CN112558571A - Production formula analysis method and system based on information security - Google Patents
Production formula analysis method and system based on information security Download PDFInfo
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- CN112558571A CN112558571A CN202011447130.1A CN202011447130A CN112558571A CN 112558571 A CN112558571 A CN 112558571A CN 202011447130 A CN202011447130 A CN 202011447130A CN 112558571 A CN112558571 A CN 112558571A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 59
- 238000004458 analytical method Methods 0.000 title claims abstract description 17
- 238000007726 management method Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 6
- 230000026676 system process Effects 0.000 claims description 3
- 238000012986 modification Methods 0.000 abstract description 4
- 230000004048 modification Effects 0.000 abstract description 4
- 238000003908 quality control method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004886 process control Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32368—Quality control
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The invention relates to a production formula analysis management method and system based on information security, which comprises an EQP (electronic quality control) unit, a management unit and a management unit, wherein the EQP is used for producing according to a formula ID (identity) and corresponding parameters specified by an EAP (extensible authentication protocol) system and emptying the formula ID and the corresponding parameters in a machine; the EAP system is used for controlling the product running process, acquiring a product formula ID according to the MES, requesting a product formula parameter from the RMS system, sending the formula ID and related parameters required by production to the EQP, and issuing an instruction to the EQP to clear the formula ID and related parameters in the machine; the RMS system is used for configuring machine information and product formula information, providing corresponding parameters when an EAP system requests, and generating a character string which is identified for the machine by the parameters according to rules through the formula. The invention manages the production formula of the machine in a centralized way, is convenient for carrying out authority control on access, modification, signing and checking of the formula and the like, promotes the information security of the production formula, avoids directly copying and copying the production formula from the machine, and solves the problem of low management security of the production formula of the existing product.
Description
Technical Field
The invention relates to the technical field of formula management, in particular to a production formula analysis method and system based on information safety.
Background
The RMS (reliability management System), namely a recipe (recipe) management system, manages recipes (recipes) in semiconductor and panel production, and inspects the recipes and parameters of products produced in each machine to meet the visibility of recipe contents, the traceability of parameters and the stability of production, thereby realizing the advanced process control of the recipes to improve the reliability of production.
When producing semiconductors and panels, the product is transported to the machine, and the EAP (or BC) system requests the production data from the MES system, and obtains the recipe of the product needed by the machine through the production data. Then inquiring whether the formula exists on the machine, if so, confirming whether the parameter of the formula needs to be checked to the MES, if so, replying that the parameter of the formula needs to be checked to the MES, inquiring the parameter of the formula to the machine by the EAP (or BC) system, after the machine reports a string of unknown characters, analyzing the parameter of the formula needing to be controlled by the EAP according to the analysis rule of the formula, and then reporting to the RMS system. If the RMS system has the control parameter for maintaining the formula of the machine, the RMS system compares the formula parameter reported by the EAP (or BC) system with the maintained parameter configuration, if the comparison is consistent, the RMS system replies to the EAP (or BC) system OK, otherwise, the RMS system replies to the NG. After the EAP (or BC) system receives the RMS system reply OK, it sends the production data containing the recipe to the machine and informs the machine to start production.
Production recipes are important assets in the semiconductor and panel industries, and if important production recipes can be easily copied and recorded, significant loss is caused by obvious information security risks; in the traditional formula management mode, production formulas are stored on a machine, and formula information is recorded on an EAP (or BC) system; however, the machine and the EAP (or BC) system are easily accessible to many people, which will certainly affect the safety of the production recipe.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, provides a production formula analysis management method and system based on information safety, and solves the problem of low management safety of the production formula of the existing product.
The purpose of the invention is realized by the following technical scheme: a production formula analysis management system based on information security comprises an MES system, an EQP, an EAP system and an MES system;
the MES system is used for providing the product formula ID of the product to the EAP system;
the EQP is used for producing according to the formula ID and corresponding parameters appointed by the EAP system, and clearing the formula ID and corresponding parameters in the machine according to an instruction issued by the EAP after the production of each batch of products is finished;
the EAP system is used for controlling a product running process, acquiring a product formula ID according to the MES, requesting a product formula parameter from the RMS system, sending the formula ID and related parameters required by production to the EQP, and issuing an instruction to the EQP to clear the formula ID and related parameters in the machine;
the RMS system is used for configuring machine information and product formula information, providing corresponding parameters when the EAP system requests, and generating character strings for identifying the machine by the parameters according to rules through the formula.
A production formula analysis management method based on information security comprises the following steps:
and (3) acquiring a product formula ID: resolving a formula ID according to product carrier information;
and D, resolving the product formula ID: the recipe parameters are requested and analyzed into an identifiable format and then sent to the machine;
product production and removal steps: and the machine station produces according to the received formula parameters and empties the formula parameter information after the production is finished.
The step of obtaining the product formula ID specifically comprises the following steps:
the EQP system reports the ID of the product carrier to the EAP system, and the EAP system processes the product carrier information and then requests product information to the MES system;
and the MES system sends the product data information to the EAP system, and the EAP system disassembles the product production formula ID according to the received product data information.
The step of analyzing the product formula ID specifically comprises the following steps:
the EAP system requests a formula parameter from the RMS, and the RMS judges and processes the formula ID and analyzes the formula parameter into an EQP identifiable format;
the RMS system sends the analyzed recipe parameter information to the EAP system, which sends the analyzed recipe parameter information to the EQP.
The product production and removal steps specifically comprise:
the EQP receives the analyzed formula parameter information and then carries out product production on a machine platform;
sending completion information to an EAP system after the product is produced or the product is moved away;
after receiving the completion information, the EAP system wants the EQP to send a formula parameter clearing instruction, and the EQP clears the formula parameter information in the machine after receiving the instruction.
The invention has the following advantages: a production formula analysis management method and system based on information security centrally manage a machine production formula, facilitate authority control on access, modification, signing and checking of the formula and the like, promote information security of the production formula, avoid direct copying and copying of the production formula from a machine, and solve the problem of low management security of the existing product production formula.
Drawings
FIG. 1 is a schematic diagram of the system of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. The components of the embodiments of the present application, generally described and illustrated in the figures herein, can be arranged and designed in a wide variety of different configurations. Thus, the detailed description of the embodiments of the present application provided below in connection with the appended drawings is not intended to limit the scope of the claimed application, but is merely representative of selected embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present application without making any creative effort, shall fall within the protection scope of the present application. The invention is further described below with reference to the accompanying drawings.
As shown in FIG. 1, the present invention relates to a production recipe analysis management system based on information security, which comprises an MES system, an EQP, an EAP system and an MES system;
the RMS (reliability management System), namely a recipe (recipe) management system, manages recipes (recipes) in semiconductor and panel production, and inspects recipes and parameters of products produced by each machine to meet the visibility of recipe contents, the traceability of parameters and the production stability, thereby realizing the advanced process control of recipes to improve the production reliability.
The EAP system program (i.e., an equipment automation program) is interposed between the MES (manufacturing execution system) and the equipment, and is used for information transmission, data collection, process control, and the like, so as to achieve the purpose of factory automation, reduce the risk of errors due to manual operations of personnel to a great extent, and improve the production efficiency and the product yield.
The MES system is used for providing the product formula ID of the product to the EAP system;
the EQP (machine station) is used for producing according to the formula ID and corresponding parameters appointed by the EAP system, and clearing the formula ID and corresponding parameters in the machine station according to an instruction issued by the EAP after the production of each batch of products is finished;
the EAP system is used for controlling a product running process, acquiring a product formula ID according to the MES, requesting a product formula parameter from the RMS system, sending the formula ID and related parameters required by production to the EQP, and issuing an instruction to the EQP to clear the formula ID and related parameters in the machine;
the RMS system is used for configuring machine information and product formula information, providing corresponding parameters when the EAP system requests, and generating character strings for identifying the machine by the parameters according to rules through the formula.
Another embodiment of the present invention relates to a production recipe analysis management method based on information security, including:
s1, the EQP system reports the ID of the product carrier to the EAP system, and the EAP system processes the product carrier information and then requests the product information to the MES system;
s2, the MES system sends the product information to the EAP system, the EAP system disassembles the product production formula ID according to the received product information.
S3, the EAP system requests the RMS for the recipe parameters, the RMS system judges the processing recipe ID and analyzes the recipe parameters into a format recognizable by the EQP;
and S4, sending the analyzed formula parameter information to an EAP system by the RMS system, and sending the analyzed formula parameter information to the EQP by the EAP system.
S5, the EQP receives the analyzed formula parameter information and produces products on the machine platform;
s6, sending completion information to the EAP system after the product is produced or removed;
s7, after receiving the completion information, the EAP system wants the EQP to send a formula parameter clearing instruction, and the EQP clears the formula parameter information in the machine after receiving the instruction.
The foregoing is illustrative of the preferred embodiments of this invention, and it is to be understood that the invention is not limited to the precise form disclosed herein and that various other combinations, modifications, and environments may be resorted to, falling within the scope of the concept as disclosed herein, either as described above or as apparent to those skilled in the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (5)
1. A production formula analysis management system based on information security is characterized in that: the system comprises an MES system, an EQP, an EAP system and an MES system;
the MES system is used for providing the product formula ID of the product to the EAP system;
the EQP is used for producing according to the formula ID and corresponding parameters appointed by the EAP system, and clearing the formula ID and corresponding parameters in the machine according to an instruction issued by the EAP after the production of each batch of products is finished;
the EAP system is used for controlling a product running process, acquiring a product formula ID according to the MES, requesting a product formula parameter from the RMS system, sending the formula ID and related parameters required by production to the EQP, and issuing an instruction to the EQP to clear the formula ID and related parameters in the machine;
the RMS system is used for configuring machine information and product formula information, providing corresponding parameters when the EAP system requests, and generating character strings for identifying the machine by the parameters according to rules through the formula.
2. A production formula analysis management method based on information security is characterized by comprising the following steps: the production formula analysis management method comprises the following steps:
and (3) acquiring a product formula ID: resolving a formula ID according to product carrier information;
and D, resolving the product formula ID: the recipe parameters are requested and analyzed into an identifiable format and then sent to the machine;
product production and removal steps: and the machine station produces according to the received formula parameters and empties the formula parameter information after the production is finished.
3. The information security-based production recipe analysis management method according to claim 2, characterized in that: the step of obtaining the product formula ID specifically comprises the following steps:
the EQP system reports the ID of the product carrier to the EAP system, and the EAP system processes the product carrier information and then requests product information to the MES system;
and the MES system sends the product data information to the EAP system, and the EAP system disassembles the product production formula ID according to the received product data information.
4. The information security-based production recipe analysis management method according to claim 3, characterized in that: the step of analyzing the product formula ID specifically comprises the following steps:
the EAP system requests a formula parameter from the RMS, and the RMS judges and processes the formula ID and analyzes the formula parameter into an EQP identifiable format;
the RMS system sends the analyzed recipe parameter information to the EAP system, which sends the analyzed recipe parameter information to the EQP.
5. The information security-based production recipe analysis management method according to claim 4, characterized in that: the product production and removal steps specifically comprise:
the EQP receives the analyzed formula parameter information and then carries out product production on a machine platform;
sending completion information to an EAP system after the product is produced or the product is moved away;
after receiving the completion information, the EAP system wants the EQP to send a formula parameter clearing instruction, and the EQP clears the formula parameter information in the machine after receiving the instruction.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011447130.1A CN112558571A (en) | 2020-12-09 | 2020-12-09 | Production formula analysis method and system based on information security |
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| CN202011447130.1A CN112558571A (en) | 2020-12-09 | 2020-12-09 | Production formula analysis method and system based on information security |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114548885A (en) * | 2022-04-27 | 2022-05-27 | 广州粤芯半导体技术有限公司 | Recipe data collection method and device for wafer manufacturing |
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| CN111394778A (en) * | 2020-03-13 | 2020-07-10 | 江西景旺精密电路有限公司 | Automatic generation and loading method and device for VCP (virtual video protocol) line production parameters |
| CN111783172A (en) * | 2020-06-23 | 2020-10-16 | 北京北方华创微电子装备有限公司 | Semiconductor process execution method and semiconductor process equipment |
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2020
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104166378A (en) * | 2013-05-17 | 2014-11-26 | 上海和辉光电有限公司 | Material CIM automatic management system and method for AMOLED factory |
| CN111308964A (en) * | 2018-12-12 | 2020-06-19 | 汉能移动能源控股集团有限公司 | Automatic production line control method, device and system |
| CN110264132A (en) * | 2019-06-06 | 2019-09-20 | 深圳市菲菱科思通信技术股份有限公司 | Material management system and implementation method based on MES |
| CN111394778A (en) * | 2020-03-13 | 2020-07-10 | 江西景旺精密电路有限公司 | Automatic generation and loading method and device for VCP (virtual video protocol) line production parameters |
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Application publication date: 20210326 |