CN116978763A - Assembly method and assembly fixing structure convenient for aligning electron gun electrode center - Google Patents
Assembly method and assembly fixing structure convenient for aligning electron gun electrode center Download PDFInfo
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- CN116978763A CN116978763A CN202311235269.3A CN202311235269A CN116978763A CN 116978763 A CN116978763 A CN 116978763A CN 202311235269 A CN202311235269 A CN 202311235269A CN 116978763 A CN116978763 A CN 116978763A
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 239000002184 metal Substances 0.000 claims abstract description 88
- 229910052751 metal Inorganic materials 0.000 claims abstract description 88
- 239000000919 ceramic Substances 0.000 claims abstract description 68
- 238000003466 welding Methods 0.000 claims description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 12
- 238000009434 installation Methods 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 6
- 229910000833 kovar Inorganic materials 0.000 claims description 6
- 238000003754 machining Methods 0.000 claims description 6
- 229910052759 nickel Inorganic materials 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 6
- 230000008569 process Effects 0.000 abstract description 5
- 238000010894 electron beam technology Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 3
- 230000002452 interceptive effect Effects 0.000 description 2
- 230000002427 irreversible effect Effects 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
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Abstract
The application discloses an assembly method and an assembly fixing structure convenient for aligning the center of an electrode of an electron gun, relates to the technical field of electric vacuum in the electron industry, and solves the technical problems that the operation of the electrode in the existing electron gun is complex in the assembly process, and meanwhile, the accuracy error existing in a clamping jig can not be well solved, and the assembly accuracy of the electrode is easily affected. The structure comprises a ceramic ring and a metal ring; one or two metal rings are matched with the ceramic rings; the metal ring is fixed on the end face of the ceramic ring; the first assembly fixing structure is arranged between the first electrode and the second electrode and used for connecting and fixing the first electrode and the second electrode. The first electrode and the second electrode are directly connected and fixed through the assembly and fixing structure, so that the operation is convenient, the problem that the positions of the first electrode and the second electrode are inconvenient to adjust and the clamping jig has precision errors is avoided when the clamping jig is used for clamping the first electrode and the second electrode, and the assembly precision of the electrodes is ensured.
Description
Technical Field
The application relates to the technical field of electric vacuum in the electronic industry, in particular to an assembly method and an assembly fixing structure for facilitating the centering of an electrode of an electron gun.
Background
Electron guns are important components for emitting electron beams in vacuum systems, and are widely used in various vacuum electronic devices, particle accelerators, electron microscopes, electron tubes, and generally comprise a cathode, a grid, a focusing electrode, an anode, and the like. The distance between the grid and the cathode is very short, sometimes several hundred micrometers, and the grid mesh must be precisely assembled at the corresponding position with the cathode, otherwise, the electron beam emission of the cathode is affected, and the cathode is damaged in severe cases, so that irreversible consequences are caused. The focusing electrode plays a role in focusing the electron beam, the parallelism and the center deviation of the focusing electrode can greatly influence the track of the electron beam, the drop point of the electron beam on the anode is caused to deviate, the size and the shape of the focal spot can be influenced, and the performance of the electron gun is reduced. Therefore, when assembling the electron gun, it is necessary to ensure alignment problems between the electrodes in the electron gun, improving the assembly accuracy and the service life of the electron gun.
In the assembly process of the internal electrode of the existing electron gun, the assembly method or the assembly device generally adopts a fixture to position the electrode, is troublesome to operate, is inconvenient to adjust the position of the electrode, and is easy to cause poor alignment degree of the center of the electrode in the fixedly assembled electron gun and influence the assembly precision of the electron gun when the fixture has manufacturing precision errors or long-time use precision is reduced.
Disclosure of Invention
The application aims to provide an assembly method and an assembly fixing structure which are convenient for aligning the center of an electrode of an electron gun, so as to solve the technical problems that the operation of the electrode in the existing electron gun in the assembly process is complex, the accuracy error of a clamping fixture per se cannot be well solved, and the assembly accuracy of the electrode is easily affected in the prior art.
In order to achieve the above purpose, the present application provides the following technical solutions:
the application provides an assembly method for facilitating the center alignment of electrodes of an electron gun, which is used for aligning the centers of a plurality of electrodes when the electrodes in the electron gun are assembled, and specifically comprises the following steps:
s100, fixing a first electrode on an assembly fixing structure, and aligning and placing the first electrode on a second electrode through the assembly fixing structure;
s200, sequentially penetrating fasteners through the second electrode, the assembly fixing structure and the corresponding mounting hole sites on the first electrode;
s300, detecting whether the central hole site of the first electrode is aligned with the central hole site or the electron emission region of the second electrode or not through a detection device; if so, the assembly fixing structure is welded on the second electrode by laser to form an integrated structure; if not, the position of the first electrode and the position of the assembly and fixation structure are adjusted through the fastener, then the position is detected and adjusted until the central hole position of the first electrode is aligned with the central hole position or the electron emission area of the second electrode, and then the first electrode and the second electrode are fixed to form an integrated structure.
Preferably, the step S100 further includes the following steps:
s10, machining a plurality of mounting holes in a ceramic ring, and polishing two end faces of the ceramic ring to be smooth;
s20, welding and fixing a metal ring on one end face of the ceramic ring, or welding and fixing two metal rings on two end faces of the ceramic ring to form an assembly and fixing structure;
s30, processing bosses matched with the assembly fixing structure on the surfaces of the first electrode and the second electrode, and reserving welding spaces between the bosses and the metal ring;
s40, machining a plurality of mounting hole sites on the first electrode and the second electrode, corresponding to the mounting hole sites on the ceramic ring, and polishing and flattening the surfaces of the first electrode and the second electrode.
Preferably, the step S300 further includes a step S400:
s400, fixing a new electrode on a new assembly and fixing structure, aligning and placing the new assembly and fixing structure on the integrated structure, and sequentially penetrating the fastener through the integrated structure, the new assembly and fixing structure and the new electrode;
s500, observing whether the central hole site of the new electrode is aligned with the central hole site of the integrated structure, adjusting the positions of the new electrode and the new assembly fixing structure through the fastener until the central hole site of the new electrode is aligned with the central hole site of the integrated structure, and then fixing to form a new integrated structure;
and S600, finishing electrode assembly according to the requirement, or re-assembling a new electrode, and returning to the step S400.
An assembling and fixing structure for facilitating the alignment of the center of an electron gun electrode, which is applied to the assembling method for facilitating the alignment of the center of the electron gun electrode; comprising a ceramic ring and a metal ring; one or two metal rings are matched with the ceramic rings; the metal ring is fixed on the end face of the ceramic ring; the first assembly fixing structure is arranged between the first electrode and the second electrode and used for connecting and fixing the first electrode and the second electrode.
Preferably, one or two bosses are arranged on the first electrode and the second electrode; the boss is arranged on the end surfaces of the first electrode and the second electrode.
Preferably, the diameter of the boss is smaller than the inner diameter of the metal ring; the boss can penetrate through the metal ring and is abutted against the end face of the ceramic ring; the height of the boss is larger than that of the metal ring.
Preferably, a plurality of mounting holes are formed in the ceramic ring; the mounting hole site is matched with the fastener; and a plurality of mounting hole sites are correspondingly arranged on the first electrode and the second electrode, and the first electrode, the ceramic ring and the second electrode can be connected through the fastener.
Preferably, the metal ring is a kovar metal ring, a copper metal ring or a nickel metal ring.
Preferably, after the first electrode and the second electrode are connected to form an integral structure through the first assembly fixing structure, a second assembly fixing structure is fixed on the third electrode, and the first electrode and the second electrode are connected with the integral structure through the second assembly fixing structure.
Preferably, central hole sites or electron emission regions are arranged in the middle of the first electrode and the second electrode; the central hole site is a horn-shaped hole, a square hole or a round hole.
By implementing one of the technical schemes, the application has the following advantages or beneficial effects:
the first electrode and the second electrode are directly connected and fixed through the assembly and fixing structure, so that the operation is convenient, the problem that the positions of the first electrode and the second electrode are inconvenient to adjust and the clamping jig has precision errors is avoided when the clamping jig is used for clamping the first electrode and the second electrode, and the assembly precision of the electrodes is ensured.
Drawings
For a clearer description of the technical solutions of embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art, in which:
FIG. 1 is a first flow chart of an embodiment of an assembly method of the present application for facilitating centering of an electron gun electrode;
FIG. 2 is a second flow chart of an embodiment of an assembly method of the present application that facilitates centering of an electron gun electrode;
FIG. 3 is a third flow chart of an embodiment of an assembly method of the present application for facilitating centering of an electron gun electrode;
FIG. 4 is a first cross-sectional view of an embodiment of the mounting fixture of the present application for facilitating centering of an electron gun electrode;
FIG. 5 is a second cross-sectional view of an embodiment of the mounting fixture of the present application for facilitating centering of the electron gun electrodes;
FIG. 6 is a top view of an embodiment of the mounting fixture of the present application that facilitates centering of the electron gun electrodes;
FIG. 7 is a first assembled cross-sectional view of an embodiment of an assembled mounting structure of the present application that facilitates centering of an electron gun electrode;
FIG. 8 is a second assembled cross-sectional view of an embodiment of an assembled mounting structure of the present application that facilitates centering of an electron gun electrode;
FIG. 9 is a third assembled cross-sectional view of an embodiment of an assembled mounting structure of the present application that facilitates centering of an electron gun electrode;
FIG. 10 is a fourth assembled cross-sectional view of an embodiment of an assembled mounting structure of the present application that facilitates centering of an electron gun electrode;
FIG. 11 is a fifth assembled cross-sectional view of an embodiment of an assembled mounting structure of the present application that facilitates centering of an electron gun electrode;
FIG. 12 is a sixth assembled cross-sectional view of an embodiment of an assembled mounting structure of the present application that facilitates centering of an electron gun electrode;
FIG. 13 is a seventh assembled cross-sectional view of an embodiment of an assembled mounting structure of the present application that facilitates centering of an electron gun electrode;
fig. 14 is an exploded view of an embodiment of the mounting fixture of the present application that facilitates centering of the electron gun electrodes.
In the figure: 1. a ceramic ring; 2. a metal ring; 3. a first electrode; 4. a second electrode; 5. a third electrode; 6. a boss; 7. installing hole sites; 8. a central hole site; 9. an electron emission region.
Detailed Description
For a better understanding of the objects, technical solutions and advantages of the present application, reference should be made to the various exemplary embodiments described hereinafter with reference to the accompanying drawings, which form a part hereof, and in which are described various exemplary embodiments which may be employed in practicing the present application. The same reference numbers in different drawings identify the same or similar elements unless expressly stated otherwise. The implementations described in the following exemplary examples are not representative of all implementations consistent with the present disclosure. It is to be understood that they are merely examples of processes, methods, apparatuses, etc. that are consistent with certain aspects of the present disclosure as detailed in the appended claims, other embodiments may be utilized, or structural and functional modifications may be made to the embodiments set forth herein without departing from the scope and spirit of the present disclosure.
In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," and the like are used in an orientation or positional relationship based on that shown in the drawings, and are merely for convenience in describing the present application and to simplify the description, rather than to indicate or imply that the elements referred to must have a particular orientation, be constructed and operate in a particular orientation. The terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. The term "plurality" means two or more. The terms "connected," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, integrally connected, mechanically connected, electrically connected, communicatively connected, directly connected, indirectly connected via intermediaries, or may be an internal connection of two elements or an interaction relationship of two elements. The term "and/or" includes any and all combinations of one or more of the associated listed items. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
In order to illustrate the technical solutions of the present application, the following description is made by specific embodiments, only the portions related to the embodiments of the present application are shown.
Examples
As shown in fig. 1 to 3, the present application provides an assembling method for facilitating centering of electrodes of an electron gun, for centering a plurality of electrodes when assembling the electrodes inside the electron gun, comprising the steps of:
s100, fixing a first electrode on an assembly fixing structure, and aligning and placing the first electrode on a second electrode through the assembly fixing structure;
s200, sequentially penetrating fasteners through the second electrode, the assembly fixing structure and the corresponding mounting hole sites on the first electrode;
s300, detecting whether the central hole site of the first electrode is aligned with the central hole site or the electron emission region of the second electrode or not through a detection device; if so, the assembly fixing structure is welded on the second electrode by laser to form an integrated structure; if not, the position of the first electrode and the position of the assembly and fixation structure are adjusted through the fastener, then the position is detected and adjusted until the central hole position of the first electrode is aligned with the central hole position or the electron emission area of the second electrode, and then the first electrode and the second electrode are fixed to form an integrated structure. Specifically, one end face of the first electrode is welded and fixed with one end face of the assembly fixing structure, the first electrode is aligned and placed on the second fixing structure through the assembly fixing structure, and the second electrode, the assembly fixing structure and the first electrode are connected together through the corresponding installation hole sites on the second electrode, the assembly fixing structure and the first electrode in sequence through the fasteners. In implementation, the fastener can sequentially penetrate through the first electrode, the assembly fixing structure and the second electrode according to the convenience in operation. Detecting whether the central hole position of the first electrode is aligned with the central hole position of the second electrode or the electron emission area through the detection device, when the central hole position of the first electrode is not aligned with the central hole position of the second electrode or the electron emission area, adjusting the positions of the first electrode and the assembly fixing structure through loosening fasteners, detecting, adjusting and detecting again until the central hole position of the first electrode is aligned with the central hole position of the second electrode or the electron emission area is detected, and then welding and fixing the assembly fixing structure with the second electrode through laser welding, so that the first electrode, the assembly fixing structure and the second electrode form an integrated structure, the assembly of the central alignment of the first electrode and the second electrode is completed, the assembly precision of the electrodes in the electron gun is ensured, and the quality of the electron gun is improved. After the first electrode and the second electrode are aligned, the fastening piece is kept motionless when the assembly fixing structure is welded with the second electrode, the fastening piece exerts force to cause the position change of the electrodes, and the fastening piece has a preliminary fixing function besides an adjusting function; after the assembly and fixing structure is welded, the fastener can be removed or reserved on the electrode according to the requirement, and the fastener can serve as an electrode column when reserved on the electrode and is used for connecting a power supply to apply voltage. The detection device is preferably a microscope, and the central hole site of the first electrode and the central hole site or the electron emission region of the second electrode are observed through the microscope, so that the detection device can observe more accurately, and the central alignment degree between the first electrode and the second electrode can be improved. The first electrode and the second electrode are directly connected and fixed through the assembly and fixing structure, so that the operation is convenient, the problem that the positions of the first electrode and the second electrode are inconvenient to adjust and the clamping jig has precision errors is avoided when the clamping jig is used for clamping the first electrode and the second electrode, and the assembly precision of the electrodes is ensured.
As an optional embodiment, the step S100 further includes the following steps:
s10, machining a plurality of mounting holes in a ceramic ring, and polishing two end faces of the ceramic ring to be smooth;
s20, welding and fixing a metal ring on one end face of the ceramic ring, or welding and fixing two metal rings on two end faces of the ceramic ring to form an assembly and fixing structure;
s30, processing bosses matched with the assembly fixing structure on the surfaces of the first electrode and the second electrode, and reserving welding spaces between the bosses and the metal ring;
s40, machining a plurality of mounting hole sites on the first electrode and the second electrode, corresponding to the mounting hole sites on the ceramic ring, and polishing and flattening the surfaces of the first electrode and the second electrode. Specifically, a plurality of mounting holes are machined in the ceramic ring, so that the ceramic ring is convenient to mount and fix; the number of the mounting holes is preferably two, so that the stability of the structure is ensured, the electrode is not easy to move when the electrode is assembled, the center alignment degree of the electrodes at the two ends of the assembly and fixation structure is prevented from being changed, and the assembly precision of the electrode is ensured; the number of the installation hole sites can be adaptively set according to actual requirements. The two sides of the ceramic ring are polished and leveled, so that the parallelism of the electrode is reliable when the electrode of the electron gun is assembled by the assembly fixing structure, the electrode is not obliquely placed, and the centers of the electrodes at two ends of the assembly fixing structure are not aligned. The metal rings matched with each other can be welded on one end face of the ceramic ring, or the metal rings are welded on two end faces of the ceramic ring respectively to form different assembly fixing structure structures, the structure is easy to use according to actual requirements, and the welded metal rings are kovar metal rings, copper metal rings or nickel metal rings. The size of the assembly fixing structure is matched with the size of the electrode, and the size of the assembly fixing structure can be adaptively set according to the size of the electrode. And a boss is machined on the surfaces of the first electrode, the second electrode and other electrodes needing to be assembled by the assembly fixing structure, and the machined boss is matched with the assembly fixing structure, so that the electrodes are conveniently connected and fixed with the assembly fixing structure through the boss. The diameter of the boss is smaller than the inner diameter of the metal ring, and the height of the boss is higher than the height of the metal ring, so that a welding space is reserved between the boss and the metal ring, and fine adjustment of the center alignment of the electrode is realized through the welding space between the boss and the metal ring. A plurality of mounting hole sites are machined on the first electrode, the second electrode and other electrodes which need to be assembled by the assembly fixing structure, and the mounting hole sites on the electrodes correspond to the mounting hole sites on the ceramic ring and are identical in size, so that fasteners can conveniently penetrate through the mounting hole sites on the ceramic ring and the electrodes at the same time. After the mounting holes are machined in the first electrode, the second electrode and other electrodes which need to be assembled by the assembly fixing structure, the surfaces of the electrodes, namely the surfaces which are abutted against the assembly height structure, are required to be polished to be smooth, and the ceramic rings which are convenient to polish to be smooth with the end surfaces are matched with each other, so that the parallelism is reliable when the electrodes are fixed on the assembly fixing structure, and whether the central hole positions are aligned can be accurately detected. Before the electrode is assembled, a central hole site or an electron emission region is arranged in the middle of the electrode in advance, and the central hole site is a horn-shaped hole, a square hole or a round hole.
As an optional embodiment, the step S300 further includes a step S400:
s400, fixing a new electrode on a new assembly and fixing structure, aligning and placing the new assembly and fixing structure on the integrated structure, and sequentially penetrating the fastener through the integrated structure, the new assembly and fixing structure and the new electrode;
s500, observing whether the central hole site of the new electrode is aligned with the central hole site of the integrated structure, adjusting the positions of the new electrode and the new assembly fixing structure through the fastener until the central hole site of the new electrode is aligned with the central hole site of the integrated structure, and then fixing to form a new integrated structure;
and S600, finishing electrode assembly according to the requirement, or re-assembling a new electrode, and returning to the step S400. Specifically, when more than two electrodes need to be assembled in sequence in the electron gun, after the first electrode and the second electrode are assembled into an integral structure through the assembly fixing structure, a new electrode, such as a third electrode, can be fixed on a new assembly fixing structure, such as the second assembly fixing structure, the new electrode is aligned and placed on the integral structure through the new assembly fixing structure, that is, the first electrode and the second electrode are assembled on the integral structure through the assembly fixing structure, the new electrode, the new assembly fixing structure and the integral structure are connected through fasteners, the detecting device observes whether the central hole position of the new electrode is aligned with the central hole position of the integral structure, and then detects, adjusts and detects the position of the new electrode until the central hole position of the new electrode is aligned with the central hole position of the integral structure, and then the new electrode and the integral structure are assembled into a new integral structure through laser welding of the new assembly fixing structure. If a new electrode is to be assembled on the basis, repeating the steps to assemble.
Examples
As shown in fig. 4 to 14, an assembling and fixing structure for facilitating the centering of the electron gun electrode is applied to the assembling method for facilitating the centering of the electron gun electrode in the first embodiment; comprising a ceramic ring 1 and a metal ring 2; one or two metal rings 2 are matched with the ceramic ring 1; the metal ring 2 is fixed on the end face of the ceramic ring 1; the first assembly fixing structure is arranged between the first electrode 3 and the second electrode 4 and is used for fixedly connecting the first electrode 3 and the second electrode 4. Specifically, one end face of the ceramic ring 1 is welded with a metal ring 2 to form an assembly fixing structure, or two end faces of the ceramic ring 1 are respectively welded with a metal ring 2 to form an assembly fixing structure. Before the metal ring 2 is welded on the ceramic ring 1, the end face of the ceramic ring 1 needs to be polished and leveled, so that the parallelism is reliable when the assembly fixing structure is used for assembling and fixing the electrodes in the electron gun, the fixed electrodes are not horizontally placed due to uneven and inclined end faces, precision errors exist during assembly and fixing, the end face of the ceramic ring 1 is polished and leveled, certain assembly precision can be eliminated, and the assembly precision is high when the alignment of the centers of the two electrodes is guaranteed. The ceramic ring 1 and the metal ring 2 welded together are matched with each other, that is, it is preferable that the outer diameter size of the ceramic ring 1 is the same as the outer diameter size of the metal ring 2, so that the metal ring 2 is fixed on the ceramic ring 1. The first assembly fixing structure is arranged between the first electrode 3 and the second electrode 4, and the first electrode 3 is fixedly connected with the second electrode 4 through the assembly fixing structure, so that the first electrode 3 and the second electrode 4 are assembled. The electrodes can be sequentially fixed in the high-precision electron gun, and when the electrodes are required to be sequentially assembled and fixed, the electrodes and the assembling and fixing structures can be sequentially connected in an interactive mode, and at least one assembling and fixing structure is connected with the two electrodes. The electrode assembled and fixed by the assembling and fixing structure is not limited to the cathode, the grid electrode and the focusing electrode in the electron gun, and can be used for connecting and fixing other electrodes.
As an alternative embodiment, one or two bosses 6 are arranged on each of the first electrode 3 and the second electrode 4; the boss 6 is provided on the end surfaces of the first electrode 3 and the second electrode 4. Specifically, one end face of the first electrode 3 is provided with a boss 6, or two end faces are respectively provided with a boss 6; similarly, one end face of the second electrode 4 is provided with a boss 6, or two end faces are respectively provided with a boss 6. The first electrode 3 and the second electrode 4 are fixedly connected with the assembly fixing structure through the boss 6, and the boss 6 is required to be arranged on the end face of the electrode which is required to be assembled and connected by the assembly fixing structure, so that the electrode is convenient to be matched and fixed with the assembly fixing structure. When only one end face of the ceramic ring 1 is provided with the metal ring 2, two electrodes are connected by the assembly fixing structure, one electrode is adjacent to the end face of the assembly fixing structure, which is not provided with the metal ring 2, the end face of the electrode adjacent to the assembly fixing structure can be directly fixedly connected with the end face of the ceramic ring 1 through the end face of the electrode without arranging the boss 6. Before the electrode is assembled, the end face of the electrode needs to be polished and leveled, and the polished end face comprises the end face of the boss 6.
As an alternative embodiment, the diameter of the boss 6 is smaller than the inner diameter of the metal ring 2; the boss 6 can penetrate through the metal ring 2 and is abutted against the end face of the ceramic ring 1; the height of the boss 6 is greater than the height of the metal ring 2. Specifically, the diameter of boss 6 on the electrode is less than the internal diameter of metal ring 2, and the internal diameter of metal ring 2 is greater than the internal diameter of ceramic ring 1 simultaneously, conveniently when electrode and assembly fixed knot construct are fixed, the electrode can run through metal ring 2 through boss 6, directly carries out the butt with the terminal surface of ceramic ring 1. The end face of the ceramic ring 1 and the end face of the electrode are polished and leveled, and the end face of the electrode is directly abutted with the end face of the ceramic ring 1, so that the parallelism of the assembled electrode can be well guaranteed. The height of the boss 6 is larger than that of the metal ring 2, so that a certain distance is kept between the metal ring 2 and the end face of the electrode when the electrode is assembled, and the distance between the metal ring 2 and the end face of the electrode is preferably 10-350 microns. The diameter of the boss 6 is smaller than the inner diameter of the metal ring 2, and a certain distance, preferably 10-350 microns, exists between the side wall of the boss 6 and the inner wall of the metal ring 2. And a certain distance exists between the metal ring 2 and the end face of the electrode and between the metal ring and the side wall of the boss 6, a reserved welding space is formed, so that when the assembly fixing structure is assembled and fixed with the electrode, fine adjustment of the position of the electrode is realized through the range of the reserved welding space, and the center alignment between the electrodes is ensured.
As an alternative embodiment, the ceramic ring 1 is provided with a plurality of mounting holes 7; the installation hole site 7 is matched with the fastener; the first electrode 3 and the second electrode 4 are respectively provided with a plurality of mounting holes 7, and the first electrode 3, the ceramic ring 1 and the second electrode 4 can be connected through fasteners. Specifically, the plurality of mounting holes 7 formed in the ceramic ring 1 are parallel to each other and perpendicular to the end faces of the ceramic ring 1, and can connect the two end faces of the ceramic ring 1. The first electrode 3 and the second electrode 4 are respectively provided with an installation hole site 7 corresponding to the installation hole site 7 on the ceramic ring 1, the installation hole sites 7 on the first electrode 3 and the second electrode 4 can be connected with two end surfaces of the first electrode 3 and the second electrode 4, and fasteners matched with the installation hole sites 7 can pass through the first electrode 3, the ceramic ring 1 and the second electrode 4 in sequence, so that the first electrode 3, the ceramic ring 1 and the second electrode 4 are connected and fixed. Fasteners may also be passed sequentially through the second electrode 4, the ceramic ring 1 and the first electrode 3 to connect the electrodes and the fasteners. The electrodes which are required to be assembled and fixed by the assembling and fixing structure are all required to be provided with mounting hole sites 7, and the mounting hole sites 7 on the electrodes correspond to the mounting hole sites 7 on the ceramic ring 1. The mounting hole 7 is preferably a screw hole, the fastening piece is preferably a screw, and the fastening piece can also be other structures with connecting and fastening functions, such as bolts, screws and the like, and only the mutual matching of the fastening piece and the mounting hole 7 is required to be ensured.
As an alternative embodiment, the metal ring 2 is a kovar metal ring, a copper metal ring or a nickel metal ring. Specifically, the metal ring 2 welded on the ceramic ring 1 can be a kovar metal ring, the kovar metal ring has higher strength at high temperature, is not easy to deform, has good plasticity and wear resistance, has the characteristic of no magnetism, and can effectively ensure the performance of the electron gun because the electrode in the electron gun is a nonmagnetic metal ring 2 which is not easy to influence the electron track of the electron gun. The metal ring 2 can also be a copper metal ring, and the copper metal ring is easy to process, good in thermal conductivity and electric conductivity, good in mechanical property and low in cost. The metal ring 2 can also be a nickel metal ring, and the nickel metal ring has hard texture, good ductility, magnetism and corrosion resistance. The metal ring 2 is not limited to the metal ring 2, and may be made of other materials, and the metal ring 2 is only required to be combined with the design of the electron gun, and is adaptively set according to requirements.
As an alternative embodiment, after the first electrode 3 and the second electrode 4 are connected to form a unitary structure through the first assembly fixing structure, the second assembly fixing structure is fixed on the third electrode 5, and is connected to the unitary structure through the second assembly fixing structure. Specifically, after the first electrode 3 and the second electrode 4 are connected to form an integral structure through the first assembly fixing structure, when other electrodes, such as the third electrode 5, are required to be assembled and fixed with the first electrode 3 and the second electrode 4 in a center alignment manner, a second assembly fixing structure is fixed on one end face of the third electrode 5, and the third electrode 5 is fixedly connected with the integral structure through the second assembly fixing structure. When a plurality of electrodes are required to be aligned and assembled in sequence in one electron gun, the plurality of electrodes and the plurality of assembly fixing structures can be connected in sequence in an interactive mode, namely, the assembled integrated structure is formed by sequentially connecting one electrode, one assembly fixing structure and one electrode … ….
As an alternative embodiment, the middle parts of the first electrode 3 and the second electrode 4 are provided with central hole sites 8 or electron emission regions 9; the central hole site 8 is a horn-shaped hole, a square hole or a round hole. Specifically, the central hole sites 8 or the electron emission regions 9 are arranged in the middle of the first electrode 3 and the second electrode 4, the electrodes provided with the electron emission regions 9 are cathodes, and the central holes of the other electrodes can enable electron beams emitted by the cathodes to pass through so as to be emitted to the anodes. The middle parts of the electrodes to be assembled with the fixing structure are each provided with a central hole site 8 or an electron emission region 9. When the electrodes in the electron gun are assembled, the central hole sites 8 and 8 of the electrodes at the two ends of the assembly and fixing structure or the central hole sites 8 and the electron emission region 9 are aligned to ensure the central alignment between the electrodes, so that the grid mesh is accurately assembled at the corresponding position with the cathode, the electron beam emission of the cathode is not influenced, and the cathode is prevented from being damaged when the electron beam emission of the cathode is seriously influenced, thereby causing irreversible consequences; or the focusing electrode is aligned to the cathode and the grid electrode, so that electron beams emitted by the cathode can be well focused on the anode, the track of the electron beams is not influenced, the falling point of the electron beams on the anode is not deviated, and the size and the shape of a focal spot are not influenced; or otherwise avoid the degradation of the electron gun due to misalignment of the electron centers. The central hole site 8 is a horn-shaped hole, a square hole or a round hole, the shape of the central hole site 8 on the electrode can be set according to the emission characteristic of the electron gun, the central hole sites 8 with different shapes can generate different influences on the emission current and the path of the electron gun, the central hole site 8 on the electrode is not limited to the shape, and the central hole sites 8 with other shapes can be set according to actual requirements.
In the application, when the electrode is assembled by the assembly and fixing structure, the number of the metal rings 2 on the assembly and fixing structure, the material of the metal rings 2, the electron emission area in the middle of the electrode and the central hole sites with different shapes can be matched at will, so that different assemblies are realized. For example, an electrode provided with an electron emission region 9 and an electrode having a square or circular hole in the center hole 8 are assembled in a fixed structure of an assembly in which metal rings 2 are provided on both sides, as shown in fig. 8. For example, an electrode provided with an electron emission region 9 and an electrode having a horn-like opening at a central hole site 8 are assembled in a fixing structure provided with a metal ring 2 on one side, as shown in fig. 7. The above is only an individual example, and the method is not limited to the above examples and examples of the drawings, and only needs to match the above replaceable technical features arbitrarily.
The foregoing is only illustrative of the preferred embodiments of the application, and it will be appreciated by those skilled in the art that various changes in the features and embodiments may be made and equivalents may be substituted without departing from the spirit and scope of the application. In addition, many modifications may be made to adapt a particular situation or material to the teachings of the application without departing from the essential scope thereof. Therefore, it is intended that the application not be limited to the particular embodiment disclosed, but that the application will include all embodiments falling within the scope of the appended claims.
Claims (10)
1. An assembling method for facilitating centering of electrodes of an electron gun, characterized by being used for centering of a plurality of electrodes when assembling the electrodes inside the electron gun, comprising the steps of:
s100, fixing a first electrode on an assembly fixing structure, and aligning and placing the first electrode on a second electrode through the assembly fixing structure;
s200, sequentially penetrating fasteners through the second electrode, the assembly fixing structure and the corresponding mounting hole sites on the first electrode;
s300, detecting whether the central hole site of the first electrode is aligned with the central hole site or the electron emission region of the second electrode or not through a detection device; if so, the assembly fixing structure is welded on the second electrode by laser to form an integrated structure; if not, the position of the first electrode and the position of the assembly and fixation structure are adjusted through the fastener, then the position is detected and adjusted until the central hole position of the first electrode is aligned with the central hole position or the electron emission area of the second electrode, and then the first electrode and the second electrode are fixed to form an integrated structure.
2. The method of assembling for facilitating centering of an electron gun electrode according to claim 1, wherein said S100 further comprises the steps of:
s10, machining a plurality of mounting holes in a ceramic ring, and polishing two end faces of the ceramic ring to be smooth;
s20, welding and fixing a metal ring on one end face of the ceramic ring, or welding and fixing two metal rings on two end faces of the ceramic ring to form an assembly and fixing structure;
s30, processing bosses matched with the assembly fixing structure on the surfaces of the first electrode and the second electrode, and reserving welding spaces between the bosses and the metal ring;
s40, machining a plurality of mounting hole sites on the first electrode and the second electrode, corresponding to the mounting hole sites on the ceramic ring, and polishing and flattening the surfaces of the first electrode and the second electrode.
3. The assembling method for facilitating centering of an electron gun electrode according to claim 2, wherein said S300 further comprises S400 steps of:
s400, fixing a new electrode on a new assembly and fixing structure, aligning and placing the new assembly and fixing structure on the integrated structure, and sequentially penetrating the fastener through the integrated structure, the new assembly and fixing structure and the new electrode;
s500, observing whether the central hole site of the new electrode is aligned with the central hole site of the integrated structure, adjusting the positions of the new electrode and the new assembly fixing structure through the fastener until the central hole site of the new electrode is aligned with the central hole site of the integrated structure, and then fixing to form a new integrated structure;
and S600, finishing electrode assembly according to the requirement, or re-assembling a new electrode, and returning to the step S400.
4. An assembling and fixing structure for facilitating the centering of an electron gun electrode, characterized by being applied to the assembling method for facilitating the centering of an electron gun electrode according to any one of claims 1 to 3; comprises a ceramic ring (1) and a metal ring (2); one or two metal rings (2) are matched with the ceramic ring (1); the metal ring (2) is fixed on the end face of the ceramic ring (1); the first assembly fixing structure is arranged between the first electrode (3) and the second electrode (4) and is used for connecting and fixing the first electrode (3) and the second electrode (4).
5. The assembling and fixing structure for facilitating the centering of the electron gun electrodes according to claim 4, wherein one or two bosses (6) are arranged on each of the first electrode (3) and the second electrode (4); the boss (6) is arranged on the end surfaces of the first electrode (3) and the second electrode (4).
6. The mounting fixture for facilitating centering of electron gun electrodes according to claim 5, wherein the diameter of the boss (6) is smaller than the inner diameter of the metal ring (2); the boss (6) can penetrate through the metal ring (2) and is abutted against the end face of the ceramic ring (1); the height of the boss (6) is larger than that of the metal ring (2).
7. The assembly fixture for facilitating centering of electron gun electrodes according to claim 4, wherein the ceramic ring (1) is provided with a plurality of mounting holes (7); the installation hole sites (7) are matched with the fasteners; a plurality of mounting hole sites (7) are correspondingly arranged on the first electrode (3) and the second electrode (4) and pass through the fasteners; the first electrode (3), the ceramic ring (1) and the second electrode (4) can be connected.
8. The assembly fixture for facilitating centering of electron gun electrodes according to claim 4, wherein the metal ring (2) is a kovar metal ring, a copper metal ring or a nickel metal ring.
9. The assembly fixture for facilitating centering of electron gun electrodes according to claim 4, wherein after the first electrode (3) and the second electrode (4) are connected to form an integral structure by the first assembly fixture, a second assembly fixture is fixed on the third electrode (5), and is connected to the integral structure by the second assembly fixture.
10. The assembling and fixing structure for facilitating the centering of the electron gun electrodes according to claim 4, wherein the central portions of the first electrode (3) and the second electrode (4) are provided with a central hole site (8) or an electron emission region (9); the central hole site (8) is a horn-shaped hole, a square hole or a round hole.
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| CN116978763B (en) | 2023-12-12 |
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