CN116945231A - Manipulator testing method and manipulator testing equipment - Google Patents

Abstract

The application relates to a manipulator testing method and manipulator testing equipment. The manipulator testing method comprises a precision detection step, wherein the precision detection step comprises at least one of a telescopic positioning precision detection step, a translational positioning precision detection step and a lifting positioning precision detection step; telescopic positioning precision of the detection step comprises the following steps: the method comprises the steps of controlling the manipulator to translate to a detection station, controlling the manipulator to extend out, and detecting first position data of the manipulator in an extending state by using a vision system; the translation positioning accuracy detection step comprises the following steps: controlling the manipulator to translate a second preset distance, and detecting second position data of the manipulator by using a vision system; the lifting positioning precision detection step comprises the following steps: and controlling the mechanical arm of the mechanical arm to ascend or descend by a preset height, and detecting third position data of the mechanical arm by using the distance sensor.

Description

Manipulator testing method and manipulator testing equipment

Technical Field

The application relates to the technical field of mechanical arm performance test, in particular to a mechanical arm test method and mechanical arm test equipment.

Background

In modern industrial production, robots are increasingly used for handling workpieces or products. In a wafer manufacturing process, a semiconductor device such as a wafer is generally transported by a robot. Because the semiconductor devices such as wafers are integrated with high-value chips, the requirements on the positioning accuracy, reliability and service life of the manipulator in the process of carrying are extremely high, and the phenomena of faults, falling of the semiconductor devices or position deviation are avoided as much as possible in the process of carrying the semiconductor devices. Therefore, higher requirements are put on performance test and verification of the manipulator.

However, the test and verification of the existing manipulator needs manual deep participation, severely depends on human experience, and cannot meet the test and verification requirements of the handling manipulator of the semiconductor device, which has compact structure, flexible and reliable movement and high repeated positioning precision.

Disclosure of Invention

Based on the above, it is necessary to provide a manipulator testing method and a manipulator testing device for improving the above-mentioned drawbacks, aiming at the problems that the testing and verification of the manipulator in the prior art needs manual deep participation, severely depends on human experience, and cannot meet the testing and verification requirements of the handling manipulator for semiconductor devices with compact structure, flexible and reliable movement and high repeated positioning precision.

The mechanical arm testing method comprises a precision detection step, wherein the precision detection step comprises at least one of a telescopic positioning precision detection step, a translational positioning precision detection step and a lifting positioning precision detection step;

the telescopic positioning accuracy detection step comprises the following steps: controlling the manipulator to move to a detection station, controlling the manipulator arm of the manipulator to extend out of a first preset distance, and then controlling a vision system to detect and acquire first position data of the manipulator arm of the manipulator in an extending state, so that the telescopic positioning precision of the manipulator arm of the manipulator is obtained;

the translational positioning accuracy detection step comprises the following steps: controlling the manipulator to translate a second preset distance, and then controlling the vision system to detect and acquire second position data of the manipulator, so as to obtain translation positioning precision of the manipulator;

the lifting positioning precision detection step comprises the following steps: and controlling the mechanical arm of the mechanical arm to ascend or descend by a preset height, and then controlling the distance sensor to detect and acquire third position data of the mechanical arm, so as to obtain the ascending and descending positioning precision of the mechanical arm.

In one embodiment, the precision detecting step further includes a rotational positioning precision detecting step;

the rotational positioning accuracy detection step includes: and controlling the mechanical arm of the mechanical arm to rotate by a preset angle, reversely rotating the preset angle, and controlling the vision system to respectively detect and acquire fourth position data before the mechanical arm of the mechanical arm rotates and fifth position data after the mechanical arm rotates, so as to obtain the rotation positioning precision of the mechanical arm.

In one embodiment, the rotational positioning accuracy detecting step is repeatedly performed a plurality of times to obtain a plurality of the rotational positioning accuracy; and analyzing each rotary positioning precision to obtain repeated rotary positioning precision of the mechanical arm.

In one embodiment, when the precision detecting step includes the telescopic positioning precision detecting step, the telescopic positioning precision detecting step is repeatedly performed a plurality of times to obtain a plurality of telescopic positioning precision; analyzing each telescopic positioning precision to obtain repeated telescopic positioning precision of a mechanical arm of the mechanical arm;

when the precision detection step includes the translational positioning precision detection step, repeatedly executing the translational positioning precision detection step a plurality of times to obtain a plurality of translational positioning precision; analyzing each translational positioning precision to obtain repeated translational positioning precision of the manipulator;

when the precision detection step includes the lifting positioning precision detection step, repeatedly executing the lifting positioning precision detection step for a plurality of times to obtain a plurality of lifting positioning precision; and analyzing each lifting positioning precision to obtain repeated lifting positioning precision of the mechanical arm.

In one embodiment, the method for testing a manipulator further includes a feeding step, where the feeding step includes:

controlling the manipulator to move to a material taking station, and then driving the manipulator arm of the manipulator to stretch and retract and pick up a sample positioned at the material taking station;

and controlling the manipulator to move to the discharging station, and then driving the manipulator arm of the manipulator to stretch and retract and releasing the sample to the bearing table.

In one embodiment, the method further comprises the following steps between the step of driving the mechanical arm of the mechanical arm to stretch and retract and pick up the sample at the material taking station and the step of controlling the mechanical arm to move to the material discharging station:

controlling the manipulator to move to a positioning station, driving the manipulator of the manipulator to stretch and retract, and releasing a sample to an edge finder arranged corresponding to the positioning station;

controlling the edge searching machine to search edges and position the sample positioned on the edge searching machine;

and after the edge searching positioning is finished, controlling the mechanical arm of the mechanical arm to stretch and retract and picking up the sample positioned on the edge searching machine.

In one embodiment, the feeding step is further followed by a blanking step, where the blanking step includes:

controlling the manipulator to move to the discharging station, and then driving the manipulator of the manipulator to stretch and retract and pick up a sample positioned on the bearing table;

and controlling the manipulator to move to a blanking station, and then driving the manipulator of the manipulator to stretch and retract and releasing the sample to the blanking station.

In one embodiment, the loading step and the unloading step are respectively and circularly executed for samples with different specifications for a plurality of times, and the times of successful carrying by the manipulator are recorded, so that the carrying success rate is obtained;

if the carrying success rate of the sample with a certain specification is greater than or equal to a preset value, the manipulator is compatible with the sample with the specification;

if the carrying success rate of the sample with a certain specification is smaller than the preset value, the manipulator is not compatible with the sample with the specification.

The manipulator testing equipment is provided with a discharging station and a detecting station; the manipulator testing equipment comprises a bearing table, a vision system and a distance sensor;

the bearing table is arranged corresponding to the discharging station, and the vision system and the distance sensor are arranged corresponding to the detecting station; the manipulator is used for moving between the discharging station and the detecting station;

the bearing table is used for bearing samples conveyed to the discharging station by the mechanical arm of the mechanical arm; the vision system and the distance sensor are used for detecting and acquiring position data of a mechanical arm of the mechanical arm positioned at the detection station.

In one embodiment, the manipulator testing device further comprises a mounting bracket, the vision system comprises a camera mounted on the mounting bracket, and the detection station is located within a detection range of the camera; the distance sensor is installed in the installing support, and the detection station is located in the detection range of the distance sensor.

According to the manipulator testing method and the manipulator testing equipment, in the actual testing process, at least one of the telescopic positioning precision, the translational positioning progress and the lifting positioning precision of the manipulator can be automatically finished through the mutual matching of the manipulator, the vision system and the distance sensor, so that the degree of manual intervention is greatly reduced, and the reliability of test data is improved.

Drawings

FIG. 1 is a schematic diagram of a manipulator testing apparatus according to an embodiment of the present application;

FIG. 2 is a schematic view of a partial structure of the manipulator testing apparatus shown in FIG. 1;

FIG. 3 is a flow chart of a method for testing a manipulator according to an embodiment of the application;

fig. 4 is a flowchart of the precision detection step in the manipulator test method shown in fig. 3.

Detailed Description

In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. The present application may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the application, whereby the application is not limited to the specific embodiments disclosed below.

In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

Referring to fig. 1 to 4, an embodiment of the application provides a method for testing a manipulator, which includes a precision detection step S20, wherein the precision detection step S20 includes at least one of a telescopic positioning precision detection step S21, a translational positioning precision detection step S23, and a lifting positioning precision detection step S24.

The telescoping positioning accuracy detection step S21 includes: the manipulator 100 is controlled to move to a detection station (not shown), and the manipulator arm of the manipulator 100 is controlled to extend out a first preset distance; and then controlling the vision system to detect and acquire first position data of the mechanical arm 100 in the stretching state, thereby obtaining the stretching positioning precision of the mechanical arm 100. Specifically, first, the manipulator 100 is controlled to translate a distance, until reaching the detection station; then, the mechanical arm of the mechanical arm 100 is controlled to extend out of a first preset distance (the mechanical arm of the mechanical arm 100 is located in a detection range of a vision system at the moment), first position data (such as position coordinates) of a calibration block on the tail end of the mechanical arm is detected and acquired by utilizing the vision system, and the first position data detected by the vision system is compared with the first standard position coordinates, so that the telescopic positioning precision of the mechanical arm 100 is obtained; finally, the robot arm of the robot arm 100 is controlled to retract.

It should be noted that, the first standard position coordinate refers to a position where the calibration block on the arm of the manipulator 100 should reach without an error. In fact, because there is an error, the position of the calibration block on the mechanical arm of the manipulator 100 detected by the vision system deviates from the standard position, and thus the telescopic positioning accuracy of the mechanical arm of the manipulator 100 can be obtained by comparing the position coordinate (i.e., the first position data) detected by the vision system with the first standard position coordinate.

Further, the telescopic positioning accuracy detecting step S21 is repeatedly performed a plurality of times, thereby obtaining a plurality of telescopic positioning accuracy values of the robot arm 100, and the repeated telescopic positioning accuracy of the robot arm 100 is obtained by performing data processing (for example, averaging) on the plurality of telescopic positioning accuracy values.

The translational positioning accuracy detection step S23 includes: the manipulator 100 is controlled to translate by a second preset distance (at this time, the manipulator arm of the manipulator 100 is located in the detection range of the vision system), and then the vision system is controlled to detect and acquire the second position data of the manipulator arm of the manipulator 100, so as to obtain the translational positioning accuracy of the manipulator 100. Specifically, first, the manipulator 100 is controlled to translate a distance (when the end of the manipulator arm of the manipulator 100 is within the detection range of the vision system); then, a distance between the end of the arm of the robot 100 and the vision system is detected using the vision system, thereby obtaining second position data (e.g., position coordinates) of the arm of the robot 100. And comparing the second position data detected by the vision system with the second standard position coordinates, thereby obtaining the translational positioning precision of the manipulator 100.

Further, the translational positioning accuracy detecting step S23 is repeatedly performed a plurality of times, thereby obtaining a plurality of translational positioning accuracy values of the manipulator 100, and the repeated translational positioning accuracy of the manipulator 100 is obtained by performing data processing (e.g., averaging) on the plurality of translational positioning accuracy values.

The lifting positioning accuracy detection step S24 includes: the manipulator arm of the manipulator 100 is controlled to ascend or descend by a preset height, and then the distance sensor 400 is controlled to detect and acquire third position data (for example, position coordinates) of the manipulator arm of the manipulator 100, so as to obtain ascending and descending positioning accuracy of the manipulator arm of the manipulator 100. Specifically, first, the robot arm of the robot arm 100 is controlled to ascend or descend by a preset height (at this time, the end of the robot arm 100 is located within the detection range of the distance sensor 400); then, the distance sensor 400 detects the distance between the distal end of the arm of the robot 100 and the distance sensor 400, thereby obtaining third position data (for example, position coordinates) of the arm of the robot 100, and the position coordinates detected by the distance sensor 400 are compared with the third standard position coordinates, thereby obtaining the lifting positioning accuracy of the arm of the robot 100.

Further, the elevation positioning accuracy detecting step S24 is repeatedly performed a plurality of times, thereby obtaining a plurality of elevation positioning accuracy values of the robot arm 100, and the repeated elevation positioning accuracy of the robot arm 100 is obtained by performing data processing (for example, averaging) on the plurality of elevation positioning accuracy values.

According to the manipulator testing method, in the actual testing process, at least one of the telescopic positioning precision, the translational positioning progress and the lifting positioning precision of the manipulator 100 can be automatically finished through the mutual matching of the manipulator, the vision system and the distance sensor, so that the degree of manual intervention is greatly reduced, and the reliability of test data is improved.

In particular, in the embodiment, the precision detecting step S20 further includes a rotational positioning precision detecting step S22. The rotational positioning accuracy detection step S22 includes: the robot arm of the robot 100 is controlled to rotate a predetermined angle and then reversely rotate the predetermined angle. And, the control vision system detects and acquires fourth position data (for example, position coordinates) before the rotation movement and fifth position data (for example, position coordinates) after the rotation movement of the mechanical arm 100, so as to compare the position coordinates before and after the rotation movement (that is, the fourth position data and the fifth position data) to obtain a position difference of the mechanical arm 100 before and after the rotation movement, that is, obtain the rotation positioning precision of the mechanical arm 100.

Further, the rotational positioning accuracy detecting step S22 is repeatedly performed a plurality of times to obtain a plurality of rotational positioning accuracy values of the robot arm 100, and the data processing (for example, averaging) is performed on the plurality of rotational positioning accuracy values to obtain the repeated rotational positioning accuracy of the robot arm 100.

In one embodiment, the precision detecting step S20 is performed sequentially in the order of the telescopic positioning precision detecting step S21, the rotational positioning precision detecting step S22, the translational positioning precision detecting step S23, and the elevating positioning precision detecting step S24. Of course, the steps of detecting the expansion and contraction positioning accuracy S21, detecting the rotation positioning accuracy S22, detecting the translation positioning accuracy S23, and detecting the lift positioning accuracy S24 are not limited to the steps, and may be performed in other order in other embodiments, and are not limited thereto.

Referring to fig. 1, fig. 2, and fig. 3, in an embodiment of the application, the method for testing a manipulator further includes a loading step S10. The feeding step S10 includes:

and S11, controlling the manipulator 100 to move to the material taking station A1, and then driving the manipulator arm of the manipulator 100 to stretch and retract and picking up the sample positioned at the material taking station A1. Specifically, at the material taking station A1, the mechanical arm of the mechanical arm 100 is driven to extend, so that the mechanical arm of the mechanical arm 100 is closer to the sample until the sample is sucked, and then the mechanical arm of the mechanical arm 100 is driven to retract again, so that the action of picking up the sample once is completed. The process of sucking the sample by the mechanical arm of the mechanical arm 100 may further include other actions, such as ascending or descending, which is not limited herein.

And S12, controlling the manipulator 100 to move to the positioning station A2, and then driving the manipulator arm of the manipulator 100 to stretch and retract and releasing the sample to the edge finder 600 arranged corresponding to the positioning station A2. Specifically, at the positioning station A2, the mechanical arm of the mechanical arm 100 is driven to extend out first, so that the sample adsorbed by the mechanical arm of the mechanical arm 100 is located above the edge finder 600; then driving the mechanical arm of the mechanical arm 100 to stop adsorbing the sample, and releasing the sample onto the edge finder 600; then, the mechanical arm of the driving mechanical arm 100 is retracted, and the action of releasing the sample onto the edge finder 600 is completed once. The process of releasing the sample by the manipulator arm of the manipulator 100 may further include other actions, such as ascending or descending, which are not limited herein.

S13, controlling the edge finder 600 to find and position the edges of the samples on the edge finder 600. Specifically, the edge finder 600 adjusts the position of the sample thereon until the center of the sample coincides with the center of the edge finder 600.

And S14, after the edge searching positioning is completed, controlling the manipulator 100 to stretch and retract and picking up the sample on the edge searching machine. Specifically, at the positioning station A2, the mechanical arm of the mechanical arm 100 is driven to extend out first, so that the mechanical arm of the mechanical arm 100 is located above the sample on the edge finder 600; then, the mechanical arm of the driving mechanical arm 100 sucks the sample on the edge finder 600; the mechanical arm of the mechanical arm 100 is then driven to retract, and the action of picking up the sample at the edge finder 600 is completed once. In this way, the edge finder 600 is set to find edges and position samples, so that the carrying positions of the mechanical arm 100 on the samples are more accurate, the actual production operation process of the mechanical arm 100 is simulated more truly, and the accuracy of test data is further improved.

And S15, controlling the manipulator 100 to move to the discharging station A3, and then driving the manipulator arm of the manipulator 100 to stretch and retract and releasing the sample to a bearing table 200 arranged corresponding to the discharging station A3. Specifically, when the manipulator 100 translates to the discharging station A3, the manipulator arm of the manipulator 100 is controlled to extend out, so that the sample on the manipulator arm is located above the bearing table 200; then, the robot arm of the robot arm 100 is controlled to release the sample to the stage 200; finally, the mechanical arm of the mechanical arm 100 is controlled to retract, and the action of releasing the sample to the bearing table 200 is completed once. The sample may be a wafer, but other semiconductor devices may be mentioned, and the application is not limited thereto.

In this way, a sample is provided in the testing process, so that the manipulator 100 can truly complete the material taking and discharging action and the carrying action, the testing process is closer to the actual production operation, so that the consistency between the testing data and the working data in the practice of the manipulator 100 is ensured, namely, the testing data tends to be more in actual working conditions rather than theoretical data, the accuracy of the testing data is further ensured, and the testing and verifying requirements of the manipulator 100 for carrying the semiconductor device can be better met.

In one embodiment, the method further includes a blanking step S30 after the loading step S10. The blanking step S30 includes:

and S31, controlling the manipulator 100 to move to the discharging station A3, and then driving the manipulator arm of the manipulator 100 to stretch and retract and picking up the sample on the bearing table 200. Specifically, at the discharging station A3, first, the mechanical arm of the manipulator 100 is driven to extend, so that the mechanical arm of the manipulator 100 approaches the sample on the carrying table 200; then, the mechanical arm of the driving mechanical arm 100 sucks the sample on the carrying table 200; finally, the mechanical arm of the driving mechanical arm 100 is retracted, and the sample is adsorbed, and at this time, the action of picking up the sample once is completed.

And S32, controlling the manipulator 100 to move to the blanking station A6, and then driving the manipulator arm of the manipulator 100 to stretch and retract and releasing the sample to the blanking station A6. Specifically, at the blanking station A6, first, the mechanical arm of the mechanical arm 100 is driven to extend, so that the sample on the mechanical arm of the mechanical arm 100 is located in the receiving bin 800 at the blanking station A6; then, the robot arm of the robot arm 100 stops adsorbing the sample so that the sample is released into the receiving bin 800; finally, the mechanical arm of the mechanical arm 100 is controlled to retract, and the action of releasing the sample once is completed.

It should be noted that, in some embodiments, the feeding step S10 precedes the precision detecting step S20, and the discharging step S30 follows the precision detecting step S20. Of course, in other embodiments, the feeding step S10 and the discharging step S30 are both before or after the accuracy detecting step S20, which is not limited herein.

With continued reference to fig. 1-3, in an embodiment, the manipulator 100 has two arms, one of which is designated as a first arm and the other as a second arm for convenience of description. In order to detect and verify both mechanical arms, after the precision detection step S20 is performed by using the first mechanical arm, the precision detection step S20 is repeatedly performed by using the second mechanical arm, so that the telescopic positioning precision, the rotary positioning precision, the translational positioning precision and the lifting positioning precision of the first mechanical arm are obtained, and the telescopic positioning precision, the rotary positioning precision, the translational positioning precision and the lifting positioning precision of the second mechanical arm are obtained.

Further, in the manipulator testing method, the feeding step S10 is performed by using the first manipulator, and the accuracy detecting step S20 is performed by using the first manipulator. Then, the accuracy detecting step S20 is performed again with the No. two robot arms. Then, the blanking step S30 is performed by using the mechanical arm No. two. On one hand, the telescopic positioning precision, the rotary positioning precision, the translational positioning precision and the lifting positioning precision of the first mechanical arm and the second mechanical arm are obtained; and on the other hand, the feeding step S10 is performed through the first mechanical arm, so that the stability of the first mechanical arm for carrying the sample is verified, and similarly, the discharging step S30 is performed through the second mechanical arm, so that the stability of the second mechanical arm for carrying the sample is verified.

In the embodiment, the loading step S10 and the unloading step S30 are respectively and circularly performed for samples with different specifications, and the number of times of successful conveyance by the manipulator 100 is recorded, so as to obtain the conveyance success rate. If the success rate of carrying the sample with a certain specification is greater than or equal to the preset value, the manipulator 100 is compatible with the sample with the specification; if the success rate of transporting the sample of a certain specification is smaller than the preset value, the manipulator 100 is not compatible with the sample of the specification. Alternatively, the preset value may be 100%. Of course, in other embodiments, the preset value may be 99%, 98% or 97%, etc., and may be set according to the actual process requirements, which is not limited herein.

It is understood that the samples of different specifications may be one or more of wafer size, wafer thickness, wafer warp value.

For example, in order to verify whether the manipulator 100 is compatible with a sample of a first size (e.g., an 8-inch wafer), the manipulator 100 is used to carry the sample of the first size, the above-mentioned loading step S10 and the unloading step S30 are circularly performed for multiple times, in this process, the number of times that the manipulator 100 carries successfully is recorded, and the carrying success rate of the sample of the first size is obtained by dividing the number of times that the manipulator 100 carries successfully by the total number of times of the execution. If the success rate of the handling is greater than or equal to the predetermined value, it is determined that the manipulator 100 is compatible with the first-size sample. If the success rate of the transportation is less than the preset value, it is determined that the manipulator 100 is not compatible with the first-size sample.

Similarly, in order to verify whether the manipulator 100 is compatible with the second-size sample (e.g. a 12-inch wafer), the manipulator 100 is used to carry the second-size sample, the above-mentioned loading step S10 and unloading step S30 are circularly performed for multiple times, in this process, the number of times of carrying success of the manipulator 100 is recorded, and the carrying success rate of the second-size sample is obtained by dividing the number of times of carrying success by the total number of times of carrying. If the success rate of the handling is greater than or equal to the preset value, it is determined that the manipulator 100 is compatible with the second-size sample. If the success rate of the transportation is less than the preset value, it is determined that the manipulator 100 is not compatible with the second-size sample. Similarly, it can be verified whether the manipulator 100 is compatible with a sample of a certain specification or specifications.

It should be noted that the successful conveyance means that the sample is conveyed from the material taking station A1 to the material discharging station A6 by the manipulator 100, and no abnormality such as sample dropping, sample breakage, etc. occurs during the conveyance.

Further, in the process of circularly executing the feeding step S10 and the discharging step S30 a plurality of times, the accuracy detecting step S20 is executed periodically or aperiodically. Thus, the compatibility test of samples with different specifications is realized, and meanwhile, the data such as the telescopic positioning precision, the rotary positioning precision, the translational positioning precision, the lifting positioning precision and the like of the manipulator 100 can be measured.

In the embodiment, in the manipulator testing method, the feeding step S10 and the discharging step S30 are circularly performed several times, for example, long-term operation for three months is performed. The operation state of the manipulator 100 is monitored during the cycle execution, and abnormal conditions such as sample falling and sample breakage are recorded. And, the precision detecting step S20 is executed periodically or aperiodically to measure the data of telescoping positioning precision, rotating positioning precision, translational positioning precision, lifting positioning precision and the like. Thus, the long-term reliability and the service life of the robot 100 are tested and verified by the long-term cyclic operation.

Based on the manipulator testing method, the application further provides manipulator testing equipment. Referring to fig. 1 and 2, the manipulator testing apparatus has a discharging station A3 and a detecting station. The manipulator testing apparatus includes a carrier 200, a vision system, and a distance sensor 400. The carrier 200 is arranged corresponding to the discharge station A3 and the vision system and distance sensor 400 are arranged corresponding to the detection station. The robot 100 is used to carry samples for movement between the blanking station A3 and the inspection station. The carrying table 200 is used for carrying samples carried to the discharging station A3 by the mechanical arm of the mechanical arm 100. The vision system is configured to detect and acquire position data (e.g., first position data, second position data, fourth position data, fifth position data) of the robot arm 100 at the detection station. The distance sensor 400 is used for detecting and acquiring position data (such as third position data) of the mechanical arm 100 located at the detection station. In this way, at the detection station, the telescopic positioning accuracy, the translational positioning accuracy, and the rotational positioning accuracy of the manipulator 100 can be detected and obtained by the vision system, and the elevation positioning accuracy of the manipulator 100 can be detected and obtained by the distance sensor 400. The detailed detection process is described in the above-mentioned method for testing the manipulator, and will not be described herein.

In an embodiment, the manipulator testing device further includes a mounting bracket 500, the vision system includes a camera 301 mounted on the mounting bracket 500, and the detection station is located in a detection range of the camera 301, so that when the manipulator 100 moves to the detection station, the camera 301 of the vision system can detect a position coordinate of the manipulator 100, and further obtain a telescopic positioning precision, a translational positioning precision and a rotational positioning precision of the manipulator 100. The distance sensor 400 is also installed on the installation support 500, and the detection station is also located in the detection range of the distance sensor 400, so that when the manipulator 100 moves to the detection station, the distance sensor 400 can detect the position coordinates of the mechanical arm of the manipulator 100, and further the lifting positioning precision of the manipulator 100 is obtained. In this way, the camera 301 and the distance sensor 400 of the vision system are integrally mounted on the mounting bracket 500, so that the manipulator 100 can move or rotate at the detection station conveniently on one hand, and the equipment structure is more compact, and space is saved on the other hand. Preferably, the distance sensor 400 may employ a laser displacement sensor. It should be noted that, because laser has a certain harm to eyes of a person, a laser displacement sensor with a higher security level needs to be selected to eliminate the harm to the person, so that the security of a tester is ensured in the whole testing process.

Further, the mounting bracket 500 is further provided with a light source 302, and the light source 302 is used for polishing the mechanical arm of the manipulator 100 moving to the detection station, which is beneficial to improving the imaging quality of the camera 301, and further improving the detection accuracy of the vision system.

Further, the carrying platform 200 is also mounted on the mounting bracket 500 and is located below the camera 301, so that the mechanical arm of the manipulator 100 can reach the detection station after releasing the sample onto the carrying platform 200 by a small distance, and further perform detection of the related data.

In particular embodiments, the manipulator testing apparatus also has a positioning station A2. The robot testing apparatus further includes an edge finder 600. The edge finder 600 is arranged corresponding to the positioning station A2 such that when the robot arm 100 moves to the positioning station A2, the edge finder 600 can be used to perform edge-finding positioning on the sample on the robot arm of the robot arm 100 (i.e., such that the center of the sample on the robot arm of the robot arm 100 coincides with the center of the edge finder 600). The specific configuration of the edge finder 600 is not limited herein, as long as the edge finder can be used for locating the edge of the sample on the arm of the robot 100.

In particular embodiments, the manipulator testing apparatus further includes a material taking station A1 and a material discharging station A6. The manipulator testing apparatus further comprises an upper bin 700 and a receiving bin 800, both for storing samples. The feeding bin 700 is arranged corresponding to the material taking station A1, so that when the manipulator 100 moves to the material taking station A1, the manipulator of the manipulator 100 can absorb the sample in the feeding bin 700. The receiving bin 800 is arranged corresponding to the blanking station A6, so that when the manipulator 100 moves to the blanking station A6, the manipulator of the manipulator 100 can release the sucked sample into the receiving bin 800. The specific structures of the loading bin 700 and the receiving bin 800 are not limited herein, as long as the storage and the in-out of the samples can be realized.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.

Claims (10)

1. The mechanical arm testing method is characterized by comprising a precision detection step, wherein the precision detection step comprises at least one of a telescopic positioning precision detection step, a translational positioning precision detection step and a lifting positioning precision detection step;

the telescopic positioning accuracy detection step comprises the following steps: controlling the manipulator (100) to move to a detection station, controlling the mechanical arm of the manipulator (100) to extend out of a first preset distance, and then controlling a vision system to detect and acquire first position data of the mechanical arm of the manipulator (100) in an extending state, so as to obtain the telescopic positioning precision of the mechanical arm of the manipulator (100);

the translational positioning accuracy detection step comprises the following steps: controlling the manipulator (100) to translate a second preset distance, and then controlling the vision system to detect and acquire second position data of the manipulator (100), so as to obtain translation positioning precision of the manipulator (100);

the lifting positioning precision detection step comprises the following steps: and controlling the mechanical arm of the mechanical arm (100) to ascend or descend by a preset height, and then controlling the distance sensor (400) to detect and acquire third position data of the mechanical arm (100), so as to obtain the ascending and descending positioning precision of the mechanical arm (100).

2. The method according to claim 1, wherein the precision detecting step further includes a rotational positioning precision detecting step;

the rotational positioning accuracy detection step includes: and controlling the mechanical arm of the mechanical arm (100) to rotate by a preset angle and reversely rotate by the preset angle, and controlling the vision system to respectively detect and acquire fourth position data before the mechanical arm of the mechanical arm (100) rotates and fifth position data after the mechanical arm rotates, so as to obtain the rotation positioning precision of the mechanical arm (100).

3. The robot testing method of claim 2, wherein the rotational positioning accuracy detecting step is repeatedly performed a plurality of times to obtain a plurality of the rotational positioning accuracy; and analyzing each rotational positioning precision to obtain repeated rotational positioning precision of the mechanical arm (100).

4. The manipulator testing method according to claim 1, wherein when the precision detecting step includes the telescopic positioning precision detecting step, the telescopic positioning precision detecting step is repeatedly performed a plurality of times to obtain a plurality of the telescopic positioning precision; analyzing each telescopic positioning precision to obtain repeated telescopic positioning precision of a mechanical arm of the mechanical arm (100);

when the precision detection step includes the translational positioning precision detection step, repeatedly executing the translational positioning precision detection step a plurality of times to obtain a plurality of translational positioning precision; analyzing each translational positioning accuracy to obtain a repeated translational positioning accuracy of the manipulator (100);

when the precision detection step includes the lifting positioning precision detection step, repeatedly executing the lifting positioning precision detection step for a plurality of times to obtain a plurality of lifting positioning precision; and analyzing each lifting positioning precision to obtain repeated lifting positioning precision of the mechanical arm (100).

5. The method according to any one of claims 1 to 4, further comprising a loading step, the loading step comprising:

controlling the manipulator (100) to move to a material taking station (A1), and then driving the mechanical arm of the manipulator (100) to stretch and retract and pick up a sample positioned at the material taking station (A1);

and controlling the manipulator (100) to move to the discharging station (A3), and then driving the manipulator of the manipulator (100) to stretch and retract and releasing the sample onto a bearing table (200) arranged corresponding to the discharging station (A3).

6. The method according to claim 5, characterized in that between the step of driving the robotic arm of the manipulator (100) to retract and pick up the sample located at the material taking station (A1) and the step of controlling the movement of the manipulator (100) to the material discharging station (A3), further comprising the steps of:

controlling the manipulator (100) to move to a positioning station (A2), and then driving the manipulator of the manipulator (100) to stretch and retract and releasing a sample to an edge finder (600) arranged corresponding to the positioning station (A2);

controlling the edge finder (600) to find edges and position samples on the edge finder (600);

and after the edge searching positioning is finished, controlling the mechanical arm of the mechanical arm (100) to stretch and retract and picking up the sample positioned on the edge searching machine (600).

7. The method according to claim 5, further comprising a blanking step after the loading step, the blanking step comprising:

controlling the manipulator (100) to move to the discharging station (A3), and then driving the manipulator of the manipulator (100) to stretch and retract and pick up a sample positioned on the bearing table (200);

and controlling the manipulator (100) to move to the blanking station (A6), and then driving the manipulator of the manipulator (100) to stretch and retract and releasing the sample to the blanking station (A6).

8. The manipulator testing method according to claim 7, wherein the loading step and the unloading step are respectively and cyclically performed a plurality of times for samples of different specifications, and the number of times that the manipulator (100) is successfully handled is recorded, thereby obtaining a handling success rate;

if the success rate of carrying the samples with a certain specification is greater than or equal to a preset value, the manipulator (100) is compatible with the samples with the specification;

if the success rate of carrying the sample with a certain specification is smaller than the preset value, the manipulator (100) is not compatible with the sample with the specification.

9. A manipulator testing device, characterized in that it has a discharging station (A3) and a detecting station; the manipulator testing equipment comprises a bearing table (200), a vision system and a distance sensor (400);

-the loading table (200) is arranged in correspondence of the blanking station (A3), the vision system and the distance sensor (400) being arranged in correspondence of the detection station; the manipulator (100) is used for moving between the discharging station (A3) and the detecting station;

the bearing table (200) is used for bearing samples conveyed to the discharging station (A3) by the mechanical arm of the mechanical arm (100); the vision system and the distance sensor (400) are used for detecting and acquiring position data of a mechanical arm of the mechanical arm (100) positioned at the detection station.

10. The robotic testing device of claim 9, further comprising a mounting bracket (500), the vision system comprising a camera (301) mounted on the mounting bracket (500), the detection station being located within a detection range of the camera (301); the distance sensor (400) is mounted on the mounting bracket (500), and the detection station is located in the detection range of the distance sensor (400).