CN104731904A - Inquiring system and method applied to commonality analysis of furnace tube equipment - Google Patents
Inquiring system and method applied to commonality analysis of furnace tube equipment Download PDFInfo
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- CN104731904A CN104731904A CN201510128816.7A CN201510128816A CN104731904A CN 104731904 A CN104731904 A CN 104731904A CN 201510128816 A CN201510128816 A CN 201510128816A CN 104731904 A CN104731904 A CN 104731904A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
- G06F16/10—File systems; File servers
- G06F16/16—File or folder operations, e.g. details of user interfaces specifically adapted to file systems
- G06F16/168—Details of user interfaces specifically adapted to file systems, e.g. browsing and visualisation, 2d or 3d GUIs
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F16/00—Information retrieval; Database structures therefor; File system structures therefor
- G06F16/20—Information retrieval; Database structures therefor; File system structures therefor of structured data, e.g. relational data
- G06F16/24—Querying
- G06F16/245—Query processing
- G06F16/2453—Query optimisation
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Abstract
The invention discloses an inquiring system applied to commonality analysis of furnace tube equipment. The inquiring system comprises a database, an interface generation module, an inquiring module and a report generation module, wherein the database is used for recording event information of all batches of wafers in the furnace tube equipment and position information of the wafers in the furnace tube equipment; the interface generation module is used for providing query interfaces for input query condition inputting; the inquiring module is used for having access to the database according to query conditions to execute query operation in the information recorded in the database; the report generation module is used for generating a first report and a second report according to query results, wherein the first report records the event information of the wafers meeting the query conditions and the position information of the wafers in the furnace tube equipment; the second report records the position information of all the batches of wafers in the furnace tube equipment with the wafers meeting the query conditions. By adopting the inquiring system, information of the furnace tube equipment/cavities which the wafers pass through can be summarized efficiently and accurately without viewing logs and conducting manual input batch by batch and machine by machine.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly a kind of be applied to furnace tube device consistency analysis inquiry system and querying method.
Background technology
In the Project-developing stage, when product occurs abnormal, process integration slip-stick artist all needs to carry out Macro or mass analysis to technique board/website (cavity) information of each wafer process in product, to determine abnormal whether being caused by some specific board/website (cavity), this analysis is commonly referred to consistency analysis (commonality analysis).At present, although consistency analysis can by business software, as ACE system completes, ACE system only can be inquired about the particular station of wafer process, cannot inquire about all websites (cavity); In addition, ACE system also only can inquire about the information of the wafer of whole batching, also cannot inquire about the definite information of each batch in this batching wafer.Therefore, when carrying out consistency analysis, usual needs propose demand by process integration slip-stick artist, on board or in board condition monitoring system (FDC system), daily record is checked by criticizing by cavity by process engineer, then manually fill up a form, finally obtain the technique board/site information of each wafer process.So do and significantly will reduce analysis efficiency undoubtedly, and artificial input also easily produces error message.
On the other hand, particularly for furnace tube device board, because the wafer-process situation of diverse location is different in furnace tube device, therefore only inquire every batching wafer the furnace tube device board of process intuitively cannot recognize the concrete abnormal conditions of furnace tube device.
Therefore, need to provide a kind of design newly to be applied to the consistency analysis of furnace tube device.
Summary of the invention
Fundamental purpose of the present invention aims to provide a kind of inquiry system and the querying method that are applied to furnace tube device consistency analysis, with can efficient and exactly to wafer the furnace tube device/cavity information of process gather, understand the abnormal conditions of furnace tube device.
For reaching above-mentioned purpose, the invention provides a kind of inquiry system being applied to furnace tube device consistency analysis, comprise: according to storehouse, for record in each described furnace tube device whole batches wafer the event information of process and the positional information in each described furnace tube device; Interface generation module, for providing query interface with input inquiry condition; Enquiry module, for accessing described database to perform query manipulation in the information of described data-base recording according to described querying condition; And report generation module, the first form and the second form is generated according to Query Result, described first accounting logging meets the positional information in the event information of the wafer of described querying condition and furnace tube device residing for it, the positional information of wafer of whole batches in the furnace tube device residing for wafer that described Secondary Report table record meets described querying condition.
Preferably, described event information comprises wafer essential information, furnace tube device machine station information and processing step information; Wherein said wafer essential information comprises product name of an article information, batch information and wafer production line procedure information; The cavity number information that described furnace tube device machine station information comprises furnace tube device number information, furnace tube device runs goods information, furnace tube device information working time and furnace tube device; Described processing step information at least comprises process menu information.
Preferably, described querying condition at least comprises furnace tube device querying condition and processing time querying condition.
Preferably, described querying condition also comprise wafer batch querying condition, product name of an article querying condition, process menu querying condition at least one of them.
Preferably, described enquiry module verifies whether described querying condition comprises furnace tube device querying condition and processing time querying condition, and when described querying condition comprises furnace tube device querying condition and processing time querying condition, described enquiry module performs query manipulation.
Present invention also offers a kind of querying method being applied to furnace tube device consistency analysis, comprising: record the wafer of in each described furnace tube device whole batches the event information of process and the positional information in each described furnace tube device; There is provided query interface with input inquiry condition; In the information of described record, query manipulation is performed according to described querying condition; And generate the first form and the second form according to Query Result, described first accounting logging meets the positional information in the event information of the wafer of described querying condition and furnace tube device residing for it, the positional information of wafer of whole batches in the furnace tube device residing for wafer that described Secondary Report table record meets described querying condition.
Preferably, described event information comprises wafer essential information, furnace tube device machine station information and processing step information; Wherein said wafer essential information comprises product name of an article information, batch information and wafer production line procedure information; The cavity number information that described furnace tube device machine station information comprises furnace tube device number information, furnace tube device runs goods information, furnace tube device information working time and furnace tube device; Described processing step information at least comprises process menu information.
Preferably, described querying condition at least comprises furnace tube device querying condition and processing time querying condition.
Preferably, described querying condition also comprise wafer batch querying condition, product name of an article querying condition, process menu querying condition at least one of them.
Preferably, the step performing query manipulation according to described querying condition in the information of described record comprises: verify whether described querying condition comprises furnace tube device querying condition and processing time querying condition; And when described querying condition comprises furnace tube device querying condition and processing time querying condition, perform query manipulation.
Inquiry system proposed by the invention and querying method, the querying condition that can arrange according to user performs inquiry, not only can obtain the essential information, machine station information, site information etc. of qualified wafer, do not need to check daily record and hand input-data by criticizing by board, can not need within the time of minute level human intervention ground, automatically complete need a few hours in the past, work that a large amount of repetitive operation of slip-stick artist has come, efficiency and accuracy are largely increased; In addition the positional information of whole batches of wafers in the boiler tube of qualified wafer place can also intuitively be understood, to obtain the generation position of boiler tube board abnormal conditions.
Accompanying drawing explanation
Fig. 1 is the calcspar that one embodiment of the invention is applied to the inquiry system of furnace tube device consistency analysis;
The schematic diagram of the query interface that the interface generation module that what Fig. 2 was one embodiment of the invention be applied to the inquiry system of furnace tube device consistency analysis provides;
The schematic diagram of the first form that the report generation module being applied to the inquiry system of furnace tube device consistency analysis being respectively one embodiment of the invention shown in Fig. 3 and Fig. 4 generates and the second form;
Fig. 5 is the process flow diagram that one embodiment of the invention is applied to the querying method of furnace tube device consistency analysis.
Embodiment
For making content of the present invention clearly understandable, below in conjunction with Figure of description, content of the present invention is described further.Certain the present invention is not limited to this specific embodiment, and the general replacement known by those skilled in the art is also encompassed in protection scope of the present invention.
Fig. 1 is the calcspar of the inquiry system for furnace tube device consistency analysis of one embodiment of the invention, and below with reference to Fig. 1, the present invention will be described in detail.
As shown in Figure 1, inquiry system comprises database 10, interface generation module 11, enquiry module 12 and report generation module 13.Wherein, database 10 for record in each furnace tube device whole batches wafer the event information of process and the positional information of these wafers in each furnace tube device.Event information comprises name of an article information, batch information, furnace tube device information, technique website (cavity) information, process menu information, processing time information etc.In one embodiment, this database is such as FDC board condition monitoring system database, and what have recorded all furnace tube device all batches of wafers crosses goods history and the every position of wafer in furnace tube device.Interface generation module 11 is for providing query interface with input inquiry condition, and wherein querying condition at least can comprise furnace tube device querying condition and processing time querying condition.Particularly, as shown in Figure 2, query interface comprises at least two input areas, and for inputting furnace tube device querying condition and processing time querying condition respectively, user can input furnace tube device numbering and time range in the mode chosen or manually input in these two input areas.In addition optional, query interface also comprises the input area of nonproductive poll condition, nonproductive poll condition is such as wafer batch querying condition, name of an article querying condition, process menu querying condition or website querying condition, coordinates furnace tube device querying condition and processing time querying condition to reduce query context further for user with these nonproductive poll conditions.Preferably, query interface also provides specific input format, with the input of specification user.Enquiry module 12, for according to the querying condition accessing database 10 inputted on query interface, to perform query manipulation in the information recorded at database 10, obtains Query Result.Enquiry module 12 can generate the language with database matching automatically according to querying condition, as sql like language, and accessing database, and return Query Result.Preferably, first whether enquiry module 12 revene lookup condition can contain furnace tube device querying condition and processing time querying condition, if contain this two querying conditions, enquiry module 12 performs query manipulation; Otherwise will not query manipulation be performed, or can at the querying condition of query interface prompting for inputting furnace tube device and processing time.
Report generation module 13 generates the first form and the second form automatically according to Query Result, wherein the first accounting logging event information of meeting the wafer of querying condition and the positional information that meets in wafer furnace tube device residing for it of querying condition, the second form then have recorded the positional information of the wafer of in the furnace tube device residing for the wafer meeting querying condition whole batches.Please refer to Fig. 3 and Fig. 4, which show the schematic diagram of the first form and the second form.The first and second forms shown in Fig. 3 automatically generate according to after the inquiry of " furnace tube device 01-05, processing time TIME1-TIME5 " this querying condition, demonstrated 5 batches of wafers in figure 3 and met querying condition, the event information of these wafers comprises wafer essential information, furnace tube device machine station information and processing step information.Wherein, wafer essential information comprises product name of an article information (PRODUCT), batch information (LOTID) and wafer production line procedure information (ROUTE); The cavity number information (CHAMBERID) that furnace tube device machine station information comprises furnace tube device number information (EQID), furnace tube device runs goods information (LOTRUNID), furnace tube device information working time (LOTTIME) and furnace tube device; Processing step information at least comprises process menu information (the code T OOLRECEIPE of process menu formula on board, the numbering RECEIPEID of process menu formula in production line), as be also included in Fig. 3 in whole production line flow process processing step numbering (OPERNO), when the layer of pre-treatment is numbered (LAYER).In addition first form of Fig. 3 also show each batch of wafer (25) positional information in corresponding furnace tube device.By the information that the first form is shown, the working condition of diverse location in furnace tube device intuitively can be recognized.Such as with same furnace tube device for querying condition, when discovery product different batches wafer is after this furnace tube device process, often all there is exception in a collection of wafer managed in this furnace tube device same position everywhere, then this position existing problems of this furnace tube device are described, need process in time.Please continue to refer to Fig. 4, which show the information that the second form records, second form meets the wafer of querying condition to each batch, except recording this batch of wafer (in Fig. 4 PRODUCTLOT) except the positional information in corresponding furnace tube device, also have recorded the positional information of other batch of wafer (in Fig. 4 MONITORLOT) in corresponding furnace tube device, therefore Secondary Report table record meet querying condition the furnace tube device residing for wafer in whole batches wafer batch and positional information.In addition, second form can also need to record other information according to user, such as furnace tube device runs goods information (LOTRUNID), furnace tube device information working time (LOTTIME), process menu information (RECIPEID) etc., and the present invention is not limited.Same, if with same furnace tube device for querying condition, multiple second forms can be obtained, record each batch of position of wafer in this furnace tube device respectively, carry out contrasting the working condition can recognizing the ad-hoc location of furnace tube device equally in time with multiple second forms.
The querying method being applied to furnace tube device consistency analysis of the present invention one specific embodiment is described below with reference to Fig. 2.As shown in Figure 2, querying method comprises the following steps:
Record the wafer of in each furnace tube device whole batches the event information of process and the positional information in each furnace tube device;
There is provided query interface with input inquiry condition;
In the information of record, query manipulation is performed according to querying condition; And
The first form and the second form is generated according to Query Result.
Wherein, event information comprises wafer essential information, furnace tube device machine station information and processing step information; Wherein said wafer essential information comprises product name of an article information, batch information and wafer production line procedure information; The cavity number information that described furnace tube device machine station information comprises furnace tube device number information, furnace tube device runs goods information, furnace tube device information working time and furnace tube device; Described processing step information at least comprises process menu information.Querying condition at least comprises furnace tube device querying condition and processing time querying condition, optionally also comprise wafer batch querying condition, name of an article querying condition, process menu querying condition at least one of them.Preferably, perform in this step of query manipulation according to querying condition in the information of record, first whether revene lookup condition contains furnace tube device querying condition and processing time querying condition, when comprising this two conditions, just performs query manipulation.
In addition, the first accounting logging meets the positional information in the event information of the wafer of querying condition and furnace tube device residing for it, the positional information of wafer of whole batches in the furnace tube device residing for wafer that Secondary Report table record meets querying condition.
In sum, inquiry system of the present invention and querying method, the querying condition that can arrange according to user performs inquiry, not only can obtain the essential information, machine station information, site information etc. of qualified wafer, do not need to check daily record and hand input-data by criticizing by board, can not need within the time of minute level human intervention ground, automatically complete need a few hours in the past, work that a large amount of repetitive operation of slip-stick artist has come, efficiency and accuracy are largely increased; In addition the more specific location information of whole batches of wafers in the boiler tube of qualified wafer place can also intuitively be understood, accurately to obtain the generation position of boiler tube board abnormal conditions.
Although the present invention discloses as above with preferred embodiment; right described many embodiments are citing for convenience of explanation only; and be not used to limit the present invention; those skilled in the art can do some changes and retouching without departing from the spirit and scope of the present invention, and the protection domain that the present invention advocates should be as the criterion with described in claims.
Claims (10)
1. be applied to an inquiry system for furnace tube device consistency analysis, it is characterized in that, comprising:
Database, for record in each described furnace tube device whole batches wafer the event information of process and the positional information in each described furnace tube device;
Interface generation module, for providing query interface with input inquiry condition;
Enquiry module, for accessing described database to perform query manipulation in the information of described data-base recording according to described querying condition; And
Report generation module, the first form and the second form is generated according to Query Result, described first accounting logging meets the positional information in the event information of the wafer of described querying condition and furnace tube device residing for it, the positional information of wafer of whole batches in the furnace tube device residing for wafer that described Secondary Report table record meets described querying condition.
2. inquiry system according to claim 1, is characterized in that, described event information comprises wafer essential information, furnace tube device machine station information and processing step information; Wherein said wafer essential information comprises product name of an article information, batch information and wafer production line procedure information; The cavity number information that described furnace tube device machine station information comprises furnace tube device number information, furnace tube device runs goods information, furnace tube device information working time and furnace tube device; Described processing step information at least comprises process menu information.
3. inquiry system according to claim 2, is characterized in that, described querying condition at least comprises furnace tube device querying condition and processing time querying condition.
4. inquiry system according to claim 3, is characterized in that, described querying condition also comprise wafer batch querying condition, product name of an article querying condition, process menu querying condition at least one of them.
5. inquiry system according to claim 3, it is characterized in that, described enquiry module verifies whether described querying condition comprises furnace tube device querying condition and processing time querying condition, when described querying condition comprises furnace tube device querying condition and processing time querying condition, described enquiry module performs query manipulation.
6. be applied to a querying method for furnace tube device consistency analysis, comprise:
Record the wafer of in each described furnace tube device whole batches the event information of process and the positional information in each described furnace tube device;
There is provided query interface with input inquiry condition;
In the information of described record, query manipulation is performed according to described querying condition; And
The first form and the second form is generated according to Query Result, described first accounting logging meets the positional information in the event information of the wafer of described querying condition and furnace tube device residing for it, the positional information of wafer of whole batches in the furnace tube device residing for wafer that described Secondary Report table record meets described querying condition.
7. querying method according to claim 6, is characterized in that, described event information comprises wafer essential information, furnace tube device machine station information and processing step information; Wherein said wafer essential information comprises product name of an article information, batch information and wafer production line procedure information; The cavity number information that described furnace tube device machine station information comprises furnace tube device number information, furnace tube device runs goods information, furnace tube device information working time and furnace tube device; Described processing step information at least comprises process menu information.
8. querying method according to claim 6, is characterized in that, described querying condition at least comprises furnace tube device querying condition and processing time querying condition.
9. querying method according to claim 8, is characterized in that, described querying condition also comprise wafer batch querying condition, product name of an article querying condition, process menu querying condition at least one of them.
10. querying method according to claim 8, is characterized in that, the step wherein performing query manipulation according to described querying condition in the information of described record comprises:
Verify whether described querying condition comprises furnace tube device querying condition and processing time querying condition; And
When described querying condition comprises furnace tube device querying condition and processing time querying condition, perform query manipulation.
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| CN201510128816.7A CN104731904A (en) | 2015-03-23 | 2015-03-23 | Inquiring system and method applied to commonality analysis of furnace tube equipment |
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| CN201510128816.7A CN104731904A (en) | 2015-03-23 | 2015-03-23 | Inquiring system and method applied to commonality analysis of furnace tube equipment |
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| CN108460165A (en) * | 2018-04-19 | 2018-08-28 | 中山凯旋真空科技股份有限公司 | The information record queries method and system of vacuum equipment |
| CN112799863A (en) * | 2019-11-13 | 2021-05-14 | 北京百度网讯科技有限公司 | Method and apparatus for outputting information |
| CN112989141A (en) * | 2021-03-15 | 2021-06-18 | 上海华力微电子有限公司 | Method and system for inquiring interrupted wafer batch LOT |
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Application publication date: 20150624 |