is installed closely to one surface of the TX barrel 110 so as to communicate with the entrance 111 of the TX barrel 110 and receives a terahertz wave incident through the entrance 111, The terahertz wave is received by the terahertz wave transmitting / receiving module 100, and the terahertz wave and the terahertz reflected wave are changed in direction.

The galvano scanning module 200 is fixed at a predetermined angle within the galvano scanning module 200 to form a Galvano reflector 201 that changes the traveling direction of the terahertz wave or the terahertz wave.

The Galvano reflectors 201 are preferably formed as a pair.

The angle of the Galvano reflector 201 is adjusted by the user and fixed at a predetermined angle.

The Galvano reflector 201 guides a terahertz wave to a predetermined point of the f-theta lens 300 or a terahertz wave reflected from the target T through an f- To the terahertz wave transmission / reception module (100).

The path of the terahertz wave incident on the galvano mirror 201 and the path of the reflected terahertz wave preferably coincide with each other.

The galvano reflector 201 guides the terahertz waves to different points of the target T in accordance with the angle and the path of the beam.

The f-theta lens 300 is installed on the bottom surface of the galvano scanning module 200 so as to be orthogonal to the terahertz wave transmission / reception module 100. The terahertz wave is received by the terahertz wave module 300, Or directs the reflected Tertihelz reflected wave to the target T to be reflected in the direction of the galvano scanning module 200.

The f-theta lens 300 guides the terahertz wave to converge to a predetermined point of the target (T).

The f-theta lens 300 has a hollow shape and has an f-theta lens barrel inlet 311 on one side and an f-theta barrel outlet 312 on the other side opposite to the f-theta barrel inlet 311 ? Barrel main body 310 in which the f-? Barrel main body 310 is formed, a convex-concave lens 320 provided at the inside corresponding to the f-? Barrel inlet 311 of the f-? Barrel main body 310, convex lens 340 is provided between the f-θ lens barrel outlet (312) plane of the positive lens 330 is installed on the inner side corresponding to the said Bullock the negative lens 320 and the plane-convex lens 330 of the unit 310, the convex concave lens 320, the plane-convex lens 330, and is disposed between the convex lens 340, the convex concave lens 320, a plane-convex lens 330 and the convex lens 340 is the and a fixing ring 350 which is fixed in the f- theta barrel main body 310 .

The terahertz wave incident through the f-theta barrel inlet 311 of the f-? Barrel main body 310 sequentially passes through the convex concave lens 320, the convex lens 340 and the convex lens 330 Is incident on a predetermined point of the target (T) in that state, and is reflected on the same path at the target (T).

The fixing ring 350 separates the convex concave lens 320, the plano convex lens 330, and the convex lens 340 by a predetermined distance.

The electron scanning apparatus using the terahertz wave according to the present invention configured as described above is used as follows.

The galvano scanning module 200 is closely fixed to the entrance 111 of the terahertz wave transmitting / receiving module 100 having the TX barrel 110 and the RX barrel 120 formed integrally, The f-theta lens 300 is provided on the bottom surface of the lens 200. [

Here, an external device is connected to the input / output terminal (not marked) of the galvano scanning module 200, and the angle of the Galvano reflector 201 of the galvano scanning module 200 is adjusted by operating an external device in this state , The path of the terahertz wave reflected by the Galvano reflector 201 and incident in the direction of the f-theta lens 300 is controlled.

Then, the f-theta lens 300 of the scanning device using the coupled terahertz wave is installed on a predetermined height of the housing 400 so as to face downward, Place the target (T) to be inspected.

When a laser signal is input through the TX optical fiber cable 113a of the terahertz transmission module 113 of the TX barrel 110, a terahertz wave is generated in the terahertz transmission module 113, The Hertz wave is transmitted through the first collimating lens 114b and the first focusing lens 114a and is brought into contact with the surface of the beam splitter 130. [

Some of the terahertz waves that come into contact with the beam splitter 130 are transmitted through the beam splitter 130 to enter the outside of the first jig 112 through the entrance 111 and some of the terahertz waves Is reflected at an angle of 90 degrees with respect to the contact point with the beam splitter 130, and is emitted to the outside through the through hole 112a.

At this time, a terahertz wave reflected from the beam splitter 130 through the transmission hole 112a is emitted to the outside of the first jig 112, so that the beam splitter 130 can be rotated in the first jig 112, The terahertz waves reflected by the first jig 112 are prevented from being irregularly reflected, so that the terahertz wave can be incident continuously to the outside of the first jig 112 through the entrance 111.

The first collimating lens 114b collimates the terahertz wave generated from the terahertz transmission module 113 and focuses the terahertz wave to the first focusing lens 114a to generate the output signal of the entrance 111) direction, so that the terahertz wave is guided to enter in a focused state.

The terahertz wave incident through the entrance 111 of the first jig 112 is reflected by the galvano mirror 201 while passing through the galvano scanning module 200. At this time, 201 are changed in the direction of incidence and incident on the f-theta lens 300.

Ray tube body 310 in the direction of the f-theta barrel main body 310 of the f-theta lens 300 is led into the f-theta barrel main body 310 through the f-theta barrel inlet 311 The convex concave lens 320, the convex lens 340 and the plano convex lens 330 are successively transmitted and then incident on the surface of the target T through the f-theta barrel outlet 312, (T) The terahertz wave is focused at a predetermined point on the surface.

The convex concave lens 320, the convex lens 340 and the convex lens 330 are fixed to the f-theta lens barrel body 310 at a predetermined interval by the ring-shaped fixing ring 350 Respectively.

Particularly, the fixing ring 350 is made of an aluminum material and fixed between the convex concave lens 320 and the convex lens 340 and between the convex lens 340 and the convex lens 330.

At this time, the point of the terahertz wave focused on the target T is scanned in accordance with the reflection angle of the Galvano reflector 201, and a predetermined point of the target T is scanned .

Then, the terahertz wave incident on the surface of the target (T) is reflected on the surface of the target (T) to generate a terahertz wave. At this time, the terahertz wave is reflected toward the f-theta lens .

In this case, the reflected terahertz wave reflected in the direction of the f-theta lens 300 passes through the f-theta barrel outlet 312 of the f-theta barrel main body 310 so as to correspond to the incident angle of the terahertz wave, The convex lens 330 and the convex concave lens 320 are successively transmitted through the f-theta barrel inlet 311 to enter the galvano scanning module 200 again.

The terahertz wave reflected by the Galvano scanning module 200 is reflected by the Galvano reflector 201 and its reflection direction is changed so that the entrance 111 of the first jig 112 And then enters the second jig 121 of the RX barrel 120 after being reflected by the beam splitter 130. [

At this time, the reflection path of the terahertz reflected wave reflected by the beam splitter 130 is changed to an angle of 90 degrees so as to face the second jig 121.

The reflected terahertz wave entered into the second jig 121 maintains a focused state while passing through the second collimating lens 123b and the second focusing lens 123a. In this state, Hertz reception module 122. The Hertz-

Then, a terahertz reflected wave signal is detected by an external device connected to the terahertz receiving module 122 through the RX optical fiber cable 122a of the terahertz receiving module 122, and at this time, a terahertz reflected wave signal is detected by an external device And examines whether or not the target (T) is defective.

At this time, the incident path of the terahertz wave reaching the target (T) from the entrance (111) of the TX barrel (110) reaches the entrance (111) of the TX barrel (110) It corresponds to the reflector path of the Hertzian wave.

In the above description, the scanning device using the terahertz wave is installed on the housing 400. However, according to the selection of the user, the electron scanning device using the terahertz wave may be applied to a conveying conveyor The target T conveyed in one direction can be continuously inspected.

The galvano scanning module 200 is installed on one side of the terahertz wave transmission and reception module 100 and the f-theta lens 300 is installed on the bottom surface of the galvano scanning module 200, The configuration for examining whether a target T is defective with a reflected terahertz wave includes a terahertz transmission module and a terahertz reception module that are involved in generation and detection of a terahertz wave, It is unnecessary to adjust the angle between the TX barrel and the RX barrel so that the terahertz wave is reflected to the target and reflected back to the target without the necessity of adjusting the angles of the TX barrel and the RX barrel integrally with the TX barrel and the RX barrel each having the first and second parallel- It is possible to rapidly visualize whether the target is defective or not by inspecting the paths to be inspected.

The present invention is not limited to the above-described embodiments, and various modifications and changes may be made without departing from the spirit and scope of the present invention as defined in the following claims. There is a technical spirit to the extent that anyone who has it can make various changes.

100: terahertz wave transmitting / receiving module
110: TX telescope 111: entrance
112: first jig 112a: permeable hole
112b: through hole 113: terahertz transmission module
113a: TX optical fiber cable 114a: first focusing lens
114b: first parallel optical lens 120: RX lens barrel
121: second jig 122: terahertz receiving module
122a: RX optical fiber cable 123a: second focusing lens
123b: second parallel optical lens 130: beam splitter
200: Galvano scanning module 201: Galvano reflector
300: f-theta lens 310: f-theta barrel main body
311: f-theta barrel inlet 312: f-theta barrel exit
320: convex concave lens 330: flat convex lens
340: convex lens T: target

Claims (7)

And a TX barrel 110 for receiving a laser signal to generate a terahertz wave and for introducing the terahertz wave to the outside through an entrance 111 formed on one side of the terahertz wave. The TX barrel 110 is orthogonal to the TX barrel 110 A terahertz wave transmitting / receiving module 100 receiving the terahertz wave reflected back to the entrance 111 and forming an RX mirror barrel 120 for outputting the reflected signal to the outside;
The terahertz wave transmitting / receiving module 100 is installed closely to one surface of the TX barrel 110 so as to communicate with the entrance 111 of the TX barrel 110, receives a terahertz wave incident through the entrance 111, A Galvano scanning module 200 for receiving a terahertz reflected wave reflected in a direction of a laser beam and changing a direction of reflection or reflection of terahertz wave and terahertz wave;
The terahertz wave transmitting / receiving module 100 is installed on the bottom surface of the galvano scanning module 200 so as to be orthogonal to the terahertz wave transmitting / receiving module 100. The terahertz wave transmitting / receiving module 100 receives the terahertz wave, guides the terahertz wave to converge to a predetermined point of the target T, An f-? Lens 300 for guiding reflected Tertihelz reflected waves to the target T to be reflected toward the galvano scanning module 200;
And a scanning unit for scanning the electron beam. The method according to claim 1,
The terahertz wave transmission / reception module 100 includes:
A terahertz wave is formed between the TX mirror barrel 110 and the RX barrel 120 so as to be inclined in one direction so as to pass through the terahertz wave emitted toward the entrance 111. The terahertz wave reflected in the direction of the entrance 111 And a beam splitter (130) for reflecting the direction of the reflected wave toward the RX mirror barrel (120). 3. The method of claim 2,
The TX barrel 110 of the terahertz wave transmission / reception module 100 includes:
A first jig 112 having a hollow tube shape;
A terahertz transmission module 113 installed inside the first jig 112 and horizontally aligned with the entrance 111 to generate a terahertz wave in the direction of the entrance 111 by receiving a laser signal;
A first focusing lens 114a provided between the terahertz transmission module 113 and the entrance 111 and guiding a terahertz wave generated from the terahertz transmission module 113 toward the entrance 111, ;
A first parallel optical lens 114b provided between the beam splitter 130 and the first focusing lens 114a and guiding the terahertz wave to move in parallel by the first focusing lens 114a;
And a scanning unit for scanning the electron beam. The method of claim 3,
The first jig (112) of the TX barrel (110)
A first converging lens 114b and a first converging lens 114a to be incident on the inner wall surface orthogonal to the launching direction of the terahertz wave with reference to the contact point of the terahertz wave contacting the beam splitter 130, And a transmission hole (112a) for guiding the reflected THz wave to the outside through the beam splitter (130). 3. The method of claim 2,
The RX mirror barrel 120 of the terahertz wave transmission / reception module 100,
A second jig 121 having a hollow tube shape and installed perpendicularly to the first jig 112 of the TX barrel 110;
A terahertz reflected wave which is provided inside the second jig 121 and is perpendicular to the entrance 111 and reflected by the beam splitter 130 and receives the reflected terahertz wave, A receiving module 122;
A second focusing lens installed between the beam splitter 130 and the terahertz receiving module 122 for guiding the reflected terahertz wave reflected from the beam splitter 130 to be input to the terahertz receiving module 122; 123a);
A second parallel optical lens 123b provided between the beam splitter 130 and the second focusing lens 123a and guiding the terahertz wave to move in parallel by the second focusing lens 123a;
And a scanning unit for scanning the electron beam. The method according to claim 1,
The galvano scanning module 200 includes:
And a Galvano reflector 201 is fixed inside the reflector 201 at a predetermined angle to change the traveling direction of the terahertz wave or the terahertz reflected wave. The method according to claim 1,
The f-theta lens (300)
? Barrel body 311 having a hollow? -? Barrel inlet 311 formed on one side thereof and an f-? Barrel outlet 312 formed on the other side opposite to the f-? Barrel inlet 311 310;
A convex concave lens 320 provided on the inside corresponding to the f-? Barrel inlet 311 of the f-? Barrel main body 310;
A flat convex lens 330 provided on the inner side corresponding to the f-? Barrel outlet 312 of the f-? Barrel main body 310; And
A convex lens 340 provided between the convex concave lens 320 and the plano convex lens 330;
The convex concave lens 320, the plano convex lens 330 and the convex lens 340 are provided between the convex concave lens 320, the plano convex lens 330 and the convex lens 340, a fixing ring 350 to be fixed in the f-theta barrel main body 310;
And a scanning unit for scanning the electron beam.

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