CN116848467A - 感光性树脂组合物、固化膜和半导体装置 - Google Patents

感光性树脂组合物、固化膜和半导体装置 Download PDF

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Publication number
CN116848467A
CN116848467A CN202280015064.1A CN202280015064A CN116848467A CN 116848467 A CN116848467 A CN 116848467A CN 202280015064 A CN202280015064 A CN 202280015064A CN 116848467 A CN116848467 A CN 116848467A
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CN
China
Prior art keywords
group
carbon atoms
general formula
resin composition
photosensitive resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280015064.1A
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English (en)
Chinese (zh)
Inventor
乙黑昭彦
今井启太
上田祐辉
久保山俊治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority claimed from PCT/JP2022/005338 external-priority patent/WO2022172988A1/ja
Publication of CN116848467A publication Critical patent/CN116848467A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G73/00—Macromolecular compounds obtained by reactions forming a linkage containing nitrogen with or without oxygen or carbon in the main chain of the macromolecule, not provided for in groups C08G12/00 - C08G71/00
    • C08G73/06—Polycondensates having nitrogen-containing heterocyclic rings in the main chain of the macromolecule
    • C08G73/10—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • C08G73/16—Polyester-imides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
CN202280015064.1A 2021-02-15 2022-02-10 感光性树脂组合物、固化膜和半导体装置 Pending CN116848467A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2021-021545 2021-02-15
JP2021105687 2021-06-25
JP2021-105687 2021-06-25
PCT/JP2022/005338 WO2022172988A1 (ja) 2021-02-15 2022-02-10 感光性樹脂組成物、硬化膜および半導体装置

Publications (1)

Publication Number Publication Date
CN116848467A true CN116848467A (zh) 2023-10-03

Family

ID=84545731

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280015064.1A Pending CN116848467A (zh) 2021-02-15 2022-02-10 感光性树脂组合物、固化膜和半导体装置

Country Status (3)

Country Link
JP (1) JPWO2022270527A1 (https=)
CN (1) CN116848467A (https=)
WO (1) WO2022270527A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120456798A (zh) * 2025-07-11 2025-08-08 昆山协鑫光电材料有限公司 一种钙钛矿太阳能电池、电子传输层的制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3537907B2 (ja) * 1994-03-29 2004-06-14 株式会社東芝 ポリイミド前駆体、ポリイミド前駆体組成物、ポリイミド樹脂および電子部品
JP2017125210A (ja) * 2017-04-05 2017-07-20 住友ベークライト株式会社 ポリアミド樹脂、ポジ型感光性樹脂組成物、硬化膜、保護膜、絶縁膜、半導体装置、および表示体装置
US11535709B2 (en) * 2019-03-05 2022-12-27 Promerus, Llc Reactive end group containing polyimides and polyamic acids and photosensitive compositions thereof
WO2020196764A1 (ja) * 2019-03-27 2020-10-01 株式会社カネカ アルカリ可溶性ポリイミドおよびその製造方法、ネガ型感光性樹脂組成物、硬化膜、ならびにパターン硬化膜の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120456798A (zh) * 2025-07-11 2025-08-08 昆山协鑫光电材料有限公司 一种钙钛矿太阳能电池、电子传输层的制备方法

Also Published As

Publication number Publication date
TW202311368A (zh) 2023-03-16
WO2022270527A1 (ja) 2022-12-29
JPWO2022270527A1 (https=) 2022-12-29

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