CN114023616A - Assembling device and assembling method applied to high-energy electron gun - Google Patents
Assembling device and assembling method applied to high-energy electron gun Download PDFInfo
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- CN114023616A CN114023616A CN202111208885.0A CN202111208885A CN114023616A CN 114023616 A CN114023616 A CN 114023616A CN 202111208885 A CN202111208885 A CN 202111208885A CN 114023616 A CN114023616 A CN 114023616A
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- coaxiality
- dial indicator
- electron gun
- assembly
- seat
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000000919 ceramic Substances 0.000 claims description 34
- 239000000523 sample Substances 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 239000008358 core component Substances 0.000 abstract description 6
- 238000010894 electron beam technology Methods 0.000 abstract description 6
- 238000005259 measurement Methods 0.000 abstract description 3
- 238000010009 beating Methods 0.000 description 2
- 239000000306 component Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
Abstract
The invention belongs to the field of high-energy electron guns, and particularly relates to an assembling device and an assembling method applied to a high-energy electron gun. The assembling device comprises a base, a rotating platform, a three-jaw chuck, a dial indicator support and a dial indicator, wherein the rotating platform and the dial indicator support are respectively installed on the base, the three-jaw chuck is installed on the rotating platform, and the dial indicator is installed on the dial indicator support. The assembly device provided by the invention can timely adjust and ensure the coaxiality of key parts through the matched arrangement of the rotating table, the three-jaw chuck, the dial indicator bracket and the dial indicator, and can realize that an electronic gun is installed while measuring the coaxiality by taking a dial indicator; by adopting the assembling method of the invention, the coaxiality between the electron gun core components (the cathode filament, the grid, the focusing electrode and the anode) is improved, the problems of poor electron beam performance and the like caused by random assembly are avoided, a uniform method is provided for assembling the high-energy electron gun, and the measurement result has guiding significance for designing the electron gun.
Description
Technical Field
The invention belongs to the field of high-energy electron guns, and particularly relates to an assembling device and an assembling method applied to a high-energy electron gun.
Background
The electron gun is used as the emitting source of the high-energy electron diffractometer and is widely applied to the processes of preparing films, such as molecular beam epitaxy, pulsed laser beam deposition and the like, so that the performance of the electron beam is very critical, and the beam current and the beam spot are key indexes for judging the performance of the electron beam. The factors influencing the beam current and the beam spot are many, besides the size and the distance of the polar plate of the electron gun, the improper assembly of the electron gun can also result in the failure to achieve the ideal beam current and beam spot value, for example, the poor coaxiality of the core component of the electron gun can cause only part of the electron beams to pass through the light path, so that the beam current is too small. At present, the coaxiality of the electron gun manufactured in China still needs to be enhanced, so that an assembly method capable of measuring and ensuring the coaxiality of the core components of the electron gun is necessary.
Disclosure of Invention
In view of the above problems, the present invention provides an assembling apparatus and an assembling method for a high-energy electron gun.
The purpose of the invention is realized by the following technical scheme:
the utility model provides an assembly quality for high energy electron gun, includes base, revolving stage, three-jaw chuck, percentage table support and percentage table, the revolving stage reaches the percentage table support install respectively in on the base, three-jaw chuck install in on the revolving stage, along with the revolving stage is rotatory, the percentage table install in on the percentage table support.
The assembling method applied to the high-energy electron gun adopts the assembling device for assembling and comprises the following steps:
the method comprises the following steps: clamping the focusing barrel by using a three-jaw chuck, enabling the probe of the dial indicator to be in contact with the peripheral surface of the focusing barrel, rotating the rotating table for a circle, and measuring the coaxiality of the focusing barrel by observing the deflection of the pointer of the dial indicator;
step two: connecting a ceramic seat with a focusing cylinder, measuring the coaxiality of the ceramic seat by taking the focusing cylinder as a reference, enabling a dial indicator probe to be in contact with the peripheral surface of the ceramic seat, rotating a rotating table for a circle, measuring the coaxiality of the ceramic seat by observing the deflection of a pointer of the dial indicator, and controlling the coaxiality of the ceramic seat within a specified numerical range by continuously adjusting;
step three: fixing the cathode assembly on a ceramic seat, measuring the coaxiality of the cathode assembly by using a dial indicator on the basis of a focusing cylinder, and controlling the coaxiality of the cathode assembly within a specified numerical range through continuous adjustment;
step four: taking down the part which is finished by the first, second and third steps from the three-jaw chuck and placing the part into a clamping groove of a seat ring, respectively connecting the seat ring with an anode cylinder and an anode cap of an anode assembly by using a small support rod, connecting the seat ring with an electrode flange by using a large support rod, connecting four electrode leads of a cathode assembly with four electrode columns at the electrode flange, placing the electrode flange in the three-jaw chuck and clamping the electrode flange, enabling a dial indicator probe to be in contact with the peripheral surface of the electrode flange, rotating the rotary table for a circle, and if the deviation of the dial indicator is large, lightly knocking the opposite direction of the deviation of the electrode flange by using a soft hammer to ensure the coaxiality of the electrode flange;
step five: the probe of the dial indicator is contacted with the peripheral surface of the seat ring, the coaxiality of the seat ring is measured by taking the electrode flange as a reference, and the coaxiality of the seat ring is controlled within a specified numerical range through continuous adjustment;
step six: and (3) enabling a dial indicator probe to be in contact with the inner circumferential surface of the anode hole of the anode cap, and measuring the coaxiality of the inner circumferential surface of the anode hole by using the electrode flange as a reference.
And in the second step, if the coaxiality of the ceramic seat is poor, the deviation direction of the ceramic seat can be judged by observing the pointer of the dial indicator, then the ceramic seat is slowly knocked towards the reverse direction of the deviation by using a soft hammer, and if the pointer of the dial indicator is greatly deviated, the deviation can be reduced by adjusting the cross pin for fixing the ceramic seat, so that the coaxiality of the ceramic seat is ensured.
In the third step, if the pointer deviation of the dial indicator is large, the deviation can be reduced by adjusting the cross pin for fixing the cathode assembly, so that the coaxiality of the cathode assembly is ensured.
In the fifth step, if the deviation of the pointer of the dial indicator is large, the deviation can be adjusted by adjusting the inner hexagonal nail for fixing the seat ring, so that the coaxiality of the seat ring is ensured.
The invention has the advantages and positive effects that:
1. the assembly device provided by the invention can timely adjust and ensure the coaxiality of key parts through the matched arrangement of the rotating table, the three-jaw chuck, the dial indicator bracket and the dial indicator, and can realize that an electronic gun is installed while measuring the coaxiality by taking a dial indicator;
2. by adopting the assembling method of the invention, the coaxiality between the electron gun core components (the cathode filament, the grid, the focusing electrode and the anode) is improved, the problems of poor electron beam performance and the like caused by random assembly are avoided, a uniform method is provided for assembling the high-energy electron gun, and the measurement result has guiding significance for designing the electron gun.
Drawings
FIG. 1 is a schematic view of the overall structure of the mounting device of the present invention;
FIG. 2 is a schematic diagram of an embodiment of the assembly method of the present invention;
fig. 3 is a second schematic view of the assembly method of the present invention.
In the figure: the device comprises a dial indicator 1, a dial indicator probe 2, a three-jaw chuck 3, a rotary table 4, a cathode assembly 5, a ceramic seat 6, a focusing cylinder 7, an anode hole 8, a seat ring 9, an electrode flange 10, a base 11 and a dial indicator support 12.
Detailed Description
The invention is described in further detail below with reference to figures 1-3.
An assembly device applied to a high-energy electron gun is shown in figure 1 and comprises a base 11, a rotating platform 4, a three-jaw chuck 3, a dial indicator support 12 and a dial indicator 1, wherein the rotating platform 4 and the dial indicator support 12 are respectively installed on the base 11, the three-jaw chuck 3 is installed on the rotating platform 4 and rotates along with the rotating platform 4, and the dial indicator 1 is installed on the dial indicator support 12. Through the cooperation setting of revolving stage 4, three-jaw chuck 3, percentage table support 12 and percentage table 1, the axiality of key part can in time be adjusted and guaranteed, can realize the installation electron gun simultaneously of the axiality of surveying of beating the table.
For an electrostatic gun, the core components of the electrostatic gun mainly comprise a cathode filament, a grid, a focusing electrode and an anode, namely the coaxiality of the four components needs to be ensured, the coaxiality of the cathode filament and the grid can be realized by adjusting a jackscrew and observing under a microscope, and the coaxiality of the grid, the focusing electrode and the anode needs to be ensured by a meter making assembly method. The assembling method of the present invention will be described by taking 15KV electron gun as an example, because the high-energy electron guns with different accelerating voltages have different structures.
As shown in fig. 2. The method comprises the following steps: clamping a focusing barrel 7 by using a three-jaw chuck 3, enabling a dial indicator probe 2 to be in contact with the outer peripheral surface of the focusing barrel 7, slowly rotating a rotating table 4 for a circle, and measuring the coaxiality of the focusing barrel 7 by observing the deflection of a pointer of a dial indicator 1, wherein the precision is within 0.01 mm; step two: connecting a ceramic seat 6 with a focusing cylinder 7, measuring the coaxiality of the ceramic seat 6 by taking the focusing cylinder 7 as a reference, enabling a dial indicator probe 2 to be in contact with the peripheral surface of the ceramic seat 6, slowly rotating a rotating table 4 for a circle, measuring the coaxiality of the ceramic seat 6 by observing the deflection of a pointer of a dial indicator 1, and continuously adjusting to control the coaxiality of the ceramic seat 6 within 0.02 mm; step three: fixing the cathode assembly 5 (the cathode assembly 5 comprises a filament and a grid) on the ceramic base 6, using the focusing cylinder 7 as a reference, measuring the coaxiality of the filament base of the cathode assembly 5 by using the dial indicator 1, and controlling the coaxiality of the filament base of the cathode assembly 5 within 0.05mm by continuously adjusting.
As shown in fig. 3. Step four: through the first, second and third steps, the coaxiality of the cathode assembly and the focusing barrel 7 is guaranteed, the parts which are installed in the first, second and third steps are taken down from the three-jaw chuck 3 and placed in the clamping groove of the seat ring 9, the seat ring 9 is connected with the anode barrel and the anode cap of the anode assembly respectively through the small supporting rods, the seat ring 9 and the electrode flange 10 are connected through the large supporting rod, four electrode leads of the cathode assembly are connected with four electrode columns at the position of the electrode flange 10, the electrode flange 10 is placed in the three-jaw chuck 3 and clamped tightly, the dial indicator probe 2 is in contact with the outer peripheral surface of the electrode flange 10, the rotating table 4 is rotated slowly for a circle, and if the pointer of the dial indicator 1 has large deviation, the coaxiality of the electrode flange 10 can be guaranteed through lightly knocking the opposite direction of the electrode flange 10 deviation through a soft hammer; step five: enabling a dial indicator probe 2 to be in contact with the outer peripheral surface of the seat ring 9, taking the electrode flange 10 as a reference, and measuring the coaxiality of the seat ring 9 by using a meter, wherein the coaxiality of the seat ring 9 is controlled within 0.05mm through continuous adjustment; step six: the dial indicator probe 2 is contacted with the inner circumferential surface of the anode hole 8 of the anode cap, the coaxiality of the inner circumferential surface of the anode hole 8 is measured by using the electrode flange 10 as a reference, and the coaxiality can be controlled within 0.05mm by continuously adjusting. Assuming no processing error, the coaxiality of the grid and the focusing electrode can be controlled within 0.05mm and the coaxiality of the focusing electrode and the anode can be controlled within 0.1mm by the meter making assembly method.
Through the above-mentioned a series of assembly operations of beating the table, can improve the axiality of electron gun greatly, when discovering that the part axiality is relatively poor, mainly improve through two kinds of modes: for parts such as flanges and the like, the offset can be improved by lightly knocking with a soft hammer; for the cathode assembly and the like, the offset amount can be improved by adjusting the screw for fixing the member. The method for assembling the watch is suitable for high-energy electron guns of different models, but the specific implementation method needs to be determined according to the actual structure of the gun, wherein the priority of the object to be measured and how to transmit errors are important to consider. Taking a 15KV high-energy electron gun as an example, since the coaxiality between the focusing electrode and the anode is not easy to be measured directly, the error between the two is transmitted through the ceramic holder 6 and the holder ring 9.
Specifically, in the second step, if the coaxiality of the ceramic holder 6 is poor, the offset direction can be judged by observing the pointer of the dial indicator 1, then the ceramic holder 6 is slowly knocked by a soft hammer in the opposite direction of the offset, and if the pointer of the dial indicator 1 is greatly offset, for example, exceeding 0.05mm, the offset can be reduced by adjusting the cross pin for fixing the ceramic holder 6, so that the coaxiality of the ceramic holder 6 can be ensured.
Specifically, in the third step, if the pointer of the dial gauge 1 is deviated greatly, for example, more than 0.05mm, the deviation can be reduced by adjusting the cross pin for fixing the cathode assembly 5, and the coaxiality of the cathode assembly 5 can be ensured.
Specifically, in the fifth step, if the deviation of the pointer of the dial indicator 1 is large, for example, exceeds 0.05mm, the deviation can be adjusted by adjusting the hexagon socket head cap screw for fixing the seat ring 9, so as to ensure the coaxiality of the seat ring 9.
The working principle is as follows:
through the matched arrangement of the rotating platform 4, the three-jaw chuck 3, the dial indicator bracket 12 and the dial indicator 1, the coaxiality of key parts can be adjusted in time and ensured, and the electronic gun can be installed while measuring the coaxiality by striking the dial indicator; by adopting the assembling method of the invention, the coaxiality between the electron gun core components (the cathode filament, the grid, the focusing electrode and the anode) is improved, the problems of poor electron beam performance and the like caused by random assembly are avoided, a uniform method is provided for assembling the high-energy electron gun, and the measurement result has guiding significance for designing the electron gun.
Claims (5)
1. An assembly quality for high energy electron gun, characterized by: including base (11), revolving stage (4), three-jaw chuck (3), percentage table support (12) and percentage table (1), revolving stage (4) reach percentage table support (12) install respectively in on base (11), three-jaw chuck (3) install in on revolving stage (4), along with revolving stage (4) are rotatory, percentage table (1) install in on percentage table support (12).
2. An assembly method applied to a high-energy electron gun is characterized in that: assembly with the assembly device according to claim 1, comprising the following steps:
the method comprises the following steps: clamping a focusing barrel (7) by using a three-jaw chuck (3), enabling a dial indicator probe (2) to be in contact with the outer peripheral surface of the focusing barrel (7), rotating a rotating table (4) for a circle, and measuring the coaxiality of the focusing barrel (7) by observing the deflection of a pointer of a dial indicator (1);
step two: connecting a ceramic seat (6) with a focusing cylinder (7), measuring the coaxiality of the ceramic seat (6) by taking the focusing cylinder (7) as a reference, enabling a dial indicator probe (2) to be in contact with the peripheral surface of the ceramic seat (6), rotating a rotating table (4) for a circle, measuring the coaxiality of the ceramic seat (6) by observing the deflection of a pointer of a dial indicator (1), and controlling the coaxiality of the ceramic seat (6) within a specified numerical range by continuous adjustment;
step three: fixing the cathode assembly (5) on a ceramic seat (6), measuring the coaxiality of the cathode assembly (5) by using a dial indicator (1) with a focusing cylinder (7) as a reference, and controlling the coaxiality of the cathode assembly (5) within a specified numerical range through continuous adjustment;
step four: taking down the part which is installed after the first step, the second step and the third step from the three-jaw chuck (3) and placing the part into a clamping groove of a seat ring (9), respectively connecting the seat ring (9) with an anode cylinder and an anode cap of an anode assembly by using a small support rod, connecting the seat ring (9) with an electrode flange (10) by using a large support rod, connecting four electrode leads of a cathode assembly with four electrode columns at the electrode flange (10), placing the electrode flange (10) in the three-jaw chuck (3) and clamping the electrode flange, enabling a dial indicator probe (2) to be in contact with the outer peripheral surface of the electrode flange (10), rotating the rotary table (4) for a circle, and if the pointer of the dial indicator (1) has large deviation, lightly knocking the opposite direction of the electrode flange (10) to deviate by using a soft hammer to ensure the coaxiality of the electrode flange (10);
step five: the dial indicator probe (2) is contacted with the outer peripheral surface of the seat ring (9), the coaxiality of the seat ring (9) is measured by using the electrode flange (10) as a reference, and the coaxiality of the seat ring (9) is controlled within a specified numerical range by continuous adjustment;
step six: a dial indicator probe (2) is contacted with the inner circumferential surface of an anode hole (8) of an anode cap, and the coaxiality of the inner circumferential surface of the anode hole (8) is measured by marking a meter with an electrode flange (10) as a reference.
3. The assembly method as claimed in claim 2, applied to a high-energy electron gun, wherein: in the second step, if the coaxiality of the ceramic seat (6) is poor, the offset direction of the ceramic seat (6) can be judged by observing the pointer of the dial indicator (1), then the ceramic seat (6) is slowly knocked towards the opposite direction of the offset by using a soft hammer, and if the pointer of the dial indicator (1) is large in offset, the deviation can be reduced by adjusting a cross pin for fixing the ceramic seat (6), so that the coaxiality of the ceramic seat (6) is ensured.
4. The assembly method as claimed in claim 2, applied to a high-energy electron gun, wherein: in the third step, if the pointer deviation of the dial indicator (1) is large, the deviation can be reduced by adjusting the cross pin for fixing the cathode assembly (5), and the coaxiality of the cathode assembly (5) is ensured.
5. The assembly method as claimed in claim 2, applied to a high-energy electron gun, wherein: in the fifth step, if the pointer deviation of the dial indicator (1) is large, the deviation can be adjusted by adjusting an inner hexagon nail for fixing the seat ring (9), so that the coaxiality of the seat ring (9) is ensured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111208885.0A CN114023616B (en) | 2021-10-18 | 2021-10-18 | Assembling device and assembling method applied to high-energy electron gun |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111208885.0A CN114023616B (en) | 2021-10-18 | 2021-10-18 | Assembling device and assembling method applied to high-energy electron gun |
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| CN114023616A true CN114023616A (en) | 2022-02-08 |
| CN114023616B CN114023616B (en) | 2023-10-31 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116978763A (en) * | 2023-09-25 | 2023-10-31 | 电子科技大学 | Assembly method and assembly fixing structure convenient for aligning electron gun electrode center |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2276629Y (en) * | 1997-01-08 | 1998-03-18 | 成都市红光实业股份有限公司 | Glass blub axiality measuring apparatus |
| CN102901433A (en) * | 2012-10-31 | 2013-01-30 | 宁波培源电器制造有限公司 | Coaxiality detector |
| CN110739195A (en) * | 2019-07-24 | 2020-01-31 | 中国科学院电子学研究所 | Cathode and focusing electrode coaxiality adjusting device, system and method for electron guns |
| CN111266844A (en) * | 2020-03-09 | 2020-06-12 | 西北核技术研究院 | Automatic coaxiality adjusting device and method |
-
2021
- 2021-10-18 CN CN202111208885.0A patent/CN114023616B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2276629Y (en) * | 1997-01-08 | 1998-03-18 | 成都市红光实业股份有限公司 | Glass blub axiality measuring apparatus |
| CN102901433A (en) * | 2012-10-31 | 2013-01-30 | 宁波培源电器制造有限公司 | Coaxiality detector |
| CN110739195A (en) * | 2019-07-24 | 2020-01-31 | 中国科学院电子学研究所 | Cathode and focusing electrode coaxiality adjusting device, system and method for electron guns |
| CN111266844A (en) * | 2020-03-09 | 2020-06-12 | 西北核技术研究院 | Automatic coaxiality adjusting device and method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116978763A (en) * | 2023-09-25 | 2023-10-31 | 电子科技大学 | Assembly method and assembly fixing structure convenient for aligning electron gun electrode center |
| CN116978763B (en) * | 2023-09-25 | 2023-12-12 | 电子科技大学 | Assembly method and assembly fixing structure convenient for aligning electron gun electrode center |
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| Publication number | Publication date |
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| CN114023616B (en) | 2023-10-31 |
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