CN115091187A - High-precision alignment tool and alignment assembly method for terahertz traveling wave tube - Google Patents
High-precision alignment tool and alignment assembly method for terahertz traveling wave tube Download PDFInfo
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- CN115091187A CN115091187A CN202210897515.0A CN202210897515A CN115091187A CN 115091187 A CN115091187 A CN 115091187A CN 202210897515 A CN202210897515 A CN 202210897515A CN 115091187 A CN115091187 A CN 115091187A
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- 238000000034 method Methods 0.000 title claims abstract description 11
- 238000006073 displacement reaction Methods 0.000 claims abstract description 23
- 238000010894 electron beam technology Methods 0.000 claims description 24
- 230000001276 controlling effect Effects 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P19/00—Machines for simply fitting together or separating metal parts or objects, or metal and non-metal parts, whether or not involving some deformation; Tools or devices therefor so far as not provided for in other classes
- B23P19/10—Aligning parts to be fitted together
Abstract
The invention relates to a high-precision alignment tool and an alignment assembly method for a terahertz traveling wave tube, and belongs to the field of electronic equipment. The electron gun tool and the slow-wave structure tool respectively comprise a leveling tool, a multi-axis precision displacement platform and a base, and two equal-height blocks and bases which are combined into a right-angle shape; a multi-axis precision displacement platform and two equal-height blocks which are combined into a right-angle shape are arranged on the same horizontal plane of the base; a leveling tool is arranged at the upper end part of the multi-axis precision displacement platform; an electron gun or a slow-wave structure is arranged in the leveling tool; the electron gun tooling and the slow-wave structure tooling are arranged oppositely and arranged on the base. The invention utilizes the laser measuring instrument and two equal-height blocks to compensate errors of non-contact measurement of the electron gun at different heights, and enables the centering precision of the electron gun and the slow wave system to reach the micron order through the laser measuring instrument and the tooling die, thereby improving the working reliability and stability of the traveling wave tube.
Description
Technical Field
The invention relates to a high-precision alignment tool and an alignment assembly method for a terahertz traveling wave tube, and belongs to the field of electronic equipment.
Background
For the terahertz traveling wave tube, the structural size of parts of the terahertz traveling wave tube is greatly reduced, the terahertz traveling wave tube enters a micrometer scale, the size of an electron beam which can be provided is reduced due to the sharply reduced structural size, if an electron gun and a slow wave structure cannot be aligned at high precision, electrons cannot advance according to a preset track, the output power and the electrical performance index required by the terahertz traveling wave tube are difficult to achieve, and the working reliability of the traveling wave tube is influenced. For the ribbon electron beam, there are two difficulties, firstly, the ribbon electron beam cannot adopt a centering form of a circular electron injection hole axis type, and the central coordinate of the ribbon electron beam is difficult to determine; secondly, due to the small size and the strip-shaped electron beam, the measurement can be carried out only in a non-contact measurement mode, and the height of the electron beam has unavoidable measurement errors. Therefore, a high-precision alignment tool is urgently needed to be developed to meet the application requirement of high-precision alignment of the terahertz traveling wave tube.
Disclosure of Invention
The invention provides a terahertz traveling wave tube high-precision alignment tool and an alignment assembly method, which are used for assisting mechanical and optical technologies, combining a banded electron beam electron gun and a slow wave system structure, and enabling the alignment precision of the electron gun and the slow wave system to reach the micrometer level through a laser measuring instrument and a tool die, thereby improving the working reliability and stability of the traveling wave tube.
The invention adopts the following technical scheme:
the high-precision alignment tool for the terahertz traveling-wave tube comprises an electron gun tool and a slow-wave structure tool; the electron gun tool and the slow-wave structure tool respectively comprise a leveling tool, a multi-axis precision displacement platform, a base, two equal-height blocks which are combined into a right-angle shape and a base; a multi-axis precision displacement platform and two equal-height blocks which are combined into a right-angle shape are arranged on the same horizontal plane of the base; a leveling tool is arranged at the upper end part of the multi-axis precision displacement platform; an electronic gun or a slow-wave structure is arranged in the leveling tool;
the electron gun tooling and the slow wave structure tooling are arranged on the base in a manner that the electron gun and the slow wave structure are oppositely arranged.
According to the high-precision alignment tool for the terahertz traveling-wave tube, the leveling tool is used for adjusting the horizontal angle of the cathode surface of an electron gun; the leveling tool comprises an electron gun assembling base, an electron gun assembling slotted sleeve, an electron gun assembling adjusting seat and an adjusting screw; a cavity is arranged in the electron gun assembly base, and an electron gun assembly adjusting seat which is concentrically arranged is arranged in the cavity; an electron gun assembling slotted sleeve for installing an electron gun is arranged in the electron gun assembling adjusting seat; and adjusting screws which are longitudinally and transversely arranged are arranged in the electron gun assembly adjusting seat.
According to the high-precision alignment tool for the terahertz traveling-wave tube, the electron gun assembly base is further provided with transversely arranged adjusting screws, and the adjusting screws are used for adjusting the electron gun assembly adjusting base.
The invention relates to an assembling method of a high-precision alignment tool for a terahertz traveling wave tube, which comprises the following alignment assembling steps:
firstly, preparing a base for installing an electron gun tool and a slow-wave structure; two equal-height blocks and a multi-axis precision displacement platform are respectively installed and fixed on the base;
secondly, respectively installing a leveling tool on the multi-axis precision displacement platform, and installing an electronic gun and a slow-wave structure in the leveling tool;
leveling the upper surface of the cathode of the electron gun through a leveling tool, and controlling the accuracy of the horizontal surface within 2 microns;
step four, two equal-height blocks which are vertical to each other are used as an X, Y axis coordinate system in the electron gun tool; calibrating the position of the cathode of the electron gun in the X, Y axis coordinate system by using a laser measuring instrument;
regulating the vertical positioning surface of the electron beam channel of the slow wave structure to be horizontal through a leveling tool, and enabling two vertical side surfaces of an electron beam channel hole to be parallel to vertical surfaces of the fixed two equal-height blocks respectively; the positioning surface is a plane opposite to the electron gun and is vertical to the electron beam channel hole, and the position of the electron beam channel hole is positioned at the center of the slow wave;
taking two equal-height blocks which are perpendicular to each other in the slow-wave structure tool as an X, Y axial coordinate system, and calibrating the position of a hole of an electron column channel in the slow-wave structure in the X, Y axial coordinate system by using a laser measuring instrument;
step seven, keeping the central coordinates of the cathode of the electron gun and the electron beam channel of the slow-wave structure in the step four and the step six consistent;
step eight, turning the electron gun and the slow wave structure by 90 degrees in the step eight, and arranging the electron gun and the slow wave structure on the base; and the assembly of alignment of a cathode and a slow wave in the terahertz travelling wave tube strip-shaped electron beam electron gun is realized by sliding and attaching on the base.
According to the assembling method of the terahertz traveling-wave tube high-precision alignment tool, in the first step, the height difference of two equal-height blocks is within +/-0.5 mm; the two equal-height blocks are perpendicular to each other and the included angle between the equal-height blocks is 90 degrees +/-5 degrees.
Advantageous effects
According to the invention, the leveling tool is adopted to adjust the level of the electronic gun, and the three coordinates of the leveling tool are determined by adopting the multi-axis precision displacement platform, so that the determination of the X-axis coordinate, the Y-axis coordinate and the R-axis coordinate of the electronic gun is realized.
The invention utilizes the laser measuring instrument and two equal-height blocks to compensate the error of the non-contact measurement of the electron gun at different heights. According to the requirement of the terahertz travelling wave tube on stable work, by means of mechanical and optical technologies, a ribbon electron beam electron gun and a slow wave system structure are combined, and the centering precision of the electron gun and the slow wave system reaches the micrometer level through a laser measuring instrument and a tooling die, so that the working reliability and stability of the travelling wave tube are improved.
Drawings
FIG. 1 is a schematic view of an electron gun leveling structure according to the present invention;
FIG. 2 is a schematic top view of an electron gun leveling arrangement of the present invention;
FIG. 3 is a schematic view of the structure at A in FIG. 1;
FIG. 4 is a schematic layout diagram of an electron gun leveling tool and a slow wave leveling tool according to the present invention.
In the figure, 1-a leveling tool, 2-a multi-axis precision displacement platform, 3-a base, 4-an equal-height block I, 5-an equal-height block II, 6-an electron gun assembly base, 7-an electron gun assembly slotted sleeve, 8-an electron gun assembly adjusting seat, 9-an adjusting screw, 10-a base and 11-a cathode.
Detailed Description
In order to make the purpose and technical solution of the embodiments of the present invention clearer, the technical solution of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.
As shown in fig. 1: a tool capable of accurately aligning an electron gun and a slow-wave structure and an assembly method are characterized in that: the device comprises two sets of leveling tools 1, two sets of multi-axis precise displacement platforms 2, a base 3, an equal-height block I4 and an equal-height block II 5, wherein each leveling tool comprises an electron gun assembling base 6, an electron gun assembling slotted sleeve 7, an electron gun assembling adjusting seat 8 and an adjusting screw 9. The specific assembly is shown in the figure.
The application, the terahertz traveling-wave tube high-precision alignment tool and the assembling method thereof are described in more detail, and the terahertz traveling-wave tube high-precision alignment tool is characterized by comprising the following steps:
1. assembling a multi-axis precision displacement platform 2 on a base 3, and assembling a leveling tool 1 on the multi-axis precision displacement platform 2;
2. adjusting the surface of a cathode 11 in the electron gun to be horizontal by three adjusting screws, and controlling the precision within 2 microns; the cathode 11 of the electron gun is square, and the edge part is used as a trimming reference.
3. Measuring the distance from the end face of the base to the face of a cathode 11 in the electron gun, adjusting the heights of the equal-height block 1 and the equal-height block 2 to be consistent with the equal-height block (the heights are within +/-0.5 mm), and installing the equal-height block I and the equal-height block II on the base 3 by means of pins and screws to ensure that the equal-height blocks are perpendicular to each other and the included angle is 90 +/-5';
4. adjusting the R coordinate of the multi-axis precision displacement platform, and enabling two edges of the cathode 11 to be respectively parallel to an X, Y axis (two vertical surfaces of the equal-height block) by means of a laser measuring instrument, wherein the parallelism is controlled within 2 microns;
5. measuring the central coordinates of the cathode 11 in the electron gun relative to the equal-height blocks by adopting a laser measuring instrument;
6. repeating the step 1, assembling the other multi-axis precision displacement platform 2 on the base 3, and assembling the slow-wave structure leveling tool on the multi-axis precision displacement platform 2;
7. the vertical surface of an electron beam channel of the slow-wave structure is leveled by an adjusting screw, and the precision is controlled within 2 microns;
8. measuring the distance from the end face of the base to the vertical positioning face of the electron beam channel of the slow wave structure, adjusting the heights of the two equal-height blocks to be consistent with each other (the heights are within +/-0.5 mm), and installing the equal-height block 1 and the equal-height block 2 on the base 3 by means of pins and screws to ensure that the two equal-height blocks are perpendicular to each other and form an included angle of 90 +/-5';
9. adjusting the R coordinate of the multi-axis precision displacement platform, and enabling two vertical side surfaces of the electron beam channel hole of the slow wave structure to be respectively parallel to an X, Y axis (two vertical surfaces of the equal-height block) by means of a laser measuring instrument, wherein the parallelism is controlled within 2 microns;
10. measuring the central coordinates of the electron beam channel of the slow wave structure relative to the contour block by adopting a laser measuring instrument;
11. adjusting an X, Y axis of the multi-axis precision displacement platform to enable an electron beam channel of the slow wave structure to be consistent with the center coordinate of a cathode 11 in the electron gun, and controlling the precision within 2 microns;
12. the two tools with the same central coordinates are turned over by 90 degrees and slide on the vertical base 10 to be attached, so that the assembly of the alignment of the cathode 11 and the slow wave in the terahertz travelling wave tube strip electron beam electron gun can be realized.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (5)
1. The utility model provides a terahertz travelling wave tube high accuracy alignment frock which characterized in that: the device comprises an electron gun tool and a slow-wave structure tool; the electron gun tool and the slow-wave structure tool respectively comprise a leveling tool, a multi-axis precision displacement platform, a base, two equal-height blocks which are combined into a right-angle shape and a base; a multi-axis precision displacement platform and two equal-height blocks which are combined into a right-angle shape are arranged on the same horizontal plane of the base; a leveling tool is arranged at the upper end part of the multi-axis precision displacement platform; an electron gun or a slow-wave structure is arranged in the leveling tool;
and the electron gun and the slow wave structure are oppositely arranged in the electron gun tool and the slow wave structure tool and are arranged on the base.
2. The terahertz traveling-wave tube high-precision alignment tool according to claim 1, characterized in that: the leveling tool is used for adjusting the horizontal angle of the cathode surface of the electron gun; the leveling tool comprises an electron gun assembling base, an electron gun assembling slotted sleeve, an electron gun assembling adjusting seat and an adjusting screw; a cavity is arranged in the electron gun assembly base, and an electron gun assembly adjusting seat which is concentrically arranged is arranged in the cavity; an electron gun assembling slotted sleeve for installing an electron gun is arranged in the electron gun assembling adjusting seat; and adjusting screws which are longitudinally and transversely arranged are arranged in the electron gun assembly adjusting seat.
3. The terahertz traveling-wave tube high-precision alignment tool according to claim 2, characterized in that: the electron gun assembling base is also provided with a transversely arranged adjusting screw which is used for adjusting the electron gun assembling adjusting base.
4. The assembly method of the terahertz traveling-wave tube high-precision alignment tool according to any one of claims 1 to 3 is characterized in that: the alignment assembly steps are as follows:
firstly, preparing a base for installing an electron gun tool and a slow-wave structure; two equal-height blocks and a multi-axis precision displacement platform are respectively installed and fixed on the base;
secondly, respectively installing a leveling tool on the multi-axis precision displacement platform, and installing an electronic gun and a slow-wave structure in the leveling tool;
leveling the upper surface of the cathode of the electron gun through a leveling tool, and controlling the accuracy of the horizontal surface within 2 microns;
step four, taking two equal-height blocks which are perpendicular to each other in the electronic gun tool as an X, Y axis coordinate system; calibrating the position of the cathode of the electron gun in the X, Y axial coordinate system by using a laser measuring instrument;
regulating the vertical positioning surface of the slow-wave structure electron beam channel to be horizontal through a leveling tool, and enabling two vertical side surfaces of an electron beam channel hole to be parallel to vertical surfaces of the two equal-height blocks respectively;
taking two equal-height blocks which are perpendicular to each other in the slow-wave structure tool as an X, Y axial coordinate system, and calibrating the position of a hole of an electron column channel in the slow-wave structure in the X, Y axial coordinate system by using a laser measuring instrument;
step seven, keeping the central coordinates of the cathode of the electron gun and the electron beam channel of the slow-wave structure in the step four and the step six consistent;
step eight, turning the electron gun and the slow wave structure by 90 degrees in the step eight, and arranging the electron gun and the slow wave structure on the base; and the assembly of alignment of a cathode and a slow wave in the terahertz travelling wave tube strip-shaped electron beam electron gun is realized by sliding and attaching on the base.
5. The assembling method of the terahertz traveling-wave tube high-precision alignment tool according to claim 4 is characterized in that: in the step one, the height difference of the two equal-height blocks is within +/-0.5 mm; the two equal-height blocks are perpendicular to each other and the included angle between the equal-height blocks is 90 degrees +/-5 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210897515.0A CN115091187A (en) | 2022-07-28 | 2022-07-28 | High-precision alignment tool and alignment assembly method for terahertz traveling wave tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210897515.0A CN115091187A (en) | 2022-07-28 | 2022-07-28 | High-precision alignment tool and alignment assembly method for terahertz traveling wave tube |
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| Publication Number | Publication Date |
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| CN115091187A true CN115091187A (en) | 2022-09-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210897515.0A Pending CN115091187A (en) | 2022-07-28 | 2022-07-28 | High-precision alignment tool and alignment assembly method for terahertz traveling wave tube |
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| CN (1) | CN115091187A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116978763A (en) * | 2023-09-25 | 2023-10-31 | 电子科技大学 | Assembly method and assembly fixing structure convenient for aligning electron gun electrode center |
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2022
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| FR1258160A (en) * | 1959-06-11 | 1961-04-07 | Telefunken Gmbh | Correction device for traveling wave tubes |
| US3156845A (en) * | 1959-09-30 | 1964-11-10 | Telefunken Gmbh | Conductor centering arrangement for traveling field tube |
| US4013917A (en) * | 1974-12-03 | 1977-03-22 | Nippon Electric Company, Ltd. | Coupled cavity type slow-wave structure for use in travelling-wave tube |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116978763A (en) * | 2023-09-25 | 2023-10-31 | 电子科技大学 | Assembly method and assembly fixing structure convenient for aligning electron gun electrode center |
| CN116978763B (en) * | 2023-09-25 | 2023-12-12 | 电子科技大学 | Assembly method and assembly fixing structure convenient for aligning electron gun electrode center |
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