CN116844802A - Manufacturing method of car gauge anti-sulfuration film high-precision resistor and resistor - Google Patents

Manufacturing method of car gauge anti-sulfuration film high-precision resistor and resistor Download PDF

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Publication number
CN116844802A
CN116844802A CN202310785439.9A CN202310785439A CN116844802A CN 116844802 A CN116844802 A CN 116844802A CN 202310785439 A CN202310785439 A CN 202310785439A CN 116844802 A CN116844802 A CN 116844802A
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China
Prior art keywords
resistor
protective layer
layer
resistance
cutting
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CN202310785439.9A
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CN116844802B (en
Inventor
徐刚君
冯会军
韩胜友
袁其平
张峰
杜勇
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Ningbo Dingsheng Microelectronics Technology Co ltd
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Ningbo Dingsheng Microelectronics Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006Thin film resistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C1/00Details
    • H01C1/02Housing; Enclosing; Embedding; Filling the housing or enclosure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/245Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by mechanical means, e.g. sand blasting, cutting, ultrasonic treatment

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

The invention relates to a manufacturing method of a car gauge anti-sulfuration film high-precision resistor, and the resistor adopts AL 2 O 3 The ceramic substrate is used as a carrier, and a front electrode and a back electrode are printed; sputtering a resistance layer and AL by a magnetron sputtering process 2 O 3 A protective layer; carrying out laser correction, wherein the cutting line is lifted from the edge close to the resistance layer, and the lifting position is positioned in the range of the G2 protective layer; cleaning the surface of the resistor layer, forming a G2 protective layer above the resistor layer, and drying and curing the G2 protective layer; printing on the G2 protective layer, and drying and curing. The invention breaks through the technical barriers to form a set, and accords with the high-temperature high-humidity application condition of 85 ℃/85%RH, and the resistor with high power and sulfuration resistance. By bisection ofThe uniform and reasonable distribution of the secant realizes high power characteristic; the super-strong vulcanization resistance characteristic is realized by designing the resistor structure; high power and high stability are realized through cutting lines and protective layer adjustment.

Description

Manufacturing method of car gauge anti-sulfuration film high-precision resistor and resistor
Technical Field
The invention relates to the manufacture of resistors, in particular to the manufacture of car gauge anti-vulcanization film high-precision resistors.
Background
The information technology industry is a strategic, basic and pilot industry for the urgent safety and development of the relation nations, and is also a competition place for the full-force layout with high importance in the main nations of the world. The new energy automobile mainly promotes electronic components such as a vehicle-standard sensor, a capacitor, a resistor and the like to be applied.
The existing resistor cannot simultaneously have three-phase indexes of high temperature resistance, high humidity resistance, high power resistance and sulfuration resistance. The vehicle gauge resistor has a severe working environment and is particularly important to performance requirements. For this reason, there is a need for a resistor that is capable of meeting the requirements of high temperature and humidity resistance, high power, and sulfuration resistance.
Disclosure of Invention
In order to solve the problem that at present, no resistor with three-phase indexes of high temperature resistance, high humidity resistance, high power resistance and sulfuration resistance exists. The invention provides a manufacturing method of a vehicle-gauge anti-vulcanization thin film high-precision resistor and the resistor.
The invention adopts the technical scheme that: a manufacturing method of a car gauge anti-vulcanization film high-precision resistor comprises the following steps:
a. by AL 2 O 3 The ceramic substrate is used as a carrier, and the front electrode and the back electrode are printed through a screen printing process and dried and cured;
b. covering the front surface of the carrier by using glass powder slurry through screen printing, and exposing the resistor layer area;
c. sputtering the resistance layer through a magnetron sputtering process;
d. solidifying the resistance layer;
e. removing the glass powder slurry;
f. having a thickness of 300nm to 500nm by magnetron sputteringAL 2 O 3 A protective layer;
g. carrying out primary laser correction, wherein the cutting line is lifted from the edge close to the resistance layer and the lifting position is positioned in the G2 protective layer range of the step i; the cutter spacing between cutting lines is between 30UM and 57UM, and the cutter number is between 57 and 20 cutters according to the small-to-large spacing;
h. performing laser correction for the second time, and performing resistance value finishing on the basis of the laser correction for the first time;
i. cleaning the surface of the resistor layer: vacuum plasma cleaning, and then infrared baking; immediately performing the next process, printing the resin slurry on the resistor layer through screen printing to form a G2 protective layer, and drying and curing; printing the character mark on the G2 protective layer, and drying and curing;
j. and folding the resistor and performing magnetron sputtering on the end face of the resistor to form a metal conducting layer, so that the front electrode and the back electrode are conducted.
k. And (5) folding the grains.
As a preferable one of the manufacturing methods of the car gauge vulcanizing-resistant film high-precision resistor, the G2 protective layer is covered and wrapped with AL 2 O 3 And (3) a protective layer.
As one of the preferable methods for manufacturing the high-precision resistor of the car gauge vulcanizing-resistant film, a third protection layer is covered above the front electrode and parallel to the G2 protection layer, and the third protection layer adopts conductive paste.
As one preferable method for manufacturing the high-precision resistor of the car gauge vulcanizing-resistant film, the G2 protective layer is formed by covering two layers and the second G2 protective layer is covered with the first G2 protective layer
A high-precision resistor for a car gauge vulcanizing-resistant film comprises an AL 2 O 3 The resistor carrier of the ceramic substrate is provided with a third protective layer above the front electrodes at the two ends of the resistor carrier, the front of the resistor carrier is provided with a resistor layer, the resistor layer is cut with equidistant cutting marks of 20 to 57 cutters, the cutting marks comprise a first direction cutting mark extending from one side to the other side of the resistor and retaining part of the resistor material, and a second direction cutting mark extending from the other side to one side of the resistor and retaining part of the resistor material, and the first direction cutting mark comprisesThe cutting marks and the cutting marks in the second direction are arranged at intervals, and the G2 protective layer and the character mark are arranged on the resistor layer. The cutting mark tool setting is positioned in the substrate and close to the side face of the resistor, and the G2 protective layer covers the cutting mark. An AL is arranged between the G2 protective layer and the resistance layer 2 O 3 Protective layer, AL 2 O 3 The thickness of the protective layer is 300-500 nm.
The invention has the beneficial effects that: breaks through the technical barriers to form a set, and accords with the high-temperature high-humidity application condition of double 85-85 ℃/85%RH, and the resistor with high power and sulfuration resistance. The high power characteristic is realized through the uniform and reasonable distribution of the cutting lines; the super-strong vulcanization resistance characteristic is realized by designing the resistor structure; high power and high stability are realized through cutting lines and protective layer adjustment.
Drawings
FIG. 1 is a schematic diagram of laser cutting according to the present invention.
Fig. 2 is a schematic diagram of a resistor structure according to the present invention.
FIG. 3 is a chart of product testing
Wherein: 1. a resistive carrier; 2. a resistive layer; 3. a first direction cutting mark, 4, a second direction cutting mark; 5. a G2 protective layer; 6. marking characters; 7. a tool setting position; 8. AL (AL) 2 O 3 A protective layer; 9. a third protective layer; 10. a front electrode; 11. a back electrode; 12. a side electrode; a 13 nickel layer; 14. and a tin layer. The number in the test chart is the test result of the design product, the rest is the test result of other test products, NG indicates no passing, and NG1Pcs indicates 1 piece of test fails.
Detailed Description
The invention will be further described with reference to the accompanying drawings. It should be noted that the following examples are only for illustrating the technical scheme of the present disclosure, and are not limiting; the technology of the present disclosure has been described in detail with reference to examples, and it should be understood by those of ordinary skill in the art that: the technical scheme described in the above embodiments can be modified, especially for the process step sequence, or some or all technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present disclosure.
A manufacturing method of a car gauge anti-vulcanization film high-precision resistor comprises the following steps: by AL 2 O 3 The ceramic substrate is used as a carrier, and the front electrode and the back electrode are printed through a screen printing process and dried and cured; covering the front surface of the carrier by using glass powder slurry through screen printing, and exposing the resistor layer area; sputtering the resistance layer through a magnetron sputtering process; removing the glass powder slurry after the resistor layer is solidified; formation of AL by magnetron sputtering to a thickness of 300nm to 500nm 2 O 3 A protective layer; carrying out primary laser correction, wherein the cutting line is lifted from the edge close to the resistance layer, and the lifting position is positioned in the range of the G2 protective layer; the cutter spacing between cutting lines is between 30UM and 57UM, and the cutter number is between 57 and 20 cutters according to the small-to-large spacing; and then carrying out laser correction for the second time, and carrying out resistance value finishing on the basis of the laser correction for the first time. Then cleaning the surface of the resistor layer, including cleaning by vacuum plasma, and then baking by infrared to ensure that the surface is dry and the next printing process is not influenced; immediately printing an alumina protective layer after cleaning, then printing the alumina protective layer above the resistor layer, drying, printing resin slurry above the resistor layer to form a G2 protective layer, and drying and curing; and finally, printing the character mark on the G2 protective layer, and drying and curing.
Carrying out strip folding, grain folding and end electrode setting, carrying out strip folding on the resistor, and carrying out end face magnetron sputtering on a metal conducting layer to conduct the front electrode and the back electrode; and then carrying out grain folding and electroplating, and finally screening and packaging. And a third protection layer is covered above the front electrode and parallel to the G2 protection layer, the third protection layer partially covers the G2 protection layer, and the third protection layer is made of conductive paste.
A high-precision resistor for a car gauge vulcanizing-resistant film comprises an AL 2 O 3 The resistor carrier 1 of the ceramic substrate, the upper end of both sides of the resistor carrier 1 is provided with a front electrode 10, the back is provided with a back electrode 11, a third protective layer 9 is arranged above the front electrode 10 at both ends of the resistor carrier 1, and the third protective layer 9 partially covers the G2 protective layer 5 and is arranged parallel to the G2 protective layer 5; the front surface of the resistor carrier 1 is provided withThe resistor layer 2 is cut with equidistant cutting marks of 20 to 57 knives, the cutting marks comprise first-direction cutting marks extending from one side to the other side of the resistor and retaining part of resistor materials, and second-direction cutting marks extending from the other side to one side of the resistor and retaining part of resistor materials, the first-direction cutting marks and the second-direction cutting marks are arranged at intervals, and the resistor layer 2 is provided with a G2 protective layer 5 and a character mark 6. The cutting mark tool setting position 7 is positioned in the substrate and close to the side face of the resistor, and the G2 protective layer 5 covers the cutting mark. An AL is arranged between the G2 protective layer 5 and the resistance layer 2 O 3 Protective layer 8, AL 2 O 3 The protective layer 8 has a thickness of between 300 and 500 nm. Finally, the side electrode 12 is sputtered with metal, the nickel layer 13 is electroplated, and the tin layer 14 is electroplated.
The highest change of the resistance value of the thermal shock 100cycles test of 50 resistors is 0.07 percent, and the lowest change of the resistance value is-0.03 percent.
The highest change of the upper limit of the resistance value in the vulcanization test-100H is 0.02%, and the lowest change of the lower limit of the resistance value is-0.04%.
The highest change of the upper limit of the resistance value in the vulcanization test-200H is 0.01%, and the lowest change of the lower limit of the resistance value is-0.04%.
The highest change of the upper limit of the resistance value of the test in the vulcanization test-300H is 0.04%, and the lowest change of the resistance value is-0.04%.
The highest change of the upper limit of the resistance value in the vulcanization test-400H is 0.06%, and the lowest change of the lower limit of the resistance value is-0.03%.
The results of the thermal shock test and the vulcanization test are all in accordance with the standard, and the resistance variation is lower than 1%.
In the above embodiments, technical features are described together in the same embodiments for convenience of description, and those skilled in the art should understand that conventional evolution is within the scope of the present invention according to the present description.

Claims (9)

1. The manufacturing method of the car gauge vulcanizing-resistant film high-precision resistor is characterized by comprising the following steps of:
a. by AL 2 O 3 The ceramic substrate is used as a carrier and is printed by a screen printing processBrushing the front electrode and the back electrode, and drying and solidifying;
b. covering the front surface of the carrier by using glass powder slurry through screen printing, and exposing the resistor layer area;
c. sputtering the resistance layer through a magnetron sputtering process;
d. by magnetron sputtering of AL 2 O 3 A protective layer;
e. removing the glass powder slurry;
f. solidifying the resistance layer;
g. carrying out first laser correction, and cutting the cutting line from the edge close to the resistance layer; the cutter spacing between cutting lines is between 30UM and 57UM, and the cutter number is between 57 and 20 cutters according to the small-to-large spacing;
h. performing laser correction for the second time, and performing resistance value finishing on the basis of the laser correction for the first time;
i. cleaning the surface of the resistor layer;
j. printing resin slurry on the upper side of the resistor layer through screen printing to form a G2 protective layer, wherein the G2 protective layer wraps the knife-lifting position; drying and solidifying;
k. printing the character mark on the G2 protective layer, and drying and curing;
carrying out strip folding on the resistor and carrying out magnetron sputtering on the end face of the resistor to form a metal conducting layer, so that the front electrode and the back electrode are conducted;
and m, folding, electroplating, screening and packaging.
2. The method for manufacturing a car gauge vulcanizing-resistant high-precision resistor according to claim 1, wherein: in step d, al is sputtered with a thickness of 300nm to 500nm 2 O 3 And a waterproof protective layer.
3. The method for manufacturing a car gauge vulcanizing-resistant high-precision resistor according to claim 1, wherein: cleaning the surface of the resistor layer in the step i: including vacuum plasma cleaning followed by infrared baking.
4. A method of manufacturing a gauge anti-sulfidation high precision resistor as claimed in claim 3, wherein: immediately after the end of step i, the G2 protective layer printing of step j is performed.
5. The method for manufacturing a car gauge vulcanizing-resistant high-precision resistor according to claim 1, wherein: the G2 protective layer is formed by covering two layers, and the second layer of G2 protective layer covers the first layer of G2 protective layer.
6. The method for manufacturing a car gauge vulcanizing-resistant high-precision resistor according to claim 1, wherein: the G2 protective layer covers and wraps the AL 2 O 3 And (3) a protective layer.
7. A gauge anti-sulfuration thin film high precision resistor produced by using the gauge anti-sulfuration high precision resistor of claims 1 to 6, characterized in that: including AL 2 O 3 The resistor carrier of ceramic substrate, resistor carrier both ends openly electrode top is equipped with the third protective layer, and the resistor carrier openly is equipped with the resistive layer, the resistive layer cutting has the equidistance cutting trace of 20 to 57 sword, the cutting trace includes by the first direction cutting trace of resistor one side opposite side extension and reservation part resistance material to and by the second direction cutting trace of resistor other side extension and reservation part resistance material, first direction cutting trace and second direction cutting trace interval set up, be equipped with G2 protective layer and character mark on the resistive layer.
8. The gauge anti-sulfur high precision resistor of claim 7, wherein: the cutting mark tool setting is positioned in the substrate and close to the side face of the resistor, and the G2 protective layer covers the cutting mark.
9. The car gauge anti-vulcanization high-precision resistor as claimed in claim 7, characterized in that an AL is arranged between the G2 protective layer and the resistance layer 2 O 3 Protective layer, AL 2 O 3 The thickness of the protective layer is 300-500 nm.
CN202310785439.9A 2023-06-29 2023-06-29 Manufacturing method of car gauge anti-sulfuration film high-precision resistor and resistor Active CN116844802B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201643904A (en) * 2015-06-09 2016-12-16 Univ Nat Cheng Kung Method for manufacturing automobile anti-sulfurated chip resistor
CN110648810A (en) * 2019-08-27 2020-01-03 昆山厚声电子工业有限公司 Manufacturing method of turning gauge resistor and turning gauge resistor
CN210200434U (en) * 2019-08-20 2020-03-27 丽智电子(昆山)有限公司 Thick film chip resistor of printing type vulcanization-resistant structure
CN112802644A (en) * 2021-01-14 2021-05-14 广东风华高新科技股份有限公司 Anti-vulcanization bridging resistor and preparation method thereof
CN112820489A (en) * 2021-02-22 2021-05-18 昆山厚声电子工业有限公司 Improved manufacturing process for improving waterproof performance of chip film resistor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201643904A (en) * 2015-06-09 2016-12-16 Univ Nat Cheng Kung Method for manufacturing automobile anti-sulfurated chip resistor
CN210200434U (en) * 2019-08-20 2020-03-27 丽智电子(昆山)有限公司 Thick film chip resistor of printing type vulcanization-resistant structure
CN110648810A (en) * 2019-08-27 2020-01-03 昆山厚声电子工业有限公司 Manufacturing method of turning gauge resistor and turning gauge resistor
CN112802644A (en) * 2021-01-14 2021-05-14 广东风华高新科技股份有限公司 Anti-vulcanization bridging resistor and preparation method thereof
CN112820489A (en) * 2021-02-22 2021-05-18 昆山厚声电子工业有限公司 Improved manufacturing process for improving waterproof performance of chip film resistor

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