CN103678974A - Remote access client terminal of chemico-mechanical polishing control system - Google Patents
Remote access client terminal of chemico-mechanical polishing control system Download PDFInfo
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Abstract
The invention provides a remote access client terminal of a chemico-mechanical polishing control system. The remote access client terminal is used for technologists to access a wafer machining information database of the chemico-mechanical polishing control system, and therefore the technologists are assisted in conveniently scanning all wafer machining information records within the scope of their access permission. The wafer machining information database is constructed by a MySQL database management system and operates on an independent server. The client terminal is used for sending a request for accessing the wafer machining information database to the server so as to obtain the permission of accessing the wafer machining information database through the server and read information within the permission. According to the remote access client terminal of the chemico-mechanical polishing control system, the technologists can remotely log in to the far-end wafer machining information database and perform corresponding operation on wafer machining information data in the database within the scope of their access permission In addition, the client terminal is safe, reliable, efficient and convenient to operate.
Description
Technical field
The present invention relates to chemical Mechanical Polishing Technique field, particularly a kind of remote access client of chemically mechanical polishing control system.
Background technology
Chemical Mechanical Polishing Technique (Chemical Mechanical Planarization, be called for short CMP) is current the most widely used overall planarization of ULSI epoch, and being also at present uniquely can provide to submicron order device the technology of overall planarization.CMP technological synthesis the advantage of chemical polishing and mechanical buffing, can effectively take into account part and the global flatness of crystal column surface, met the requirement of the more chip of less, the metal interconnected number of plies of manufacturing feature size.
CMP system designs for copper CMP technique, for removing the unnecessary copper of crystal column surface.In process practice, technologist needs to grasp in time the technique information of each wafer, and the technical recipe using while comprising wafer numbering, process time and polishing thereof etc., for scientifically managing wafer work flow.Therefore, for meet bulk information record, preserve and consult, can select MySQL(ripe Relational DBMS of increasing income) set up and manage a perfect wafer machining information database.But how to guarantee technologist's high efficient and reliable easily remote access wafer machining information database be the major issue need solving.
Summary of the invention
The present invention is intended at least one of solve the problems of the technologies described above.
For this reason, the object of the invention is to propose a kind of remote access client of safe, reliable and easy to operate chemically mechanical polishing control system, this client can realize technologist's remote access chemically mechanical polishing control system wafer machining information database, facilitate technologist to browse whole wafer processed record information in its authority, and according to its authority, the wafer machining information data in database are operated accordingly, to meet technologist's demand.
To achieve these goals, embodiments of the invention provide a kind of remote access client of chemically mechanical polishing control system, for technologist, access the wafer machining information database of chemically mechanical polishing control system, wherein, described wafer machining information database is built by MySQL data base management system (DBMS), operate in independently on server, described client is responsible for and described server telecommunication, for sending the request of access to described wafer machining information database according to the information of technologist's input to described server, to obtain the authority of the described wafer machining information database of access by described server, described server is used for receiving the request of access to described wafer machining information database that described client is sent, and to described client, provides corresponding service according to described request of access, described wafer machining information database is for the machining information data that record and preserve wafer, and the request of access that its management system sends according to described client is to the control that conducts interviews of the machining information data of described wafer.
According to the remote access client of the chemically mechanical polishing control system of the embodiment of the present invention, wafer machining information database operates on server, this client is according to the information of technologist's input, to server, send corresponding request of access with the telecommunication of server, server provides corresponding service according to this request of access to client, so that client is connected with the Database of far-end, make technologist pass through the database that client can remote access far-end, and according to the data of relevant wafer machining information in its authority Query Database, and can carry out associative operation to wafer machining information data, such as modification and deletion information etc.This client is easy to use, and development difficulty is low, and has safe, reliable and efficient advantage.
In addition, the remote access client of chemically mechanical polishing control system according to the above embodiment of the present invention can also have following additional technical characterictic:
In some instances, described client has independently operation interface, specifically comprises: basic login interface, parameter arrange interface and information browse window.
In some instances, described wafer machining information data comprise: the technical recipe of wafer numbering, process time, wafer state and wafer.
In some instances, described client is for sending link order to connect in the information of its operation interface input to described server by technologist, after successful connection, technologist's identity information described in described server authentication, after technologist's identity described in described server authentication is correct, enter described wafer machining information database, and carry out the associative operation under described technologist's authority.
In some instances, the information of described technologist's input comprises: the port numbers that the IP address of described server, described server are monitored, title, user name and the password of described wafer machining information database, wherein, the port numbers that the IP address of described server and described server are monitored connects for described client and described server, the title of described wafer machining information database requires the database of access for indicating technologist, described technologist's user name and password are for the identity of technologist described in described server authentication.
In some instances, the content of the associative operation under described technologist's authority comprises: inquiry, modification and deletion information.
In some instances, the workflow of described client comprises: (1) logins described wafer machining information database, (2) data manipulation, (3) exit described wafer machining information database, wherein, exit after described wafer machining information database, described client also, for closing its operation interface and disconnecting and being connected of described server, discharges described client process.
In some instances, described client also, for after getting the data that need, is carried out demonstration and the combination of information, to facilitate technologist's subsequent operation to described data.
In some instances, the database access interface that the remote access client inner utilization Qt of described chemically mechanical polishing control system provides, during exploitation, need to compile the MySQL database-driven of described wafer machining information database, and apply with the form of plug-in unit, when connecting, creation database should complete following 3 operations: activate driver, link information is set, open connection; After database successful connection, described client is used the Structured Query Language (SQL) of standard database to be inquired about, deleted and the routine operation such as interpolation.
Additional aspect of the present invention and advantage in the following description part provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage accompanying drawing below combination obviously and is easily understood becoming the description of embodiment, wherein:
Fig. 1 is the remote access client of chemically mechanical polishing control system according to an embodiment of the invention and the communication schematic diagram of server;
Fig. 2 is the step schematic diagram that the remote access client of chemically mechanical polishing control system according to an embodiment of the invention connects wafer machining information database; And
Fig. 3 is the remote access client browsing process schematic diagram of chemically mechanical polishing control system according to an embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has the element of identical or similar functions from start to finish.Below by the embodiment being described with reference to the drawings, be exemplary, only for explaining the present invention, and can not be interpreted as limitation of the present invention.
In description of the invention, it will be appreciated that, term " " center ", " longitudinally ", " laterally ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end ", " interior ", orientation or the position relationship of indications such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, rather than device or the element of indication or hint indication must have specific orientation, with specific orientation structure and operation, therefore can not be interpreted as limitation of the present invention.In addition, term " first ", " second " be only for describing object, and can not be interpreted as indication or hint relative importance.
In description of the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and for example, can be to be fixedly connected with, and can be also to removably connect, or connect integratedly; Can be mechanical connection, can be to be also electrically connected to; Can be to be directly connected, also can indirectly be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, can concrete condition understand above-mentioned term concrete meaning in the present invention.
Below in conjunction with accompanying drawing, describe according to the remote access client of the chemically mechanical polishing control system of the embodiment of the present invention.
Fig. 1 is the remote access client of chemically mechanical polishing control system according to an embodiment of the invention and the communication schematic diagram of server.As shown in Figure 1, the remote access client 110 of chemically mechanical polishing control system according to an embodiment of the invention, for technologist, access the wafer machining information database 130 of chemically mechanical polishing control system, facilitate technologist to browse whole wafer processed record informations in its authority, wherein, in a concrete example, wafer machining information database 130 is built by MySQL data base management system (DBMS), operates in independently on server 120.
Particularly, client 110 and server 120 telecommunication, the request of access of client 110 for sending wafer machining information database 130 to server 120 according to the information of technologist's input, to obtain the authority of access wafer machining information database 130 by server 120.The request of access to wafer machining information database 130 that server 120 sends for receiving client 110, and to client 110, provide corresponding service according to this request of access.Wafer machining information database 130 is for recording and preserve the machining information data of wafer, and the request of access that its management system sends according to client 110 is to the control that conducts interviews of the machining information data of wafer.
As a concrete example, for example can be by Qt OpenSource being integrated into the exploitation that realizes above-mentioned client 110 in Visual Studio 2008 environment.Wherein, Qt is a for developing the C++ kit of cross-platform graphical interface program, offers developer and sets up the required all functions of art level graphic user interface.The mode that Qt is used source code level " once to write, everywhere compiling " builds multi-platform graphical user interface program, and good encapsulation mechanism makes the degree of modularity of Qt very high, and reusability is good, very convenient for User Exploitation.Qt also provides a kind of Signal/Slots(of being called signal/groove) security mechanism substitute Callback(readjustment), make the collaborative work between each control become very simple.In addition, Qt adopts C Plus Plus, and execution speed is very fast, the occasion that applicable requirement of real-time is higher, and the program of writing can meet the requirement of real-time in remote access data storehouse completely in speed.Therefore, embodiments of the invention can be selected the concrete version of Qt OpenSource(according to self needing) be integrated in Visual Studio 2008 environment, in order to realize the exploitation of client 110.
In addition, for example can build above-mentioned wafer machining information database 130 by MySQL data base management system (DBMS).Particularly, Database Technolgy Development has had the commercial data base management system (DBMS) of a lot of maturations so far.In numerous data base management system (DBMS)s, MySQL is outstanding.MySQL is the data base management system (DBMS) of increasing income of Sweden MySQL AB company exploitation, is the sql database server of a real multi-user, multi-platform and multithreading.As a kind of associated data base management system, MySQL is expressed the relation between data with the form of database table, and stores data in form, so that inquiry.The major advantage of MySQL is quick, stable and easy-to-use.Compare other any producers that database is provided on hardware platform, it can process the large database of the same order of magnitude quickly.Therefore,, in the chemically mechanical polishing control system of the embodiment of the present invention, can utilize MySQL to build wafer machining information database 130.
In one embodiment of the invention, above-mentioned client 110 has independently operation interface, specifically comprises: basic login interface, parameter arrange interface and information browse window.Wherein, as a concrete example, the design of this operation interface is completed by Qt Designer.
Further, client 110 also sends link order to connect for the information of inputting on its operation interface by technologist to server 120.After successful connection, server 120 starts to verify technologist's identity information.After server 120 checking technologist identity are correct, client 110 enters wafer machining information database 130, and carries out the associative operation under technologist's authority.Wherein, the information of above-mentioned technologist's input for example comprises: port numbers, the title of wafer machining information database 130, technologist's user name and corresponding password that the IP address of server 120, server 120 are monitored.The content of the associative operation under above-mentioned technologist's authority specifically comprises: inquiry, modification and deletion information.Wherein, the IP address of server 120 and the port numbers of monitoring connect for client 110 and server 120, the title of wafer machining information database 130 requires the database of access for indicating technologist, technologist's user name and password are for server 120 these technologists' of checking identity.
In other words, established technology personnel input the IP address of server 120 on the operation interface of client 110, the port numbers that server 120 is monitored, the title of database 130, the log-on message such as user name and password, after information to be confirmed is errorless, can start this login process.First client-side program initiates to connect to server 120, if connected, is successfully established, and server 120 can start to verify technologist's identity information, and after success to be verified, technologist can login this wafer machining information database 130.Further, technologist, enter after database, the operation under can carry out this authority, such as inquiring about in database, revise and the operation such as deletion information.
In another embodiment of the present invention, above-mentioned wafer machining information data comprise: the technical recipe of wafer numbering, process time, wafer state and wafer.
In other words, as a concrete example, shown in Fig. 1, the global design requirement of the chemically mechanical polishing control system based on the embodiment of the present invention, wafer machining information Database Systems adopt C/S(client/server) pattern.Server 120 be used for customer in response request and specific service is provided; Client 110 is used for filing a request and requiring certain service to server 120.More specifically, under this pattern, the program of client 110 operates in host computer IPC, and the operation that can not monitor master routine to CMP impacts.Further, client 110 is responsible for access remote data storehouse 130, and there is oneself independently operation interface (design of operation interface utilizes Qt Designer to complete), mainly comprise that basic login interface, parameter arrange interface and information browse window, can meet technologist's functional requirement completely.Technologist is by client 110 log database 130, accesses the line correlation operation (technologist of different stage enjoys different authorities) of going forward side by side of every terms of information under this authority.The wafer machining information database 130 building based on MySQL operates on server 120, and for recording and preserve submitted data, its management system is responsible for the access control of data.For server 120, server resource management device need be connected to MySQL database.In database, recorded in detail every key message of each wafer, such as comprising wafer numbering, wafer state (such as completing processing or not completing processing) and the main fields such as technical recipe of selecting, and a series of complete data forms have been set up accordingly.In addition, if technologist accesses successfully, can obtain the full detail in this authority, and carry out corresponding operating.If accessed unsuccessfully, return to unsuccessfully information.
Further, in one embodiment of the invention, the workflow of client 110 comprises: (1) login wafer machining information database; (2) data manipulation; (3) exit wafer machining information database.Wherein, exit after wafer machining information database, client 110 is also for closing its operation interface, and being connected of disconnection and server 120, and discharges client process.In other words, established technology personnel shutoff operation interface, exits access and connects, and discharges client process.
In addition, client 110 also, for after getting the data that need, is carried out demonstration and the combination of information, to facilitate technologist's subsequent operation to these data.Further, if do not need too many subsequent treatment, only for showing more quickly record, for simple data, show, client 110 can also be used QSQlTableModel and the QTableView that Qt provides to process every data of having received.
In another specific example, the main operating process of the client of the system of the embodiment of the present invention can be summarized as follows:
(1) connection data storehouse.
In client operation interface, first input the IP address of server, the log-on messages such as port numbers, database-name, user name and password that server end is monitored.After technologist's confirmation is errorless, can start this login process.First client-side program initiates to connect to server end, if connected, is successfully established.Server end can start to verify technologist's identity information.Success to be verified, technologist can enter this wafer machining information database.Wherein, IP address for server, the basic default parameters such as the port numbers that server end is monitored and database-name, client can be preserved with .dat file layout automatically, during technologist's running client program next time, system reads this Parameter File first automatically, and parameters value is presented in corresponding input frame one by one, technologist only needs user name and the password of input oneself, can start login process.If basic default parameters change, technologist also only needs to re-enter once, and after confirming to preserve, client-side program will upgrade corresponding Parameter File automatically.
(2) data manipulation.
After technologist enters database, the operation under can carry out this authority.Client-side program is responsible for the information of various operations to be included in the solicited message of passing to server, and in an embodiment of the present invention, the content of operation that client can be passed to server mainly comprises inquiry, modification and deletion information etc.Wherein query manipulation is the authority according to current technologist, feeds back to all wafer records in this authority of technologist, and user can further arrange querying condition, checks the own information of being concerned about most at present; Retouching operation is modified to current a certain record for technologist, if the modification information of client submission, i.e. respective record in renewable database are verified and passed through to server end; Deletion action can make technologist delete all invalid record, when server end obtains after user's operational order, result can be sent to client, is presented on interface, facilitates technologist to consult.
(3) exit client.
Established technology personnel are closed and are browsed window by client, and middle connection breaking discharges client process.
In addition, database itself is a program that can replace people's managing mass data.It is pointed out that when utilizing visualization toolkit to do database development, application program can not directly be come into contacts with data source conventionally, and will pass through some intermediaries, therefore, needs choose reasonable database access mode.
Aspect application development accessing database, the software company of main flow all provides separately independently or the solution about database access of contact as Microsoft, Borland, Sun and some other companies or mechanism.If early stage DAO, ODBC, RDO and OLE DB, ADD afterwards, ADO.Net etc. are mainly the database access technology that Microsoft provides.
Usually, access MySQL database has 3 kinds of methods: the C api interface that 1) uses MySQL; 2) use Open Database Connection interface MySQL ODBC; 3) use based on standard C ++ MySQL database access engine MySQL++.Above-mentioned first two access method is the access MySQL data base method that MySQL provides in early days, and MySQL++ be the up-to-date release of MySQL based on standard C ++ source code level MySQL database access engine, have powerful, access performance is high and the advantage such as cross-platform.But, because Qt provides the database programming interface of irrelevant platform, can expand better new different database, and utilize model/view structure of Qt database and client end interface can be combined well, the browsing and show of more convenient information.Therefore, client 110 is used the database access interface of Qt.
Further, in one embodiment of the invention, the database access interface of client 110 inner utilization Qt, when exploitation, need to compile the MySQL database-driven of described wafer machining information database, and apply with the form of plug-in unit, when creation database connects, should complete following operation (as shown in Figure 2): activate this driver, link information with wafer machining information database 130 is set, finally according to this link information, opens and being connected of wafer machining information database 130.
In other words, in one example, although MySQL self provides conveniently application programming interface, consider that CMP control system master routine adopts Qt design, and Qt provides the database programming interface of irrelevant platform, can expand better new different database.In addition, utilize model/view structure of Qt the graphic user interface of database and client can be combined well, the browsing and show of more convenient information.Therefore, guaranteeing the good conforming while, embodiments of the invention are used Qt database access interface.
In Qt, if access other a certain specific databases, need to provide corresponding driver to Qt.Because Qt self is not with the driving of MySQL database, only have source code file, so need to compile voluntarily MySQL database-driven, make its application of form with plug-in unit.Whole compilation process is divided into following 3 steps:
1) download the installation procedure of MySQL.Select when mounted customization to install, choose Libs and Include file.Suppose installation site be C: MySQL.
2) compile.And in the light of actual conditions input as given an order:
a.cd%QTDIR%\src\plugins\sqldrivers\mysql
b.qmake″INCLUDEPATH+=C:\MySQL\include″″LIBS+=C:\MYSQL\MySQL?Server<version>\lib\opt\libmysql.lib″mysql.pro
c.nmake
3) finally by C: MySQL libmySQL.dll file copy under bin catalogue to the qt under Qt Creator installation directory in bin catalogue.
The SQL class of Qt provides seamless database integrated for Qt application program, and such form by plug-in unit is dynamically loaded new driver in the runtime.Once this plug-in unit is established, Qt just can automatically load it, is that QSqlDatabase is used afterwards.Therefore, in an embodiment of the present invention, creating a database connection needs 3 steps: activate driver; Link information is set; And open connection.After database successful connection, just can use the SQL(Structured Query Language of standard, Structured Query Language (SQL)) database is inquired about, deleted and the routine operation (see figure 3) such as interpolation.
As a concrete example, in order to carry out SQL query, first must set up and being connected of database.Generally, in program, with an independent function, realize and being connected of database.
QSqlDatabase?db=QSqlDatabase::addDatabase(″QMYSQL″);
db.setHostName(parameter::ipaddress);
db.setPort(parameter::port);
db.setDatabaseName(parameter::DBname);
db.setUserName(parameter::dbusername);
db.setPassword(parameter::dbuserpassword);
if(!db.open())
{ // relevant error process information }
First, call addDatabase function and create QSqlDatabase object.First parameter of addDatabase function has specified Qt to use which database device to visit this database, and that the present invention uses is MySQL.
Next, the server name of database need to be set, port numbers, database name, user name and password, and open this connection.Generally, Common Parameters setting can be preserved.When user's secondary is logined, at assigned address, read and preserve parameter.If function Open operation failure, will show error message.
Once connect, set up, just can use QSqlQuery to carry out any SQL statement that underlying database is supported.When carrying out SQL statement, need to create a QSqlQuery object, then utilize exec function.As follows.
QSqlQuery?query;
query.exec(QString(″SELECT*FROM?popmsg?WHERE?cid=′%1′ORDER?BY?createtime?DESC″).arg(parameter::userID));
Above-mentioned code is all records that return under active user's authority, and by date of formation descending sort.After executing exec function, the internal pointer of QSqlQuery can be used next function that pointer is navigated to article one record before being positioned to first record of result set.Each next function call, all can move on to next record record pointer subsequently, until next function just returns to false during the ending of result set.
int?attributeNo=0;
while(query.next())
{
attributeNo=query.record().indexOf(″wafer_id″);
wafer_id=query.value(attributeNo).toString();
attributeNo=query.record().indexOf(″createtime″);
QString?createtime=query.value(attributeNo).toString();
attributeNo=query.record().indexOf(″state″);
QString?state=query.value(attributeNo).toString();
attributeNo=query.record().indexOf(″recipe″);
QString?state=query.value(attributeNo).toString();
}
Above-mentioned code access the wafer numbering of every record, process time, the property values such as wafer state and technical recipe.It should be noted that, function value returns to each field value as QVariant, and QVariant class can be preserved the data type of many C++ and Qt, during use, need change accordingly.
So far, client completes the access function to remote data storehouse substantially, and successfully gets all data that technologist is concerned about.Client can freely be used these data to carry out the demonstration of information and combination etc., to facilitate the ensuing operation of user.If do not need too many subsequent treatment, only for showing more quickly record, can also use QSQlTableModel and the QTableView that Qt provides to process every data of having received.
Pattern/view/controller is a kind of Design Mode that small talk language is introduced at first, is mainly used in the user interface of framework program.This Design Mode comprises three kinds of objects.Pattern is application object, comprises the data that will show.The mode (showing data in modes such as form, tree and lists) that view shows corresponding to data.Controller object is for playing up the data that will show.In Qt, introduce such design framework, can make the data in database show more flexible and convenient.Based on this framework, utilize the QSQlTableModel class of Qt and the data display function that QTableView class can conveniently realize client end interface.For example:
1) QSQlTableModel class:
QSqlTableModel model; // establishment QSqlTableModel object
Model.setTable (" history "); // data of schema object a---table in database is set
Model.setFilter (QString (" cid=' %1 ' ") .arg (parameter::userID)); // screening conditions are set
Model.select (); // obtain data
By code above, can obtain the total data of this current user right.
2) QTableView class:
In establishment, complete after schema object, need to determine the data in schema object to show in which way.Qt provides three kinds of view classes to show for data in advance, is respectively QTableView class (showing with form), QListView class (showing with tabular form) and QTreeView class (showing with Tree structure).Due to the mode organising data of relation database table with similar two-dimentional form, so the demonstration to tables of data generally adopts QTableView object.
QTableView*view=new QTableView; A QTableView object of // establishment
View->setModel (model); // schema object of view is set
View->show (); // with form, show data
The schema object based on QSQlTableModel that model in code view->setModel (model) creates before being exactly.This schema object is processed and how from database, to be taken out data and take out which type of data.By above code, client end interface just can the form with form show obtained full detail, facilitates technologist to browse relevant information.
According to the remote access client of the chemically mechanical polishing control system of the embodiment of the present invention, wafer machining information database operates on server, client is according to technologist's demand, by the telecommunication with server, to server, send corresponding request of access, server provides corresponding service according to this request of access to client, so that client is connected with the Database of far-end, make technologist pass through the database that client can remote access far-end, and relevant wafer machining information data in Query Database under its authority according to demand, and can carry out associative operation to wafer machining information data, such as modification and deletion information etc.Therefore, this client operation is convenient, and development difficulty is low, and also has safe, reliable and efficient advantage.
In the description of this instructions, the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means to be contained at least one embodiment of the present invention or example in conjunction with specific features, structure, material or the feature of this embodiment or example description.In this manual, the schematic statement of above-mentioned term is not necessarily referred to identical embodiment or example.And the specific features of description, structure, material or feature can be with suitable mode combinations in any one or more embodiment or example.
Although illustrated and described embodiments of the invention, those having ordinary skill in the art will appreciate that: in the situation that not departing from principle of the present invention and aim, can carry out multiple variation, modification, replacement and modification to these embodiment, scope of the present invention is by claim and be equal to and limit.
Claims (9)
1. the remote access client of a chemically mechanical polishing control system, for technologist, access the wafer machining information database of chemically mechanical polishing control system, wherein, described wafer machining information database is built by MySQL data base management system (DBMS), operate in independently on server, it is characterized in that
Described client and described server telecommunication, for sending the request of access to described wafer machining information database according to the information of technologist's input to described server, to obtain the authority of the described wafer machining information database of access by described server;
Described server is used for receiving the request of access to described wafer machining information database that described client is sent, and to described client, provides corresponding service according to described request of access;
The machining information data of described wafer machining information database for recording and preserve wafer.
2. the remote access client of chemically mechanical polishing control system according to claim 1, is characterized in that, described client has independently operation interface, specifically comprises: basic login interface, parameter arrange interface and information browse window.
3. the remote access client of chemically mechanical polishing control system according to claim 1, is characterized in that, described wafer machining information data comprise: the technical recipe of wafer numbering, process time, wafer state and wafer.
4. the remote access client of chemically mechanical polishing control system according to claim 2, it is characterized in that, described client is for sending link order to connect in the information of its operation interface input to described server by technologist, after successful connection, technologist's identity information described in described server authentication, after technologist's identity described in described server authentication is correct, enter described wafer machining information database, and carry out the associative operation under described technologist's authority.
5. the remote access client of chemically mechanical polishing control system according to claim 4, it is characterized in that, the information of described technologist's input comprises: the IP address of described server, the port numbers that described server is monitored, the title of described wafer machining information database, described technologist's user name and password, wherein, the port numbers that the IP address of described server and described server are monitored connects for described client and described server, the title of described wafer machining information database requires the database of access for indicating technologist, described technologist's user name and password are for the identity of technologist described in described server authentication.
6. the remote access client of chemically mechanical polishing control system according to claim 4, is characterized in that, the associative operation content under described technologist's authority comprises: inquiry, modification and deletion information.
7. the remote access client of chemically mechanical polishing control system according to claim 4, it is characterized in that, the workflow of described client comprises: (1) logins described wafer machining information database, (2) data manipulation, (3) exit described wafer machining information database, wherein, exit after described wafer machining information database, described client is also for closing its operation interface, and being connected of disconnection and described server, and discharges described client process.
8. the remote access client of chemically mechanical polishing control system according to claim 4, it is characterized in that, described client also, for after getting the data that need, is carried out demonstration and the combination of information, to facilitate technologist's subsequent operation to described data.
9. the remote access client of chemically mechanical polishing control system according to claim 1, it is characterized in that, the remote access client inner utilization Qt database access interface of described chemically mechanical polishing control system, during exploitation, need to compile the MySQL database-driven of described wafer machining information database, and apply with the form of plug-in unit, when creation database connects, should complete following 3 operations: activate driver, link information is set, opens connection; After database successful connection, described client is used the Structured Query Language (SQL) of standard database to be inquired about, deleted and the routine operation such as interpolation.
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| CN107329842A (en) * | 2017-06-29 | 2017-11-07 | 福建新和兴信息技术有限公司 | The method and terminal of acquisition data based on Qt signal mechanism slots |
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