CN117339912A - Automatic wobble plate resistance measuring device based on machine vision - Google Patents

Abstract

The invention discloses an automatic swaying disc resistance measuring device based on machine vision, and aims to solve the defects of poor swaying disc position accuracy, high labor intensity and low working efficiency in the process of measuring resistance of semiconductor products. The invention comprises an automatic identification wobble plate unit and an automatic identification resistance measurement unit, wherein a conveying line is arranged on a host machine, and a tray is arranged on the conveying line; the automatic identification wobble plate unit includes: a vibration plate in which a product is loaded; the upper visual sensor is used for acquiring the gesture and position information of the product in the vibration disc; a suction nozzle for sucking the product in the vibration tray and loading the product on the tray; the automatic identification resistance measurement unit includes: positioning a visual sensor to acquire the position information of the product on the tray; the resistance detector is connected with the detection probe, and the resistance detector detects the resistance of the product through the detection probe, so that the precision of the wobble plate and the accuracy of resistance detection are improved; reduces the labor intensity and improves the working efficiency.

Description

An automatic pendulum resistance measuring device based on machine vision

Technical field

The invention relates to the field of semiconductor detection, and more specifically, to an automatic swing plate resistance measuring device based on machine vision.

Background technique

At present, the semiconductor industry needs to conduct a large number of tests on various products, such as resistance performance testing of products. With the rapid development and growth of the semiconductor industry, the demand for placement and testing is growing day by day. Most of the existing post-distribution inspection systems are composed of purely manual or semi-automatic equipment. The products are manually observed with eyes and then placed on the carrier plate. Then, the products on the plate are inspected one by one under a microscope with a hand-held inspection instrument. , and process the NG results according to the judgment results of the instrument. Due to the large number of product specifications, the demand for production is increasing day by day. The most important thing is that the products are relatively small, and the overall dimensions of the products are mostly between 2 and 5 mm. Especially when resistance detection is required, the smallest contact point is only 0.3 mm, which requires the use of a microscope manually. Detection is carried out, and manual detection may cause unstable contacts, which affects the accuracy of the detection value. Therefore, this method has many disadvantages. The position consistency of the products placed on the carrier plate is not good, the accuracy of the detection operation is biased, and the production efficiency is low. It cannot meet the requirements for accuracy and efficiency, and it requires a lot of workers and labor costs. big.

Contents of the invention

In order to overcome the above shortcomings, the present invention provides an automatic swing plate resistance measuring device based on machine vision, which can improve the accuracy of the swing plate and thereby improve the accuracy of resistance detection; reduce labor intensity and improve work efficiency.

In order to solve the above technical problems, the present invention adopts the following technical solution: an automatic pendulum plate resistance measuring device based on machine vision, including an automatic identification plate pendulum unit and an automatic identification resistance measurement unit installed on a host machine. A transmission line is installed on the host machine. Set pallets on the conveyor line;

The automatic recognition plating unit includes:

A vibrating plate, in which the product is loaded;

Use the visual sensor to obtain the attitude and position information of the product in the vibrating plate;

The suction nozzle sucks the products in the vibration plate and loads them onto the tray;

The automatic identification resistance measurement unit includes:

Positioning vision sensors to obtain position information of products on the pallet;

Resistance detector, the resistance detector is connected to the detection probe, the detection probe moves towards the product and contacts the detection contact on the product, and the resistance detector detects the resistance of the product through the detection probe.

When working, the product is placed on the vibrating plate, and the pallet is transported to the swinging position through the conveyor line. The vibrating plate works to flip the products up and down. According to the probability, a certain proportion of the products face up, and the upper visual sensor obtains the posture of the product in the vibrating plate. and position information, position the products that meet the plating requirements, and send the position information to the host computer. Based on the acquired position information, the host computer controls the movement of the nozzle to complete the suction of the product at that position and transfer it to the large tray. After the pallet is placed, it is transported to the automatic identification resistance measurement unit through the conveyor line. The positioning visual sensor obtains the position information of the product on the pallet and sends the position information to the host computer. The host computer controls the detection probe to move to the product and interact with the product. The detection contacts are in contact, and the resistance detector detects the resistance of the product through the detection probe.

An upper vision sensor is used to obtain the position of the product, and the position information is transmitted to the host computer. The host computer controls the suction nozzle to accurately reach the product position, and accurately places the product to the designated position on the tray, with high precision in the placement position. When measuring resistance, the accurate position of the product is obtained through the positioning vision sensor, and the position information is transmitted to the host computer. The host computer controls the detection probe to accurately touch the contacts on the product, and the position is accurate and reliable. This automatic swing plate resistance measuring device based on machine vision can improve the accuracy of the swing plate, thereby improving the accuracy of resistance detection; reducing labor intensity and improving work efficiency.

Preferably, a lower vision sensor is provided below the suction nozzle, and the suction nozzle is rotated. The lower vision sensor obtains the posture and position information of the product on the suction nozzle, and adjusts the posture of the product on the suction nozzle to the appropriate position through the rotation of the suction nozzle.

The lower vision sensor takes a bottom shot of the product picked up by the suction nozzle to obtain accurate product position information to determine the status and position compensation value. The posture of the product is in the required state through the rotation of the suction nozzle. The position compensation value determines the movement of the suction nozzle. position to compensate for placing the product on the pallet.

Preferably, a side-axis vision sensor is provided near the suction nozzle. The side-axis vision sensor obtains the position information of the tray and determines the initial placement position of the product.

The side-axis vision sensor and the suction nozzle move together to identify the three points on the tray to determine the placement coordinate information. The suction nozzle places the product on the tray based on the placement coordinate point information and the position compensation value obtained by the lower vision sensor. The location is accurate and reliable.

Preferably, there are travel stop pins that can be raised and lowered below the conveyor line and at positions corresponding to the automatic identification of the swinging unit and corresponding to the automatic identification of the resistance measuring unit, and the travel stop pins block and position the pallet.

The travel stop pin rises upward to position the pallet. The travel stop pin is lowered to facilitate the movement of the pallet driven by the conveyor line.

As a preferred option, an NG suction rod is set up close to the detection probe, and an NG discharge tray is set up above the conveyor line. The NG suction rod picks up products that fail the resistance test on the tray and places them in the NG discharge tray.

When the detection probe detects an abnormal resistance value of the product, it records and transmits the data to the host computer. After all the products on the pallet have been tested, take pictures of the products that detect NG and recheck the resistance value. After confirming that the product is NG, NG When the suction rod works, the host computer controls the NG suction rod to move to the position of the product with abnormal resistance value based on the location information of the product with abnormal resistance value, and sucks the product and transfers it to the NG discharge tray.

Preferably, two fixed brackets are provided on the main machine. The upper vision sensor and the positioning vision sensor are respectively installed on the two fixed brackets and the installation height can be adjusted up and down.

The installation height of the upper vision sensor and positioning vision sensor can be adjusted so that the camera focus can meet the needs of products of different specifications.

Preferably, the conveyor line includes two conveyor belts and two support beams, the pallet is supported between the two conveyor belts, pulleys are installed at both ends of the support beams, and the conveyor belts are wrapped around the support beams.

The conveyor belt is supported on the support beam, and the pallet is supported on the conveyor belt for more stable and reliable transportation, ensuring the accuracy of product position.

Preferably, several receiving slots are provided on the pallet, and the products are loaded in the receiving slots.

The product is loaded into the holding tank smoothly and reliably.

Preferably, the main machine is provided with a traverse beam, a wobble beam and a detection beam that move along the X-axis are installed on the transverse beam, a wobble base that moves along the Y-axis is installed on the wobble beam, and a wobble piston cylinder is installed on the wobble base. , the suction nozzle is installed on the telescopic rod of the swing plate piston cylinder; a detection seat that moves along the Y-axis is installed on the detection beam, the detection piston cylinder is installed on the detection seat, and the detection probe is installed on the telescopic rod of the detection piston cylinder.

Through this structural arrangement, the suction nozzle can move on the X-axis, Y-axis, and Z-axis, and the detection probe can move on the X-axis, Y-axis, and Z-axis. This enables reliable placement and resistance measurement of the product.

As a preferred option, the NG suction rod includes a fixed sleeve and a movable suction pipe. The movable suction pipe is connected to the fixed sleeve movable set. An air extraction chamber is provided on the fixed sleeve, a ventilation hole is provided on the side wall of the movable suction pipe, and an air extraction chamber is provided on the side wall of the air extraction chamber. The air hole, ventilation hole and air extraction hole are misaligned and separated; a positioning locking structure is installed between the movable suction pipe and the fixed sleeve. The positioning locking structure includes a positioning spring and a pull rod. A rotatable support is installed in the fixed sleeve, and one end of the pull rod is connected to the support. On the movable straw, a positioning groove is provided, and the other end of the pull rod is provided with a positioning head. The end of the positioning head is placed in the positioning groove and slides. A positioning block is installed in the positioning groove. The positioning block is provided with an inclined guide surface and a V-shaped slot. A V-shaped slide is formed between the groove and the edge of the positioning groove; one end of the positioning spring is in contact with the movable suction pipe, and the other end of the positioning spring is in contact with the support and is biased to one side of the support; the NG suction rod moves above the NG product. After pressing downward, the movable suction pipe moves upward. The positioning head on the pull rod slides over the guide surface and is stuck in the slot. At this time, the ventilation hole and the air extraction hole are connected correspondingly, and the NG product is adsorbed through negative pressure; the NG suction rod moves to the NG release position. After it is above the material tray, press downward to move the movable suction pipe upward. The positioning head slides away from the slot and returns to the original position. The ventilation hole and the air extraction hole are misaligned and separated, and the NG product falls into the NG discharge tray due to gravity.

Through this structure, when the NG suction rod moves to the position of the NG product, there is no negative pressure adsorption at the lower end of the NG suction rod. During this process, the NG suction rod will not adsorb the product on the tray and cause the product to move. Cause confusion. Moreover, when the lower end of the movable straw comes into contact with the product, it will be ventilated for negative pressure adsorption, making the absorption of the product accurate and reliable. After the product is transferred to the NG discharge tray, press the NG suction rod again to return the movable suction pipe to cut off the air, allowing the NG product to fall into the NG discharge tray. It eliminates the use of solenoid valves, reduces costs, and can accurately control the timing of ventilation and air shutoff, making the operation stable and reliable.

Compared with the existing technology, the beneficial effects of the present invention are: this automatic swinging plate resistance measuring device based on machine vision can improve the accuracy of the swinging plate, thereby improving the accuracy of resistance detection; it reduces labor intensity and improves work efficiency. efficiency.

Description of drawings

Figure 1 is a schematic structural diagram of the present invention;

Figure 2 is a schematic diagram of the internal structure of the present invention;

Figure 3 is a schematic structural diagram of the automatic identification and placement unit of the present invention;

Figure 4 is a schematic structural diagram of the automatic identification resistance measurement unit of the present invention;

Figure 5 is a schematic structural diagram of the NG suction rod according to Embodiment 2 of the present invention;

In the picture: 1. Host, 2. Automatic identification of the placing unit, 3. Automatic identification of the resistance measuring unit, 4. Conveyor line, 5. Pallet, 6. Accommodation tank, 7. Conveyor belt, 8. Support beam, 9. Pulley, 10. Vibration plate, 11. Product, 12. Upper vision sensor, 13. Suction nozzle, 14. Positioning vision sensor, 15. Resistance detector, 16. Detection probe, 17. Stroke stop pin, 18. Lifting Piston cylinder, 19. Traverse beam, 20. Swing plate beam, 21. Detection beam, 22. Swing plate seat, 23. Swing plate piston cylinder, 24. Detection seat, 25. Detection piston cylinder, 26. Fixed bracket, 27 , Lower vision sensor, 28. Suction nozzle seat, 29. Adsorption rod, 30. Side-axis vision sensor, 31. NG suction rod, 32. NG piston cylinder, 33. NG discharge plate, 34. Fixed sleeve, 35. Movable straw, 36. Air extraction chamber, 37. Ventilation hole, 38. Air extraction hole, 39. Positioning spring, 40. Pull rod, 41. Support, 42. Contact part, 43. Positioning groove, 44. Guide surface, 45 , card slot, 46, abutment slot, 47, step surface.

Detailed ways

The technical solution of the present invention will be further described in detail below through specific examples and in conjunction with the accompanying drawings:

Embodiment 1: An automatic pendulum plate resistance measuring device based on machine vision (see Figures 1 to 4), including an automatic identification pendulum unit 2 and an automatic identification resistance measurement unit 3 installed on the host computer 1. Install the conveyor line 4, set a pallet 5 on the conveyor line, and set a number of accommodation slots 6 on the pallet, and the products are loaded in the accommodation slots; the conveyor line includes two conveyor belts 7 and two support beams 8, the conveyor belts are set along the X-axis, and the pallets It is supported between two conveyor belts, and pulleys 9 are installed at both ends of the support beam. The pulleys are driven by motors, and the conveyor belt is wrapped around the support beam;

The automatic recognition plating unit includes:

The vibrating plate 10 is loaded with products 11. After the vibrating plate vibrates, the products are flipped up and down. According to the probability, a certain proportion of the products will face up;

The upper vision sensor 12 obtains the posture and position information of the product in the vibrating plate, and a visual light source is provided close to the upper vision sensor;

Suction nozzle 13, the suction nozzle can realize the movement of X-axis, Y-axis, and Z-axis, suck the product in the vibration plate and load it onto the tray. The suction nozzle sucks the product through negative pressure adsorption;

The automatic identification resistance measurement unit includes:

Positioning vision sensor 14 obtains the position information of the product on the pallet, and sets a visual light source close to the positioning vision sensor;

Resistance detector 15. The resistance detector is connected to the detection probe 16. The detection probe can move on the X-axis, Y-axis, and Z-axis. The detection probe moves toward the product and contacts the detection contacts on the product. The resistance detector passes The detection probe detects the resistance of the product.

A lifting stop pin 17 is provided below the conveyor line at a position corresponding to the automatic identification of the pendulum unit and at a position corresponding to the automatic identification of the resistance measuring unit. The stroke stop pin blocks and positions the pallet. The main engine is provided with a lifting piston cylinder 18 corresponding to the stroke stop pin, and the stroke stop pin is connected with the telescopic rod of the lift piston cylinder. The main machine is provided with a traversing beam 19, a pendulum beam 20 and a detection beam 21 that move along the X-axis are installed on the traverse beam, a pendulum base 22 that moves along the Y-axis is installed on the pendulum beam, and a pendulum piston is installed on the pendulum base. Cylinder 23, the suction nozzle is installed on the telescopic rod of the swing plate piston cylinder; the detection seat 24 that moves along the Y-axis is installed on the detection beam, the detection piston cylinder 25 is installed on the detection seat, and the detection probe is installed on the telescopic rod of the detection piston cylinder. The lifting and lowering movement of the piston cylinder telescopic rod realizes the Z-axis lifting and lowering movement of the detection probe. Two fixed brackets 26 are provided on the main machine. The upper visual sensor and the positioning visual sensor are respectively installed on the two fixed brackets and the installation height can be adjusted up and down.

A lower vision sensor 27 is arranged below the suction nozzle, and the suction nozzle is rotated. The lower vision sensor obtains the posture and position information of the product on the suction nozzle, and adjusts the posture of the product on the suction nozzle to a suitable position through the rotation of the suction nozzle. The suction nozzle includes a suction nozzle seat 28 and an adsorption rod 29. A stator is provided on the suction nozzle seat and a rotor is provided on the adsorption rod. The adsorption rod is rotated and installed on the suction nozzle seat to form a motor structure so that the adsorption rod can rotate. An adsorption hole is provided on the adsorption rod. , perform negative pressure suction on the adsorption hole to absorb the product. A side-axis vision sensor 30 is provided near the suction nozzle. The side-axis vision sensor is installed on the plate base. The side-axis vision sensor obtains the position information of the tray and determines the initial placement position of the product.

An NG suction rod 31 is installed close to the detection probe. A negative pressure adsorption hole is provided on the NG suction rod. The negative pressure adsorption hole is pumped to realize the suction of NG products. An NG piston cylinder 32 is installed on the detection seat. The NG suction rod and the NG piston cylinder The telescopic rod is connected, and the telescopic rod of the NG piston cylinder moves up and down to realize the Z-axis lifting movement of the NG suction rod. An NG discharge tray 33 is set above the conveyor line, and the NG suction rod picks up products that fail the resistance test on the tray and places them into the NG discharge tray.

When working, the product is placed on the vibrating plate, and the pallet is transported to the swinging position through the conveyor line. The vibrating plate works to flip the products up and down. According to the probability, a certain proportion of the products face up, and the upper visual sensor obtains the posture of the product in the vibrating plate. and position information, position the products that meet the plating requirements, and send the position information to the host computer. Based on the obtained position information, the host computer controls the movement of the suction nozzle to complete the suction of the product at that position. The lower vision sensor detects the suction nozzle. The bottom of the sucked product is photographed to obtain accurate product position information to determine the status and position compensation value. Through the rotation of the suction nozzle, the posture of the product is in the required state. The position compensation value compensates for the movement of the suction nozzle. The paraxial The vision sensor and the suction nozzle move together to identify the three points on the tray to determine the placement coordinate information. Based on the placement coordinate point information and the position compensation value obtained by the lower vision sensor, the suction nozzle places the product on the tray, and the placement position is accurate. reliable.

After the pallet is placed, it is transported to the automatic identification resistance measurement unit through the conveyor line. The positioning visual sensor obtains the position information of the product on the pallet and sends the position information to the host computer. The host computer controls the detection probe to move to the product and interact with the product. The detection contacts are in contact, and the resistance detector detects the resistance of the product through the detection probe. When the detection probe detects an abnormal resistance value of the product, it records and transmits the data to the host computer. After all the products on the pallet have been tested, take pictures of the products that detect NG and recheck the resistance value. After confirming that the product is NG, NG When the suction rod works, the host computer controls the NG suction rod to move to the position of the product with abnormal resistance value based on the location information of the product with abnormal resistance value, and sucks the product and transfers it to the NG discharge tray. The conveyor line transports the inspected pallets to the next station, and the inspection ends.

Embodiment 2: An automatic swing plate resistance measuring device based on machine vision (see Figure 5). Its structure is similar to Embodiment 1. The main difference is that in this embodiment, the NG suction rod includes a fixed sleeve 34 and a movable suction pipe. 35. The movable suction pipe is connected to the fixed casing movable set. The fixed casing is firmly installed on the telescopic rod of the NG piston cylinder. An air extraction chamber 36 is provided on the fixed casing. A ventilation hole 37 is provided on the side wall of the movable suction pipe. On the side of the air extraction chamber An air extraction hole 38 is provided on the wall, and the ventilation hole and the air extraction hole are staggered and separated.

A positioning locking structure is installed between the movable straw and the fixed sleeve. The positioning locking structure includes a positioning spring 39 and a pull rod 40. A rotatable support 41 is installed in the fixed sleeve. An arc-shaped abutment 42 is provided at the bottom of the support. The pull rod One end is connected to the support, a positioning groove 43 is provided on the movable straw, a positioning head is provided at the other end of the pull rod, the end of the positioning head is placed in the positioning groove and slides, a positioning block is installed in the positioning groove, and an inclined guide surface 44 is provided on the positioning block. There is a V-shaped clamping groove 45, and a V-shaped slideway is formed between the clamping slot and the edge of the positioning groove; an abutting groove 46 is provided on the upper edge of the positioning groove, and the positioning head abuts at the abutting groove. One end of the positioning spring is in contact with the movable suction pipe, and the other end of the positioning spring is in contact with the abutment part on the support and is biased to one side of the support; a step surface 47 is provided on the movable suction pipe, and the step surface is in contact with the bottom of the fixed sleeve, and the movable suction pipe is movable. A fixing sleeve extends from the lower part of the suction pipe.

The NG suction rod moves above the NG product. After pressing downward, the movable suction pipe moves upward. The positioning head on the pull rod moves downward from the abutment groove and slides through the guide surface and gets stuck in the slot. Because the positioning spring is biased and supported It is set on one side of the seat, so the positioning head will deflect to the slot side after sliding away from the guide surface. At this time, the ventilation hole and the air extraction hole are connected correspondingly, and the NG product is absorbed through negative pressure; after the NG suction rod moves above the NG discharge tray , press downward to move the movable suction pipe upward, the positioning head slides away from the slot and returns to the initial position, the ventilation hole and the exhaust hole are misaligned and separated, and the NG product falls into the NG discharge tray due to gravity. Other structures are the same as in Embodiment 1.

Through this structure, when the NG suction rod moves to the position of the NG product, there is no negative pressure adsorption at the lower end of the NG suction rod. During this process, the NG suction rod will not adsorb the product on the tray and cause the product to move. Cause confusion. Moreover, when the lower end of the movable straw comes into contact with the product, it will be ventilated for negative pressure adsorption, making the absorption of the product accurate and reliable. After the product is transferred to the NG discharge tray, press the NG suction rod again to return the movable suction pipe to cut off the air, allowing the NG product to fall into the NG discharge tray. It eliminates the use of solenoid valves, reduces costs, and can accurately control the timing of ventilation and air shutoff, making the operation stable and reliable.

The above-described embodiments are only preferred solutions of the present invention and do not limit the present invention in any form. There are other variations and modifications without exceeding the technical solution described in the claims.

Claims (10)

1. An automatic plate placement and resistance measuring device based on machine vision, which is characterized by including an automatic identification plate placement unit and an automatic identification resistance measurement unit installed on a host machine. A conveyor line is installed on the host machine, and a tray is provided on the conveyor line; The automatic recognition plating unit includes: A vibrating plate, in which the product is loaded; Use the visual sensor to obtain the attitude and position information of the product in the vibrating plate; The suction nozzle sucks the products in the vibration plate and loads them onto the tray; The automatic identification resistance measurement unit includes: Positioning vision sensors to obtain position information of products on the pallet; Resistance detector, the resistance detector is connected to the detection probe, the detection probe moves towards the product and contacts the detection contact on the product, and the resistance detector detects the resistance of the product through the detection probe. 2. An automatic swing plate resistance measuring device based on machine vision according to claim 1, characterized in that a lower visual sensor is provided below the suction nozzle, the suction nozzle is rotated, and the lower visual sensor acquires the posture and position of the product on the suction nozzle. Information, adjust the posture of the product on the nozzle to the appropriate position by rotating the nozzle. 3. An automatic swing plate resistance measuring device based on machine vision according to claim 1, characterized in that a side-axis vision sensor is provided near the suction nozzle, and the side-axis vision sensor obtains the position information of the tray to determine the initial position of the product. Placement. 4. An automatic pendulum resistance measuring device based on machine vision according to claim 1, characterized in that the position below the conveyor line and the position corresponding to the automatic identification pendulum unit and the position corresponding to the automatic identification resistance measurement unit are equipped with energy-saving devices. The lifting and lowering travel stop pins block and position the pallet. 5. An automatic swing plate resistance measuring device based on machine vision according to claim 1, characterized in that an NG suction rod is provided near the detection probe, an NG discharge tray is provided above the conveyor line, and the NG suction rod absorbs the tray. The unqualified products are detected by upper resistance and placed in the NG discharge tray. 6. An automatic swing plate resistance measuring device based on machine vision according to claim 1, characterized in that two fixed brackets are provided on the main machine, and the upper visual sensor and the positioning visual sensor are respectively installed on the two fixed brackets and can move up and down. Adjust the installation height. 7. An automatic swing plate resistance measuring device based on machine vision according to claim 1, characterized in that the conveyor line includes two conveyor belts and two support beams, the tray is supported between the two conveyor belts, and the two ends of the support beams Pulleys are installed, and the conveyor belt is wrapped around the support beam. 8. An automatic swing plate resistance measuring device based on machine vision according to claim 1, characterized in that a plurality of accommodation slots are provided on the tray, and the products are loaded in the accommodation slots. 9. An automatic swing plate resistance measuring device based on machine vision according to any one of claims 1 to 8, characterized in that a traversing beam is provided on the main machine, and a pendulum plate moving along the X-axis is installed on the traversing beam. Beam and detection beam, a swing plate seat that moves along the Y-axis is installed on the swing plate beam, a swing plate piston cylinder is installed on the swing plate seat, and the suction nozzle is installed on the telescopic rod of the swing plate piston cylinder; a swing plate that moves along the Y-axis is installed on the detection beam. The detection seat has a detection piston cylinder installed on the detection seat, and the detection probe is installed on the telescopic rod of the detection piston cylinder. 10. An automatic swing plate resistance measuring device based on machine vision according to claim 5, characterized in that the NG suction rod includes a fixed sleeve and a movable straw, the movable straw is connected to the fixed sleeve movable set, and the fixed sleeve An air extraction chamber is provided on the side wall of the movable suction pipe, and a ventilation hole is provided on the side wall of the movable suction pipe. An air extraction hole is provided on the side wall of the air extraction cavity. The ventilation hole and the air extraction hole are misaligned and separated; a positioning locking structure is installed between the movable suction pipe and the fixed sleeve, and the positioning lock The structure includes a positioning spring and a pull rod. A rotatable support is installed in the fixed sleeve. One end of the pull rod is connected to the support. A positioning groove is set on the movable straw. A positioning head is set on the other end of the pull rod. The end of the positioning head is placed in the positioning groove and slides. A positioning block is installed in the positioning slot. An inclined guide surface and a V-shaped slot are provided on the positioning block. A V-shaped slide is formed between the slot and the edge of the positioning slot. One end of the positioning spring is in contact with the movable straw, and the other end of the positioning spring is in contact with the movable straw. One end is in contact with the support and tilted to one side of the support; the NG suction rod moves above the NG product, and after pressing downward, the movable suction pipe moves upward. The positioning head on the pull rod slides through the guide surface and gets stuck in the slot. When the ventilation hole and the air extraction hole are connected correspondingly, NG products are adsorbed through negative pressure; after the NG suction rod moves above the NG discharge tray, press downward to move the movable suction pipe upward, and the positioning head slides away from the slot and returns to the original position. Position, the ventilation hole and the exhaust hole are misaligned and separated, and the NG product falls into the NG discharge tray due to gravity.