CN116883192A - Integrated circuit product in-out station management system and integrated circuit product in-out station management method - Google Patents

Abstract

The application provides an intelligent management system for in-out station of integrated circuit products. The integrated circuit product station in-out management system comprises a communication module, a detection module, a station in-out module, a mapping module and a formula management and control module. The communication module is used for receiving a request signal sent by the process machine, wherein the request signal indicates the identification code of the current material strip. The detection module is used for judging the batch of the current material strip according to the request signal and generating a detection result. The in-out station module is used for indicating the MES system to execute production tracking and acquire batch information according to the detection result, and transmitting the batch information, the mapping information corresponding to the identification code and the formula information to the in-out station module. The mapping module is used for receiving the mapping information and storing the mapping information in a strip mapping database. The formula management and control module is used for indicating the RMS system to confirm a formula according to the formula information.

Description

Integrated circuit product in-out station management system and integrated circuit product in-out station management method

Technical Field

The present application relates to the field of semiconductors, and more particularly, to an integrated circuit product station entry and exit management system and an integrated circuit product station entry and exit management method.

Background

In the prior art, when the process machine alarms, personnel are required to confirm, and defective products of the previous process cannot be skipped automatically, so that the efficiency of the process machine is low, and the consumption of human resources is increased; in addition, the automation degree of the process machine is low, a great deal of manpower is required to carry out operations such as alarm elimination, data input, formula confirmation and the like, the efficiency is low, and the error rate is high. In addition, when a product has a problem, mapping information of the product is often difficult to track, and the traceability is low; in addition, the MES system, the RMS system and the material strip mapping database cannot be linked, personnel need to confirm operation information to each system every time operation, and the systems have no linkage.

Disclosure of Invention

In view of the above, the present application provides an integrated circuit product in-out management system and an integrated circuit product in-out management method for solving the above-mentioned problems.

According to an embodiment of the application, an intelligent management system for in-out station of integrated circuit products is provided. The integrated circuit product station in-out management system comprises a communication module, a detection module, a station in-out module, a mapping module and a formula management and control module. The communication module is used for receiving a request signal sent by the process machine, wherein the request signal indicates the identification code of the current material strip. The detection module is used for judging the batch of the current material strip according to the request signal and generating a detection result. The in-out station module is used for indicating the MES system to execute production tracking and acquire batch information according to the detection result, and transmitting the batch information, the mapping information corresponding to the identification code and the formula information to the in-out station module. The mapping module is used for receiving the mapping information and storing the mapping information in a strip mapping database. The formula management and control module is used for indicating the RMS system to confirm a formula according to the formula information.

According to an embodiment of the present application, the mapping module further transmits the mapping information to the process machine through the communication module, where the mapping information indicates the process machine to omit the process of defective products recorded in the mapping information.

According to an embodiment of the present application, the in-out station module further instructs the MES system to determine whether the process machine state, the mold number, and the material accounting information conform to a production state according to the detection result.

According to an embodiment of the present application, the in-out module further instructs the MES system to perform automatic material billing corresponding to the lot information after the MES system obtains the lot information according to the detection result.

According to an embodiment of the present application, the recipe management module further instructs the RMS system to determine whether the recipe of the process tool meets the production status.

According to an embodiment of the present application, when the detection result indicates that the current strand is a mixed strand not belonging to the current batch, the operation of the process machine is stopped.

According to an embodiment of the present application, when the detection result indicates that the current strip is the last strip of the batch, the in-out module transmits the mapping information received from the process tool to the MES system after the process tool completes the process and instructs the MES system to end the production tracking.

According to an embodiment of the present application, the communication module communicates with the process tool through SECS/GEM protocol.

According to an embodiment of the application, the docking module interfaces the lot information with the MES system via WCF technology.

According to an embodiment of the present application, an in-out management method for an integrated circuit product is provided. The integrated circuit product station entering and exiting management method comprises the following steps: receiving a request signal sent by a process machine, wherein the request signal indicates the identification code of the current material strip; judging the batch of the current material strip according to the request signal and generating a detection result; instructing the MES system to execute production tracking and acquire batch information according to the detection result; receiving the batch information and the mapping information and the recipe information corresponding to the identification code from the MES system; storing the mapping information in a strip mapping database; and instructing the RMS system to confirm a recipe based on the recipe information.

According to the integrated circuit product in-out station management system and the integrated circuit product in-out station management method, when the indication of the reference batch information of the process machine meets the defective product of the previous process, the process can be directly skipped, manual operation of personnel is avoided, and therefore the working efficiency of the process machine is improved.

In addition, in the integrated circuit product in-out station management system and the integrated circuit product in-out station management method, the MES system can be instructed to automatically realize and finish production tracking (track in/out), so that the station passing of the MES system is achieved without manual work, and the accuracy and timeliness of the station passing are improved. The system is led in, the machine station alarm is reduced, the efficiency is improved, the personnel only need to process the real alarm, the personnel efficiency is improved by 20%, the timeliness of passing by a station is improved by 30%, and the accuracy is improved by 5%.

In addition, in the integrated circuit product in-out station management system and the integrated circuit product in-out station management method provided by the application, under the condition that the inspection of an MES system and an RMS system is passed, the process machine can only produce after receiving the mapping information, so that the personnel memory operation flow is reduced, and the personnel only needs to put in the product, thereby improving the quality

In addition, in the integrated circuit product in-out station management system and the integrated circuit product in-out station management method, each strip is used for tracking, and compared with the scheme of tracking by batches in the past, the integrated circuit product in-out station management system and the integrated circuit product in-out station management method greatly improve productivity.

In addition, in the integrated circuit product in-out station management system and the integrated circuit product in-out station management method, data extraction, transmission and processing can be carried out with the MES system, the RMS system and the material strip mapping database, so that the problem of isolated island of the data of the MES system, the RMS system and the material strip mapping database in the existing operation process is solved, and operation automation is realized.

Drawings

The accompanying drawings are included to provide a further understanding of the application, and are incorporated in and constitute a part of this specification, illustrate the application and together with the description serve to explain, without limitation, the application. In the drawings:

FIG. 1 illustrates a block diagram of an integrated circuit product ingress and egress management system in accordance with one embodiment of the present application.

FIG. 2 illustrates a flowchart of the operation of an integrated circuit product ingress and egress management system in accordance with one embodiment of the present application.

FIG. 3 illustrates a flowchart of the steps of a method for ingress and egress management of an integrated circuit product according to one embodiment of the present application.

Detailed Description

The following disclosure provides various embodiments or examples that can be used to implement the various features of the present disclosure. Specific examples of components and arrangements are described below to simplify the present disclosure. It is to be understood that these descriptions are merely exemplary and are not intended to limit the present disclosure. For example, in the following description, forming a first feature on or over a second feature may include certain embodiments in which the first and second features are in direct contact with each other; and may include embodiments in which additional components are formed between the first and second features such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. Such reuse is for brevity and clarity purposes and does not itself represent a relationship between the different embodiments and/or configurations discussed.

Moreover, spatially relative terms, such as "under," "below," "lower," "upper," and the like, may be used herein to facilitate a description of the relationship between one element or feature to another element or feature as illustrated in the figures. These spatially relative terms are intended to encompass a variety of different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be placed in other orientations (e.g., rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein interpreted accordingly.

Notwithstanding that the numerical ranges and parameters setting forth the broad scope of the application are approximations, the numerical values set forth in the specific examples are reported as precisely as possible. However, any numerical value inherently contains certain standard deviations found in their respective testing measurements. As used herein, "about" generally means that the actual value is within plus or minus 10%, 5%, 1% or 0.5% of a particular value or range. Alternatively, the term "about" means that the actual value falls within an acceptable standard error of the average value, depending on the consideration of the person having ordinary skill in the art to which the present application pertains. It is to be understood that all ranges, amounts, values, and percentages used herein (e.g., to describe amounts of materials, lengths of time, temperatures, operating conditions, ratios of amounts, and the like) are modified by the word "about" unless otherwise specifically indicated. Accordingly, unless indicated to the contrary, the numerical parameters set forth in the present specification and attached claims are approximations that may vary depending upon the desired properties. At least these numerical parameters should be construed as the number of significant digits and by applying ordinary rounding techniques. Herein, a numerical range is expressed as from one end point to another end point or between two end points; unless otherwise indicated, all numerical ranges recited herein include endpoints.

Fig. 1 illustrates a block diagram of an integrated circuit product ingress and egress management system 1 in accordance with one embodiment of the present application. In some embodiments, the integrated circuit product ingress and egress management system 1 includes a communication module 11, a detection module 12, an ingress and egress module 13, a mapping module 14, and a recipe management module 15. In some embodiments, the communication module 11 is configured to receive a request signal SM sent by the processing machine 100, where the request signal SM indicates an identification ID of a current strip. In some embodiments, the process machine 100 scans the ID of the current strip and then sends a request signal SM to the communication module 11 to instruct the ic product in-out management system 1 to transmit the mapping information 2SY corresponding to the ID. In some embodiments, the communication module 11 may communicate with the process tool 100 via SECS/GEM protocol.

In some embodiments, the detecting module 12 is configured to determine the batch of the current strip according to the request signal SM and generate the detecting result SA. In certain embodiments, the detection result SA indicates whether the current strip belongs to the first strip of the new batch. In some embodiments, when the detection result SA indicates that the current strip belongs to the first strip of the new batch, the in-out station module 13 instructs the MES system 200 to determine whether the state of the process machine 100, the mold number, and the material account information are in accordance with the production state, if so, the MES system 200 performs production tracking (track in) and obtains the corresponding batch information 1SY, and performs automatic in-process of the account corresponding to the batch information 1SY, and then the MES system 200 transmits the batch information 1SY and the mapping information 2SY and the recipe information 3SY corresponding to the identification code ID to the in-out station module 13.

If the state of the process tool 100, the mold number, and the material accounting information do not match the production state, the MES system 200 notifies the process tool 100 to stop the process. In some embodiments, the MES system 200 can communicate to the process tool 100 via the communication module 11 to stop the process.

In certain embodiments, the docking module 13 interfaces the lot information 1SY with the MES system 200 via WCF technology.

In some embodiments, the detection result SA may also indicate whether the current strand does not belong to the batch of compounded strands. When the detection result SA indicates that the current strip is a strip belonging to the lot, the in-out module 13 instructs the MES system 200 to transmit the map information 2SY and the recipe information 3SY corresponding to the identification code ID to the in-out module 13. When the detection result SA indicates that the current strip is not the batch of mixed material strips, the in-out station module 13 notifies the process machine 100 through the communication module 11 to stop the process.

In some embodiments, the detection result SA indicates that the current strip is the last strip of the lot, the in-out module 13 transmits the mapping information 2SY received from the process tool 100 to the MES system 200 after the process tool 100 completes the process and instructs the MES system 200 to end the production tracking (track out).

In some embodiments, the mapping module 14 is configured to accept the mapping information 2SY and store the mapping information 2SY in the strip mapping database 400. In some embodiments, the mapping module 14 transmits the mapping information 2SY to the process tool 100 via the communication module 11. In some embodiments, the mapping information 2SY indicates defective products in the current strip and instructs the process tool 100 to omit the process of defective products, so as to reduce the manual release procedure by personnel.

In some embodiments, the recipe management module 15 is configured to instruct the RMS system 300 to confirm whether the recipe of the process tool 100 meets the production status according to the recipe information 3SY, and if so, the RMS system 300 instructs the process tool 100 to start the process. If the production status is not met, the RMS system 300 notifies the process tool 100 to stop the process. In some embodiments, the RMS system 300 may instruct or notify the process tool 100 to start or stop the process through the communication module 11.

Fig. 2 illustrates a flowchart of the operation of the integrated circuit product ingress and egress management system 1 in accordance with one embodiment of the present application. The application is not limited to practice with the steps shown in fig. 2 entirely, provided that substantially the same results are achieved. In some embodiments, the operation flow shown in fig. 2 is a method applied to the in-out management system 1 of an integrated circuit product, and please refer to the embodiment of fig. 1 for illustration. In some embodiments, the operational flow of the integrated circuit product ingress and egress management system 1 may be summarized as follows:

step 20: the process machine 100 scans the identification code ID of the current strip and sends a request signal SM to the communication module 11. The request signal SM instructs the integrated circuit product entry and exit management system 1 to transmit the mapping information 2SY corresponding to the identification code ID.

Step 21: the detection module 11 determines whether the current strip is the first strip of the new batch, if yes, go to step 22; otherwise step 29 is entered.

Step 22: the in-out module 13 instructs the MES system 200 to determine whether the state of the process tool 100, the mold number, and the material accounting information are consistent with the production state, and if yes, go to step 23; otherwise, stopping the process.

Step 23: the MES system 200 performs production tracking (track in) and acquires the lot information 1SY, and performs automatic check-out of the lot corresponding to the lot information 1SY.

Step 24: the MES system transmits batch information 1SY, map information 2SY and recipe information 3SY to the in-out station module 13.

Step 25: the recipe management and control module 15 communicates recipe information 3SY to the RMS system 300 to instruct the RMS system 300 to perform a recipe validation.

Step 26: if the recipe of the process machine 100 meets the production status, step 27 is entered; otherwise, stopping the process.

Step 27: the mapping module 14 transmits and stores the mapping information 2SY to the strip mapping database 400, and transmits the mapping information 2SY to the process machine 100 through the communication module 11. The process machine 100 may omit the process of defective products in the current bar indicated by the mapping information 2SY to reduce the manual release procedure by personnel.

Step 28: the process is started.

Step 29: the detection module 11 determines whether the current strip is a batch of material strips that do not belong to the batch, and, if so,

the process is stopped; otherwise, step 24 is entered.

It should be noted that, in some embodiments, step 27 may be performed to transfer and store the mapping information 2SY to the strip mapping database 400 after step 25, and the mapping information 2SY is transferred to the process machine 100 through the communication module 11, then steps 25 and 26 are performed to transfer the recipe information 3SY to the RMS system 300 to instruct the RMS system 300 to perform the recipe confirmation, and if the recipe of the process machine 100 meets the production status, the process is started after step 28, otherwise, the process is stopped.

It should be noted that, in step 29, if it is determined that the current strip is not the mixed strip belonging to the batch, the detection module 12 may also determine whether the current strip is the last strip of the batch, if so, the in/out module 13 transmits the mapping information 2SY received from the process machine 100 to the MES system 200 after the process machine 100 completes the process and instructs the MES system 200 to end the production tracking (track out).

Fig. 3 illustrates a flowchart of the steps of an integrated circuit product ingress and egress management method 3 according to one embodiment of the present application. The application is not limited to practice with the steps shown in fig. 3 entirely, provided that substantially the same results are achieved. In some embodiments, the integrated circuit product ingress and egress management method 3 can be summarized as follows:

step 30: receiving a request signal sent by a process machine, wherein the request signal indicates the identification code of the current material strip;

step 31: judging the batch of the current material strip according to the request signal and generating a detection result;

step 32: instructing the MES system to execute production tracking and acquire batch information according to the detection result;

step 33: receiving the batch information and the mapping information and the recipe information corresponding to the identification code from the MES system;

step 34: storing the mapping information in a strip mapping database; and

step 35: and indicating the RMS system to confirm a formula according to the formula information.

Those skilled in the art will readily understand the details of the embodiment of fig. 3 after reading the embodiments of fig. 1 and 2, and thus the detailed description is omitted again for brevity.

According to the integrated circuit product in-out station management system 1 and the integrated circuit product in-out station management method 3 provided by the application, when the indication of the process machine 100 reference batch information 2SY encounters a defective product of the previous process, the process can be directly skipped, manual operation of personnel is avoided, and thus the work efficiency of the process machine is improved.

In addition, in the integrated circuit product in-out station management system 1 and the integrated circuit product in-out station management method 3 provided by the application, the MES system 200 can be instructed to automatically realize and finish production tracking (track in/out), so that the aim of passing a station in the MES system 200 without manual work is fulfilled, and the accuracy and timeliness of passing the station are improved. The system is led in, the machine station alarm is reduced, the efficiency is improved, the personnel only need to process the real alarm, the personnel efficiency is improved by 20%, the timeliness of passing by a station is improved by 30%, and the accuracy is improved by 5%.

In addition, in the integrated circuit product in-out station management system 1 and the integrated circuit product in-out station management method 3 provided by the application, under the condition that the inspection of the MES system 200 and the RMS system 300 is passed, the process machine 100 can only produce after receiving the mapping information 2SY, so that the personnel memory operation flow is reduced, and the personnel only needs to put in the product, thereby improving the quality

In addition, in the integrated circuit product in-out station management system 1 and the integrated circuit product in-out station management method 3 provided by the application, each strip is used for tracking, and compared with the scheme of tracking by batches in the past, the productivity is greatly improved.

In addition, in the integrated circuit product in-out station management system 1 and the integrated circuit product in-out station management method 3, data extraction, transmission and processing can be performed with the MES system 200, the RMS system 300 and the strip mapping database 400, so that the problem of data island of three systems of the MES system 200, the RMS system 300 and the strip mapping database 400 in the existing operation process is solved, and operation automation is realized.

It should be noted that each module shown in fig. 1 may be stored in a computer readable storage medium if implemented in a form of a software functional unit and sold or used as a separate product. Based on such understanding, the technical solution of the present application may be embodied essentially or in part or all of the technical solution or in part in the form of a software product stored in a storage medium, including instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method of the various embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a read-only memory (ROM), a random access memory (random access memory, RAM), a magnetic disk, or an optical disk, or other various media capable of storing program codes.

The above-described embodiments may be implemented in whole or in part by software, hardware, firmware, or any combination thereof, and when implemented in software, may be implemented in whole or in part in the form of a computer program product.

The computer program product includes one or more computer instructions. When the computer-executable instructions are loaded and executed on a computer, the processes or functions in accordance with embodiments of the present application are fully or partially produced. The computer may be a general purpose computer, a special purpose computer, a computer network, or other programmable apparatus. The computer instructions may be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another computer-readable storage medium, for example, the computer instructions may be transmitted from one website, computer, server, or data center to another website, computer, server, or data center by a wired (e.g., coaxial cable, fiber optic, digital Subscriber Line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.). Computer readable storage media can be any available media that can be stored by a computer or data storage devices such as servers, data centers, etc. that contain an integration of one or more available media. Usable media may be magnetic media (e.g., floppy disks, hard disks, magnetic tape), optical media (e.g., DVD), or semiconductor media (e.g., SSD)), or the like.

As used herein, the terms "approximately," "substantially," and "about" are used to describe and account for minor variations. When used in connection with an event or circumstance, the terms can refer to instances where the event or circumstance occurs precisely and instances where it occurs to the close approximation. As used herein with respect to a given value or range, the term "about" generally means within ±10%, ±5%, ±1% or ±0.5% of the given value or range. Ranges can be expressed herein as from one endpoint to the other endpoint, or between two endpoints. Unless otherwise specified, all ranges disclosed herein include endpoints. The term "substantially coplanar" may refer to two surfaces within a few micrometers (μm) positioned along a same plane, for example, within 10 μm, within 5 μm, within 1 μm, or within 0.5 μm positioned along the same plane. When referring to "substantially" the same value or property, the term may refer to a value that is within ±10%, 5%, 1% or 0.5% of the average value of the values.

As used herein, the terms "approximately," "substantially," and "about" are used to describe and explain minor variations. When used in connection with an event or circumstance, the terms can refer to instances where the event or circumstance occurs precisely and instances where it occurs to the close approximation. For example, when used in conjunction with a numerical value, the term can refer to a range of variation of less than or equal to ±10% of the numerical value, e.g., less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, two values may be considered to be "substantially" or "about" the same if the difference between the two values is less than or equal to ±10% (e.g., less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%) of the average value of the values. For example, "substantially" parallel may refer to a range of angular variation of less than or equal to ±10° relative to 0 °, for example, less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°. For example, "substantially" perpendicular may refer to a range of angular variation of less than or equal to ±10° relative to 90 °, for example, less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°.

For example, two surfaces may be considered to be coplanar or substantially coplanar if the displacement between the two surfaces is equal to or less than 5 μm, equal to or less than 2 μm, equal to or less than 1 μm, or equal to or less than 0.5 μm. A surface may be considered planar or substantially planar if the displacement of the surface relative to the plane between any two points on the surface is equal to or less than 5 μm, equal to or less than 2 μm, equal to or less than 1 μm, or equal to or less than 0.5 μm.

As used herein, the singular terms "a" and "an" may include plural referents unless the context clearly dictates otherwise. In the description of some embodiments, a component provided "on" or "over" another component may encompass the case where the former component is directly on (e.g., in physical contact with) the latter component, as well as the case where one or more intermediate components are located between the former component and the latter component.

As used herein, spatially relative terms such as "below," "lower," "above," "upper," "lower," "left," "right," and the like may be used herein for ease of description to describe one component or feature's relationship to another component or feature as illustrated in the figures. In addition to the orientations depicted in the figures, the spatially relative terms are intended to encompass different orientations of the device in use or operation. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present.

The foregoing has outlined features of several embodiments and detailed aspects of the present disclosure. The embodiments described in this disclosure may be readily used as a basis for designing or modifying other processes and structures for carrying out the same or similar purposes and/or obtaining the same or similar advantages of the embodiments introduced herein. Such equivalent constructions do not depart from the spirit and scope of the present disclosure and are susceptible to various changes, substitutions and alterations without departing from the spirit and scope of the present disclosure.

Claims (10)

1. An integrated circuit product ingress and egress management system, comprising:

the communication module is used for receiving a request signal sent by the process machine, wherein the request signal indicates the identification code of the current material strip;

the detection module is used for judging the batch of the current material strip according to the request signal and generating a detection result;

the station entering and exiting module is used for indicating the MES system to execute production tracking and acquire batch information according to the detection result, and transmitting the batch information, the mapping information corresponding to the identification code and the formula information to the station entering and exiting module;

the mapping module is used for receiving the mapping information and storing the mapping information in a strip mapping database; and

and the formula management and control module is used for indicating the RMS system to confirm the formula according to the formula information.

2. The system of claim 1, wherein the mapping module further transmits the mapping information to the process tool through the communication module, the mapping information indicating the process tool to omit the process of defective products recorded in the mapping information.

3. The system of claim 1, wherein the station entry and exit module further instructs the MES system to determine whether the process tool status, the die number, and the material accounting information are consistent with a production status based on the detection result.

4. The system of claim 3, wherein the in-out module further instructs the MES system to perform an automatic check-out of the account material corresponding to the lot information after the MES system acquires the lot information according to the detection result.

5. The integrated circuit product in-out management system of claim 1, wherein the recipe management module further instructs the RMS system to determine whether the recipe of the process tool meets a production recipe.

6. The system of claim 1, wherein the process tool is stopped when the detection result indicates that the current strand is a batch of material that does not belong to a current batch.

7. The integrated circuit product in-out management system of claim 1, wherein when the detection indicates that the current strip is the last strip of the lot, the in-out module transmits the mapping information received from the process tool to the MES system after the process tool completes processing and instructs the MES system to end production tracking.

8. The integrated circuit product ingress and egress management system of claim 1, wherein the communication module communicates with the process tool via SECS/GEM protocol.

9. The integrated circuit product ingress and egress management system of claim 1, wherein the ingress and egress module interfaces the lot information with the MES system via WCF technology.

10. An integrated circuit product ingress and egress management method, comprising:

receiving a request signal sent by a process machine, wherein the request signal indicates the identification code of the current material strip;

judging the batch of the current material strip according to the request signal and generating a detection result;

instructing the MES system to execute production tracking and acquire batch information according to the detection result;

receiving the batch information and the mapping information and the recipe information corresponding to the identification code from the MES system;

storing the mapping information in a strip mapping database; and

and indicating the RMS system to confirm a formula according to the formula information.