CN106556576A - A kind of method of the reflectance and transmitance for measuring high reflection/highly transmissive optical element based on optical cavity ring-down technology simultaneously - Google Patents
A kind of method of the reflectance and transmitance for measuring high reflection/highly transmissive optical element based on optical cavity ring-down technology simultaneously Download PDFInfo
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- CN106556576A CN106556576A CN201610972470.3A CN201610972470A CN106556576A CN 106556576 A CN106556576 A CN 106556576A CN 201610972470 A CN201610972470 A CN 201610972470A CN 106556576 A CN106556576 A CN 106556576A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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Abstract
The present invention relates to a kind of method of the reflectance and transmitance that high reflection/highly transmissive optical element is measured based on optical cavity ring-down technology simultaneously, step is：Using optical cavity ring-down technology, first measure declining for initial optical cavity and swing signal and be fitted the ring-down time for obtaining initial optical cavity.It is subsequently adding high reflection to be measured/highly transmissive optical element and forms steady testing optical cavity, measured from optical element to be measured output and declining for output hysteroscope output respectively and swing signal and be fitted the ring-down time for obtaining testing optical cavity, calculate the transmitance of the reflectance or highly transmissive optical element of high reflection optical element；The optical cavity ring-down signal amplitude that simultaneously optical element to be measured is exported carries out ratio calculation with the optical cavity ring-down signal amplitude of output hysteroscope output, and the reflectance of the transmitance or highly transmissive optical element of high reflection optical element is obtained by calibration.The reflectance and transmitance of the measuring method not only measurable high reflection/highly transmissive optical element, and can realize that high resolution 2 d is imaged to its reflectance and transmitance distribution.
Description
Technical field
The present invention relates to the technology of the reflectance/transmitance for being used to measuring high reflection optical element or highly transmissive optical element
Field, more particularly to a kind of single-point for measuring high reflection optical element or highly transmissive optical element based on optical cavity ring-down technology simultaneously
The method of reflectance/transmitance and its reflectance/transmitance Two dimensional Distribution.
Background technology
High reflection optical element and highly transmissive optical element are widely used in high power laser system, gravitational wave detection, swash
In the technical fields such as optical circulator.With the progress of coating technique, the reflectance/transmittance of high reflection/highly transmissive optical element is got over
Come higher, the reflectance/transmitance of accurate measurement high reflection/highly transmissive optical element becomes particularly important.
High reflection optical element albedo measurement is based primarily upon optical cavity ring-down technology (Li Bincheng, Gong Yuan；Optical cavity ring-down is high anti-
Rate measurement summary is penetrated,《Laser and optoelectronics are in progress》, 2010,47:021203).Chinese Patent Application No. 98114152.8
Patent of invention " a kind of measuring method of anti-mirror high reflectance ", the patent of invention of Chinese Patent Application No. 200610011254.9
" a kind of measuring method of reflectance ratio of high reflected mirror ", " high reflective mirror is anti-for the patent of invention of Chinese Patent Application No. 200610165082.0
Penetrate the measuring method of rate ", the patent of invention of Chinese Patent Application No. 200710098755.X is " based on quasiconductor self-mixing effect
High reflectivity measurement method ", the patent of invention of Chinese Patent Application No. 200810102778.8 " are fed back based on frequency selectivity light
Patent of invention " a kind of use of the high reflectivity measurement method of optical cavity ring-down technology ", Chinese Patent Application No. 200810055635.4
In the device of measurement high reflectance " it is using the high high reflection optical element reflectance of optical cavity ring-down commercial measurement.Highly transmissive light
Learn element Transmissivity measurement and can equally adopt optical cavity ring-down technology.The invention of Chinese Patent Application No. 201010295724.5 is special
Sharp " a kind of method for measuring transmission loss of optical element " is using the saturating of the highly transmissive optical element of continuous optical cavity ring-down commercial measurement
Cross rate.Optical cavity ring-down technology solves the skill of high reflection optical element albedo measurement and the measurement of highly transmissive transmittance of optical element
Art problem.
Measurement to highly transmissive optical element residual reflectance and high reflection transmittance of optical element then still adopts light splitting
Photometric technique.A kind of patent of invention " measuring method of transmittance of optical element of Chinese Patent Application No. 201210524943.5
And device ", a kind of patent of invention of Chinese Patent Application No. 201310013193.X " each optical module of illuminator in litho machine
The laser beam of specific wavelength is split by the measurement apparatus and measuring method of transmitance " by spectrophotography, obtains two
Beam light is respectively by reference to light path and optical system for testing measuring the transmitance of optical element.Spectrophotometry can also be measuring
The reflectance of optical element, but certainty of measurement by the intensity of light source fluctuation affected, typical reflectivity/Transmissivity measurement precision for ±
0.1-0.3%.
The single-point reflectance and transmitance of high reflection/highly transmissive optical element are measured respectively using different device can neither
Ensure its test is identity element position, cannot guarantee that optical element in same state, and device is relative complex, behaviour
Bother.Have no at present can while measure the reflectance and the measuring method of transmitance of high reflection/highly transmissive optical element, therefore
A kind of reflectance and transmitance that can measure high reflection/highly transmissive optical element simultaneously of development, it is possible to meet its reflectance/thoroughly
The measurement apparatus for crossing rate two-dimensional scan imaging are very necessary.
The content of the invention
The technical problem to be solved in the present invention is：Based on optical cavity ring-down technology, using same LASER Light Source, realize high anti-
Penetrate/reflectance of highly transmissive optical element and measure while transmitance, while meeting the two of optical element reflectance/transmitance
Dimension scanning imagery measurement, and have the advantages that certainty of measurement is high.
Implementation step is as follows：
Beam of laser light beam is injected into stable initial optical cavity by step (1), and the initial optical cavity is put down by two pieces of identicals
Recessed high reflection mirror constitutes straight die cavity or constitutes " V " die cavity by one piece of plane mirror and two pieces of identical plano-concave high reflection mirrors,
The a length of L in chamber0, laser beam injects optical cavity from coupling mirror, by the output hysteroscope output of plano-concave high reflection, the optical cavity ring-down signal of output by
First photodetector detection；The optical cavity ring-down signal for measuring is obtained into declining for initial optical cavity by single exponent ring-down Function Fitting
Swing time τ0；
Step (2) adds optical element to be measured according to using angle in initial optical cavity, if optical element to be measured is height
Transmission optical component, it is not necessary to which the plano-concave high reflective cavity mirror after movement optical element to be measured directly constitutes stable test optical cavity；
If optical element to be measured is high reflection optical element, the output hysteroscope of the plano-concave high reflection after optical element to be measured is correspondingly moved
Constitute stable test optical cavity；The a length of L in chamber1, from the optical signal or highly transmissive optics to be measured of high reflection optical element to be measured transmission
Second photodetector detection of optical signals of element reflection, optical element to be measured can be positioned on two-dimension displacement platform, together
First and second photodetector of Shi Jilu is in optical cavity ring-down signal mutually in the same time and obtains its amplitude ratio P1=I1/I0, I0
And I1The optical signal amplitude of respectively first and second photodetector detection, by second and first photodetector
Amplification ratio M and output hysteroscope transmitance T0Demarcation obtains transmitance T=P of high reflection optical element to be measured1T0/ M is treated
Survey the reflectance R=P of highly transmissive optical element1T0/M；Meanwhile, the optical cavity ring-down signal that first or second detector is measured
Obtain testing the ring-down time τ of optical cavity by single exponent ring-down Function Fitting1, calculate the anti-of high reflection optical element to be measured
Penetrate rate R=(L0/cτ0-L1/cτ1) or highly transmissive optical element to be measured transmitanceWherein c is light
Speed, nsFor optical element refractive index to be measured, d is optic thickness to be measured.
Wherein, described LASER Light Source can be pulse laser or continuous laser.Continuous laser adopts semiconductor laser
Or the solid state laser or gas laser of diode pumping are produced.
Wherein, described laser output beam is TEM00Mould light beam.
Wherein, two pieces of plano-concave high reflection mirrors and one piece of plane mirror of the composition initial optical cavity and test optical cavity is anti-
The rate of penetrating is all higher than 99%.
Wherein, the initial optical cavity and test optical cavity are stable cavity, the long L in initial optical cavity chamber0L long with test optical cavity1Meet
0<L0<2r, 0<L1<The radius of curvature of 2r, wherein r for plano-concave high reflection mirror concave surface.
Wherein, described optical cavity ring-down signal is realized by following either type
A. light source adopts pulse laser, directly obtains optical cavity ring-down signal；
B. light source adopts continuous semiconductor laser instrument, when optical cavity output signal is higher than the threshold value of trigger switch circuit configuration
When, the driving voltage or electric current of quick closedown semiconductor laser obtain optical cavity ring-down signal；
C. light source adopts the solid state laser or gas laser of continuous semiconductor laser instrument or diode pumping, works as light
When chamber output signal is higher than the threshold value for setting, laser beam is closed using fast optical switch between laser instrument and input hysteroscope, is obtained
Obtain optical cavity ring-down signal；
D. square-wave frequency modulation laser driven power supply is adopted, or adopts chopper, acousto-optic or electrooptic modulator modulating lasering beam,
When threshold value of the optical cavity output signal higher than setting, using square wave trailing edge quick closedown laser beam, optical cavity ring-down signal is obtained.
Wherein, in the step (2), detector amplification ratio M is believed by detecting same light using this two detectors
Number obtain.
Wherein, transmitance T of hysteroscope is exported in the step (2)0By spectrophotometry or other e measurement technology marks
It is fixed.
Wherein, position of optical element to be measured is moved by two-dimension translational platform, realizes optical element reflectance and transmitance
Two-dimensional measurement；If optical element to be measured only needs spot measurement, optical element to be measured be positioned on two-dimension translational platform.
The present invention has following technological merit compared with prior art：Present invention achieves set of device measures high anti-simultaneously
/ reflectance of highly transmissive optical element and transmitance are penetrated, the cost of optical element measuring multiple parameters is reduced.The present invention can also be real
Existing optical element two-dimensional scan imaging measurement, obtains the Two dimensional Distribution of optical element reflectance/transmitance.
Description of the drawings
Fig. 1 is the overall knot of high reflection optical element reflectance and Transmissivity measurement that initial optical cavity of the present invention is refrative cavity
Structure schematic diagram；
Fig. 2 is the overall knot of highly transmissive transmittance of optical element and albedo measurement that initial optical cavity of the present invention is refrative cavity
Structure schematic diagram；
Fig. 3 be the present invention simulation Fig. 1 in detector 9 with 7 identical time-ofday signals amplitude ratio I1/I0With height to be measured
Reflective optical devices transmitance T relationship curve；
Fig. 4 is the population structure of the high reflection optical element reflectance that initial optical cavity of the present invention is straight chamber and Transmissivity measurement
Schematic diagram；
Fig. 5 is the highly transmissive transmittance of optical element and the population structure of albedo measurement that initial optical cavity of the present invention is straight chamber
Schematic diagram；
In Fig. 1 and Fig. 2：1 is LASER Light Source；2 is plane reflection hysteroscope；3 and 4 is plano-concave reflecting cavity mirror；5 is to treat photometry
Element；6 and 8 is condenser lenses；7 and 9 is photodetector；10 is two-dimension displacement platform；11 is that function occurs card；12 is data
Capture card；13 is computer；Wherein plano-concave reflecting cavity mirror 3 is output hysteroscope, and the thick line in figure is light path, and fine rule is connecting line.
In Fig. 4 and Fig. 5：1 is LASER Light Source；2 and 3 is plano-concave reflecting cavity mirror；4 is optical element to be measured；5 and 7 are focusing
Lens；6 and 8 is photodetector；9 is two-dimension displacement platform；10 is that function occurs card；11 is data collecting card；12 are calculating
Machine；Wherein plano-concave reflecting cavity mirror 3 is output hysteroscope, and the thick line in figure is light path, and fine rule is connecting line.
Specific embodiment
Light is based on reference to the one kind of initial optical cavity described in Fig. 1 and Fig. 2 for the measuring system description present invention of refrative cavity
The method that cavity attenuation and vibration technique measures the reflectance and transmitance of high reflection/highly transmissive optical element simultaneously.
Light source 1 selects continuous semiconductor laser instrument, and card 11 square-wave frequency modulation output occurs using function；Optical cavity is fed back according to light
Laser is injected into stable optical resonator cavity by attenuation and vibration technique.By plane mirror 2 and two pieces of identical plano-concave reflecting mirrors 3,4 structures
Shake chamber into initial light is stablized.The reflectance of reflector for constituting initial optical cavity is all higher than 99%, and initial optical cavity is stable optical resonance
Chamber, the long L in chamber0Meet 0<L0<The radius of curvature of 2r, wherein r for plano-concave reflecting mirror concave surface.Incoming laser beam passes through plane mirror 2
Coupling is injected into optical resonator, and shakes in resonance intracavity.In square wave trailing edge, laser is turned off, and generation declines and swings signal, will
The optical cavity ring-down signal of the record of photodetector 7 presses single exponent ring-down function(A01, A00For constant coefficient,
T is the time) fit the ring-down time τ of initial optical resonator cavity0。
Optical element to be measured 5 is inserted in initial optical cavity, angle of incidence is the use angle of optical element to be measured 5, treats light-metering
Element 5 is learned as on two-dimension displacement platform 10.If optical element to be measured is high reflection optical element, corresponding mobile plano-concave is anti-
The position for penetrating hysteroscope 4 constitutes stable test optical cavity, as shown in solid lines in fig. 1.If optical element to be measured is highly transmissive optics
Element, the then position that need not move plano-concave reflecting cavity mirror 4 directly constitute stable test optical cavity, as illustrated in solid line in figure 2.
Test optical cavity be stable optical resonator cavity, the long L in chamber1Meet 0<L1<The radius of curvature of 2r, wherein r for plano-concave reflecting mirror concave surface.
In measurement apparatus as depicted in figs. 1 and 2, the transmitted light of plano-concave reflecting mirror 3 is focused in photodetector 7 by condenser lenses 6.
The transmitted light of high reflection optical element to be measured 5 is focused in photodetector 9, as shown in Figure 1 by condenser lenses 8；Or, it is to be measured
The highly transmissive reflected light for penetrating optical element 5 is focused in photodetector 9, as shown in Figure 2 by condenser lenses 8.While recording light
Electric explorer 7 and 9 is in optical cavity ring-down signal mutually in the same time and obtains its amplitude ratio P1=I1/I0, I0And I1Respectively photoelectricity
The optical signal amplitude of the detection of detector 7 and 9, it is saturating with output hysteroscope 3 by the amplification ratio M to photodetector 9 and 7
Cross rate T0Demarcation obtains transmitance T=P of high reflection optical element to be measured1T0The reflectance R of the highly transmissive optical elements of/M or to be measured
=P1T0/M；Used as an example, Fig. 3 shows ratio I1/I0With high reflection transmittance of optical element T relationship to be measured, as a result show
Show I1/I0It is linear with high reflection sample transmitance T to be measured.M=1, T are assumed in figure0=25ppm.
Meanwhile, the optical cavity ring-down signal that photodetector 7 or 9 is recorded is pressed into single exponent ring-down function
(A11, A12For constant coefficient, t is the time) fit the ring-down time τ for testing optical resonator1.Treated by Fig. 1 shown devices
Survey reflectance R=exp (the L/c τ of high reflection optical element 50-L1/cτ1)；To be measured highly transmissive penetrate is obtained by Fig. 2 shown devices
The transmitance of optical element 5Wherein c be the light velocity, L0Long, the L for initial optical cavity chamber1To test optical cavity chamber
It is long, nsFor highly transmissive optical element refractive index to be measured, d is highly transmissive optic thickness to be measured.Two dimension is positioned over by movement
Position of optical element to be measured on displacement platform 10 can realize the two-dimensional scan measurement of optical element, obtain treating photometry unit
The reflectance of part/transmitance distribution.If optical element to be measured only needs spot measurement, optical element to be measured be positioned over two
On dimension displacement platform.
In a word, the present invention proposes one kind based on optical cavity ring-down technology while measuring high reflection optical element or highly transmissive light
Learn element reflectance and transmitance method, realize high reflection/highly transmissive optical element reflectance and transmitance it is same
When measure.The present invention can also realize the two-dimensional scan imaging measurement to optical element (such as optical elements of large caliber), be treated
The Two dimensional Distribution of photometry element reflectance/transmitance.
Claims (10)
1. a kind of reflectance and side of transmitance that high reflection/highly transmissive optical element is simultaneously measured based on optical cavity ring-down technology
Method, implementation step are as follows：
Step (1), beam of laser light beam is injected into stable initial optical cavity, the initial optical cavity is high by two pieces of identical plano-concaves
Reflecting mirror constitutes straight die cavity or constitutes " V " die cavity by one piece of plane mirror and two pieces of identical plano-concave high reflection mirrors, and chamber is long
For L0, laser beam injects optical cavity from coupling mirror, and by the output hysteroscope output of plano-concave high reflection, the optical cavity ring-down signal of output is by first
Individual photodetector detection；By the optical cavity ring-down signal for measuring by single exponent ring-down Function Fitting obtain initial optical cavity decline swing when
Between τ0；
Step (2) adds optical element to be measured according to using angle in initial optical cavity, if optical element to be measured is highly transmissive
Optical element, it is not necessary to which the plano-concave high reflective cavity mirror after movement optical element to be measured directly constitutes stable test optical cavity；If
Optical element to be measured is high reflection optical element, correspondingly moves the output hysteroscope of the plano-concave high reflection after optical element to be measured and constitutes
Stable test optical cavity；The a length of L in chamber1, from the optical signal or highly transmissive optical element to be measured of high reflection optical element to be measured transmission
Second photodetector detection of optical signals of reflection, optical element to be measured can be positioned on two-dimension displacement platform, while note
First and second photodetector of record is in optical cavity ring-down signal mutually in the same time and obtains its amplitude ratio P1=I1/I0, I0And I1Point
Not Wei the detection of first and second photodetector optical signal amplitude, by the times magnification to second and first photodetector
Number ratio M and output hysteroscope transmitance T0Demarcation obtains transmitance T=P of high reflection optical element to be measured1T0/ M or to be measured is high thoroughly
Penetrate the reflectance R=P of optical element1T0/M；Meanwhile, the optical cavity ring-down signal that first or second detector is measured is by singly referring to
Number attenuation function fitting obtains testing the ring-down time τ of optical cavity1, calculate the reflectance R of high reflection optical element to be measured
=(L0/cτ0-L1/cτ1) or highly transmissive optical element to be measured transmitanceWherein c be the light velocity, nsFor
Optical element refractive index to be measured, d are optic thickness to be measured.
2. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：Described LASER Light Source can be pulse laser or continuous laser.It is continuous to swash
Light adopts semiconductor laser or the solid state laser or gas laser of diode pumping to produce.
3. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：Described laser output beam is TEM00Mould light beam.
4. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：Two pieces of plano-concave high reflection mirrors of the composition initial optical cavity and test optical cavity
99% is all higher than with the reflectance of one piece of plane mirror.
5. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：The initial optical cavity and test optical cavity are stable cavity, and initial optical cavity chamber is long
L0L long with test optical cavity1Meet 0<L0<2r, 0<L1<The radius of curvature of 2r, wherein r for plano-concave high reflection mirror concave surface.
6. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：Described optical cavity ring-down signal is realized by following either type
A. light source adopts pulse laser, directly obtains optical cavity ring-down signal；
B. light source adopts continuous semiconductor laser instrument, when threshold value of the optical cavity output signal higher than trigger switch circuit configuration, soon
Speed closes the driving voltage or electric current of semiconductor laser, obtains optical cavity ring-down signal；
C. light source adopts the solid state laser or gas laser of continuous semiconductor laser instrument or diode pumping, when optical cavity it is defeated
When going out signal higher than the threshold value for setting, laser beam is closed using fast optical switch between laser instrument and input hysteroscope, light is obtained
Cavity-type BPM signal；
D. square-wave frequency modulation laser driven power supply is adopted, or adopts chopper, acousto-optic or electrooptic modulator modulating lasering beam, work as light
When chamber output signal is higher than the threshold value for setting, using square wave trailing edge quick closedown laser beam, optical cavity ring-down signal is obtained.
7. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：In the step (2) detector amplification ratio M by using this two
Individual detector detects same optical signal and obtains.
8. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：Transmitance T of output hysteroscope in the step (2)0By spectrophotometric skill
Art or other e measurement technologies are demarcated.
9. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：Position of optical element to be measured is moved by two-dimension translational platform, optics unit is realized
The two-dimensional measurement of part reflectance and transmitance.
10. it is according to claim 1 a kind of high reflection/highly transmissive optical element simultaneously to be measured based on optical cavity ring-down technology
The method of reflectance and transmitance, it is characterised in that：If optical element to be measured only needs spot measurement, optical element to be measured need not
It is positioned on two-dimension translational platform.
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| CN107132029A (en) * | 2017-05-12 | 2017-09-05 | 电子科技大学 | It is a kind of while measuring the method for the reflectivity of high reflection/highly transmissive optical element, transmitance, scattering loss and absorption loss |
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